DE2226586C3 - Process for the production of polycrystalline cubic boron nitride - Google Patents
Process for the production of polycrystalline cubic boron nitrideInfo
- Publication number
- DE2226586C3 DE2226586C3 DE19722226586 DE2226586A DE2226586C3 DE 2226586 C3 DE2226586 C3 DE 2226586C3 DE 19722226586 DE19722226586 DE 19722226586 DE 2226586 A DE2226586 A DE 2226586A DE 2226586 C3 DE2226586 C3 DE 2226586C3
- Authority
- DE
- Germany
- Prior art keywords
- boron nitride
- silicon
- germanium
- cubic boron
- cubic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052582 BN Inorganic materials 0.000 title claims description 34
- PZNSFCLAULLKQX-UHFFFAOYSA-N N#B Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052732 germanium Inorganic materials 0.000 claims description 12
- 239000003999 initiator Substances 0.000 claims description 5
- -1 silicon nitrides Chemical class 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims 8
- 239000003054 catalyst Substances 0.000 claims 7
- 230000015572 biosynthetic process Effects 0.000 claims 5
- 238000005755 formation reaction Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 3
- 150000002291 germanium compounds Chemical class 0.000 claims 3
- 150000003377 silicon compounds Chemical class 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000000047 product Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910052723 transition metal Inorganic materials 0.000 claims 2
- 150000003624 transition metals Chemical class 0.000 claims 2
- 206010010144 Completed suicide Diseases 0.000 claims 1
- AJUFTLIHDBAQOK-UHFFFAOYSA-N Lithium nitride Chemical compound [Li+].[Li][N-][Li] AJUFTLIHDBAQOK-UHFFFAOYSA-N 0.000 claims 1
- 210000004072 Lung Anatomy 0.000 claims 1
- 241000158147 Sator Species 0.000 claims 1
- 238000005296 abrasive Methods 0.000 claims 1
- 239000003082 abrasive agent Substances 0.000 claims 1
- 150000001342 alkaline earth metals Chemical class 0.000 claims 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 230000003197 catalytic Effects 0.000 claims 1
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000000737 periodic Effects 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- 230000002142 suicide Effects 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 230000002194 synthesizing Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N Silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 239000004575 stone Substances 0.000 description 3
- QXUAMGWCVYZOLV-UHFFFAOYSA-N boride(3-) Chemical compound [B-3] QXUAMGWCVYZOLV-UHFFFAOYSA-N 0.000 description 2
- BIXHRBFZLLFBFL-UHFFFAOYSA-N Germanium nitride Chemical compound N#[Ge]N([Ge]#N)[Ge]#N BIXHRBFZLLFBFL-UHFFFAOYSA-N 0.000 description 1
- RXNSQEYGIRHYEE-UHFFFAOYSA-N boranylidynesilicon Chemical compound [Si]#B RXNSQEYGIRHYEE-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- TWXTWZIUMCFMSG-UHFFFAOYSA-N nitride(3-) Chemical compound [N-3] TWXTWZIUMCFMSG-UHFFFAOYSA-N 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
Description
findungsgemäßen Verfahrens verwendet man 2 bis Die genannte Mischung setzt man einem Druck vonThe process according to the invention is used from 2 to The mixture mentioned is put under a pressure of
20 0Zo der genannten Silizium- oder Germaniumver- 80 kbar und einer Erhitzung auf 18000C während20 0 Zo of said silicon or germanium ver- 80 kbar and heating to 1800 0 C during
bindungen. 2 Minuten aus. Durch eine solche Einwirkung bildetties. 2 minutes off. Forms through such exposure
Der Vorteil des erfindungsgemäßen Verfahrens sich kubisches Bornitrid mit einer Größe der Kri-The advantage of the method according to the invention is cubic boron nitride with a size of the Kri-
besteht darin, daß bei der Verwendung der genann- 5 stallite von 10~3 cm.consists in the fact that when using the mentioned 5 stallite of 10 ~ 3 cm.
ten Initiatoren das kubische Bornitrid unmittelbar .ten initiators the cubic boron nitride directly.
während der Herstellung polykristaliine Struktur an- B e ι s ρ ι e 1 4polycrystalline structure during production. B e ι s ρ ι e 1 4
nimmt. Man wiederholt die im Beispiel 3 beschriebenetakes. The procedure described in Example 3 is repeated
Nachstehend wird die Erfindung durch die Be- Methodik, man verwendet jedoch statt des Siliziumschreibung von Beispielen für die Durchführung des io nitrids Germaniumnitrid. Die Mischung setzt man Verfahrens näher erläutert, die das Wesen des erfin- einem Druck von 75 kbar und einer Erhitzung auf dungsgemäßen Verfahrens kennzeichnen. 1800° C während 3 Minuten aus. Die Kristallite desThe invention is described below using the Be methodology, but instead of using silicon writing of examples of the implementation of the io nitride germanium nitride. The mixture is set Process explained in more detail, which is the essence of the inven- a pressure of 75 kbar and a heating on mark in accordance with the procedure. 1800 ° C for 3 minutes. The crystallites of
gebildeten kubischen Bornitrids weisen eine Größeformed cubic boron nitride have a size
Beispiel 1 bis 10"4 cm auf.Example 1 to 10 " 4 cm on.
Man bereitet eine Mischung, die 80 % hexagonales Beispiel 5Prepare a mixture that is 80% hexagonal Example 5
Bornitrid und 20% Siliziumnitrid enthält. Die erhal- Man bereitet eine Mischung, welche 93% hexago-Contains boron nitride and 20% silicon nitride. The result is a mixture containing 93% hexagon
tene Mischung, das Reaktionsgemisch, bringt man in nales Bornitrid und 7% Siliziumnitrid enthält. Dietene mixture, the reaction mixture, is brought into nales boron nitride and contains 7% silicon nitride. the
die Kammer einer Anlage beliebiger Konstruktion erhaltene Mischung führt man in die Kammer einer ein, die die Erzeugung eines hohen Druckes und 20 Anlage beliebiger Konstruktion ein, die die Erzeu-the chamber of a system of any construction is fed into the chamber of a mixture one that generates high pressure and 20 systems of any construction that generate
einer hohen Temperatur ermöglicht. Als Medium, gung eines hohen Druckes und einer hohen Tempe-allows a high temperature. As a medium, a high pressure and a high temperature
welches den Druck überträgt, verwendet man Litho- ratur gewährleistet. Als Medium, welches den Druckwhich transmits the pressure, one uses lithography guaranteed. As a medium, which is the pressure
grafiestein. Die genannte Mischung unterwirft man überträgt, verwendet man Lithografiestein. Die ge-graphic stone. The said mixture is subjected to transfers using lithographic stone. The GE-
einem Druck von 65 kbar und einer Erhitzung auf nannte Mischung setzt man einem Druck von 70 kbar eine Temperatur von 17000C während 2 Minuten. 25 und einer Erhitzung auf 1750° C während 1 Minutea pressure of 65 kbar and heating to the said mixture, a pressure of 70 kbar, a temperature of 1700 ° C. for 2 minutes. 25 and heating to 1750 ° C for 1 minute
Durch eine solche Einwirkung bildet sich in der aus. Durch eine solche Einwirkung bildet sich in derSuch an action forms in the. Such an action forms in the
Kammer kubisches Bornitrid mit einer Größe von Kammer kubisches Bornitrid, dessen Kristallite eineChamber of cubic boron nitride with a size of chamber cubic boron nitride, the crystallites of which are a
Kristalliten (Polykristallen) von 10~3 cm. Größe von 10~* cm aufweisen.Crystallites (polycrystals) of 10 ~ 3 cm. Size of 10 ~ * cm.
Beispiel 2 3« Beispiel 6Example 2 3 «Example 6
Es wird die im Beispiel 1 beschriebene Methodik Man bereitet eine Mischung, welche 95 % hexagowiederholt, man verwendet aber statt des Silizium- nales Bornitrid, 2 % Siliziumnitrid und 3 % Siliziumnitrids Siliziumborid. borid enthält. Die erhaltene Mischung führt man inThe methodology described in Example 1 is used. A mixture is prepared which repeats 95% hexagos, Instead of silicon, however, boron nitride, 2% silicon nitride and 3% silicon nitride are used Silicon boride. contains boride. The mixture obtained is carried out in
35 die Kammer einer Anlage beliebiger Konstruktion35 the chamber of a system of any construction
Beispiel 3 em> die die Erzeugung eines hohen Druckes undExample 3 em > the generation of high pressure and
einer hohen Temperatur gewährleistet. Als Medium,a high temperature guaranteed. As a medium,
Man bereitet eine Mischung, welche 98% hexago- welches den Druck überträgt, verwendet man Litho-A mixture is prepared, which is 98% hexagonal, which transfers the pressure, if litho-
nales Bornitrid und 2% Germaniumborid enthält. grafiestem. Die genannte Mischung setzt man einemContains nal boron nitride and 2% germanium boride. graphiest. The said mixture is what you put into one
Die erhaltene Mischung führt man in die Kammer 40 Druck von 75 kbar und einer Erhitzung auf 1800° CThe mixture obtained is fed into the chamber 40 with a pressure of 75 kbar and heating to 1800.degree
einer Anlage beliebiger Konstruktion ein, die die während 1 Minute aus. Durch eine solche Einwir-a system of any construction, which the during 1 minute. Such an impact
Erzeugung eines hohen Druckes und einer hohen kung bildet sich in der Kammer kubisches Bornitrid,Generating a high pressure and a high voltage, cubic boron nitride is formed in the chamber,
Temperatur gewährleistet. Als Medium, welches den dessen Kristallite eine Größe von ΙΟ"3 cm auf-Temperature guaranteed. As a medium, which has a size of ΙΟ " 3 cm in its crystallites
Druck überträgt, verwendet man Lithografiestein. weisen.To transfer pressure, lithographic stone is used. point.
Claims (2)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722226586 DE2226586C3 (en) | 1972-05-31 | Process for the production of polycrystalline cubic boron nitride | |
FR7220144A FR2187686B1 (en) | 1972-05-31 | 1972-06-05 | |
CH829272A CH562756A5 (en) | 1972-05-31 | 1972-06-05 | |
GB2627272A GB1355743A (en) | 1972-05-31 | 1972-06-06 | Method of producing polycrystals of cubic boron nitride |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722226586 DE2226586C3 (en) | 1972-05-31 | Process for the production of polycrystalline cubic boron nitride | |
FR7220144A FR2187686B1 (en) | 1972-05-31 | 1972-06-05 | |
CH829272A CH562756A5 (en) | 1972-05-31 | 1972-06-05 | |
GB2627272 | 1972-06-06 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE2226586A1 DE2226586A1 (en) | 1973-12-13 |
DE2226586B2 DE2226586B2 (en) | 1976-01-22 |
DE2226586C3 true DE2226586C3 (en) | 1976-08-26 |
Family
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