DE212015000067U1 - Table device, transport device and semiconductor manufacturing device - Google Patents

Abstract

Table apparatus (100) comprising:
a first element (1) that can move within a predetermined plane;
a second member (2) that can move relative to the first member;
a first guide unit (4) comprising at least one part disposed on the first element and guiding the second element such that movement of the first element results in the second element being in a direction parallel to a first one Moves axis that is orthogonal to the specified plane;
a table (10) comprising a first member (10P) carried by the second member; and
a plurality of second guide units (5), each of the second guide units comprising at least a part connected to a corresponding one of the second parts (10R) of the table, the second parts being arranged around the first part, the second guide units comprising Guide the table so that the table moves in the direction parallel to the first axis.

Description

Area

The present invention relates to a table device and a transport device.

background

In transportation apparatuses, for example, a table apparatus having a movable table as disclosed in Patent Literature 1 is used.

Bibliography

patent literature

• Patent Literature 1: Japanese Published Patent Publication No. 2004-195620

Summary

Technical problem

In a table device, the performance of a transport device comprising the table device may be impaired if a table accidentally deviates from the target track, even if the table is intended to be moved along the target track. The positioning accuracy is impaired, for example, when the table is not being moved, even if it is intended that the table is being moved in the vertical direction. As a result, an object positioned on the table may not be positioned at a desired position.

An object of the present invention is to provide a table device that can move a table along a target track. In addition, it is an object of the present invention to provide a transport device that can prevent performance degradation.

the solution of the problem

A first aspect of the present invention provides a table apparatus comprising: a first member that can move within a predetermined plane; a second member that can move relative to the first member; a first guide unit including at least one member disposed on the first member and guiding the second member such that movement of the first member results in the second member moving in a direction parallel to a first axis orthogonal to the predetermined one Level is; a table comprising a first part carried by the second element; and a plurality of second guide units, each of the second guide units comprising at least one part connected to a corresponding one of the second parts of the table, the second parts being arranged around the first part, the second guide units guiding the table such that the table is in the direction moves parallel to the first axis.

According to the first aspect of the present invention, since the second guide units are provided around the second member, the table can move accurately along a target track. The second guide units guide the table in the direction parallel to the first axis. The table can thus move straight in the direction parallel to the first axis. This prevents the positioning accuracy of the table from being affected. The table and the object carried by the table can thus be positioned at a target position.

In the first aspect of the present invention, the first part may comprise a central part of the table within the fixed plane and the second parts may be arranged circumferentially of the table within the fixed plane. The table can thus be moved in a precise manner along a target track.

In the first aspect of the present invention, the table may have a quadrangular shape within the specified plane and the second guide units may each be connected to four corners of the table. The table can thus be moved in a precise manner along a target track.

In the first aspect of the present invention, the first part may comprise a center of gravity of the table, and the distances between the first part and the corresponding second parts defined at the corners may be the same. The table can thus be moved in a precise manner along a target track.

In the first aspect of the present invention, the first guide unit may include a linear rolling bearing including a first rail and a first slider that can be moved relative to the first rail, and the second guide units may each comprise a linear rolling bearing including a second rail and a first second slider, which can be moved relative to the second rail. This allows the first guide unit and the second guide units to guide the table in an accurate manner.

In the first aspect of the present invention, the second sliders may be arranged in the direction parallel to the first axis. This allows the second guide units to guide the table in an accurate manner.

In the first aspect of the present invention, the table device may further include: a triggering device that generates enough power to move the first element in a direction parallel to a second axis within the predetermined plane; and a third guide unit that guides the first member in the direction parallel to the second axis, wherein the third guide unit may include a linear roller bearing that includes a third rail and a third slider that can be moved relative to the third rail. In this way, each of the first guide unit, the second guide unit and the third guide unit comprises a linear roller bearing. This allows the table to be accurately moved in the direction parallel to the first axis and in the direction parallel to the second axis.

In the first aspect of the present invention, the third rail may be disposed on the first member and the third slider is fixed. As a result, the position of the third slider does not change when the first member moves. This allows the first element to stably support the table over the second element.

A second aspect of the present invention provides a transport device comprising the table device of the first aspect.

According to the second aspect of the present invention, deterioration of the performance of the transport device is prevented. Thus, an object carried by the table is transported to a target position.

Advantageous effects of the invention

With a table apparatus of the present invention, deviation of a table from a target track is prevented. Moreover, a transport device of the present invention prevents performance degradation.

Brief description of the illustrations

1 FIG. 15 is a front view illustrating an example of a table device according to a first embodiment. FIG.

2 FIG. 10 is a plan view illustrating an example of the table apparatus according to the first embodiment. FIG.

3 FIG. 10 is a side view illustrating an example of the table device according to the first embodiment. FIG.

4 FIG. 10 is a side view illustrating an example of the table device according to the first embodiment. FIG.

5 FIG. 10 is an enlarged view of a part of the table apparatus according to the first embodiment. FIG.

6 Fig. 13 illustrates an example of a guide unit according to the first embodiment.

7 Fig. 12 is a schematic diagram for explaining relative positions of a table and guide units according to the first embodiment.

8th FIG. 15 is a diagram illustrating an example of a transport device and a semiconductor manufacturing device according to a second embodiment. FIG.

9 FIG. 15 is a diagram illustrating an example of a transportation apparatus and a test apparatus according to the second embodiment. FIG.

Description of the embodiments

Embodiments according to the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiments. Components in the embodiments described below may be suitably combined. Furthermore, some of the components can not be used. In the following description, an orthogonal XYZ coordinate system will be used and positional relationships of corresponding components will be described with respect to the XYZ orthogonal coordinate system. A direction in a given plane becomes an X-axis direction, a direction orthogonal to the X-axis direction in the given plane becomes a Y-axis direction, and a direction orthogonal to both the X-axis direction and the Y-axis direction is expressed as Z -Axis direction. In addition, rotation (inclination) directions about the X-axis, the Y-axis, and the Z-axis are respectively referred to as an θX direction, a θY direction, and a θZ direction. The X-axis is orthogonal to a YZ-plane. The Y axis is orthogonal to an XZ plane. The Z axis is orthogonal to an XY plane. The XY plane is parallel to the given plane. It is assumed that the XY plane in the embodiments is parallel to a horizontal plane. The Z-axis direction is the vertical direction.

<First Embodiment>

A first embodiment will now be described. 1 is a frontal view showing an example of a table device 100 illustrated according to the first embodiment. 2 is a plan view of the table device 100 of the 1 as seen from the + Z-side. 3 is a side view of the table device 100 of the 1 as seen from the -X-side. 4 is a side view of the table device 100 of the 1 as seen from the + X-side. 5 is an enlarged view of part of the 1 ,

The table device 100 includes a table 10 which may carry: an object S, a first element 1 that can move within the XY plane (within the horizontal plane), a second element 2 that is relative to the first element 1 can move a leadership unit 4 that at least one on the first element 1 arranged part comprises and the second element 2 so that leads to the second element 2 moved in the Z-axis direction when the first element 1 moves, and a variety of leadership units 5 that all comprise at least part of that with the table 10 connected, and the table 10 so lead the table 10 moved in the Z-axis direction.

The table device 100 comprises a base element 8th , In the present embodiment, the base member comprises 8th a first base element 81 and a second base member 82 , which is the first basic element 81 wearing. The basic element 8th is for example arranged on a floor in a device in which the table device 100 is installed. Examples of the device include a factory.

The table 10 has a surface 10A which faces the + Z direction and a lower surface 10B which faces the direction of the surface 10A opposite (the -Z direction). An object S is on the surface 10A the table 10 positioned. The surface 10A can carry the object S.

The table 10 has a part 10P and a variety of parts 10R , The parts 10R are around the part 10P arranged. The part 10P includes a middle part of the table 10 within the XY plane. The part 10P the table 10 includes the center (middle of the figure) of the table 10 within the XY plane. In the present embodiment, the part comprises 10P the table 10 the center of gravity G of the table 10 , The parts 10R are around the table 10 arranged within the XY plane.

As in 2 illustrated, the table has 10 in the present embodiment, a quadrangular shape (rectangular or square) within the XY plane. The table 10 has four corners. The parts 10R include these corners. In the present embodiment, the parts 10R at four positions around the part 10P intended.

The table 10 is from the second element 2 carried. In the present embodiment, the second element carries 2 the part 10P the table 10 , In particular, the second element carries 2 the middle part of the table 10 (the center of gravity G of the table 10 ). In the present embodiment, the second element carries 2 the table 10 with an intermediate connecting element 22 , The second element 2 and the connecting element 22 are attached to each other. The connecting element 22 and the part 10P the table 10 are attached to each other. Alternatively, the second element 2 and the connecting element 22 be integrated.

The leadership units 5 wear the parts 10R the table 10 , A variety of (four) leadership units 5 is provided so that they each have the plurality of (four) parts 10R wear. At least part of each of the leadership units 5 is with the appropriate part 10R the table 10 connected. The leadership units 5 are each with the four corners of the table 10 connected.

The first element 1 , the second element 2 and the leadership unit 4 are on the side of the bottom surface 10B (the -z side) of the table 10 arranged. The second element 2 carries the table 10 on the side of the lower surface 10B the table 10 ,

The leadership units 5 are at lower positions than (at the -Z sides) of the surface 10A the table 10 arranged. In the present invention, at least a part of each of the guide units extends 5 out to the outside of the table 10 within the XY plane.

The first element 1 and the second element 2 are movable elements. Each of the first element 1 and the second element 2 moves in a room under the table 10 (in a room on the -Z side of the table 10 ). Each of the first element 1 and the second element 2 moves in a room above the base element 8th (in a room on the + Z side of the base element 8th ).

The first element 1 can be moved within the XY plane. In the present embodiment, the first element 1 be moved in the X-axis direction. The outer shape of the first element 1 inside the XZ plane is essentially triangular (wedge shape). As in the 1 and 5 illustrates has the first element 1 a lower surface 1B which is parallel to the XY plane, a sloped surface 1G , which is inclined with respect to the XY plane, and a side surface 1S , the is parallel to the Z axis. The inclined surface 1G and the side surface 1S are at higher positions than the bottom surface 1B (on the + Z side of it). The inclined surface 1G is inclined upwards along the + X direction (in the + Z direction). A lower end of the inclined surface 1G and one end on the -X side of the bottom surface 1B are connected. An upper end of the inclined surface 1G and an upper end of the side surface 1S are connected. A lower end of the side surface 1S and one end on the + X side of the bottom surface 1B are connected.

The second element 2 becomes movable from the first element 1 carried. The first element 1 and the second element 2 can be moved relative to each other. The second element 2 moves relative to the first element 1 over (on the + Z side of) the first element 1 ,

The second element 2 can be moved at least in the Z-axis direction. In the present embodiment, the movement of the first element causes 1 in the X-axis direction that the second element 2 moves in the Z-axis direction. The outer shape of the second element 2 inside the XZ plane is essentially triangular (wedge shape). As in the 1 and 5 illustrated has the second element 2 a surface 2A parallel to the XY plane, an inclined surface 2G , which is inclined with respect to the XY plane, and a side surface 2S parallel to the Z-axis. The surface 2A is located at a position above (on the + Z side) of the side surface 2S and the inclined surface 2G , The inclined surface 2G is tilted upwards (in the + Z direction), along the + X direction. In the present embodiment, the inclined surface 1G and the inclined surface 2G parallel to each other. An upper end of the inclined surface 2G and one end on the + X side of the surface 2A are connected. A lower end of the inclined surface 2G and a lower end of the side surface 2S are connected. An upper end of the side surface 2S and an end on the -X side of the surface 2A are connected.

The leadership unit 4 leads the second element 2 so that the movement of the first element 1 in the X-axis direction causes the second element 2 moves in the Z-axis direction. At least part of the leadership unit 4 is on the first element 1 positioned. In the present embodiment, the guide unit comprises 4 a linear guide mechanism. The leadership unit 4 includes a rail 41 that on the first element 1 is arranged, and a slide (block) 42 that on the second element 2 and along the rail 41 is movably arranged. The rail 41 is on the inclined surface 1G of the first element 1 arranged. The slider 42 is on the inclined surface 2G of the second element 2 arranged.

The leadership unit 4 includes a linear bearing. In the present embodiment, the guide unit comprises 4 a linear rolling bearing. The rolling bearing has a rolling element. The rolling element comprises balls or rollers or both. Thus, the rolling bearing comprises a ball bearing or a roller bearing or both. In the present embodiment, the guide unit comprises 4 a linear ball bearing.

6 illustrates an example of the guidance unit 4 according to the present embodiment. The leadership unit 4 includes the rail 41 and the slide (block, linear bearing) 42 that is relative to the rail 41 can be moved. The rail 41 has an upwardly facing surface 41A , Side surfaces 41B on both sides of the surface 41A and in the corresponding side areas 41B formed grooves 41C , The slider 42 has a first opposite surface 42A that of the surface 41A the rail 41 facing, second opposing surfaces 42B covering the side surfaces 41B the rail 41 may be facing, and a rolling element (balls) 42T which comprise at least one part in the grooves 41C the rail 41 is arranged. The balls 42T Roll in contact with the inner surfaces of the grooves 41C , The balls 42T roll on the grooves 41C along, causing the slider 42 smoothly on the rail 41 can move along.

In the present embodiment, the rail is 41 on the first element 1 (the inclined surface 1G ) at an angle with respect to the XY plane. The rail 41 is arranged so that the surface 41A the rail 41 is inclined with respect to the XY plane. As in 5 illustrates is the angle of inclination of the rail 41 (the surface 41A ) in the present embodiment with respect to the XY plane θ. The angle θ is greater than 0 degrees and less than 90 degrees. The slider 42 is on the second element 2 (on the inclined surface 2G ) arranged so that the first opposite surface 42A and the surface 41A the rail 41 are parallel to each other. In the present embodiment, there are two slides 42 on the inclined surface 2G of the second element 2 arranged. Alternatively, a slider 42 on the second element 2 be arranged. Three or more sliders 42 can on the second element 2 be arranged.

The second element 2 is from the leadership unit 4 so guided that the movement of the first element 1 in the X-axis direction causes the second element 2 in the Z-axis direction emotional. When the first element 1 moving in the -X direction, the second element moves 2 in the + Z direction (moves up). When the first element 1 moved in the + X direction, moves the second element 2 in the -Z direction (moves down). The table 10 is from the second element 2 carried. Thus, the movement of the second element causes 2 in the Z-axis direction (move up and down) that is the table 10 together with the second element 2 emotional. In particular, when the second element 2 moves in the + Z direction (up), the table moves 10 together with the second element 2 in the + Z direction. When the second element 2 moved in the -Z direction (down), the table moves 10 together with the second element 2 in the -Z direction.

Alternatively, the slides 42 in the leadership unit 4 on the inclined surface 1G of the first element 1 be arranged and the rail 41 can on the inclined surface 2G of the second element 2 be arranged.

The outer shape of the first element 1 is essentially triangular (wedge shape). The outer shape of the second element 2 is also essentially triangular (wedge shape). Thus, the table device includes 100 in the present embodiment, a Keilhubvorrichtung. The first element 1 can as a wedge element (first wedge element) 1 be designated. The second element 2 can as a wedge element (second wedge element) 2 be designated.

The table device 100 includes a triggering device 7 that produces power to cause the first element 1 moving in the X-axis direction, and a guide unit 9 that the first element 1 in the X-axis direction. The triggering device 7 can be the first element 1 move within the XY plane. The triggering device 7 generates power to move the first element 1 , The triggering device 7 generates power to cause the first element 1 moved within the XY plane. In the present embodiment, the operation of the triggering device 7 that is the first element 1 moved in the X-axis direction. The triggering device 7 includes a rotary motor and is operated with electric power supplied thereto. As in 1 illustrates are the triggering device 7 and the first element 1 via a power transmission device 11 connected with each other. The power (driving force) of the tripping device 7 is via the power transmission device 11 to the first element 1 transfer.

In the present embodiment, the power transmission device converts 11 the rotational movement of the triggering device 7 into a linear motion. In the present embodiment, a shaft of the tripping device rotates (rotary motor) 7 in an θX direction. The power transmission device 11 converts the rotational movement in the θX direction into the linear motion in the X-axis direction and transmits the resulting linear motion to the first element 1 , The first element 1 is through the over the power transmission device 11 transmitted power (driving force) of the tripping device 7 moved in the X-axis direction.

In the present embodiment, the power transmission device includes 11 a ball screw 11B , The ball screw 11B includes a propeller shaft formed by the operation of the tripping device 7 is turned, a mother, with the first element 1 is connected and arranged around the screw shaft, and balls which are arranged between the screw shaft and the nut. The screw shaft of the ball screw 11B is rotatable by a support bearing 12 carried. In the present embodiment, the ball screw rotates 11B in the θX direction. The rotation of the ball screw 11B in the θX direction has the consequence that the nut and the first element 1 to which the nut is connected move in the X-axis direction (move linearly).

When the triggering device 7 the screw shaft of the ball screw 11B turning in one direction, the rotation of the propeller shaft has the consequence that the first element 1 moved in the + X direction. When the triggering device 7 the screw shaft of the ball screw 11B turning in the opposite direction, the rotation of the propeller shaft has the consequence that the first element 1 moved in the -X direction. Thus, the direction of movement of the first element becomes 1 along the X-axis direction (the + X direction or the -X direction) based on the moving direction of the triggering device 7 (The rotational movement of the screw shaft or the ball screw 11B ) certainly. The direction of movement of the second element 2 (the table 10 ) along the Z-axis direction (the -Z direction or the + Z direction) is based on the moving direction of the first element 1 certainly.

The leadership unit 9 leads the first element 1 so that the operation of the triggering device 7 The result is that the first element 1 moved in the X-axis direction. At least part of the leadership unit 9 is on the base element 8th positioned. In the present embodiment, the guide unit comprises 9 a linear guide mechanism. The leadership unit 9 includes a rail 91 that on the first element 1 is arranged, and a slide (block) 92 who on the base element 8th is arranged and relative to the rail 91 can be moved. The rail 91 is at the bottom surface 1B attached to the first element. The slider 92 is on the surface of the base element 8th attached. The rail 91 moves together with the first element 1 , The slider 92 does not move. The position of the slider 92 is fixed.

The leadership unit 9 includes a linear rolling bearing. In the present embodiment, the guide unit comprises 9 a linear ball bearing. The first element 1 is so by the leadership unit 9 led that the operation of the triggering device 7 The result is that the first element 1 moved in the X-axis direction. The leadership unit 9 has a structure that is related to the structure of the 6 described guide unit 4 equivalent. There is no detailed description of the structure of the management unit 9 provided.

Alternatively, the rail 91 in the leadership unit 9 on the surface of the base element 8th be arranged and the slide 92 can on the bottom surface 1B of the first element 1 be arranged.

Every leadership unit 5 includes a linear guide mechanism. Every leadership unit 5 includes a rail 51 and a slider (block) 52 that is relative to the rail 51 can be moved. Every leadership unit 5 includes a linear rolling bearing. In the present embodiment, each guide unit comprises 5 a linear ball bearing. The table 10 is from the leadership units 5 so led the table 10 moved in the Z direction. Every leadership unit 5 has a structure that is related to the structure of the 6 described guide unit 4 equivalent. There is no detailed description of the structure of the management unit 5 provided.

The rails 51 are at the parts 10R the table 10 attached. In the XY plane is the multitude of (four) rails 51 around the first element 1 and the second element 2 arranged. The rails 51 move together with the table 10 in the Z-axis direction.

The sliders 52 are on carrying elements 6 attached. The carrying elements 6 are at the base element 8th attached. A variety of sliders 52 is arranged in the Z-axis direction. In the present embodiment, each guide unit comprises 5 two sliders 52 which are arranged in the Z-axis direction. Alternatively, each guide unit 5 any number of more than two sliders 52 include, which are arranged in the Z-axis direction.

7 Fig. 12 is a diagram for explaining an example of relative positions of the table 10 and the leadership units 5 according to the present embodiment. In the present embodiment, the part becomes 10P , which is the center of gravity G of the table 10 includes, from the second element 2 carried.

As in 7 illustrated, the table has 10 a quadrangular shape within the XY plane. The parts 10R are each at the four corners of the table 10 Are defined. The four corners 10R are each from the leadership units 5 carried.

The table 10 has a first corner 10Ra , a second corner 10rb , a third corner 10RC and a fourth corner 10RD , The first corner 10Ra and the second corner 10rb are arranged in the Y-axis direction. The third corner 10RC and the fourth corner 10RD are arranged in the Y-axis direction. The first corner 10Ra and the second corner 10rb are on the + X side of the third corner 10RC and the fourth corner 10RD arranged. The first corner 10Ra and the fourth corner 10RD are arranged in the X-axis direction. The second corner 10rb and the third corner 10RC are arranged in the X-axis direction. The first corner 10Ra and the fourth corner 10RD are on the + Y side of the second corner 10rb and the third corner 10RC arranged.

The rails 51 the leadership units 5 are each with the first corner 10Ra , the second corner 10rb , the third corner 10RC and the fourth corner 10RD connected.

Within the XY plane, the distance between the part 10P (the center of gravity G) and the first corner 10Ra represented as Ha. The distance between the part 10P (the center of gravity G) and the second corner 10rb is represented as Hb. The distance between the part 10P (the center of gravity G) and the third corner 10RC is represented as Hc. The distance between the part 10P (the center of gravity G) and the fourth corner 10RD is represented as Hd. In the present invention, the distance Ha, the distance Hb, the distance Hc and the distance Hd are the same. In other words, the four guide units 5 (the rails 51 ) in the present embodiment, in each case with the parts ( 10Ra . 10rb . 10RC and 10RD ) at equal distances in the direction of radiation from the center of gravity G of the table 10 connected within the XY plane.

Moreover, in the present invention, the distance Dxa is between the first corner 10Ra and the fourth corner 10RD and the distance Dxb between the second corner 10rb and the third corner 10RC same in the X-axis direction. The Distance Dya between the first corner 10Ra and the second corner 10rb and the distance Dyb between the third corner 10RC and the fourth corner 10RD are the same in the Y-axis direction.

Next, an example of the operation of the table device described above will be described 100 described. The triggering device 7 is operated and thereby power is from the triggering device 7 via the power transmission device 11 to the first element 1 transfer. The operation of the tripping device 7 causes the first element 1 moved in the X-axis direction. The first element 1 is through the leadership unit 9 guided and thus can move smoothly in the X-axis direction. The first element 1 is through the leadership unit 9 along a target track (desired track) in the X-axis direction. In the present embodiment, the first element 1 through the leadership unit 9 just be moved in the X direction.

The movement of the first element 1 in the X-axis direction causes the second element 2 moved in the Z-axis direction. The second element 2 is from the leadership unit 4 guided and thus can move smoothly in the Z-axis direction. The movement of the second element 2 in the Z-axis direction causes that of the second element 2 worn table 10 itself together with the second element 2 moved in the Z-axis direction.

In the present invention, a plurality of guide units 5 all at the table 10 fixed rail 51 and slider 52 include the rail 51 movably carry to the second element 2 intended. The leadership units 5 allow it to be the table 10 moved in the Z-axis direction while at the same time preventing the table from moving 10 moved in the X-axis direction and in the Y-axis direction. That's how the table becomes 10 is moved along a target track (desired track) in the Z-axis direction. In this embodiment, the table 10 through the leadership units 5 be moved in the Z-axis direction.

The triggering device 7 is operated so that the table 10 worn object S is positioned at a target position. In the present embodiment, the guide units 5 for guiding the table 10 provided in the Z-axis direction. Thus, the table can 10 along a target track (desired track) are moved. Thus, the table device 100 Position the object S at a target position.

As described above, according to the present embodiment, a plurality of guide units 5 around the second element 2 provided what makes it possible for the table 10 moved exactly along a target track. The leadership units 5 lead the table 10 in the Z-axis direction. Thus, the table can 10 just move in the Z-axis direction. Because four guide units 5 around the second element 2 (the table 10 ) are arranged, the immobility of the table device 100 increased in the XY directions. The operation of the table 10 is thus stabilized. In addition, the table 100 stable against external forces acting thereon, since a plurality of the guide units 5 is provided. In addition, the leadership units are the same 5 the error, even if the error in the movement of the table 10 a consequence of the surface accuracies or the like of the first element 1 and the second element 2 is. This prevents interference with the positioning accuracy of the table 10 and allows the table 10 and one off the table 10 worn object S are positioned at a target position.

Moreover, in the present embodiment, the part becomes 10P which is the middle part of the table 10 includes, from the second element 2 worn and the four corners (parts) 10R the table 10 be from the leadership units 5 carried. The part 10P includes the center of gravity G of the table 10 , The respective distances (Ha, Hb, Hc and Hd) between the part 10P and the four corners 10R ( 10Ra . 10rb . 10RC and 10RD ) are equal. The table 10 can therefore move exactly along a target track.

In addition, the leadership units included 5 in the present embodiment, in each case a linear roller bearing. This will allow the table 10 from the leadership units 5 is guided and thus can the table 10 just move in the Z-axis direction.

In addition, the leadership units include 5 in each case a plurality of (two) slides in the present invention 52 which are arranged in the Z-axis direction. As a result, the vibration is distributed even when it hits a slider 52 during a movement of the table 10 (the slider 52 ) in the Z-axis direction. Thus, the microvibration is also minimized. This will allow the guide units 5 the table 10 lead exactly.

In addition, the slider 92 comprising the rolling element, in the present embodiment, on the base element 8th attached and the rail 91 moves together with the first element 1 , As a result, the position of the slider changes 92 not when the table is 10 (the second element 2 ) is moved in the Z-axis direction. This can be the first element 1 the table 10 above the second element 2 stable wear. This is particularly effective when the movement distance (stroke) of the first element 1 is long.

In addition, each includes the leadership unit 4 , the leadership unit 5 and the leadership unit 9 in the present embodiment, a linear guide mechanism including a rolling bearing. The leadership unit 4 , the leadership units 5 and the leadership unit 9 each have rolling bearings with a substantially same structure. The table 10 is thus from the leadership unit 4 , the leadership units 5 and the leadership unit 9 and thereby can move accurately along target tracks in the Z-axis direction and in the X-axis direction.

In the present embodiment, four guide units 5 around the second element 2 arranged. Two or three leadership units 5 can be around the second element 2 be arranged. Any number over four of the guide units 5 can be around the second element 2 be arranged.

In the present embodiment, the table has 10 a quadrangular shape. Within the XY level, the table can be 10 a round shape or a polygonal shape, such. A hexagon or an octagon.

In the present embodiment, the guide unit comprises 4 a rolling bearing comprising a rolling element. The leadership unit 4 may include a linear plain bearing that does not include a rolling element. The leadership unit 4 may include a linear gas bearing. Alternatively, the guide unit 4 do not include a slider. The inclined surface 2G of the second element 2 for example, along one of the first element 1 provided rail, so that the second element 2 moved in the Z-axis direction. In this case, it acts on the first element 1 provided rail as a guide unit for guiding the second element 2 ,

Similarly, the guide unit 9 comprise a linear sliding bearing. The leadership unit 9 may include a linear gas bearing. Alternatively, the guide unit 9 do not include a slider.

Similarly, the leadership units 5 comprise linear plain bearings. The leadership units 5 may include linear gas bearings. Alternatively, the guide units 5 do not include slides.

<Second Embodiment>

A second embodiment will now be described. In the following description, the same or equivalent components to the components in the above-described embodiment will be given the same reference numerals and the description thereof will be simplified or not repeated.

8th FIG. 15 is a diagram illustrating an example of a semiconductor manufacturing apparatus. FIG 200 illustrated, including the table device 100 according to the present embodiment. The semiconductor manufacturing device 200 includes a semiconductor device for semiconductor devices that can manufacture semiconductor devices. The semiconductor manufacturing device 200 includes a transport device 300 which can transport an object S for manufacturing a semiconductor device. The transport device 300 includes the table device 100 according to the present embodiment. It should be noted that the table device 100 in 8th is illustrated in a simplified way.

In the present embodiment, the object S is a substrate for manufacturing a semiconductor device. A semiconductor device is manufactured by the object S. The object S may comprise a semiconductor wafer. The object S may comprise a glass pane. A device pattern (wiring pattern) is formed on the object to manufacture a semiconductor device.

The semiconductor manufacturing device 200 processes the object S positioned at a machining position PJ1 to form a device pattern thereon. The table device 100 positioned that from the table 10 supported object S at the machining position PJ1. The transport device 300 includes a delivery device 301 putting the object on the table 10 the table device 100 can transport, and a Wegtransportiervorrichtung 302 that the object S from the table 10 transport (carry away) can. The delivery device 301 transports an unprocessed object S to the table 10 , The table device 100 transports that from the table 10 supported object S to the machining position PJ1. The Wegtransportiervorrichtung 302 transports the processed object S from the table 10 path.

The table device 100 moves the table 10 to the table 10 carried object S to the processing position PJ1 to move. As described in the above-mentioned embodiment, the table becomes 10 from the leadership units 5 guided. Thus, the table device 100 the table 10 Move along a target track and off the table 10 position worn object S at the machining position (target position) PJ1.

When the semiconductor manufacturing device 200 For example, a measuring device for measuring the device pattern of the object S by an optical system 201 includes, then the processing position PJ1 comprises a focus position (measurement position) of the optical system 201 , The object S is positioned at the processing position PJ1, so that the semiconductor manufacturing device 200 through the optical system 201 an image of the device pattern formed on the object S can be obtained. When the semiconductor manufacturing device 200 an apparatus for forming layers for forming a film on the object S, the processing position PJ1 is a position to which a material for forming a film can be applied. The object S is positioned at the machining position PJ1, so that a layer for forming a device pattern is formed on the object S.

After the object S has been processed at the processing position PJ1, the processed object S becomes the path transporting device 302 off the table 10 transported. That of the Wegtransportiervorrichtung 302 transported (transported away) object S is transported to a processing device for performing a subsequent processing.

In the present embodiment, the table device 100 position the object S at the machining position (target position) PJ1. This prevents the production of defective products. In other words, the table device prevents 100 an impairment of the positioning accuracy for the object S in the semiconductor manufacturing apparatus 200 , This prevents the occurrence of defective products.

9 is a diagram showing an example of a tester 400 including the table device 100 , illustrated in accordance with the present embodiment. The tester 400 checks one of the semiconductor manufacturing device 200 manufactured object (semiconductor device) S2. The tester 400 includes a transport device 300B that can transport the object S2. The transport device 300B includes the table device 100 according to the present invention. It should be noted that the table device 100 in the 9 is illustrated in a simplified way.

The tester 400 checks the objects S2 positioned at a test position PJ2. The table device 100 positioned that from the table 10 supported object S2 at the test position PJ2. The transport device 300B includes a delivery device 301B that the object S2 on the table 10 the table device 100 can transport, and a Wegtransportiervorrichtung 302B that the object S2 from the table 10 transport (carry away) can. The delivery device 301B transports an unchecked object S2 to the table 10 , The table device 100 transports that from the table 10 carried object S2 to the test position PJ2. The Wegtransportiervorrichtung 302B transports the checked object S2 off the table 10 path.

The table device 100 moves the table 10 to the table 10 moved object S2 to the test position PJ2 to move. As described in the above-mentioned embodiment, the table becomes 10 from the leadership units 5 guided. The table device 100 can thus the table 10 move along a target track. The table device 100 That can be done from the table 10 position worn object S2 at the test position (target position) PJ2.

In the present embodiment, the test apparatus uses 400 a detection light to visually check the object S. The tester 400 includes an irradiation device 401 which can emit a detection light, and a light receiving device 402 that is at least part of that of the irradiation device 401 can receive received and reflected from the object S2 detection light. In the present embodiment, the inspection position PJ2 includes an irradiation position of the detection light. The object S2 is positioned at the test position PJ2 at which the state of the object S2 is visually checked.

After the object S2 has been inspected at the inspection position PJ2, the inspected object S2 becomes the path transporting device 302B off the table 10 transported.

In the present embodiment, the occurrence of a test failure can be prevented because the table apparatus 100 can position the object S2 at the test position (target position) PJ2. In particular, the test device 400 successfully determine whether an object S2 is faulty or not. This prevents, for example, that a faulty object S2 is transported or delivered to a subsequent processing.

In the present embodiment, the table is moving 10 in the Z-axis direction. In the present embodiment, the table 10 be moved in an oblique direction with respect to the Z-axis. The first element 1 can be moved in an oblique direction with respect to the XY plane or the second element 2 can be moved in an oblique direction with respect to the Z-axis. Thus, the XY plane may be parallel to the horizontal plane, or it may be inclined with respect to the horizontal plane. The leadership units 5 can the table 10 lead in the oblique direction. The leadership units 5 allow it to be the table 10 just moved in the oblique direction.

LIST OF REFERENCE NUMBERS

1

First element

2

Second element

4

Guide unit

5

Guide unit

6

carrying member

7

triggering device

8th

base element

9

Guide unit

10

table

10P

part

10R

part

11

The power transmission unit

41

rail

42

pusher

51

rail

52

pusher

91

rail

92

pusher

100

table device

200

Semiconductor manufacturing apparatus

300

transport device

400

Tester

Claims (10)

Table device ( 100 ), comprising: a first element ( 1 ) that can move within a set level; a second element ( 2 ) that can move relative to the first element; a first leadership unit ( 4 ) comprising at least a portion disposed on the first member and guiding the second member such that movement of the first member results in the second member moving in a direction parallel to a first axis that is orthogonal to the specified level; a table ( 10 ), which is a first part carried by the second element ( 10P ); and a plurality of second guide units ( 5 ), wherein each of the second guide units comprises at least one part which is connected to a corresponding one of the second parts ( 10R ) of the table, the second parts being arranged around the first part, the second guide units guiding the table so that the table moves in the direction parallel to the first axis. Table device according to claim 1, wherein the first part comprises a central part of the table within the specified plane and the second parts are arranged circumferentially of the table within the predetermined plane. A table device according to claim 1 or claim 2, wherein the table has a quadrangular shape within the predetermined plane and the second guide units each have four corners (Fig. 10R ) of the table are connected. Table device according to claim 3, wherein the first part includes a center of gravity of the table and Distances (Ha, Hb, Hc, and Hd) between the first part and the respective second parts defined at the corners are the same. Table device according to one of claims 1 to 4, wherein the first guide unit comprises a linear rolling bearing, which is a first rail ( 41 ) and a first slider ( 42 ), which can be moved relative to the first rail, and the second guide units each comprise a linear roller bearing, which has a second rail ( 51 ) and a second slider ( 52 ) which can be moved relative to the second rail. A table device according to claim 5, wherein the second slides are arranged in the direction parallel to the first axis. A table device according to claim 5 or claim 6, further comprising: a triggering device ( 7 ) generating power for moving the first element in a direction parallel to a second axis within the specified plane; and a third guide unit that moves the first element in the direction parallel to the second axis, wherein the third guide unit ( 9 ) comprises a linear roller bearing having a third rail ( 91 ) and a third slider ( 92 ) which can be moved relative to the third rail. A table apparatus according to claim 7, wherein the third rail is disposed on the first member and the third slider is fixed. Transport device ( 300 ), comprising the table device according to one of claims 1 to 8. Semiconductor manufacturing device comprising the table device ( 200 ) according to one of claims 1 to 8.

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