DE3041041A1 - Low noise sensitivity magneto-electrical distance transducer - has distance and direction transducer pairs on permanent magnet, typically cobalt samarium alloy - Google Patents

Low noise sensitivity magneto-electrical distance transducer - has distance and direction transducer pairs on permanent magnet, typically cobalt samarium alloy

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Publication number
DE3041041A1
DE3041041A1 DE19803041041 DE3041041A DE3041041A1 DE 3041041 A1 DE3041041 A1 DE 3041041A1 DE 19803041041 DE19803041041 DE 19803041041 DE 3041041 A DE3041041 A DE 3041041A DE 3041041 A1 DE3041041 A1 DE 3041041A1
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Germany
Prior art keywords
transducer
pairs
permanent magnet
magneto
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19803041041
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German (de)
Other versions
DE3041041C2 (en
Inventor
Rudolf 8000 München Gebhardt
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Siemens AG
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Krauss Maffei AG
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Priority to DE19803041041 priority Critical patent/DE3041041C2/en
Publication of DE3041041A1 publication Critical patent/DE3041041A1/en
Application granted granted Critical
Publication of DE3041041C2 publication Critical patent/DE3041041C2/en
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G01P13/045—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement with speed indication

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

A magneto-electrical distance transducer has a toothed element moving on a linear or circular path and a magnetic sensor which converts its motion into periodic electrical signals via detection of magnetic field strength variations. The arrangmenet exhibits low sensitivity to noise from mechanical vibrations and external magnetic noise fields. The sensor contains two pairs of magneto-electrical transducers (10,20) mounted on a permanent magnet (30), one (20) for direction and one (10) for displacement measurement. The displacement measurement transducer pair (10) is placed on the axis of symmetry of the equipotential field profile of the permanent magnet. The permanent magnet is a cobalt samarium magnet whose pole surface is large compared to the effective measurement surfaces of the transducer pairs. The transducer pairs may be in the form of pairs of field plates.

Description

MAGNETO-ELEKTRiSLHER dEGAUFNEHMER MAGNETO-ELECTRICAL DEGA TRANSDUCER

Die Erfindung bezieht sich auf einen magneto-elektrischen Wegaufnehmer gemäß dem Oberbegriff des Anspruchs 1, wie er aus der DE-AS 26 06 845 bekannt ist.The invention relates to a magneto-electric displacement transducer according to the preamble of claim 1, as it is known from DE-AS 26 06 845.

Bei dem bekannten Wegaufnehmer wird die Drehbewegung eines Zahnrades mit Hilfe eines magnetischen Fühlers erfaßt und in ein elektrlsches Impuissignal umgewandelt, dessen Periodendauer wegproportional ist. Der magnetische Fühler besteht aus zwei Paaren magneto-elektrischer Wandler, von denen jedes Wandlerpaar auf einem gesonderten Permanentmagneten angebracht ist. Die beiden Wandlerpaare sind mit ihrem elektrischen Ausgängen an eine Auswerteinrichtung angeschlossen, welche beispielsweise eine Brückenschaltung zur Wegmessung und eine weitere Brückenschaltung zur Richtungsmessung a-ufgrund der Phase des Impulssignals aufweist. Dabei ist in jeder Brückenschaltung ein Wandlerpaar als einer der Brückenzweige angeordnet ( vgl. DATENBUCH 1976/77 der Firma Siemens AG, München 'Magnetfeldabhängige Halbleite!-", Seiten 147 und 76 ).In the known displacement transducer, the rotary movement of a gear detected with the help of a magnetic sensor and converted into an electrical pulse signal converted, the period of which is proportional to the displacement. The magnetic sensor exists of two pairs of magneto-electrical converters, each of which is on one separate permanent magnet is attached. The two pairs of transducers are with theirs electrical outputs connected to an evaluation device, which for example a bridge circuit for distance measurement and another bridge circuit for direction measurement a-due to the phase of the pulse signal. There is in every bridge circuit a transducer pair as one of the bridge branches arranged (see DATABOOK 1976/77 from Siemens AG, Munich 'Magnetic field dependent semiconductor! - ", pages 147 and 76).

Der bekannte Wegaufnehmer weist jedoch eine Reihe von Unzulänglichkeiten auf. Zum einen ist der Abstand zwischen dem Zahnrad und den Wandlerpaaren außerordentlich kritisch, und zwar insofern, als dieser Abstand betragsmäßig auf maximal etwa 1,2 mm begrenzt ist und deshalb genau justiert werden muß, was umständlich und zeitraubend ist. Ferner erzeugt der bekannte Wegaufnehmer beispielsweise bei Vibrationen und stehendem Zahnrad fälschlicherweise ein Meßsignal. Schließlich kann das Meßergebnis des bekannten Wegaufnehmers durch äußere magnetische Störfelder verfälscht werden.The known displacement transducer, however, has a number of shortcomings on. On the one hand, the distance between the gear and the transducer pairs is extraordinary critical insofar as this distance is limited to a maximum of about 1.2 mm is limited and must therefore be adjusted precisely, which is cumbersome and time-consuming is. Furthermore, the known displacement transducer generates, for example, vibrations and falsely a measurement signal when the gear is stationary. Finally, the measurement result of the known displacement transducer are falsified by external magnetic interference fields.

Die Aufgabe der Erfindung besteht demgegenüber darin, einen magneto-elektrischen Wegaufnehmer der eingangs erwähnten Art zu schafen, welcher bei unproblematischem Abstand zwischen den Wandlern und dem gezahnten Organ eine geringere ',törempfEndlichkeit gegenüber mechanischen Vibrationen und äußeren magnetischen Storfeldern aufweist.The object of the invention is to provide a magneto-electric To create displacement transducers of the type mentioned at the beginning, which in the case of unproblematic Distance between the transducers and the toothed organ is less' sensitive to death exhibits against mechanical vibrations and external magnetic interference fields.

Die Aufgabe wird erfindungsgenäß durch die kennzeichnenden Merkmale des Anspruchs 1 gelöst.The task is according to the invention by the characterizing features of claim 1 solved.

Vorteilhafte Ausgestaltungen und Weiterbildungen des Wegaufnehmers nach Anspruch 1 ergeben sich aus den Unteransprüchen.Advantageous refinements and developments of the displacement transducer according to claim 1 result from the subclaims.

Der erfindungsgemäße Wegaufnehmer beruht auf der Erkenntnis, daß durch Anordnung des zur Messung di eionden Wandlerpaares in der Symmetrieachse des Squipotentiallinienfeldprofils des Permanentmagneten magnetische Störfelder und Abstandsänderungen zwischen den Wandlern und dem gezahnten Organ in gleichem Ausmaß von jedem Wandler des Wandlerpaares erfaßt und in der zugeordneten Brückenschaltung kompensizrt werden, so daß der Nullabgleich der Brückenschaltung und damit die Nulldurchgänc;e des l)erioclischen elektrischen Ausgangssignals unbeeinflußt bleiben. Dies hat wiederum zur Folge, daß der Wegaufnehmer insgesamt gegenüber magnetischen Fremdfeldern und Abstandsanderungen z.B. infolge von Vibrationen unempfindlich ist.The displacement transducer according to the invention is based on the knowledge that through Arrangement of the transducer pair for measuring the diodes in the symmetry axis of the squipotential line field profile of the permanent magnet magnetic interference fields and changes in distance between the Transducers and the toothed organ to the same extent of each transducer of the transducer pair are detected and are compensated in the associated bridge circuit, so that the zero balance the bridge circuit and thus the zero crossings of the l) erioclischen electrical Output signal remain unaffected. This in turn has the consequence that the displacement transducer overall to external magnetic fields and changes in distance, e.g. as a result of is insensitive to vibrations.

Die Erfindung wird anhand der Zeichnungen näher erläutert. Es zeigt: Fig. 1 einen schematischen Schnitt durch den erfindungsgemäßen magneto-elektrischen Wegaufnehmer, Fig. 2 eine Draufsich auf den Wegaufnehmer nach Fig. 1, und Fig. 3 ein elektrisches Schaltbild des Wegaufnehmers nach Fig. 1.The invention is explained in more detail with reference to the drawings. It shows: Fig. 1 shows a schematic section through the magneto-electric displacement transducer according to the invention, FIG. 2 shows a plan view of the displacement transducer according to FIG. 1, and FIG. 3 shows an electrical one Circuit diagram of the displacement transducer according to FIG. 1.

Der in Fig. 1 im Schnitt und in Fig. 2 in der Draufsicht veranschaulichte Wegaufnehmer nach der Erfindung umfaßt zwei magneto-elektrische Wandlerpaare 10 und 20, die auf einem gemeinsamen Permanentmagneten 30 an dessen einer Polfläche, z.B. der N-Polfläche, angebracht sind. Der Perm;inentmanet 30 mit den beiden Wandlerpaaren 10, 20 ist unter einem Abstand von einem gezahnten Organ 40, z.B. einem Zahnrad oder einer Zahnstange, angeordnet, welches in Richtung des Pfeils 50 beweglich ist. Die Bewegungsgeschwindigkeit des Organs 40 ist proportional des zu messenden Weges. Infolge der Bewegung des Organgs 40 ändert sich das in Fig. 1 schematisch dargestellte Magnetfeld des Permanentmagneten, was eine entsprechende Induktion in den beiden Wandlerpaaren 10, 20 hervorruft und zur Erzeugung einer periodischen Aus(;angsspannung an jedem Wandler 10a, 10b bzw. 20a. 20b ( Fig. 3 ) der WandlerpEare 10, 20 führt. Zu- Bestimmung der Bewegungsgeschwindigkeit des Organis 40 und damit des zu messenden Weges braucht lediglich die Periodendauer einer dieser Ausgangsspannungen ermittelt zu werden, was mit Hilfe einer Brückenschaltung der Wandler eines Wandlerpaares mit zwei Me@widerständen erfolgetl kann.The illustrated in Fig. 1 in section and in Fig. 2 in plan view Displacement transducer according to the invention comprises two magneto-electric transducer pairs 10 and 20, which are mounted on a common permanent magnet 30 on one of its pole faces, e.g. the N pole face, are attached. The Perm; inentmanet 30 with the two pairs of transducers 10, 20 is at a distance from a toothed member 40, for example a gear or a rack, which is movable in the direction of arrow 50. The speed of movement of the organ 40 is proportional to the path to be measured. As a result of the movement of the organ 40, what is shown schematically in FIG. 1 changes Magnetic field of the permanent magnet, what a corresponding induction in the two pairs of transducers 10, 20 and to generate a periodic From (; input voltage to each converter 10a, 10b or 20a. 20b (Fig. 3) of the converter pairs 10, 20 leads. To determine the speed of movement of the organ 40 and thus of the path to be measured only needs the period of one of these output voltages to be determined what with the help of a bridge circuit of the transducers of a transducer pair can be done with two measuring resistors.

Zur Bestimmung der Bewegulgsrichtung des Organs 40 wird die Phasenverschiebung zwischen den Ausgangsspannungen der beiden Wandlerpaare 10, 20 herangezogen, die dadurch auftritt, daß die beiden Wandlerpaare 10, 20 in Bewegungsrichtung ( Pfeil 50 ) des Organs 40 gesehen unter einem geringen Abstand a von z.B. 0,4 mm neßbenein.nder angeordnet sind. Zur Messung dieser Phasenverschiebung werden c ie Wandler des nicht zur Wegmessung benetzten Wardlerpaares ebenfalls mit den erwähnten Meiwiderständen in einer Brückenschaltung angeordnet. so daß sich insgesamt die in Fig. 3 veranschaulichte Doppelbrückenschaltung ergibt.The phase shift is used to determine the direction of movement of the organ 40 used between the output voltages of the two transducer pairs 10, 20, the occurs in that the two pairs of transducers 10, 20 in the direction of movement (arrow 50) of the organ 40 seen at a small distance a of e.g. 0.4 mm next to one another are arranged. The transducers of the are not used to measure this phase shift Wardler pair also wetted the mentioned Mei resistors for distance measurement arranged in a bridge circuit. so that overall that illustrated in FIG Double bridge circuit results.

Wie aus Fig. 3 im Einzelnen hervorgeht, liegen die Wandler 10a, 10b des einen Wandlerpaares 10 in der einen Brückenhälfte und zwei Meßwiderstände R in der anderen Brückenhälfte einer ersten Meßbrückenschaltung 60. Demgegenüber liegen die Wandler 20a, 20b des anderen Wandlerpaares 20 in der einen Brückenhälfte und die beiden Meßwiderstände R in der anderen Brückenhälfte einer zweiten Meßbrückenschaltung 70. Beide Brückenschaltungen 60, 70 sind an die Klemmen einer Gleichspannungsquelle von z.B. +5V angeschlossen.As can be seen in detail from FIG. 3, the transducers 10a, 10b are located of a pair of transducers 10 in one half of the bridge and two measuring resistors R in the other bridge half of a first measuring bridge circuit 60. Opposite are the transducers 20a, 20b of the other transducer pair 20 in one bridge half and the two measuring resistors R in the other bridge half of a second measuring bridge circuit 70. Both bridge circuits 60, 70 are connected to the terminals of a DC voltage source of e.g. + 5V connected.

Zwischen den Brückenmittelpunkten beider Brückenschaltungen 60, 70 befindet sich jeweils ein Spannungsmesser V.Between the bridge centers of the two bridge circuits 60, 70 there is a voltmeter V in each case.

Die Anordnung der Wandlerpaare 10, 20 auf der einen Polfläche des gemeinsamen Permanentmagneten 30 ist erfindungsslemäß so getroffen, daß das zur Wegmessung vorgesehene Wandlerpaar 10 in der der Symmetrieachse 80 ( Fign. 1 und 2 ) des in Fig. 1 veranschaulichten Äquipotentiall inienfeldes des Permanentmagneten 30 liegt.The arrangement of the transducer pairs 10, 20 on one pole face of the common permanent magnet 30 is made according to the invention so that the for Distance measurement provided transducer pair 10 in the axis of symmetry 80 (FIGS. 1 and 2) of the equipotential field of the permanent magnet illustrated in FIG. 1 30 lies.

Das zur Richtungsmesung vorgesehene Wandlerpaar 20 liegt in einem senkrecht u der Symmetrieachse 80 gemessenen Abstand a von den Wandlerpaar 10 entfernt.The transducer pair 20 provided for direction measurement is in one Distance a measured perpendicularly to the axis of symmetry 80 from the transducer pair 10.

Diese Anordnung der Wandlerpaare 10, 20 gewährleistet, daß zum einen der Abstand des Permanentmagneten 30 von dem Organ 40 unkritisch ist und zum anderen der Einfluß von äußeren Fremdfeldern beide Wandlerpaare 10, 20 in gleicher Stärke betrifft, so daß sich die dadurch hervorgerufenen Jerfälschungen der Wandlerausgangsspannungen in der Doppelbrückenschaltung nach Fig. 3 kompensieren.This arrangement of the transducer pairs 10, 20 ensures that on the one hand the distance of the permanent magnet 30 from the organ 40 is not critical and on the other hand the Influence of external external fields on both pairs of transducers 10, 20 affects in the same strength, so that the resulting counterfeiting of the converter output voltages in the double bridge circuit according to FIG. 3.

Als Wandler kommen in bevorzugter Weise Feldplatten in Betracht, obwohl auch andere Arten elektromagnetischer Wandler, wie z.B. Hallgeneratoren Anwendung finden können. Als Werkstoff für den Permanentmagneten 30 ist in bevorzugter Welse eine gesinterte Kobalt-Samarium-Verbindung vorgesehen, da dieser Werkstoff eine hohe FluBdichte besitzt. Der Polflächenabstand des Permanentmagneten 30 soll möglichst klein gehalten werden, um über die Länge der Polflächen hinweg eine möglichst große Differenz zwischen benachbarten quipotentiallinien und damit eine möglichst hohe Meßempfindlichkeit zur Verfugung zu haben. Dieser möglichst geringe gegenseitige Polflächenabstand läßt sich mit Kobalt-Samarium-Permanentmagneten besonders gut verwirklichen, da bereits bei kurzen CoSm-Magneten eine hohe Felcl<itärlse vorhanden 1 stField plates are preferred as transducers, although other types of electromagnetic transducers, such as Hall generators, are also used can find. The preferred material for the permanent magnet 30 is catfish a sintered cobalt-samarium compound is provided as this material is a has high flux density. The distance between the pole faces of the permanent magnet 30 should be as possible can be kept small in order to achieve the largest possible over the length of the pole faces Difference between neighboring equipotential lines and thus as high as possible To have measurement sensitivity available. This as low as possible mutual The distance between the pole faces can be achieved particularly well with cobalt-samarium permanent magnets realize, since a high field strength is already present with short CoSm magnets 1 st

Claims (5)

MAGNETO-ELEKTRISCHER WEGAUFNEHMER PATENTANSPRÜCHE Magneto-lektrlscher Wegaufnehmer, mit einem linear oder kreisbahnförmig beweglichen, gezahnten Organ, dessen Bewegung von einem magnetischen Fühler in Form von Feidstärkeänderungen erfaßt und in ein periodisches elektrisches Signal umgewandelt wird, dessen Perlodendauer ein Maß für den zu messenden Weg und dessen Phase ein Maß für die Bewegungsrichtung darstellt, wobei der magnetische Fühler wenigstens zwei Paai-e magneto-elektrischer Wandler aufweist, die unter definiertem gegenseitigem Abstand in einem Permanentmagnetfeld angebracht und elektrisch in einer Doppelbrückenschaltung angeordnet sind, von denen das eine Wandlerpaar zur Wegmessung und das andere Wandlerpaar zur Richtungserkennung dient, d a d u r c h g e k e n n -z e i c h n e t , daß die beiden Wandlerpaare (10, 20) auf einem gemeinsamen Permanentmagneten (30) angebracht sind und daß das eine, zur Wegmessung dlenende Wandlerpaar (10) in der Symmetrieachse des Squipotentlalfeldprofils des Permanentmagneten (30) angeordnet ist. MAGNETO-ELECTRIC POSITION DETECTOR PATENT CLAIMS Magneto-electric scanners Displacement transducer with a toothed organ that can move linearly or in a circular path, whose movement is detected by a magnetic sensor in the form of changes in the field strength and is converted into a periodic electrical signal, the period of which a measure of the path to be measured and its phase a measure of the direction of movement represents, wherein the magnetic sensor at least two Paai-e magneto-electric Has transducers that are at a defined mutual distance in a permanent magnetic field attached and electrically arranged in a double bridge circuit, of which one pair of transducers for distance measurement and the other pair of transducers for direction detection serves that the two transducer pairs (10, 20) on a common permanent magnet (30) appropriate and that the one transducer pair (10) which is used for distance measurement is in the axis of symmetry of the squipotential field profile of the permanent magnet (30) is arranged. 2. Wegaufnehmer nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t , daß als Permanentmagnet (30) ein Kobalt-Samariummagnet vorgesehen ist.2. Displacement transducer according to claim 1, d a d u r c h g e k e n n z e i c Note that a cobalt samarium magnet is provided as the permanent magnet (30). 3. Wegaufnehmer nach Anspruch 1 oder 2, d a d u r c h g e k e n n z e i c h n e t , daß die Polfläche (31) des Permanentmagneten (30) groß im Verhältnis zur wirksamen Meßfläche Cli bzw. 21) der Wandlerpaare (10, 20) ist.3. Displacement transducer according to claim 1 or 2, d a d u r c h g e k e n n z e i c h n e t that the pole face (31) of the permanent magnet (30) is large in proportion to the effective measuring area Cli or 21) of the transducer pairs (10, 20). 4. Wegaufnehmer nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß als magneto-elektrische Wandlerpaare (10, 20) Feldplattenraare vorgesehen sind.4. Displacement transducer according to one of claims 1 to 3, characterized in that that as magneto-electric transducer pairs (10, 20) Feldplatteraare are provided. 5. Wegaufnehmer nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß als magneto-elektrische Wandlerpaare (10, 20) Hall-Generatorenpaare vorgesehen sind.5. Displacement transducer according to one of claims 1 to 3, characterized in that that as magneto-electric transducer pairs (10, 20) Hall generator pairs are provided are.
DE19803041041 1980-10-31 1980-10-31 Magneto-electric displacement transducer Expired DE3041041C2 (en)

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Cited By (12)

* Cited by examiner, † Cited by third party
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EP0203275A2 (en) * 1985-03-23 1986-12-03 Robert Bosch Gmbh Incremental transducer
US4677377A (en) * 1984-08-10 1987-06-30 Hitachi, Ltd. Position-detecting sensor for detecting position of a moving object utilizing magnetism
EP0448062A1 (en) * 1990-03-21 1991-09-25 Mannesmann Kienzle GmbH (HR B1220) Direction sensing tachometer
EP0496918A1 (en) * 1991-01-31 1992-08-05 Siemens Aktiengesellschaft System for generating pulse signals from markings on a passing object
DE19648271A1 (en) * 1996-06-25 1998-01-29 Mitsubishi Electric Corp Movement sensor for magnetic object
FR2771812A1 (en) * 1997-11-28 1999-06-04 Denso Corp MAGNETORESISTIVE TYPE POSITION DETECTION DEVICE
WO1999030114A1 (en) * 1997-12-10 1999-06-17 Krauss-Maffei Verkehrstechnik Gmbh Device for magnetic distance measurement
DE19620337C2 (en) * 1996-05-21 2001-08-16 Kostal Leopold Gmbh & Co Kg Sensor for speed and direction of rotation
WO2006131418A1 (en) * 2005-06-06 2006-12-14 Robert Bosch Gmbh Eddy current sensor arrangement
US7285074B2 (en) 2003-02-25 2007-10-23 Volkswagen Aktiengesellschaft Method and device for controlling a motor vehicle drive train
DE102008058896B4 (en) * 2007-12-05 2013-06-20 Infineon Technologies Ag System comprising detection elements at different distances from vertical magnetic field lines
US8476896B2 (en) 2006-12-21 2013-07-02 Micro-Epsilon Messtechnik Gmbh & Co. Kg Method and sensor arrangement for determining the position and/or change of position of a measured object relative to a sensor

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DE19927759A1 (en) * 1999-06-17 2001-01-04 Siemens Krauss Maffei Lokomoti Magnetic distance measuring device
DE102007062862A1 (en) 2006-12-21 2008-07-10 Micro-Epsilon Messtechnik Gmbh & Co. Kg Method for determining position and change of position of measured object, involves arranging magnet in area of influence of sensor, which brings about change in permeability of foil

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US3034036A (en) * 1957-10-10 1962-05-08 Clevite Corp Position measuring apparatus
FR1228866A (en) * 1958-02-20 1960-09-02 Asea Ab Mount for <<pathers>> components or pressure detectors
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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677377A (en) * 1984-08-10 1987-06-30 Hitachi, Ltd. Position-detecting sensor for detecting position of a moving object utilizing magnetism
EP0203275A2 (en) * 1985-03-23 1986-12-03 Robert Bosch Gmbh Incremental transducer
EP0203275A3 (en) * 1985-03-23 1987-12-02 Robert Bosch Gmbh Incremental transducer
EP0448062A1 (en) * 1990-03-21 1991-09-25 Mannesmann Kienzle GmbH (HR B1220) Direction sensing tachometer
EP0496918A1 (en) * 1991-01-31 1992-08-05 Siemens Aktiengesellschaft System for generating pulse signals from markings on a passing object
DE19620337C2 (en) * 1996-05-21 2001-08-16 Kostal Leopold Gmbh & Co Kg Sensor for speed and direction of rotation
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