DE3161970D1 - Hydrostatic supporting device - Google Patents

Hydrostatic supporting device

Info

Publication number
DE3161970D1
DE3161970D1 DE8181401254T DE3161970T DE3161970D1 DE 3161970 D1 DE3161970 D1 DE 3161970D1 DE 8181401254 T DE8181401254 T DE 8181401254T DE 3161970 T DE3161970 T DE 3161970T DE 3161970 D1 DE3161970 D1 DE 3161970D1
Authority
DE
Germany
Prior art keywords
magnet
hydrostatic
supporting device
elements
hydrostatic supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181401254T
Other languages
English (en)
Inventor
Jean Gaston Lombard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CERMO
Centre dEtudes et de Recherches de la Machine Outil CERMO
Original Assignee
CERMO
Centre dEtudes et de Recherches de la Machine Outil CERMO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CERMO, Centre dEtudes et de Recherches de la Machine Outil CERMO filed Critical CERMO
Application granted granted Critical
Publication of DE3161970D1 publication Critical patent/DE3161970D1/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/12—Arrangements for adjusting play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F16C32/0674—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play by means of pre-load on the fluid bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Electromagnets (AREA)
  • Machine Tool Units (AREA)
DE8181401254T 1980-08-07 1981-08-04 Hydrostatic supporting device Expired DE3161970D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8017452A FR2488353A1 (fr) 1980-08-07 1980-08-07 Dispositif hydrostatique de support

Publications (1)

Publication Number Publication Date
DE3161970D1 true DE3161970D1 (en) 1984-02-23

Family

ID=9244996

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181401254T Expired DE3161970D1 (en) 1980-08-07 1981-08-04 Hydrostatic supporting device

Country Status (4)

Country Link
US (1) US4413863A (de)
EP (1) EP0046111B1 (de)
DE (1) DE3161970D1 (de)
FR (1) FR2488353A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761876A (en) * 1986-04-18 1988-08-09 Dynamotion Corporation High speed precision drilling system
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
BR9714611A (pt) * 1996-05-21 2001-02-13 Unova Ind Automation Sys Inc Montagem e acionamento de porta/máquina ferramentas e seu referido método
US5828501A (en) * 1996-07-02 1998-10-27 Barco Gerber Systems Apparatus and method for positioning a lens to expand an optical beam of an imaging system
US5821981A (en) * 1996-07-02 1998-10-13 Gerber Systems Corporation Magnetically preloaded air bearing motion system for an imaging device
US5841567A (en) * 1996-07-02 1998-11-24 Barco Gerber Systems Method and apparatus for imaging at a plurality of wavelengths
US5912458A (en) * 1997-04-18 1999-06-15 Gerber Systems Corporation Multiple beam scanning system for an imaging device
US5938187A (en) * 1997-04-18 1999-08-17 Gerber Systems Corporation Media feed apparatus for an imaging device
US6042101A (en) * 1997-06-03 2000-03-28 Gerber Systems Corporation Automated media transport device and method of using the same
DE19933379B4 (de) * 1999-07-20 2005-03-10 Aerolas Gmbh Lageranordnung zum Abstützen von Zugkräften und Lagerkopf für die Lageranordnung
JP4455004B2 (ja) * 2003-10-16 2010-04-21 キヤノン株式会社 流体軸受装置およびそれを用いたステージ装置
US7942099B2 (en) 2005-08-23 2011-05-17 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT194216B (de) * 1954-01-07 1957-12-27 Vyzk Ustav Obrabecich Stroju Lager mit Flüssigkeitsreibung für Flachführungen, insbesondere bei Werkzeugmaschinen
US3164753A (en) * 1956-03-13 1965-01-05 Magnaflux Corp Magnetic chuck demagnetizer
FR1353247A (fr) * 1962-03-28 1964-02-21 Philips Nv Dispositif de guidage
CH415188A (de) * 1963-08-23 1966-06-15 Max Fehr C O Liberia Mining Co Magnetische Vorrichtung zum Festhalten und zum berührungslosen Verschieben zweier Teile an- bzw. relativ zueinander
US3746407A (en) * 1971-08-13 1973-07-17 Litton Systems Inc Ferrohydrodynamic low friction bearing
DE2336488A1 (de) * 1973-07-18 1975-02-06 Klein Schanzlin & Becker Ag Axiallagerung fuer kreiselpumpen

Also Published As

Publication number Publication date
FR2488353B1 (de) 1984-05-04
FR2488353A1 (fr) 1982-02-12
US4413863A (en) 1983-11-08
EP0046111B1 (de) 1984-01-18
EP0046111A1 (de) 1982-02-17

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee