DE2039414A1 - Electrode arrangement for electron beam scanning devices - Google Patents

Description

PATENT ADVOCATE E Dipl.-Ing. M ARTI N LIGHT

PATENTANWÄLTE LICHT, HANSMANN, HERRMANN Dr, R E I N H O L D S C H M I DT

8MONCHENJ-THfRESIENSTRASSESa. . ...,. , ".." .., .. ,, ....

Dipl.-Wirtsch.-Ing. AXEL HANSMANN Dipl.-Phys. SEBASTIAN HERRMANN

Munich, the

Your sign Unier sign

10M) HHOP OOEIOEATIOw
everlv liills, California '/ Ilshire Boulevard 9744 V. öt. A.

Electrode assembly for electron beam scanning devices

The present invention relates to an electron gun and in particular a device in which flat dynode elements are used on which a grid pattern is formed arranged electrodes are provided, which are used to control the «electron beam.

In the ii. S. Patent Ho. 3,408,532 of the present Applicant (Jyorthrop Corporation) entitled "Electron Beam Scanner" (Electron Beam Scanning Device) a scanning device is described, which a number of flat dynodes used, on the two opposite sides of which are arranged to form an interlaced grid pattern., electrodes are applied, which are provided according to a control signal

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Patent attorney «Dipl.-Ing. Mariin Ucfit, Dipl.-Wirtich.-Ing. Axel Hantmann, Dipl .- ^ hyt. Sebastian Herrmann

I MONCHIN 3, THgRfSItNSTRASSE 33 ■ Ttltfom2S1202 · TeleeranvwAdre »» ·. Llpotli / Munich Um- Varafmfcaflk tMndm, Zw «le * t. Oikar-von-Mlllcr-Rtna, Kfo.-Nr. M2 4f5 · PoitMhcck-Konte ι Munich No. 1 * 33 97

IMrei FATINTANWALT DR. RIINHOtO SCHMIDT

are excited, uu. einij -ble ^ trcnenstr-tl-l zv / iscucn Xfcthoäe and counter electrode to be able to control, "ie in de" -. or, .r-hnte: r. i-etont is set out are on the two; _: Egenüberlie _c ünaen sides astir.i, ufter at each dynode similar £; selectively zv or reverse / ischei'j äez: coronet each other oils Uberla _c ~ -rn, wherein Vorspannungsi.otentiale in jjurchl & .u, ric.i.itun_.. -: ^ rjüb ^ rli ^ unuen Eleictroden-iJustern can be applied.

Dier-e so far. \ ended Ele / ztroaen & nordnun ^; allowed we; ci. c-es abv / ecnselenden ü & sci.altens zv / isichen the two EaBteriuUster-Häifter. each dynode '.eine:' leic \ zeiti ':; e full "Auallichtunr" or activation of the £ et; ε ^ t he. surface of the counter electrode. Such full Ausleuchtung- is zweckmäßi "since it facilitates the degassing by ruit all Linzelkenäle before the start of the switching operation of a DC voltage can be operated so that the susceptibility e ^e i ^fcn 3p nnungsdurchschlä-ve is reduced. Auäerdea can ierät hereby as Speichereleraent used inäea this full illumination serves as a "delete read signal".

The present invention offers over the electrode arrangement as shown in FIGS. mentioned patent is an improvement by enabling full illumination of the screen in addition to normal scanning will; the present invention also includes other advantages. First, the apparatus of the present invention uses.! .Invention a grid pattern only on one surface of the dynode, which simplifies production. Second, they lie

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About a! .. ittlüi-t.- operation so i: uer used- switching sr-annunren er-.ieblic -:.: Io '.. ri. he, ..eil. on one side of the dynode a fea'te Bcu, r; ü amiur ^ verv.eüdet v; irdj thereby increases oie .Lebi5: .. ijd {? v-.ei 'oes G-υ advises s, unü ieistui. "svorluste und Anfülii: - .eit cte .1: 3vciU: UV ;; aurc'asc lüre Lon ^ e;.: ii ^ drir ._ ~ helten were. en.

AuJtrde .. Vvird die -.erinjere ... e-xi ^ is tn εΐΰτύΐν z '.. isc: -c.: ·. ion steps to one .: teliebi, he. dots within the dvnodenata _; ^v els the amount of Verstr.rkun, sbe ^ renziin ^ "increased considerably,

AviScrde-i. know the present invention beque ;;; a Luiwar.dlung from the single to., lehrfachstrahlansteuerune take place, with one. Selector switch alternately 1, 2, 4, 6 or 16 chasers, 8v.si "possibly selected v / can be grounded.

The invention is therefore based on the ^{approach to rf an improved I3j r} iiod3n-Elel: troaenanoränuns for ain electrons Bti ·: -hlabte c t device.

The invention can be built for those cusejuen-

summarize: Ein Elehtronenstrenlt 2tsc-t ^ cri; t fer.t ^ .iU't exr.e number f |

D ^ noäeu-Ele ..ente between a cathode and a counter electrode, cie the electron fl 11? steer. On one side of each dynode there are two electrodes, which are arranged in an interlaced E.as "fceruiuster. The ever which is held on a; fixed. preload only.; s otentisle. The eight,

BADOBKiINAt 10981 0/1 518

20394U

are graded between the cathode and the electrode. Au-vsrdeu are preparing ; .eu plan to re-establish the iiaBter electrode pattern with reference to the on the ge ^; errüberlie ^ enaer: Dvnode side on; ebraci ^ te and aui a solid: "ν3 :: ν ρ voltage lying electrode either in lure lassriaLtun: -; or in S ^ erection, whereby the electron currents passing through each dynode are controlled ..cenn.

A description of the eriir.f'un ^;; is attached the drawings.

31 ur 1 is a schematic diagram: c? .I Pc rot-llung to explain the operation of an Auafl. hrun; jyf ori.,. of a device according to the present invention.

Pi: ur 2 iat an index table Dl r η te llung to explain the V, 'irLu.: JSV.eise der Vo reps η now; - otcu ^ r :: i nale, the ε π of a t- ^; \: ic ..: dynode of the device: ¹ from fi ^r ur 1 lie.

Firur 3 is a schematic representation of the Dy η or. en de ° & erj.ts from Figure 1.

At the beginning should be mentioned here ;, oa of the invention G-only except for the one more solid. Bias electrodes and up to the manner in which control voltages are applied to the Ea'jterelectrodenumster, in all other points deu in de. · B. S. Patent ho. 3,408,532 set out device '' easily, which is why sicu the present description refers to the mentioned patent.

The device according to the invention contains a cathode for Emission of electrons, a counter electrode to receive

BATH ORIGINAL

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Electrons and a number of dynode plates between these two elements are arranged as a pile of battens .-. • and control the .Durchhang of the electrons. Every dynode is provided with two electrodes, - the alf.'verted Itastermu pst he are provided on one surface while the other surface of the dynode practically completely through a general electrode is covered. On the individual electrodes the dynodes have fixed bias potentials. These VorspannuniiiTJOOtenti'ale are graduated and take from the cathode in the direction of the counter electrode. For controlling of the electron flow devices are provided, dia between the grid electrode patterns and their associated Reference electrodes selectively forward or energy saving voltages turn on. In this way, any specific sections of the counterelectrode p'.rfcivieren. ■ An exemplary embodiment of the invention is shown in FIGS. 1 and 2. Those emitted by a cathode 16 Electrons are modulated by a control grid 19. The " Control or deflection of these electrons on the counter electrode 11 is controlled by the dynodes 20-25, by which the electrons pass through on their way to the counter electrode have to. The dynodes 20-25 and the control grid 19 contain openings 41 which are aligned with the individual plate elements so that electron beam channels are formed will. On one surface of each of these dynode plates there are two electrodes 20a, 20b - 25a, 25b, which are in a ι '

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certain, interrelated h.ajteruiuster ciu ' are. The gerenüberlie-jenöe side of the D ^ nodenrilatte ;: is ■ Or & ktisch completely through a coherent single electrode 20c-25c covered. The electrodes 20c-25c form a layer covering the same area as that corresponding grid pattern on the opposite side of the plate.

The control knight 1S can be modulated by means of an image signal source 45. Kaster to the pattern of each dynode is a opannun _d sschsltungs-3teuereinheit 51a, 51b 56a, 56b angelert a control voltage. A voltage for accelerating the electron flow between the cathode 16 and the counterelectrode 11 supplies a voltage potential 33 to which a voltage divider 35 is connected in parallel. Each electrode 20c-25c is supplied with a fixed voltage from the voltage divider 35, which voltage is gradually graduated from dynode to dynode between cathode and counter-electrode.

Each of the voltage control switches 51a-56a is on the same terminal of the voltage divider 35 to which the associated electrode 20c-25c is also applied. These connection points are not drawn directly in Figure 1, but only by the corresponding letters a-h on the voltage divider and on indicated by the voltage control switches.

FIG. 2 shows a typical embodiment of a voltage control switch, specifically the one with the dynode 20 connected switch. As can be seen from the drawing I: ^ \

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BATH

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the control switch 51b contains a switch element 50 which alternately connects the positive or negative terminal of the voltage source 62 with the grid electrode 20a. Correspondingly, the control switch 51a contains a switch element 63 which alternately connects the positive or negative terminal of the voltage source 65 to the grid electrode 20b. The Lie .J; ro de 2Cc is connected to the common bran of both tension sources. The switch elements 60 and 63 "burden" beispiclovveioe lislbleiterscLBltkreis that would be controlled by a digital operator logic, ie in your mentioned ei: / is latent. ^:

In -öeu in Pi _u -; ur 1 and 2 illustrated example, lie £ t each dynode at the electrodes to a particular bias voltage. Eic with this :: Example ent;. ^ Calculating outputs of the Stouereci.elt.reiKe 51a, 51b - 5-6e, 56ö are bycii associated plus and ... inus signs geiver: n ^ elcl: i: et. In this particular example, only one single line 60 gets from the line 16 to the counter electrode 11, while other elements are blocked by appropriate dynodes. Eryic By means of suitable actuation of the voltage control switch, it is usually possible to activate any section or sections as well as the entire surface of the counter electrode 11. For example, all dynodes can be biased in the forward direction in order to fully illuminate the counter electrode ", or you can only activate the upper half of the counter electrode.

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by placing electrode 21a in direction, electrode 21b iu locking device and all other dynode lines in Durclile. Direction prestressed weroen.

Dt: -: erfindun7sjG: .iäß device thus offers versatile possibilities. to control a.-: Elektronytr & hli ^ usters. Av. £ .T '. Cu., As already mentioned ν, -urde, offers. ^ The present ._ 'enc; e Erfii'iou.n _: cie · Advantages of an economic position, lower performance: -. Losses, low; er Ani t.llipkeit ^ e. en Sp & nnnunr bdurctschlä ^ e and an erijöüten lifetime of the device.

BATH ORIGINAL

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Claims (1)

20394U P A TE NTA N WÄ LT E Dipl.-lng. M ARTIN LI CHT PATENTANWÄLTE LICHT, HANSMANN, HERRMANN ■ '* "'""Dr. REINHOLDSCHMI DT 8 MDNCHEN 2 ■ THERESI ENSTRASSE 33 Dipl.-Wirtsch.-Ing. A X E L H A N S M A N N Dipl.-Phys. SEBASTIAN HERRMANN Munich, the - _Λ _ V. Aug 1970 Yours, Umar Zaidwn ; ! »ORTHfiOP COitiOHATIOlSr
Beverly Hills, California
Wilshire Boulevard 9744
V. St. A. Patent application: electrode arrangement for Electron beam scanners. " PAIElTTAä PROBLEMS 1.) Electron beam scanning device with an electron source (16), one placed opposite this QuelJ Counter electrode (11), a voltage source (33) between the ■■ -. ■ ■ - '- ■■' / ' Gerenelectrode and the electron source, which is an accelerator M potential for electrons' creates a number Dynode elements (20-25), which as a stack of plates between the The electron source and the counter electrode are attached to control the electron flow between them, wherein the electron source, the counter electrode and the dynode elements located therebetween are aligned and wherein the dynode elements contain openings (41) which act as channels for the electrons between the electron source and the 109810/1611 Mwttonwelt Dlpl.-Ing. Martin Lieht, Dfpl.-Wlrtidi.-Infl.Axil Hontmann, Dipl.-Phyi. 8tbaitian Herrmann I MDNCHIN 3, THlIIIIINfTRAf IiW · Wtfoni311302 · tah $ nmm-Mntm [ $ p , Twelve *. ΟΛβτ ^ βη ^ ΑΜνΊΟηβ, Klv.-Nr. M34M · Po * tMh «<) (- KonloiM0MiwnNr.1ASt7 MTINTANWALT 0 «. REINHOLD fCHMIDT Counter electrode are used, characterized ^ e .- ennzeicLntt that each .: _Dynodenele. ent. "contains several conductive electrodes, ο ie arranged on one plate surface to form a verscj.:ri-i.i.iiter, ra: tercuster and isolated from one another, the opposite plate surface - ie each dynode practically completely o.urcj a single conductor "Electrode is covered, with devices (35) which apply a fixed bias voltage to each of these individual elements, and with devices (35; 51-56) to selectively and alternately apply a first or second potential to each of the catheters ^ electrodes to be applied, whereby only one of these potentials represents a bias voltage in the forward direction with respect to the individual electrode to be positioned on the opposite surface. 2. Apparatus according to claim 1, characterized in that the device for the selective application of a first or second voltage contains devices to all grid electrodes simultaneously one with respect to the associated Apply bias voltage acting on individual electrodes in the forward direction. 3. Apparatus according to claim 1, characterized in that the device for selectively applying a first or second voltage to each of the ßaster'electrodes an er ^ te and second voltage source (62, 65), the positive terminal of the first voltage source and the negative Clamp the second 109810/1516 BAO V ΛΑ Sparuiuii. ^ .j ./, rush ait the device, for / fixed-. Pre-payment potential is connected to _f and switch precautions / .er. contains, Uh. al: alternating the neft-tivt · KleiUu; e of the first source and the positive level of the second; Source:.: It der zu.rehörigen Raster-eleLtro ... ü: .t; associate. ή. G-sryt nsch claim 1,, dsdvrcl ,; "eAeni ^ eiciinet, de £ .. the VorricV.tung that a fixed Vorsp & i-Nur provides electrode for each individual ', a Spar.run;." steeper (35) whose taps (a-ia) parallel to the Sp8mran £ '& source prefer, whereby each tap of the voltage divider ii.it jev: eils is connected to one of the Einxelel 2-: trodes, so d8> gradually from dynode to dynode a graduated voltage is created between the electron source and the glass electrode. 5. 3-erät na el: Claim 4, whereby £ .ek = i: ii. -draws that the device suai selective anIe (part of a first or second voltage to each of the Easter electrodes a voltage ' Supply u: with first and second voltage cells discharged, where the popular element is the first source and the negative Terminal of the second source uit an associated tap (a-h) and wherein further circuit devices are provided to alternate the negative illegality of the first Source or the positive terminal of the second source with the to connect associated vice electrode. ^ ö \ ^ 109810/1516 Blank page