DE2214291C3 - - Google Patents

Info

Publication number
DE2214291C3
DE2214291C3 DE19722214291 DE2214291A DE2214291C3 DE 2214291 C3 DE2214291 C3 DE 2214291C3 DE 19722214291 DE19722214291 DE 19722214291 DE 2214291 A DE2214291 A DE 2214291A DE 2214291 C3 DE2214291 C3 DE 2214291C3
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19722214291
Other languages
German (de)
Other versions
DE2214291A1 (de
DE2214291B2 (de
Inventor
Rolf 7902 Blaubeuren Hartung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KARL C HARTUNG ELEKTROWAERME 7902 BLAUBEUREN
Original Assignee
KARL C HARTUNG ELEKTROWAERME 7902 BLAUBEUREN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KARL C HARTUNG ELEKTROWAERME 7902 BLAUBEUREN filed Critical KARL C HARTUNG ELEKTROWAERME 7902 BLAUBEUREN
Priority to DE19722214291 priority Critical patent/DE2214291B2/de
Publication of DE2214291A1 publication Critical patent/DE2214291A1/de
Publication of DE2214291B2 publication Critical patent/DE2214291B2/de
Application granted granted Critical
Publication of DE2214291C3 publication Critical patent/DE2214291C3/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J6/00—Heat treatments such as Calcining; Fusing ; Pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/106—Continuous processes
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
DE19722214291 1972-03-24 1972-03-24 Hohllanze zum Einblasen von Spülglas in einen Vakuummuffeldurchlaufofen Granted DE2214291B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19722214291 DE2214291B2 (de) 1972-03-24 1972-03-24 Hohllanze zum Einblasen von Spülglas in einen Vakuummuffeldurchlaufofen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722214291 DE2214291B2 (de) 1972-03-24 1972-03-24 Hohllanze zum Einblasen von Spülglas in einen Vakuummuffeldurchlaufofen

Publications (3)

Publication Number Publication Date
DE2214291A1 DE2214291A1 (de) 1973-10-04
DE2214291B2 DE2214291B2 (de) 1974-02-21
DE2214291C3 true DE2214291C3 (fr) 1974-10-10

Family

ID=5839984

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722214291 Granted DE2214291B2 (de) 1972-03-24 1972-03-24 Hohllanze zum Einblasen von Spülglas in einen Vakuummuffeldurchlaufofen

Country Status (1)

Country Link
DE (1) DE2214291B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
DE2759020C2 (de) * 1977-12-30 1986-08-14 Wolfgang 7534 Birkenfeld Kohnle Ofen zur Wärmebehandlung von Kleinteilen

Also Published As

Publication number Publication date
DE2214291A1 (de) 1973-10-04
DE2214291B2 (de) 1974-02-21

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee