DE2602583A1 - Mit piezoelektrischem material arbeitende messvorrichtung - Google Patents

Mit piezoelektrischem material arbeitende messvorrichtung

Info

Publication number
DE2602583A1
DE2602583A1 DE19762602583 DE2602583A DE2602583A1 DE 2602583 A1 DE2602583 A1 DE 2602583A1 DE 19762602583 DE19762602583 DE 19762602583 DE 2602583 A DE2602583 A DE 2602583A DE 2602583 A1 DE2602583 A1 DE 2602583A1
Authority
DE
Germany
Prior art keywords
layer
piezoelectric
layers
measuring device
result
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19762602583
Other languages
German (de)
English (en)
Inventor
Allen L Taylor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE2602583A1 publication Critical patent/DE2602583A1/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Laminated Bodies (AREA)
DE19762602583 1975-01-22 1976-01-21 Mit piezoelektrischem material arbeitende messvorrichtung Pending DE2602583A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US54303575A 1975-01-22 1975-01-22

Publications (1)

Publication Number Publication Date
DE2602583A1 true DE2602583A1 (de) 1976-07-29

Family

ID=24166318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762602583 Pending DE2602583A1 (de) 1975-01-22 1976-01-21 Mit piezoelektrischem material arbeitende messvorrichtung

Country Status (4)

Country Link
JP (1) JPS5199572A (enrdf_load_stackoverflow)
DE (1) DE2602583A1 (enrdf_load_stackoverflow)
FR (1) FR2298787A1 (enrdf_load_stackoverflow)
IT (1) IT1053410B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3720303A1 (de) * 1987-06-19 1988-12-29 Schenck Ag Carl Probeneinspannvorrichtung fuer pruefmaschinen
US4836031A (en) * 1987-11-27 1989-06-06 Carl Schenck Ag Method and apparatus for measuring deformations of test samples in testing machines
US4962669A (en) * 1987-06-19 1990-10-16 Carl Schenck Ag Method and apparatus for measuring deformations of test samples in a testing machine
CN105509937A (zh) * 2016-01-07 2016-04-20 常州二维光电科技有限公司 一种压感传感器、压力检测方法及制造工艺

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2340542A1 (fr) * 1976-02-09 1977-09-02 Minnesota Mining & Mfg Capteur detectant les variations de temperature et de contrainte et comprenant des couches d'electret
GB1596284A (en) * 1977-10-11 1981-08-26 Marconi Co Ltd Signalling devices
JPS5532475U (enrdf_load_stackoverflow) * 1978-08-23 1980-03-01
DE3212661A1 (de) * 1982-04-05 1983-10-06 Siemens Ag Drucksensor
CH668137A5 (fr) * 1986-05-07 1988-11-30 Alexandra Alioth Dispositif de commande d'un appareil electrique d'alarme.
FR2625808B1 (fr) * 1988-01-12 1990-09-21 Electronique Controle Mesure S Dispositif de detection de passage de vehicules ou pietons sur une chaussee a film piezo-electrique ou resistif
FR2686412B1 (fr) * 1992-01-16 1997-05-09 Univ Joseph Fourier Capteur piezoelectrique compense en temperature.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029159B1 (enrdf_load_stackoverflow) * 1970-12-02 1975-09-20
FR2145099A5 (enrdf_load_stackoverflow) * 1971-07-08 1973-02-16 Inst Francais Du Petrole
FR2233615B1 (enrdf_load_stackoverflow) * 1973-06-12 1977-05-06 Gen Dynamics Corp
JPS587921B2 (ja) * 1974-05-06 1983-02-14 ミネソタ マイニング アンド マニユフアクチユアリング コンパニ− コウバイカンチソウチ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3720303A1 (de) * 1987-06-19 1988-12-29 Schenck Ag Carl Probeneinspannvorrichtung fuer pruefmaschinen
US4821579A (en) * 1987-06-19 1989-04-18 Carl Schenck Ag Apparatus for clamping a test sample in a testing machine
US4962669A (en) * 1987-06-19 1990-10-16 Carl Schenck Ag Method and apparatus for measuring deformations of test samples in a testing machine
US4836031A (en) * 1987-11-27 1989-06-06 Carl Schenck Ag Method and apparatus for measuring deformations of test samples in testing machines
CN105509937A (zh) * 2016-01-07 2016-04-20 常州二维光电科技有限公司 一种压感传感器、压力检测方法及制造工艺
CN105509937B (zh) * 2016-01-07 2018-12-25 常州二维光电科技有限公司 一种压感传感器、压力检测方法及制造工艺

Also Published As

Publication number Publication date
JPS5199572A (enrdf_load_stackoverflow) 1976-09-02
IT1053410B (it) 1981-08-31
FR2298787A1 (fr) 1976-08-20

Similar Documents

Publication Publication Date Title
DE69405651T2 (de) Beschleunigungsmessaufnehmer
AT393040B (de) Kapazitiver naeherungsgeber
EP2710344B1 (de) Sensorelement mit piezoelektrischem wandler
DE1916496A1 (de) Kondensator und dessen Anwendung
DE3337978C2 (de) Vorrichtung zum Messen eines Druckes und eines zeitlichen Druckverlaufs
DE2602583A1 (de) Mit piezoelektrischem material arbeitende messvorrichtung
DE102018009244B4 (de) Krafterfassungsstruktur mit Wegerfassung und Kraftsensor mit Wegerfassung
CH683714A5 (de) Kraftsensoranordnung, insbesondere zur dynamischen Achslast-, Geschwindigkeits-, Achsabstands- und Gesamtgewichtsbestimmung von Fahrzeugen.
DE102009026462A1 (de) Beschleunigungssensor
DE102009047018A1 (de) Verfahren zum Abgleich eines Beschleunigungssensors und Beschleunigungssensor
EP0776467B1 (de) Kraft- oder dehnungssensor
DE2740174A1 (de) Geraet zur messung der struktur einer leitenden oberflaeche
DE2605809C2 (de) Sensoreinrichtung zur Erfassung einer Temperaturänderung oder einer Biegespannungsänderung
DE102013221719A1 (de) Ladungskompensation für kapazitive Berührungssensorknoten
DE202016008592U1 (de) Sensor
DE102010011338A1 (de) Messeinrichtung zur Erfassung von Formänderungen
DE2932184A1 (de) Verfahren und einrichtung zum bestimmen der form und groesse eines teils
DE2461976A1 (de) Pyroelektrische gasdosimeter
DE102010012701A1 (de) Mikrokraftsensor
DE102010040932B4 (de) Verfahren zur Konfigurierung einer kapazitiven Druckmessanordnung mit nichtlinearer Kennlinie und derartig konfigurierte Druckmessanordnung
DE529843C (de) Verfahren zum Messen und Aufzeichnen des zeitlichen Verlaufes von schnell verlaufenden Laengenaenderungen oder Torsionsschwingungen
DE102020110172A1 (de) Verfahren zur kapazitiven Berühr- und Betätigungsdetektion
DE102016204439A1 (de) Kapazitiver Winkelsensor
DE112014002528B4 (de) Kapazitiver Sensor für eine physikalische Grösse
DE2021811C3 (de) Einrichtung zur Messung der Dielektrizitätskonstanten von Stoffen

Legal Events

Date Code Title Description
OHJ Non-payment of the annual fee