DE2135455A1 - Piezowiderstandsubertrager und vor richtungen mit Halbleiterschichten und de ren Herstellungsverfahren - Google Patents

Piezowiderstandsubertrager und vor richtungen mit Halbleiterschichten und de ren Herstellungsverfahren

Info

Publication number
DE2135455A1
DE2135455A1 DE19712135455 DE2135455A DE2135455A1 DE 2135455 A1 DE2135455 A1 DE 2135455A1 DE 19712135455 DE19712135455 DE 19712135455 DE 2135455 A DE2135455 A DE 2135455A DE 2135455 A1 DE2135455 A1 DE 2135455A1
Authority
DE
Germany
Prior art keywords
conductive
electrodes
heat
resistant
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712135455
Other languages
German (de)
English (en)
Inventor
Radu Dr.; Devenyi Andrei Gavrila Dr.; Bukarest; Florea Valer Mediash; Korony Gheorghe Buka rest; Gngorovici (Rumänien). P
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST DE FIZICA BUKAREST
Original Assignee
INST DE FIZICA BUKAREST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST DE FIZICA BUKAREST filed Critical INST DE FIZICA BUKAREST
Publication of DE2135455A1 publication Critical patent/DE2135455A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00—Variable-resistance transducers
    • H04R21/02—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00—Variable-resistance transducers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Force In General (AREA)
DE19712135455 1970-07-16 1971-07-15 Piezowiderstandsubertrager und vor richtungen mit Halbleiterschichten und de ren Herstellungsverfahren Pending DE2135455A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO6394670 1970-07-16

Publications (1)

Publication Number Publication Date
DE2135455A1 true DE2135455A1 (de) 1972-01-20

Family

ID=20087965

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712135455 Pending DE2135455A1 (de) 1970-07-16 1971-07-15 Piezowiderstandsubertrager und vor richtungen mit Halbleiterschichten und de ren Herstellungsverfahren

Country Status (4)

Country Link
US (1) US3705993A (enExample)
DE (1) DE2135455A1 (enExample)
FR (1) FR2098451B1 (enExample)
NL (1) NL7109824A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3026785A1 (de) * 1979-07-17 1981-02-05 Data Instr Inc Druckwandler und verfahren zu seiner herstellung

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2828605C3 (de) * 1977-06-29 1982-01-14 Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa Halbleitervorrichtung
GB2098739B (en) * 1981-05-16 1985-01-16 Colvern Ltd Electrical strain gauges
WO1994028372A1 (en) * 1993-05-25 1994-12-08 Rosemount Inc. Organic chemical sensor
DE10135170A1 (de) * 2001-07-19 2003-02-06 Bosch Gmbh Robert Herstellungsverfahren für ein Dünnschichtbauelement und Dünnschichtbauelement
US7459104B2 (en) * 2005-07-18 2008-12-02 Datec Coating Corporation Low temperature fired, lead-free thick film heating element
US20100126273A1 (en) * 2008-11-25 2010-05-27 New Jersey Institute Of Technology Flexible impact sensors and methods of making same
US11327599B2 (en) 2011-04-26 2022-05-10 Sentons Inc. Identifying a contact type
KR101771896B1 (ko) 2011-11-18 2017-08-28 센톤스 아이엔씨. 국소형 햅틱 피드백
KR101648143B1 (ko) 2011-11-18 2016-08-16 센톤스 아이엔씨. 터치 입력 힘 검출
US11009411B2 (en) 2017-08-14 2021-05-18 Sentons Inc. Increasing sensitivity of a sensor using an encoded signal
US11580829B2 (en) 2017-08-14 2023-02-14 Sentons Inc. Dynamic feedback for haptics
JP2024098735A (ja) * 2023-01-11 2024-07-24 株式会社プロテリアル センサーコード及びセンサーシステム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3026785A1 (de) * 1979-07-17 1981-02-05 Data Instr Inc Druckwandler und verfahren zu seiner herstellung

Also Published As

Publication number Publication date
FR2098451B1 (enExample) 1973-06-29
NL7109824A (enExample) 1972-01-18
US3705993A (en) 1972-12-12
FR2098451A1 (enExample) 1972-03-10

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