DE29707657U1 - Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage - Google Patents

Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage

Info

Publication number
DE29707657U1
DE29707657U1 DE29707657U DE29707657U DE29707657U1 DE 29707657 U1 DE29707657 U1 DE 29707657U1 DE 29707657 U DE29707657 U DE 29707657U DE 29707657 U DE29707657 U DE 29707657U DE 29707657 U1 DE29707657 U1 DE 29707657U1
Authority
DE
Germany
Prior art keywords
transport
disk
storage
coating system
vacuum coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29707657U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Systems GmbH
Original Assignee
Leybold Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Systems GmbH filed Critical Leybold Systems GmbH
Priority to DE29707657U priority Critical patent/DE29707657U1/en
Publication of DE29707657U1 publication Critical patent/DE29707657U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
    • B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
DE29707657U 1997-04-28 1997-04-28 Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage Expired - Lifetime DE29707657U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29707657U DE29707657U1 (en) 1997-04-28 1997-04-28 Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29707657U DE29707657U1 (en) 1997-04-28 1997-04-28 Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage

Publications (1)

Publication Number Publication Date
DE29707657U1 true DE29707657U1 (en) 1997-07-10

Family

ID=8039652

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29707657U Expired - Lifetime DE29707657U1 (en) 1997-04-28 1997-04-28 Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage

Country Status (1)

Country Link
DE (1) DE29707657U1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19839898C2 (en) * 1998-09-02 2002-07-18 Leybold Systems Gmbh Device for the vertical transport of disk-shaped substrates in a vacuum coating system or for their storage
DE10123062A1 (en) * 2001-05-11 2002-11-21 Steag Hamatech Ag Device for transport of media, such as DVDs during production has an improved mechanical coupling device for linking a lifting arrangement to a conveyor belt arrangement so that disks can be moved through a production zone
DE10162956A1 (en) * 2001-12-20 2003-07-10 Steag Hama Tech Ag Substrate processing apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3124231A (en) * 1964-03-10 Transfer mechanism
DE2305789A1 (en) * 1973-02-07 1974-08-08 Vosswerke Gmbh CONVEYOR DEVICE, IN PARTICULAR VERTICAL CONVEYORS
EP0137570A2 (en) * 1983-10-10 1985-04-17 Staat der Nederlanden (Staatsbedrijf der Posterijen, Telegrafie en Telefonie) Accumulating conveyor apparatus for effecating vertical movement and storage of tubs, or similar containers
DE3740109C2 (en) * 1987-02-16 1990-05-23 Gebr. Bindler Maschinenfabrik Gmbh & Co Kg, 5275 Bergneustadt, De
DE4341634A1 (en) * 1993-12-07 1995-06-08 Leybold Ag Transport of substrate discs in a vacuum coating plant
DE4213936C2 (en) * 1991-04-30 1995-11-09 Murata Manufacturing Co Heat treatment plant

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3124231A (en) * 1964-03-10 Transfer mechanism
DE2305789A1 (en) * 1973-02-07 1974-08-08 Vosswerke Gmbh CONVEYOR DEVICE, IN PARTICULAR VERTICAL CONVEYORS
EP0137570A2 (en) * 1983-10-10 1985-04-17 Staat der Nederlanden (Staatsbedrijf der Posterijen, Telegrafie en Telefonie) Accumulating conveyor apparatus for effecating vertical movement and storage of tubs, or similar containers
DE3740109C2 (en) * 1987-02-16 1990-05-23 Gebr. Bindler Maschinenfabrik Gmbh & Co Kg, 5275 Bergneustadt, De
DE4213936C2 (en) * 1991-04-30 1995-11-09 Murata Manufacturing Co Heat treatment plant
DE4341634A1 (en) * 1993-12-07 1995-06-08 Leybold Ag Transport of substrate discs in a vacuum coating plant

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Prospekt: Arcadia - The Replication Line for CD and DVD, der Fa. Leybold Systems GmbH, Hanau, 4, 1997, S. 6 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19839898C2 (en) * 1998-09-02 2002-07-18 Leybold Systems Gmbh Device for the vertical transport of disk-shaped substrates in a vacuum coating system or for their storage
DE10123062A1 (en) * 2001-05-11 2002-11-21 Steag Hamatech Ag Device for transport of media, such as DVDs during production has an improved mechanical coupling device for linking a lifting arrangement to a conveyor belt arrangement so that disks can be moved through a production zone
DE10162956A1 (en) * 2001-12-20 2003-07-10 Steag Hama Tech Ag Substrate processing apparatus
DE10162956B4 (en) * 2001-12-20 2005-11-03 Steag Hama Tech Ag Substrate processing apparatus

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19970821

R163 Identified publications notified

Effective date: 19970902

R150 Term of protection extended to 6 years

Effective date: 20000606

R151 Term of protection extended to 8 years

Effective date: 20030407

R152 Term of protection extended to 10 years

Effective date: 20050425

R071 Expiry of right