DE2062664B2 - Verfahren zum Anbringen dünner Schichten durch Kathodenzerstäubung - Google Patents
Verfahren zum Anbringen dünner Schichten durch KathodenzerstäubungInfo
- Publication number
- DE2062664B2 DE2062664B2 DE2062664A DE2062664A DE2062664B2 DE 2062664 B2 DE2062664 B2 DE 2062664B2 DE 2062664 A DE2062664 A DE 2062664A DE 2062664 A DE2062664 A DE 2062664A DE 2062664 B2 DE2062664 B2 DE 2062664B2
- Authority
- DE
- Germany
- Prior art keywords
- titanium
- oxygen
- electrode
- layer
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 27
- 230000008569 process Effects 0.000 title claims description 12
- 238000004544 sputter deposition Methods 0.000 title claims description 7
- 239000001301 oxygen Substances 0.000 claims description 33
- 229910052760 oxygen Inorganic materials 0.000 claims description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 31
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 17
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- 239000010936 titanium Substances 0.000 claims description 17
- 150000001875 compounds Chemical class 0.000 claims description 15
- KELHQGOVULCJSG-UHFFFAOYSA-N n,n-dimethyl-1-(5-methylfuran-2-yl)ethane-1,2-diamine Chemical compound CN(C)C(CN)C1=CC=C(C)O1 KELHQGOVULCJSG-UHFFFAOYSA-N 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 description 11
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 230000003667 anti-reflective effect Effects 0.000 description 4
- 238000000889 atomisation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000001429 visible spectrum Methods 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 210000002457 barrier cell Anatomy 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000002663 nebulization Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/30—Coatings
- H10F77/306—Coatings for devices having potential barriers
- H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
- H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR6945676A FR2071512A5 (OSRAM) | 1969-12-31 | 1969-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2062664A1 DE2062664A1 (de) | 1971-07-08 |
| DE2062664B2 true DE2062664B2 (de) | 1980-10-02 |
Family
ID=9045482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2062664A Withdrawn DE2062664B2 (de) | 1969-12-31 | 1970-12-19 | Verfahren zum Anbringen dünner Schichten durch Kathodenzerstäubung |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5039075B1 (OSRAM) |
| DE (1) | DE2062664B2 (OSRAM) |
| FR (1) | FR2071512A5 (OSRAM) |
| GB (1) | GB1330013A (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2527184C3 (de) * | 1975-06-18 | 1981-07-02 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Vorrichtung zur Herstellung von Targets für Kathodenzerstäubung |
| US4142958A (en) * | 1978-04-13 | 1979-03-06 | Litton Systems, Inc. | Method for fabricating multi-layer optical films |
| JPS5654791A (en) * | 1979-10-09 | 1981-05-14 | Fuji Photo Optical Co Ltd | Light source driving circuit |
| JPS5793416A (en) * | 1980-11-28 | 1982-06-10 | Shimadzu Corp | Regulated power supply circuit for light source |
| JPS5850312B2 (ja) * | 1981-02-18 | 1983-11-09 | 株式会社日立製作所 | スパツタリング装置 |
-
1969
- 1969-12-31 FR FR6945676A patent/FR2071512A5/fr not_active Expired
-
1970
- 1970-12-19 DE DE2062664A patent/DE2062664B2/de not_active Withdrawn
- 1970-12-28 JP JP45119537A patent/JPS5039075B1/ja active Pending
- 1970-12-29 GB GB6154270A patent/GB1330013A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1330013A (en) | 1973-09-12 |
| DE2062664A1 (de) | 1971-07-08 |
| JPS5039075B1 (OSRAM) | 1975-12-13 |
| FR2071512A5 (OSRAM) | 1971-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8263 | Opposition against grant of a patent | ||
| 8228 | New agent |
Free format text: NEHMZOW-DAVID, F., PAT.-ASS., 2000 HAMBURG |
|
| 8239 | Disposal/non-payment of the annual fee |