DE20217404U1 - Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship - Google Patents

Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship

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Publication number
DE20217404U1
DE20217404U1 DE20217404U DE20217404U DE20217404U1 DE 20217404 U1 DE20217404 U1 DE 20217404U1 DE 20217404 U DE20217404 U DE 20217404U DE 20217404 U DE20217404 U DE 20217404U DE 20217404 U1 DE20217404 U1 DE 20217404U1
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DE
Germany
Prior art keywords
coating
layer
thickness
coating according
aluminum
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20217404U
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German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials GmbH and Co KG
Original Assignee
Applied Films GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Films GmbH and Co KG filed Critical Applied Films GmbH and Co KG
Priority to DE20217404U priority Critical patent/DE20217404U1/en
Publication of DE20217404U1 publication Critical patent/DE20217404U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The coating contains at least one layer (5) of a material which has negligible absorption of light in the visible region. Coating thickness (a) follows the relationship 0.5 b = a = b where b is the thickness of a layer of the same material in which the transmission of white light is 0.1-0.2 %. An independent claim is made for equipment for producing a coating on a plastic substrate which comprises: (1) first and second magnetron cathode units parallel to each other in a coating chamber; (2) a first transporting line for the plastic substrate which passes the first unit and a second transporting line for a substrate passing the second unit; and (3) a connection between both transporting lines.

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (28)

1. Beschichtung für ein Kunststoffsubstrat, wobei diese Beschichtung eine Sperrung gegenüber Gasen und/oder Dämpfen besitzt und wenigstens eine Schicht eines Mate­ rials enthält, bei dem die Absorption von Licht im sichtbaren Bereich vernachlässig­ bar ist, dadurch gekennzeichnet, dass das Kunststoffsubstrat ein räumlicher Hohl­ körper ist und die Schicht des Materials eine Dicke a aufweist, wobei 0,5b < a < b gilt und b diejenige Dicke einer Schicht des gleichen Materials ist, bei welcher die Transmission von Weißlicht 0,1% bis 0,2% beträgt.1. Coating for a plastic substrate, this coating has a barrier to gases and / or vapors and contains at least one layer of a material in which the absorption of light in the visible range is negligible, characterized in that the plastic substrate is a spatial hollow body and the layer of material has a thickness a, where 0.5b <a <b and b is the thickness of a layer of the same material in which the transmission of white light is 0.1% to 0.2%. 2. Beschichtung nach Anspruch 1, dadurch gekennzeichnet, dass die wenigstens eine Schicht aus Metall besteht.2. Coating according to claim 1, characterized in that the at least a layer of metal. 3. Beschichtung nach Anspruch 1, dadurch gekennzeichnet, dass die wenigstens eine Schicht aus einem Nitrid der Übergangsmetalle wie Ti, Zr, Nb und Ta besteht.3. Coating according to claim 1, characterized in that the at least a layer consists of a nitride of transition metals such as Ti, Zr, Nb and Ta. 4. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass das Metall zur Gruppe Molybdän, Niob, Palladium, Aluminium, Tantal, Rhodium, Platin, Titan, Chrom, Zinn, Kupfer, Gold, Neodym, Wolfram, Zirkonium gehört.4. Coating according to claim 2, characterized in that the metal for Group molybdenum, niobium, palladium, aluminum, tantalum, rhodium, platinum, titanium, Chromium, tin, copper, gold, neodymium, tungsten, zirconium belong. 5. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass auf der Metall­ schicht eine durchsichtige Oxidschicht aufgebracht ist.5. Coating according to claim 2, characterized in that on the metal a transparent oxide layer is applied. 6. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass auf der Metall­ schicht eine durchsichtige Nitridschicht aufgebracht ist.6. Coating according to claim 2, characterized in that on the metal a transparent nitride layer is applied. 7. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Beschichtung aus Molybdän, Aluminium oder Niob eine Stärke von 20 nm bis 40 nm hat.7. Coating according to claim 2, characterized in that the coating made of molybdenum, aluminum or niobium has a thickness of 20 nm to 40 nm. 8. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Beschichtung aus Tantal, Chrom, Zinn oder Platin eine Stärke von 40 nm bis 60 nm hat.8. Coating according to claim 2, characterized in that the coating made of tantalum, chrome, tin or platinum has a thickness of 40 nm to 60 nm. 9. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Beschichtung aus Palladium, Kupfer, Wolfram oder Rhodium eine Stärke von 30 nm bis 50 nm hat. 9. Coating according to claim 2, characterized in that the coating made of palladium, copper, tungsten or rhodium has a thickness of 30 nm to 50 nm.   10. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Beschichtung aus Titan eine Stärke von 30 nm bis 40 nm hat.10. Coating according to claim 2, characterized in that the coating made of titanium has a thickness of 30 nm to 40 nm. 11. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Beschichtung aus Gold eine Stärke von 50 bis 70 nm hat.11. Coating according to claim 2, characterized in that the coating made of gold has a thickness of 50 to 70 nm. 12. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass das Metall eine Metalllegierung ist.12. Coating according to claim 2, characterized in that the metal is a Is metal alloy. 13. Beschichtung nach Anspruch 12, dadurch gekennzeichnet, dass die Metalllegie­ rung aus Kupfer und Aluminium besteht und eine Stärke von 60 nm bis 80 nm hat.13. Coating according to claim 12, characterized in that the metal alloy tion consists of copper and aluminum and has a thickness of 60 nm to 80 nm. 14. Beschichtung nach Anspruch 12, dadurch gekennzeichnet, dass die Metalllegie­ rung aus Edelstahl besteht und eine Stärke von 40 nm bis 60 nm hat.14. Coating according to claim 12, characterized in that the metal alloy stainless steel and has a thickness of 40 nm to 60 nm. 15. Beschichtung nach Anspruch 5, dadurch gekennzeichnet, dass die Oxidschicht aus SiO2 besteht.15. Coating according to claim 5, characterized in that the oxide layer consists of SiO 2 . 16. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Metallschicht aus Aluminium besteht, auf der sich eine TiO2-Schicht befindet.16. Coating according to claim 2, characterized in that the metal layer consists of aluminum, on which there is a TiO 2 layer. 17. Beschichtung nach Anspruch 16, dadurch gekennzeichnet, dass sich auf der TiO2-Schicht eine weitere Aluminium-Schicht befindet.17. Coating according to claim 16, characterized in that there is a further aluminum layer on the TiO 2 layer. 18. Beschichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Metallschicht aus Aluminium besteht, auf der sich eine SiO2-Schicht befindet.18. Coating according to claim 2, characterized in that the metal layer consists of aluminum, on which there is an SiO 2 layer. 19. Beschichtung nach Anspruch 18, dadurch gekennzeichnet, dass sich auf der SiO2-Schicht eine weitere Aluminium-Schicht befindet.19. Coating according to claim 18, characterized in that there is a further aluminum layer on the SiO 2 layer. 20. Beschichtung nach Anspruch 16, dadurch gekennzeichnet, dass die TiO2- Schicht eine Stärke von 50 nm besitzt.20. Coating according to claim 16, characterized in that the TiO 2 layer has a thickness of 50 nm. 21. Beschichtung nach Anspruch 17, dadurch gekennzeichnet, dass die TiO2- Schicht eine Stärke von 70 nm hat und sich auf dieser TiO2-Schicht eine Aluminium- Schicht von 8 nm Stärke befindet.21. Coating according to claim 17, characterized in that the TiO 2 layer has a thickness of 70 nm and there is an aluminum layer of 8 nm thickness on this TiO 2 layer. 22. Beschichtung nach Anspruch 20, dadurch gekennzeichnet, dass sich auf der TiO2-Schicht eine Aluminium-Schicht von 8 nm Stärke befindet.22. Coating according to claim 20, characterized in that there is an aluminum layer of 8 nm thickness on the TiO 2 layer. 23. Beschichtung nach Anspruch 19, dadurch gekennzeichnet, dass sich auf der SiO2-Schicht eine Aluminium-Schicht von 5 nm Stärke befindet.23. Coating according to claim 19, characterized in that there is an aluminum layer of 5 nm thickness on the SiO 2 layer. 24. Beschichtung nach Anspruch 1, dadurch gekennzeichnet, dass die wenigstens eine Schicht aus einem Oxinitrid besteht.24. Coating according to claim 1, characterized in that the at least a layer consists of an oxynitride. 25. Vorrichtung für die Herstellung einer Beschichtung für ein Kunststoffsubstrat, gekennzeichnet durch
  • a) eine erste Magnetronkathodenanordnung (8) in einer Beschichtungskammer (6) und
  • b) eine zweite Magnetronkathodenanordnung (7) in der Beschichtungskammer (6), die parallel und in einem Abstand zur ersten Magnetronkathodenanordnung (8) ange­ ordnet ist,
  • c) einem ersten Transportweg für das Kunststoffsubstrat (21 bis 25), der an der ersten Magnetronkathodenanordnung (8) vorbeiführt,
  • d) einem zweiten Transportweg für das Kunststoffsubstrat (21 bis 25), der an der zweiten Magnetronkathodenanordnung (7) vorbeiführt,
  • e) eine Verbindung (26) zwischen der ersten und der zweiten Transportvorrichtung.
25. Device for the production of a coating for a plastic substrate, characterized by
  • a) a first magnetron cathode arrangement ( 8 ) in a coating chamber ( 6 ) and
  • b) a second magnetron cathode arrangement ( 7 ) in the coating chamber ( 6 ), which is arranged parallel and at a distance from the first magnetron cathode arrangement ( 8 ),
  • c) a first transport path for the plastic substrate ( 21 to 25 ), which leads past the first magnetron cathode arrangement ( 8 ),
  • d) a second transport path for the plastic substrate ( 21 to 25 ), which leads past the second magnetron cathode arrangement ( 7 ),
  • e) a connection ( 26 ) between the first and the second transport device.
26. Vorrichtung nach Anspruch 25, dadurch gekennzeichnet, dass der erste und der zweite Transportweg in eine Schleusenkammer (9) münden, deren eine Seite der At­ mosphäre und deren andere Seite dem Hochvakuum einer Beschichtungskammer (6) ausgesetzt ist.26. The apparatus according to claim 25, characterized in that the first and the second transport path open into a lock chamber ( 9 ), one side of the atmosphere and the other side of which is exposed to the high vacuum of a coating chamber ( 6 ). 27. Vorrichtung nach Anspruch 25, dadurch gekennzeichnet, dass sich an die erste Beschichtungskammer (6) eine zweite Beschichtungskammer (30) anschließt, wobei die Beschichtungskammern (6, 30) mittels einer Gastrennwand (31) separiert sind.27. The device according to claim 25, characterized in that the first coating chamber ( 6 ) is followed by a second coating chamber ( 30 ), the coating chambers ( 6 , 30 ) being separated by means of a gas partition ( 31 ). 28. Vorrichtung nach Anspruch 27, dadurch gekennzeichnet, dass die zweite Be­ schichtungskammer (30) zwei einander gegenüberliegende Magnetronkathodenan­ ordnungen (32, 33) aufweist.28. The device according to claim 27, characterized in that the second coating chamber ( 30 ) has two opposing magnetron cathode arrangements ( 32 , 33 ).
DE20217404U 2002-11-08 2002-11-08 Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship Expired - Lifetime DE20217404U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20217404U DE20217404U1 (en) 2002-11-08 2002-11-08 Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20217404U DE20217404U1 (en) 2002-11-08 2002-11-08 Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship

Publications (1)

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DE20217404U1 true DE20217404U1 (en) 2003-01-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10314067A1 (en) * 2003-03-28 2004-10-14 Schott Glas Device for vacuum coating substrates, e.g. plastic bottles, comprises a transport unit, coating stations having coating sites, an evacuating unit, and a unit for rotating the coating sites

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10314067A1 (en) * 2003-03-28 2004-10-14 Schott Glas Device for vacuum coating substrates, e.g. plastic bottles, comprises a transport unit, coating stations having coating sites, an evacuating unit, and a unit for rotating the coating sites

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20030220

R150 Term of protection extended to 6 years

Effective date: 20051121

R081 Change of applicant/patentee

Owner name: APPLIED MATERIALS GMBH & CO. KG, DE

Free format text: FORMER OWNER: APPLIED FILMS GMBH & CO. KG, 63755 ALZENAU, DE

Effective date: 20061213

R157 Lapse of ip right after 6 years

Effective date: 20090603