DE2953050A1 - Control of deposition of thin films - Google Patents

Control of deposition of thin films

Info

Publication number
DE2953050A1
DE2953050A1 DE19792953050 DE2953050T DE2953050A1 DE 2953050 A1 DE2953050 A1 DE 2953050A1 DE 19792953050 DE19792953050 DE 19792953050 DE 2953050 T DE2953050 T DE 2953050T DE 2953050 A1 DE2953050 A1 DE 2953050A1
Authority
DE
Germany
Prior art keywords
deposition
control
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19792953050
Other languages
English (en)
Inventor
L Holland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Priority claimed from PCT/GB1979/000138 external-priority patent/WO1980000504A1/en
Publication of DE2953050A1 publication Critical patent/DE2953050A1/de
Ceased legal-status Critical Current

Links

DE19792953050 1978-08-18 1979-08-10 Control of deposition of thin films Ceased DE2953050A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7833927 1978-08-18
PCT/GB1979/000138 WO1980000504A1 (en) 1978-08-18 1979-08-10 Control of deposition of thin films

Publications (1)

Publication Number Publication Date
DE2953050A1 true DE2953050A1 (de) 1981-04-09

Family

ID=26268605

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792953050 Ceased DE2953050A1 (de) 1978-08-18 1979-08-10 Control of deposition of thin films

Country Status (1)

Country Link
DE (1) DE2953050A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4325724A1 (de) * 1993-07-30 1995-02-02 Paul Dr Debbage Vorrichtung und Verfahren zur Untersuchung eines Objektes und zur Einwirkung auf das Objekt

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Optics and Laser Technologie", 1972, S. 79-86 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4325724A1 (de) * 1993-07-30 1995-02-02 Paul Dr Debbage Vorrichtung und Verfahren zur Untersuchung eines Objektes und zur Einwirkung auf das Objekt

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection