DE2126334C3 - - Google Patents

Info

Publication number
DE2126334C3
DE2126334C3 DE2126334A DE2126334A DE2126334C3 DE 2126334 C3 DE2126334 C3 DE 2126334C3 DE 2126334 A DE2126334 A DE 2126334A DE 2126334 A DE2126334 A DE 2126334A DE 2126334 C3 DE2126334 C3 DE 2126334C3
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2126334A
Other languages
German (de)
Other versions
DE2126334B2 (de
DE2126334A1 (de
Inventor
Wilfried Dr. Engel
Hansdiethelm Dipl.-Phys. Wokoeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSTITUT fur ELEKTRONENMIKROSKOPIE AM FRITZ-HABER-INSTITUT DER MAX-PLANCKGESELLSCHAFT 1000 BERLIN
Original Assignee
INSTITUT fur ELEKTRONENMIKROSKOPIE AM FRITZ-HABER-INSTITUT DER MAX-PLANCKGESELLSCHAFT 1000 BERLIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSTITUT fur ELEKTRONENMIKROSKOPIE AM FRITZ-HABER-INSTITUT DER MAX-PLANCKGESELLSCHAFT 1000 BERLIN filed Critical INSTITUT fur ELEKTRONENMIKROSKOPIE AM FRITZ-HABER-INSTITUT DER MAX-PLANCKGESELLSCHAFT 1000 BERLIN
Priority to DE2126334A priority Critical patent/DE2126334B2/de
Publication of DE2126334A1 publication Critical patent/DE2126334A1/de
Publication of DE2126334B2 publication Critical patent/DE2126334B2/de
Application granted granted Critical
Publication of DE2126334C3 publication Critical patent/DE2126334C3/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation
    • H01J2237/082—Electron beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE2126334A 1971-05-25 1971-05-25 Ionenquelle mit einer unselbständigen Gasentladung zwischen einer ringförmigen Glühkathode und einer Anode Granted DE2126334B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2126334A DE2126334B2 (de) 1971-05-25 1971-05-25 Ionenquelle mit einer unselbständigen Gasentladung zwischen einer ringförmigen Glühkathode und einer Anode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2126334A DE2126334B2 (de) 1971-05-25 1971-05-25 Ionenquelle mit einer unselbständigen Gasentladung zwischen einer ringförmigen Glühkathode und einer Anode

Publications (3)

Publication Number Publication Date
DE2126334A1 DE2126334A1 (de) 1972-12-14
DE2126334B2 DE2126334B2 (de) 1974-03-07
DE2126334C3 true DE2126334C3 (enExample) 1974-10-17

Family

ID=5809074

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2126334A Granted DE2126334B2 (de) 1971-05-25 1971-05-25 Ionenquelle mit einer unselbständigen Gasentladung zwischen einer ringförmigen Glühkathode und einer Anode

Country Status (1)

Country Link
DE (1) DE2126334B2 (enExample)

Also Published As

Publication number Publication date
DE2126334B2 (de) 1974-03-07
DE2126334A1 (de) 1972-12-14

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)