DE3121799A1 - Measuring diaphragm for countering diffusion of pressure media - Google Patents

Measuring diaphragm for countering diffusion of pressure media

Info

Publication number
DE3121799A1
DE3121799A1 DE19813121799 DE3121799A DE3121799A1 DE 3121799 A1 DE3121799 A1 DE 3121799A1 DE 19813121799 DE19813121799 DE 19813121799 DE 3121799 A DE3121799 A DE 3121799A DE 3121799 A1 DE3121799 A1 DE 3121799A1
Authority
DE
Germany
Prior art keywords
diaphragm
measuring
membrane
pressure
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19813121799
Other languages
German (de)
Inventor
Helmut 8753 Obernburg Berninger
Kurt Dipl.-Phys. Dr. 8760 Miltenberg Neubeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WIKA Alexander Wiegand SE and Co KG
Original Assignee
WIKA Alexander Wiegand SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WIKA Alexander Wiegand SE and Co KG filed Critical WIKA Alexander Wiegand SE and Co KG
Priority to DE19813121799 priority Critical patent/DE3121799A1/en
Publication of DE3121799A1 publication Critical patent/DE3121799A1/en
Withdrawn legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0046Fluidic connecting means using isolation membranes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A measuring diaphragm for pressure and differential pressure measuring arrangements for use with pressure media which can diffuse through metallic diaphragms consists of an accommodating member (2) for the measuring diaphragm which has a turned diaphragm bed (3) in a concentric, sinusoidal corrugation, and two metal diaphragms (4, 7) between which a filter diaphragm (6) is located. A pressure medium diffusing through the first metal diaphragm (7) can pass radially outwards through the filter diaphragm (6) into a ventilation groove (5) and from there to the external atmosphere via a ventilation bore (10). The pressure medium is prevented from pressing further forwards into the second metal diaphragm (4), which separates off the liquid (15) of the pressure medium. Consequent damage to the overall measuring arrangement cannot therefore occur. <IMAGE>

Description

Meßmembrane gegen Druckmedien-Diffusion Measuring membrane against pressure media diffusion

Die Erfindung betrifft eine Meßmembrane für Druck- und Differenzdruck-Meßanordnungen zum Einsatz bei Druckmedien, die durch metallische Membranen diffundieren können, insbesondere für den in den Druckmedien enthaltenen Wasserstoff.The invention relates to a measuring membrane for pressure and differential pressure measuring arrangements for use with pressure media that can diffuse through metallic membranes, especially for the hydrogen contained in the pressure media.

Bei Meßmembranen in Differenzdruck-Meßanordnungen befindet sich hinter der Membrane eine Flüssigkeitsfüllung, die das Messen bei erhöhtem statischen Druck erst erlaubt. Diese Flüssigkeitsfüllung muß in ihren Bestandteilen rein bleiben, da sonst der beispielsweise in ihr gelöste Wasserstoff bei Entspannen der verfahrenstechnischen Anlage zu einer Zerstörung der Meßanordnung führen kann.In the case of measuring diaphragms in differential pressure measuring arrangements, is located behind the membrane is filled with a liquid that allows the measurement at increased static pressure only allowed. This liquid filling must remain pure in its components, otherwise the hydrogen dissolved in it, for example, when the process technology is released System can lead to the destruction of the measuring arrangement.

Die gleichen Probleme bestehen bei Druckmeßgeräten, bei denen auf Grund hoher Temperaturen in den verfahrenstechnischen Anlagen Druckmittlervorlagen mit Flüssigkeitsfüllung zur Druckübertragung an das eigentliche Meßelement angebaut werden.The same problems exist with pressure gauges in which on The reason for the high temperatures in the process engineering systems is the diaphragm seal with liquid filling for pressure transmission attached to the actual measuring element will.

Üblicherweise versucht man die Diffusionsrate durch die Membrane durch spezielle Auswahl des Membranwerkstoffes zu verkleinern.Usually one tries the diffusion rate through the membrane special selection of the membrane material to reduce the size.

Laut Literaturangaben sollen insbesondere die Edelmetalle Gold und Silber kleinere Diffusionsraten aufweisen.According to the literature, the precious metals gold and Silver have lower diffusion rates.

Aus diesem Grunde werden heute in erster Linie goldbeschichtete Edelstahlmembranen verwendet. Eine weitere übliche Methode ist das Aufsprühen von speziellen Ölen, die die Lebensdauer der Meß geräte ebenfalls erhöhen.For this reason, gold-coated stainless steel membranes are primarily used today used. Another common method is the spraying of special oils, which also increase the service life of the measuring devices.

Beide bisherigen Lösungen sind ein Kompromiß.Both previous solutions are a compromise.

Bei der goldbeschichteten Edelstahlmembrane ist die Diffusionsrate für die empfindliche Meßanordnung noch verhältnismäßig groß; die Aufsprühmethode ist auf Grund der begrenzten Temperaturbeständigkeit des Öles nicht generell anwendbar.With the gold-coated stainless steel membrane, the diffusion rate is relatively large for the sensitive measuring arrangement; the spray-on method is not generally applicable due to the limited temperature resistance of the oil.

Die Aufgabe der Erfindung ist, die bisherigen teilbefriedigenden Lösungen durch eine universelle zu ersetzen.The object of the invention is the previous partially satisfactory solutions to replace it with a universal one.

Dies geschieht neuerungsgemäß in der Weise, indem die heute übliche einfache Membrane durch zwei Membranen ersetzt wird, deren Zwischenraum zur Außenatmosphäre hin belüftet ist.According to the innovation, this is done in the way that is common today simple membrane is replaced by two membranes, the space between them and the outside atmosphere is ventilated.

Nach einer weiteren Ausbildung der Erfindung befindet sich zwischen den beiden Membranen eine Einlage,beispielsweise eine Siebmembrane, die ein inniges Berühren der beiden Membranen verhindert und die Entlüftung der gesamten Membranfläche sicherstellt.According to a further embodiment of the invention is located between the two membranes an insert, for example a sieve membrane, which is an intimate Touching the two membranes prevents the entire membrane surface from being vented ensures.

Die auftretende Diffusion des z. B. im Druckmedium enthaltenen Wasserstoffs kann so ungehindert über die Entlüftung zur Außenatmosphäre erfolgen und schädigt nicht mehr die nachgeschaltete Meßanordnung.The diffusion of the z. B. hydrogen contained in the pressure medium can thus take place unhindered via the ventilation to the outside atmosphere and cause damage no longer the downstream measuring arrangement.

Ein Ausführungsbeispiel der Erfindung ist in der Zeichnung dargestellt und wird im folgenden näher beschrieben.An embodiment of the invention is shown in the drawing and is described in more detail below.

Es zeigen: Figur 1 einen Schnitt eines Ausführungsbeispiels einer erfindungsgemäßen Meßmembrane.The figures show: FIG. 1 a section of an exemplary embodiment of a measuring membrane according to the invention.

Figur 2 einen vergrößerten Ausschnitt eines Schnittes eines Ausführungsbeispiels einer erfindungsgemäßen Meß-Membrane.FIG. 2 shows an enlarged detail of a section of an exemplary embodiment a measuring membrane according to the invention.

Figur 1 zeigt einen Schnitt einer Ausführungsform einer erfindungsgemäßen Meßmembrane. Nicht dargestellt ist die weitere Meßanordnung, wie Rohranschluß, Kapillarleitung, Transmitter etc.Figure 1 shows a section of an embodiment of an inventive Measuring membrane. Not shown is the further measuring arrangement, such as pipe connection, capillary line, Transmitter etc.

In der vorderen Stirnfläche 1 des zylindrischen Meßmembranaufnahmekörpers 2 befindet sich das Membranbett 3 mit konzentrischer sinusförmiger Wellung. Eine zylindrische Metallmemkrane 4 schmiegt sich an das Membranbett 3 an und ist mit ihrem Außenrand an der Innenkante einer konzentrischen Entlüftungsnut 5 mit dem Meßmembranaufnahmekörper 2 verschweißt. Eine Siebmembrane 6 und eine gleich große Metallmembrane 7 fügen sich in die Prägung der Metallmembrane 4 und reichen mit ihrer planen Randzone 8 über die Entlüftungsnut 5 hinaus bis zu einer Ausdehnung 9, an deren lienkante sie mit dem Membranaufnahmekörper 2 verschweißt sind. Eine Entlüftungsbohrung 10 führt radial von der Mantelfläche 11 des Membranaufnahmekörpers 2 auf die Entlüftungsnut 5. Gleichfalls in der Mantelfläche 11 des Membranaufnahmekörpers 2 ist eine Druckmittelfüilbohrung 12, welche in der äußersten konzentrischen Vertiefung des Membranbettes 3 austritt. In the front face 1 of the cylindrical measuring membrane receiving body 2 is the membrane bed 3 with concentric sinusoidal undulation. One cylindrical metal diaphragm 4 hugs the diaphragm bed 3 and is with its outer edge at the inner edge of a concentric vent groove 5 with the Measuring membrane receiving body 2 welded. A sieve membrane 6 and one of the same size Metal membrane 7 fit into the embossing of the metal membrane 4 and extend with it their flat edge zone 8 beyond the ventilation groove 5 to an extent 9, at the edge of which they are welded to the membrane receiving body 2. One The vent hole 10 leads radially from the lateral surface 11 of the membrane receiving body 2 on the ventilation groove 5. Likewise in the lateral surface 11 of the membrane receiving body 2 is a pressure medium filling hole 12, which in the outermost concentric Depression of the membrane bed 3 emerges.

An der hinteren Stirnfläche 13 befindet sich ein Kapillarleitungsanschluß 14 mit einer Kapillarbohrung, welche in der Mitte des Membranbettes 3 austritt.A capillary line connection is located on the rear end face 13 14 with a capillary bore which emerges in the middle of the membrane bed 3.

Der Raum zwischen Metallmembrane 4 und dem Membranbett 3 wird von der Druckmittlerflüssigkeit 15 ausgefüllt.The space between the metal membrane 4 and the membrane bed 3 is of the pressure transmitter fluid 15 is filled.

Diffundiert nun von außen Druckmedium durch die Metallmembrane 7, so kann des radial zur Seite durch die Siebmembrane 6 in die Entlüftungsnut 5 und über die Entlüftungsbohrung 10 in die Außenatmosphäre gelangen, ohne weiter in die Metallmenibrane 4, die zur Druckmittlerflüssigkeit 16 hin abtrenutS einzu -dringen.If pressure medium diffuses from the outside through the metal membrane 7, so the radially to the side through the membrane 6 into the ventilation groove 5 and get through the vent hole 10 into the outside atmosphere without further into the Metal menibrane 4, which penetrate the separating groove to the pressure transmitter fluid 16.

LeerseiteBlank page

Claims (2)

Patentansprüche 1. Meßmembrane, insbesondere für Druck- und Differenzdruck-Meßanordnungen, zum Einsatz bei Druckmedien, die durch metallische Membranen diffundieren könne, insbesondere bei Wasserstoff, dadurch gekennzeichnet, daß die heute übliche einfache Membrane durch zwei Membranen (4, 7) ersetzt wird, deren Zwischenraum zur Außenatmosphäre hin belüftet ist. Claims 1. Measuring membrane, in particular for pressure and differential pressure measuring arrangements, for use with pressure media that can diffuse through metallic membranes, especially in the case of hydrogen, characterized in that the simple one commonly used today Membrane is replaced by two membranes (4, 7), the space between them and the outside atmosphere is ventilated. 2. Meßmembrane nach Anspruch 1, dadurch gekennze ichnet, daß sich zwischen den beiden Membranen (47 7) eine Einlage beispielsweise eine Siebmembrane (6) befindet, die ein inniges Berühren der beiden Membranen (4, 7) verhindert und die Entlüftung der gesamten Membranfläche sicherstellt. 2. Measuring membrane according to claim 1, characterized in that it is marked an insert, for example a sieve membrane, between the two membranes (47 7) (6) which prevents intimate contact of the two membranes (4, 7) and Ensures ventilation of the entire membrane surface.
DE19813121799 1981-06-02 1981-06-02 Measuring diaphragm for countering diffusion of pressure media Withdrawn DE3121799A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19813121799 DE3121799A1 (en) 1981-06-02 1981-06-02 Measuring diaphragm for countering diffusion of pressure media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813121799 DE3121799A1 (en) 1981-06-02 1981-06-02 Measuring diaphragm for countering diffusion of pressure media

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DE3121799A1 true DE3121799A1 (en) 1982-12-23

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3532755A1 (en) * 1985-09-13 1987-03-19 Vdo Schindling Manometer
WO1988009490A2 (en) * 1987-05-15 1988-12-01 The Foxboro Company Floating diaphragm apparatus
EP0521246A2 (en) * 1991-07-04 1993-01-07 Fuji Electric Co., Ltd. Pressure measuring apparatus
DE4235684A1 (en) * 1992-10-22 1994-04-28 Pokorny Gmbh Arrangement for attaching a pressure measuring device to a fluid container or a fluid line
US5348387A (en) * 1992-11-18 1994-09-20 Gordon Dale F Auxiliary bearing and drive mechanism for a concrete mixer
US5495768A (en) * 1993-04-23 1996-03-05 Rosemount Inc. Pressure isolator assembly for sanitary processing
BE1008508A3 (en) * 1994-07-19 1996-05-07 Bogerd Navtec Naamloze Vennoot Separating membrane
DE19521275A1 (en) * 1995-06-10 1996-12-12 Leybold Ag Gas passage with a selectively acting passage area and method for producing the passage area
DE19859507A1 (en) * 1998-12-22 2000-07-27 Wika Alexander Wiegand Gmbh Fluid pressure relaying adaptor used with hazardous fluids, employs sandwich type flexible, reinforced diaphragm that acts as pressure transmitter cum interfluid barrier
DE19949831A1 (en) * 1999-10-15 2001-04-19 Wika Alexander Wiegand Gmbh Membrane pressure sensor for corrosive fluids has evacuated double membrane give rupture warning for any pressure
WO2001048269A1 (en) * 1999-12-28 2001-07-05 Akzo Nobel N.V. Method and construction for ventilation of hydrogen gas
DE4406021B4 (en) * 1994-02-24 2004-07-22 Braun, Dieter, Dr. pressure measuring device
DE102006056173A1 (en) * 2006-11-27 2008-06-05 Endress + Hauser Gmbh + Co. Kg Separating diaphragm for hydraulic diaphragm seals as well as diaphragm seals and pressure measuring devices with such separating diaphragms
DE102010063115A1 (en) * 2010-12-15 2012-06-21 Endress + Hauser Gmbh + Co. Kg Pressure measuring arrangement for measuring absolute or differential pressure of industrial process medium, has membrane structure that is provided and secured on outside of cylindrical base
DE102013114407A1 (en) * 2013-12-18 2015-06-18 Endress + Hauser Gmbh + Co. Kg pressure sensor
EP2638374B1 (en) 2010-11-11 2016-06-01 Badotherm Proces Instrumentatie B.V. Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly
CN108151952A (en) * 2018-01-29 2018-06-12 北京布莱迪仪器仪表有限公司 A kind of double diaphragm leakage protection diaphragms
NL2019251B1 (en) * 2016-12-24 2018-07-02 Wika Alexander Wiegand Se & Co Kg Diaphragm Seal Assembly With Evacuated Double Diaphragm and Vacuum Monitoring

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4072056A (en) * 1976-06-28 1978-02-07 Varian Associates, Inc. Fluid containment structure for transducer system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4072056A (en) * 1976-06-28 1978-02-07 Varian Associates, Inc. Fluid containment structure for transducer system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Patents Abstracts of Japan P 25 vom 29.8.80 Bd. 4, Nr. 122 *

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3532755A1 (en) * 1985-09-13 1987-03-19 Vdo Schindling Manometer
WO1988009490A2 (en) * 1987-05-15 1988-12-01 The Foxboro Company Floating diaphragm apparatus
WO1988009490A3 (en) * 1987-05-15 1989-01-26 Foxboro Co Floating diaphragm apparatus
US4852466A (en) * 1987-05-15 1989-08-01 The Foxboro Company Floating diaphragm apparatus
AU607270B2 (en) * 1987-05-15 1991-02-28 Foxboro Company, The Floating diaphragm apparatus
EP0521246A3 (en) * 1991-07-04 1993-12-01 Fuji Electric Co Ltd Pressure measuring apparatus
US5400655A (en) * 1991-07-04 1995-03-28 Fuji Electric Co., Ltd. Pressure measuring apparatus
US5551299A (en) * 1991-07-04 1996-09-03 Fuji Electric Co., Ltd. Apparatus for measuring pressure in a fluid using a seal diaphragm and pressure transmitting medium
EP0521246A2 (en) * 1991-07-04 1993-01-07 Fuji Electric Co., Ltd. Pressure measuring apparatus
DE4235684A1 (en) * 1992-10-22 1994-04-28 Pokorny Gmbh Arrangement for attaching a pressure measuring device to a fluid container or a fluid line
US5348387A (en) * 1992-11-18 1994-09-20 Gordon Dale F Auxiliary bearing and drive mechanism for a concrete mixer
US5495768A (en) * 1993-04-23 1996-03-05 Rosemount Inc. Pressure isolator assembly for sanitary processing
DE4406021B4 (en) * 1994-02-24 2004-07-22 Braun, Dieter, Dr. pressure measuring device
BE1008508A3 (en) * 1994-07-19 1996-05-07 Bogerd Navtec Naamloze Vennoot Separating membrane
DE19521275A1 (en) * 1995-06-10 1996-12-12 Leybold Ag Gas passage with a selectively acting passage area and method for producing the passage area
DE19859507A1 (en) * 1998-12-22 2000-07-27 Wika Alexander Wiegand Gmbh Fluid pressure relaying adaptor used with hazardous fluids, employs sandwich type flexible, reinforced diaphragm that acts as pressure transmitter cum interfluid barrier
US6263739B1 (en) 1998-12-22 2001-07-24 Wika Alexander Wiegand Gmbh & Co. Plastic membrane pressure sensor for the semiconductor industry
DE19859507C2 (en) * 1998-12-22 2003-04-24 Wika Alexander Wiegand Gmbh Plastic diaphragm seals for the semiconductor industry
DE19949831A1 (en) * 1999-10-15 2001-04-19 Wika Alexander Wiegand Gmbh Membrane pressure sensor for corrosive fluids has evacuated double membrane give rupture warning for any pressure
DE19949831B4 (en) * 1999-10-15 2007-08-02 Wika Alexander Wiegand Gmbh & Co Diaphragm seals
WO2001048269A1 (en) * 1999-12-28 2001-07-05 Akzo Nobel N.V. Method and construction for ventilation of hydrogen gas
US6841288B2 (en) 1999-12-28 2005-01-11 Akzo Nobel N.V. Method and construction for ventilation of hydrogen gas
DE102006056173A1 (en) * 2006-11-27 2008-06-05 Endress + Hauser Gmbh + Co. Kg Separating diaphragm for hydraulic diaphragm seals as well as diaphragm seals and pressure measuring devices with such separating diaphragms
EP2638374B1 (en) 2010-11-11 2016-06-01 Badotherm Proces Instrumentatie B.V. Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly
US9383280B2 (en) 2010-11-11 2016-07-05 Badotherm Proces Instrumentatie B.V. Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly
DE102010063115A1 (en) * 2010-12-15 2012-06-21 Endress + Hauser Gmbh + Co. Kg Pressure measuring arrangement for measuring absolute or differential pressure of industrial process medium, has membrane structure that is provided and secured on outside of cylindrical base
DE102013114407A1 (en) * 2013-12-18 2015-06-18 Endress + Hauser Gmbh + Co. Kg pressure sensor
US10345180B2 (en) 2013-12-18 2019-07-09 Endress+Hauser Se+Co.Kg Pressure sensor
NL2019251B1 (en) * 2016-12-24 2018-07-02 Wika Alexander Wiegand Se & Co Kg Diaphragm Seal Assembly With Evacuated Double Diaphragm and Vacuum Monitoring
CN108151952A (en) * 2018-01-29 2018-06-12 北京布莱迪仪器仪表有限公司 A kind of double diaphragm leakage protection diaphragms

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