DE3067386D1 - Capacitor with four-pole structure, the integrity of which can be controlled by direct current tests - Google Patents

Capacitor with four-pole structure, the integrity of which can be controlled by direct current tests

Info

Publication number
DE3067386D1
DE3067386D1 DE8080430026T DE3067386T DE3067386D1 DE 3067386 D1 DE3067386 D1 DE 3067386D1 DE 8080430026 T DE8080430026 T DE 8080430026T DE 3067386 T DE3067386 T DE 3067386T DE 3067386 D1 DE3067386 D1 DE 3067386D1
Authority
DE
Germany
Prior art keywords
integrity
capacitor
controlled
direct current
pole structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8080430026T
Other languages
English (en)
Inventor
Francois-Xavier Delaporte
Jean-Pierre Pantani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie IBM France SAS
International Business Machines Corp
Original Assignee
Compagnie IBM France SAS
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie IBM France SAS, International Business Machines Corp filed Critical Compagnie IBM France SAS
Application granted granted Critical
Publication of DE3067386D1 publication Critical patent/DE3067386D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/94—Metal-insulator-semiconductors, e.g. MOS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices
    • G01R31/2639—Circuits therefor for testing other individual devices for testing field-effect devices, e.g. of MOS-capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE8080430026T 1980-11-28 1980-11-28 Capacitor with four-pole structure, the integrity of which can be controlled by direct current tests Expired DE3067386D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP80430026A EP0053213B1 (de) 1980-11-28 1980-11-28 Vierpolkondensator, dessen Integrität mit Hilfe eines Gleichstromtests kontrolliert werden kann

Publications (1)

Publication Number Publication Date
DE3067386D1 true DE3067386D1 (en) 1984-05-10

Family

ID=8187425

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8080430026T Expired DE3067386D1 (en) 1980-11-28 1980-11-28 Capacitor with four-pole structure, the integrity of which can be controlled by direct current tests

Country Status (3)

Country Link
EP (1) EP0053213B1 (de)
JP (1) JPS5793561A (de)
DE (1) DE3067386D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1310078C (en) * 1987-11-27 1992-11-10 American Telephone And Telegraph Company Voltage controlled variable capacitor
DE3805800C2 (de) * 1988-02-24 1995-12-07 Siemens Ag Verfahren zur Bestimmung der elektrischen Belastung von MIS-Strukturen bei der Herstellung von MIS-Strukturen enthaltenden Bauelementen auf einem Substrat
SE470415B (sv) * 1992-07-06 1994-02-14 Ericsson Telefon Ab L M Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator
JP3369296B2 (ja) * 1994-03-25 2003-01-20 三菱電機株式会社 Ｍｏｓ型コンデンサ
JP2006059939A (ja) * 2004-08-19 2006-03-02 Fujitsu Ltd Ｍｉｓキャパシタおよびｍｉｓキャパシタ作成方法
JP4641396B2 (ja) * 2004-09-02 2011-03-02 Ｏｋｉセミコンダクタ株式会社 薄膜コンデンサとその製造方法
CN101494216B (zh) * 2008-01-25 2011-02-02 中芯国际集成电路制造(上海)有限公司 用于对集成电路内层电介质进行可靠性分析的测试用结构

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611070A (en) * 1970-06-15 1971-10-05 Gen Electric Voltage-variable capacitor with controllably extendible pn junction region
US4001869A (en) * 1975-06-09 1977-01-04 Sprague Electric Company Mos-capacitor for integrated circuits

Also Published As

Publication number Publication date
EP0053213B1 (de) 1984-04-04
EP0053213A1 (de) 1982-06-09
JPS5793561A (en) 1982-06-10
JPS6348185B2 (de) 1988-09-28

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee