DE2538831A1 - Crucible-free zone melting device - with single-turn high frequency heating coil overlapping at gap for uniform field - Google Patents
Crucible-free zone melting device - with single-turn high frequency heating coil overlapping at gap for uniform fieldInfo
- Publication number
- DE2538831A1 DE2538831A1 DE19752538831 DE2538831A DE2538831A1 DE 2538831 A1 DE2538831 A1 DE 2538831A1 DE 19752538831 DE19752538831 DE 19752538831 DE 2538831 A DE2538831 A DE 2538831A DE 2538831 A1 DE2538831 A1 DE 2538831A1
- Authority
- DE
- Germany
- Prior art keywords
- crucible
- coil
- rod
- zone melting
- heating coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Induction Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Vorrichtung zum tiegelfreien Zonenschmelzen Die Erfindung betrifft eine Induktionsheizspule zum tiegelfreien Zonenschmelzen eines kristallinen Stabes, insbesondere Halbleiterstabes, mit einer einzigen, den Stab ringförmig umgebenden Windung. Device for crucible-free zone melting The invention relates to an induction heating coil for crucible-free zone melting of a crystalline rod, in particular semiconductor rod, with a single ring surrounding the rod Twist.
Beim tiegeifreien Zonenschmelzen werden als Induktionsheizspulen neben Zylinderspulen und mehrwindigen Flachspulen heute bevorzugt einwindige Flachspulen eingesetzt, die es gestatten, den Stab lediglich an einer sehr schmalen Stelle aufzuschmelzen. Die hierdurch erhöhte Stabilität der Schmelzzone ist besonders bei großen Stabdurchmessern von Bedeutung. Mit derartigen einwindigen Flachspulen gelingt es, Stäbe in versetzungsfreie Einkristalle mit bis zu 7,5 cm Durchmesser zu überführen.In the case of deep-free zone melting, induction heating coils are used alongside Single-turn flat coils are preferred today for cylinder coils and multi-turn flat coils used, which allow the rod to be melted only at a very narrow point. The resulting increased stability of the melting zone is particularly important with large rod diameters significant. With such single-turn flat coils it is possible to convert rods into dislocation-free To transfer single crystals with a diameter of up to 7.5 cm.
Der an den Stromzuführungen derartiger einwindiger Flachspulen ausgebildete Schlitz wirkt sich bei größeren Stabdurchmessern jedoch sehr ungünstig aus. Die starke Feldkonzentration am Spulenschlitz kann bei Stäben mit größerem Durchmesser am Außenrand nahe der Erstarrungsfront zu Rückschmelzungen führen, die Versetzungen im Stab bedingen.The one formed on the power supply lines of such single-turn flat coils However, slot has a very unfavorable effect on larger rod diameters. the Strong field concentration at the coil slot can occur with rods with a larger diameter at the outer edge near the solidification front lead to meltbacks, the dislocations condition in the staff.
Der Erfindung liegt daher die Aufgabe zugrunde, eine Induktionsheizspule zu entwickeln, die ein homogeneres elektromagnetisches Feld erzeugt als bekannte einwindige Flachspulen.The invention is therefore based on the object of an induction heating coil to develop that generates a more homogeneous electromagnetic field than known single-turn flat coils.
Gelöst wird diese Aufgabe mit liner Induktionsheizspule zum tiegelfreien Zonenschmelzen eines kristallinen Stabes, insbesondere Halbleiterstabes, mit einer einzigen, den Stab ringförmig umgebenden Windung, die dadurch gekennzeichnet ist, daß die Spulenenden der Flachspule überlappend ausgebildet sind.This task is solved with a liner induction heating coil for crucible-free Zone melting of a crystalline rod, in particular a semiconductor rod, with a single winding surrounding the rod in a ring, which is characterized by that the coil ends of the flat coil are designed to overlap.
Die Überlappung kann dabei von ea. 1 mm bis zu einigen Zentimetern reichen, wobei eine vom Innen- zum Außenrand zunehmende Überlappung meist vorteilhaft ist. Besonders günstig ist es auch, die'beiden rohrförmigen Stromzuführungen zumindest weitgehend übereinander liegend auszuführen, um auch hier eine Feldasymmetrie durch Schlitzwirkung auszuschalten oder zumindest einzuschränken. Der Innendurchmesser der erfindungsgemäßen, beispielsweise aus Silber gefertigten Induktionsheizspule beträgt etwa 20 bis 40 mm, bevorzugt 25 bis 35 mm, der Außendurchmesser etwa 110 bis 180 mm, bevorzugt 130 bis 150 mm.The overlap can range from about 1 mm to a few centimeters range, whereby an increasing overlap from the inner to the outer edge is usually advantageous is. It is also particularly favorable to have at least the two tubular power supply lines To be carried out largely on top of each other, in order to achieve a field asymmetry here as well Switch off or at least limit the effect of the slot. The inside diameter the induction heating coil according to the invention, for example made of silver is about 20 to 40 mm, preferably 25 to 35 mm, the outer diameter is about 110 up to 180 mm, preferably 130 to 150 mm.
Der Hohlquerschnitt der von einem geeigneten Kühlmittel durchströmten Flachspulekann dabei beispielsweise weitgehend rechteckig, angenähert dreieckig beziehungsweise konusförmig sein, wobei der spitze Winkel respektive Öffnungswinkel im Innenrand der Spule liegt.The hollow cross-section through which a suitable coolant flows Flat coil can be largely rectangular, approximately triangular, for example or be conical, the acute angle or opening angle lies in the inner edge of the coil.
Die starke Feldkonzentration am Schlitz der Stromzuführung der herkömmlichen einwindigen Flachspulen wird durch die Überlappung des Schlitzes stark abgeschwächt. In dem durch die erfindungsgemäße Flachspule erzeugten, weitgehend homogenen elektromagnetischen Feld können Stäbe mit beispielsweise 10 cm Durchmesser und mehr versetzungsfrei gezogen werden, da Rückschmelzungen der Erstarrungsfront nicht mehr auftreten.The strong field concentration at the slot of the conventional power supply single-turn flat coils are greatly weakened by the overlapping of the slot. In the largely homogeneous electromagnetic generated by the flat coil according to the invention In the field, rods with a diameter of 10 cm and more, for example, can be dislocated be drawn, since meltback of the solidification front no longer occurs.
Die erfindungsgemäße Induktionsheizspule läßt sich bei den üblichen Zonenziehverfahren unter Schutzgas, wie auch unter Vakuum, beispielsweise auch beim Dünnhalsziehen d.h. beim Zonenschmelzen eines kristallinen Stabes unter seitlicher Verschiebung des wiedererstarrenden Stabteiles, einsetzen.The induction heating coil according to the invention can be used with the usual Zone drawing process under protective gas, as well as under vacuum, for example also with Thin neck drawing, i.e. when zone melting a crystalline rod under the side Shift the re-solidifying rod part, use.
In den Figuren 1 und 2 sind zwei Ausführungsformen der erfindungsgemäßen Induktionsheizspule dargestellt.In Figures 1 and 2 are two embodiments of the invention Induction heating coil shown.
Figur 1 zeigt eine Flachspule 1 mit den beiden Stromzuführungen 2 in der Draufsicht und im Querschnitt. Die Flachspule 1 weist einen weitgehend rechteckigen Hohlquerschnitt 3 mit abgerundeten Kanten auf. Die Spulenenden, die in die beiden rohrförmigen Stronzuführungen 2 übergehen, sind vom Innenrand 4 zum Außenrand 5 der Spule 1 gleichmäßig überlappend ausgebildet, wobei sich die Überlappung in die Stromzuführungen 2 fortsetzt.FIG. 1 shows a flat coil 1 with the two power supply lines 2 in plan view and in cross section. The flat coil 1 has a largely rectangular shape Hollow cross-section 3 with rounded edges. The coil ends that are in the two Passing tubular stream feeds 2 are from the inner edge 4 to the outer edge 5 of the coil 1 formed evenly overlapping, the overlap in the Power supply lines 2 continues.
Figur 2 zeigt eine andere erfindungsgemäße Induktionsheizspule, wiederum in Draufsicht und Querschnitt. Bei dieser einwindigen Flachspule 1 ist die Überlappung der Spulenenden vom Innenrand 4 zum Außenrand 5 der Flachspule 1 von wenigen Millimetern bis auf über 2 cm ansteigend ausgebildet. Die Breite der einander ebenfalls überlappenden rohrförmigen Stromzuführungen 2 entspricht bei dieser Ausführungsform fast der Breite der Überlappung der Spulenenden am Außenrand 5 der Spule 1. Der Hohlquerschnitt 3 der Flachspule 1 entspricht wiederum einem Rechteck mit abgerundeten Ecken.Figure 2 shows another induction heating coil according to the invention, again in plan view and cross-section. In this single-turn flat coil 1, the overlap is the coil ends from the inner edge 4 to the outer edge 5 of the flat coil 1 of a few millimeters up to over 2 cm. The width of the also overlapping tubular power supply lines 2 corresponds almost to the width in this embodiment the overlap of the coil ends on the outer edge 5 of the coil 1. The hollow cross-section 3 of the flat coil 1 again corresponds to a rectangle with rounded corners.
Claims (1)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752538831 DE2538831A1 (en) | 1975-09-01 | 1975-09-01 | Crucible-free zone melting device - with single-turn high frequency heating coil overlapping at gap for uniform field |
JP9546976A JPS5229644A (en) | 1975-09-01 | 1976-08-12 | Band fusing device using no crucible |
DK366176A DK366176A (en) | 1975-09-01 | 1976-08-13 | APPLIANCE FOR DICE-FREE ZONE MELTING |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19752538831 DE2538831A1 (en) | 1975-09-01 | 1975-09-01 | Crucible-free zone melting device - with single-turn high frequency heating coil overlapping at gap for uniform field |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2538831A1 true DE2538831A1 (en) | 1977-03-03 |
Family
ID=5955327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19752538831 Pending DE2538831A1 (en) | 1975-09-01 | 1975-09-01 | Crucible-free zone melting device - with single-turn high frequency heating coil overlapping at gap for uniform field |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5229644A (en) |
DE (1) | DE2538831A1 (en) |
DK (1) | DK366176A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3603766A1 (en) * | 1986-02-06 | 1987-08-13 | Wacker Chemitronic | INDUCTION HEATING COIL FOR PULL-FREE ZONE DRAWING OF CRYSTAL RODS |
EP0288880A1 (en) * | 1987-04-27 | 1988-11-02 | Shin-Etsu Handotai Company Limited | Single-turn induction heating coil for the floating-zone melting process |
EP0725168A2 (en) * | 1995-01-31 | 1996-08-07 | Shin-Etsu Handotai Company Limited | High-frequency induction heater and method of producing semiconductor single crystal using the same |
WO2014075650A1 (en) * | 2012-11-19 | 2014-05-22 | Forschungsverbund Berlin E.V. | Device for non-crucible zone pulling of crystal rods |
EP3034658A1 (en) | 2014-12-18 | 2016-06-22 | Siltronic AG | Method for growing a single crystal by crystallisation of the single crystal from a flow zone |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS426992Y1 (en) * | 1966-01-14 | 1967-03-31 |
-
1975
- 1975-09-01 DE DE19752538831 patent/DE2538831A1/en active Pending
-
1976
- 1976-08-12 JP JP9546976A patent/JPS5229644A/en active Pending
- 1976-08-13 DK DK366176A patent/DK366176A/en unknown
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3603766A1 (en) * | 1986-02-06 | 1987-08-13 | Wacker Chemitronic | INDUCTION HEATING COIL FOR PULL-FREE ZONE DRAWING OF CRYSTAL RODS |
EP0288880A1 (en) * | 1987-04-27 | 1988-11-02 | Shin-Etsu Handotai Company Limited | Single-turn induction heating coil for the floating-zone melting process |
EP0725168A2 (en) * | 1995-01-31 | 1996-08-07 | Shin-Etsu Handotai Company Limited | High-frequency induction heater and method of producing semiconductor single crystal using the same |
EP0725168A3 (en) * | 1995-01-31 | 1996-10-23 | Shinetsu Handotai Kk | High-frequency induction heater and method of producing semiconductor single crystal using the same |
US5792258A (en) * | 1995-01-31 | 1998-08-11 | Shin-Etsu Handotai Co., Ltd. | High-frequency induction heater and method of producing semiconductor single crystal using the same |
WO2014075650A1 (en) * | 2012-11-19 | 2014-05-22 | Forschungsverbund Berlin E.V. | Device for non-crucible zone pulling of crystal rods |
EP3034658A1 (en) | 2014-12-18 | 2016-06-22 | Siltronic AG | Method for growing a single crystal by crystallisation of the single crystal from a flow zone |
DE102014226419A1 (en) | 2014-12-18 | 2016-06-23 | Siltronic Ag | A method of growing a single crystal by crystallizing the single crystal from a flow zone |
US9932691B2 (en) | 2014-12-18 | 2018-04-03 | Siltronic Ag | Method for growing a single crystal by crystallizing the single crystal from a float zone |
Also Published As
Publication number | Publication date |
---|---|
DK366176A (en) | 1977-03-02 |
JPS5229644A (en) | 1977-03-05 |
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Legal Events
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OHW | Rejection |