Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GESELLSCHAFT fur SCHWERIONENFORSCHUNG MBH 6100 DARMSTADT DE
Original Assignee
GESELLSCHAFT fur SCHWERIONENFORSCHUNG MBH 6100 DARMSTADT DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GESELLSCHAFT fur SCHWERIONENFORSCHUNG MBH 6100 DARMSTADT DEfiledCriticalGESELLSCHAFT fur SCHWERIONENFORSCHUNG MBH 6100 DARMSTADT DE
Priority to DE19782841030priorityCriticalpatent/DE2841030A1/de
Publication of DE2841030A1publicationCriticalpatent/DE2841030A1/de
Application grantedgrantedCritical
Publication of DE2841030C2publicationCriticalpatent/DE2841030C2/de
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel