DE2021479A1 - Pressure gauge with double quartz glass diaphragm - Google Patents
Pressure gauge with double quartz glass diaphragmInfo
- Publication number
- DE2021479A1 DE2021479A1 DE19702021479 DE2021479A DE2021479A1 DE 2021479 A1 DE2021479 A1 DE 2021479A1 DE 19702021479 DE19702021479 DE 19702021479 DE 2021479 A DE2021479 A DE 2021479A DE 2021479 A1 DE2021479 A1 DE 2021479A1
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- measuring device
- membranes
- measure
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
- G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Druckmessgerät zur Messung von Drucken in Gasen und Flüssigkeiten.Pressure gauge for measuring pressures in gases and liquids.
Die vorliegende Erfindung bezieht sich auf ein Druckmessgerät, mit dem Drucke in Gasen und Flüssigkeiten gemessen werden. Die Begriffe Gase und Flüssigkeiten werden im folgenden durch den Oberbegriff "Fluid" zusammengefasst. Die Mess-Sonde eines solchen Gerätes besteht aus einer oder mehreren elastischen Membranen, die sich infolge der Differenz der Drucke, die auf beiden Seiten der Membran herrschen, durchbiegt.The present invention relates to a pressure measuring device with measuring pressures in gases and liquids. The terms gases and liquids are summarized in the following by the generic term "fluid". The measuring probe Such a device consists of one or more elastic membranes, which due to the difference in the pressures that prevail on both sides of the membrane, sags.
Die Durchbiegung ist ein Mass für die Differenz der Drucke und wird durch mechanische oder elektrische Mittel auf ein Anzeigegerät übertragen. Elektrische Übertragungsmittel mit digitaler Anzeige, wie sie bei der vorliegenden Erfindung verwendet werden, haben den Vorteil, dass sie reibungs- und spielfrei arbeiten.The deflection is a measure of the difference between the pressures and is transmitted to a display device by mechanical or electrical means. Electric Digital display transmission means as used in the present invention used have the advantage that they work without friction or play.
In Fig. 1 ist das Messprinzip eines herkömmlichen Druckmessgerätes dargestellt. Eine Kammer (3) ist durch eine metallische Membran (4) in zwei Räume (1) und (2), in denen die Fluiddrucke p (1) und p (2) herrschen, geteilt. Die strichierte gerade Linie zeigt die Membran im nicht belasteten Zustand: p (1) I p (2), die durchgezogene Linie zeigt die Membran im belasteten Zustand: p (1)>p (2). Parallel zu der nicht belasteten, ebenen Membran ist eine mittels der Isolatoren (6) gegen die Kammer (3) isolierte Metallplatte angebracht, die mittels der gasdichten Durchführung (7) elektrisch nach außen gefuhrt' wird und mit der Membran einen elektrischen Kondensator bildet. Die infolge der Durchbiegung der Membran sich ändernde Kapazität des Kondensators ist ein Mass für die Druckdifferenz p (1) - p (2).In Fig. 1 is the measuring principle of a conventional pressure measuring device shown. A chamber (3) is divided into two spaces by a metallic membrane (4) (1) and (2), in which the fluid pressures p (1) and p (2) prevail, divided. The dashed The straight line shows the membrane in the unloaded state: p (1) I p (2), the solid line Line shows the membrane in the loaded state: p (1)> p (2). Parallel to that not loaded, flat membrane is one by means of the isolators (6) against the chamber (3) insulated metal plate attached, which by means of the gas-tight bushing (7) electrically to the outside 'and with the membrane an electrical capacitor forms. The capacitance of the capacitor, which changes as a result of the deflection of the membrane is a measure of the pressure difference p (1) - p (2).
Die herkömmlichen Druckmessgeräte besitzen meistens eine etallmembrane.The conventional pressure gauges usually have a metal membrane.
Diese haben jedoch den Nachteil, dass sie eine elastische Nachwirkung haben, wodurch solche Geräte für Präzisionsmessungen ungeeignet sind.However, these have the disadvantage that they have an elastic after-effect which makes such devices unsuitable for precision measurements.
Diesen Nachteil haben Druckmessgeräte mit einer erfindungsgemänaus Quarzglas oder quarzähnlichem Glas gefertigten Membran nicht, da diese Art Gläser keine oder nur eine sehr geringe elastische Nachwirkung haben. Ferner hat Quarzglas einen sehr kleinen Temperaturausdehnungskoeffizienten, was einen weiteren Vorteil bedeutet. Die Verwendung von Quarzglas oder quarzähnlichem Glas als Membranmaterial in Druckmessgeräten bedeutet einen wesentlichen technischen Fortschritt.Pressure gauges with a device according to the invention have this disadvantage Quartz glass or quartz-like glass does not make membranes, as these types of glasses have little or no elastic aftereffect. Furthermore has quartz glass a very small coefficient of thermal expansion, which is another advantage means. The use of quartz glass or quartz-like glass as the membrane material in pressure gauges represents a significant technical advance.
Gegenstand der Erfindung ist ein Druskmessgerät zur Messung von Drucken in Fluids, dessen aus Quarzglas oder quarzähnlichem Glas gefertigte Membranen wegen Ihrer Nichtplastizität bei Druckeinwirkung des Fluids keine oder extrem geringe elastische Nachwirkungen haben.The subject of the invention is a drusk measuring device for measuring pressure in fluids, their membranes made of quartz glass or quartz-like glass because of Their non-plasticity when the fluid acts under pressure is none or extremely low have elastic after-effects.
Ein weiterer GEgenstand der Erfindung (Fig. 2) ist eine Anordnung von zwei Membranen (8), die an ihren Rändern zu einer Doppelmembran miteinander verbunden sind. Die Verbindung (9) kann durch ein Klebemittel, durch Verlötung oder durch Verschmelzung hergestellt werden. Die Doppelmembran kann auch aus einem Stück hergestellt sein (Fig. 3). Mittels des erfindungsgemässen Druckmessgerätes, das eine Doppelmembran enthält (siehe Fig. 4), ist die Differenz der Drucke p (1) und p (2), die im Aussenraum (10) bzw. im Innenraum (11) herrschen, messbar. Mittels der Rohrleitungen (12) und (13) können die Drucke p (1) und p (2) an den interessierenden Stellen abgenommen werden. Es ist auch möglich, einen der Räume (10) oder (11) zu evakuieren und abzuschliessen, während in dem jeweils anderen Raum der Druck des Fluids wirksam ist; in diesem Fall wird der absolute Druck gemessen. Die Doppelmembran erhöht die Messempfindlichkeit und bedeutet darum einen technischen Fortschritt.Another object of the invention (Fig. 2) is an arrangement of two membranes (8) which at their edges form a double membrane with one another are connected. The connection (9) can by an adhesive, by soldering or be made by amalgamation. The double membrane can also be made from one piece be made (Fig. 3). By means of the pressure measuring device according to the invention that contains a double membrane (see Fig. 4), the difference between the pressures is p (1) and p (2), which prevail in the outer space (10) and in the inner space (11), can be measured. Means the pipes (12) and (13) can apply the pressures p (1) and p (2) to the interested Bodies are removed. It is also possible to use one of the rooms (10) or (11) evacuate and lock, while the pressure of the Fluids is effective; in this case the absolute pressure is measured. The double membrane increases the measurement sensitivity and therefore represents a technical advance.
Ein weiterer Erfindungsgegenstand ist ein Druckmessgerät mit einer Doppelmembran (siehe Fig. 5), die zwei an ihren Innenflächen angebrachte Metallschichten (14) besitzt, die elektrisch nach aussen geführt sind (15) und gemeinsam einen elektrischen Kondensator bilden. Bei Durchbiegungen der Membranen ändert sich die Kapazität des Kondensators, die, messbar gemacht, ein Mass für die Druckdifferenz des Fluids ist. Die Metallisierung der Quarzglasmembranen zum Zwecke der elektrischen Messung der Durchbiegungen ist eine neue Methode, die einen technischen Fortschritt darstellt. Ein weiterer technischer Fortschritt wird dadurch erzielt, dass infolge der Symmetrie der Doppelmembran Verspannungen durch Temperatureinflüsse kompensiert werden.Another subject of the invention is a pressure measuring device with a double membrane (see FIG. 5), which has two metal layers (14) attached to its inner surfaces, which are electrically led to the outside (15) and together form an electrical capacitor. When the diaphragms bend, the capacitance of the capacitor changes, which, when made measurable, is a measure of the pressure difference in the fluid. The metallization of the quartz glass membranes for the purpose of electrical measurement of the deflections is a new method that represents a technical advance. A further technical advance is achieved by the fact that, due to the symmetry of the double membrane, tension is caused by temperature influences be compensated.
Ein weiterer Gegenstand der Erfindung ist ein Druckmessgerät mit einer Doppelmembran aus Quarzglas (siehe Fig. 6), deren eine Aussenfläche metallisiert ist. Diese bildet zusammen mit einer metallisierten Quarzplatte (17) einen elektrischen Kondensator. Der Innenraum der Doppelmembran, der keinerlei gasende Metalle enthält, kann hoch evakuiert werden,crnrtleisnet sichbesonders zur Messung von Absolutdrucken. Another object of the invention is a pressure measuring device with a double membrane made of quartz glass (see FIG. 6), one outer surface of which is metallized. Together with a metallized quartz plate (17), this forms an electrical capacitor. The interior of the double membrane, which does not contain any gassing metals, can be highly evacuated and is particularly suitable for measuring absolute pressures.
Ferner ist Gegenstand der Erfindung ein Druckmessgerät mit einer Doppelmembran aus Quarzglas (siehe Fig. 7), deren beide Aussenflächen metallisiert sind (16). Diese bilden zusammen mit je einer metallisierten Quarzplatte (17) zwei Kondensatoren. Diese Messanordnung hat eine besonders hohe Empfindlichkeit. Der Innenraum der Doppelmembran, der keinerlei gasendeMetalle enthält, kann hoch evakuiert werden. Der Erfindungsgegenstand eignet sich somit besonders zur Messung von tisinenAbsolutdrucken und stellt einen technischen Fortschritt dar.The invention also relates to a pressure measuring device with a double membrane made of quartz glass (see Fig. 7), the two outer surfaces of which are metallized (16). Together with a metallized quartz plate (17) each, these form two capacitors. This measuring arrangement has a particularly high sensitivity. The interior of the double membrane, which does not contain any gassing metals, can be highly evacuated. The subject of the invention is therefore particularly suitable for measuring tisine absolute pressures and provides a technical progress.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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DE19702021479 DE2021479A1 (en) | 1970-05-02 | 1970-05-02 | Pressure gauge with double quartz glass diaphragm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19702021479 DE2021479A1 (en) | 1970-05-02 | 1970-05-02 | Pressure gauge with double quartz glass diaphragm |
Publications (1)
Publication Number | Publication Date |
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DE2021479A1 true DE2021479A1 (en) | 1971-11-11 |
Family
ID=5770017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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DE19702021479 Pending DE2021479A1 (en) | 1970-05-02 | 1970-05-02 | Pressure gauge with double quartz glass diaphragm |
Country Status (1)
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DE (1) | DE2021479A1 (en) |
Cited By (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
US3952234A (en) * | 1973-12-31 | 1976-04-20 | Donald Jack Birchall | Pressure transducers |
DE2709945A1 (en) * | 1976-03-12 | 1977-09-15 | Kavlico Corp | CAPACITIVE PRESSURE TRANSDUCER AND METHOD OF MANUFACTURING IT |
FR2346704A1 (en) * | 1976-03-29 | 1977-10-28 | Setra Systems Inc | CAPACITIVE PRESSURE DETECTOR |
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
US4176557A (en) * | 1976-06-07 | 1979-12-04 | Bunker Ramo Corporation | Pressure sensor |
US4177496A (en) * | 1976-03-12 | 1979-12-04 | Kavlico Corporation | Capacitive pressure transducer |
US4207604A (en) * | 1976-12-02 | 1980-06-10 | Kavlico Corporation | Capacitive pressure transducer with cut out conductive plate |
FR2442439A1 (en) * | 1978-11-24 | 1980-06-20 | Vaisala Oy | Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation |
EP0018284A1 (en) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Method of vacuum sealing a capacitive pressure capsule |
EP0018283A1 (en) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Pressure sensor |
FR2477709A1 (en) * | 1980-03-06 | 1981-09-11 | Bosch Gmbh Robert | MANOMETRIC CAPSULE |
WO1983000385A1 (en) * | 1981-07-27 | 1983-02-03 | Rosemount Inc | Improved capacitance pressure sensor |
US4388668A (en) * | 1976-03-12 | 1983-06-14 | Kaylico Corporation | Capacitive pressure transducer |
DE3505926A1 (en) * | 1984-02-21 | 1985-08-22 | Vaisala Oy, Helsinki | CAPACITIVE PRESSURE GAUGE FOR ABSOLUTE PRESSURE |
DE3523104A1 (en) * | 1985-06-28 | 1987-01-22 | Leybold Heraeus Gmbh & Co Kg | Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode |
DE3901492A1 (en) * | 1988-07-22 | 1990-01-25 | Endress Hauser Gmbh Co | PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF |
EP0373536A2 (en) * | 1988-12-12 | 1990-06-20 | Fibronix Sensoren GmbH | Overload-proof capacitive pressure sensor |
US4982351A (en) * | 1986-05-05 | 1991-01-01 | Texas Instruments Incorporated | Low cost high precision sensor |
US5001595A (en) * | 1989-04-01 | 1991-03-19 | Gerhard Dittrich | Capacitive pressure sensor and method of manufacturing same |
DE3943475C2 (en) * | 1988-07-22 | 1991-07-25 | Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De | Capacitive pressure transducer with thermal bonded flexible diaphragm |
US5050035A (en) * | 1989-03-21 | 1991-09-17 | Endress U. Hauser Gmbh U. Co. | Capacitive pressure sensor and method of manufacturing same |
US5051937A (en) * | 1986-05-05 | 1991-09-24 | Texas Instruments Incorporated | Low cost high precision sensor |
US5097712A (en) * | 1989-09-28 | 1992-03-24 | Endress U. Hauser Gmbh U. Co. | Differential pressure measuring apparatus |
US5111698A (en) * | 1989-10-06 | 1992-05-12 | Endress U. Hauser Gmbh U. Co. | Differential pressure measuring apparatus |
US6079276A (en) | 1995-02-28 | 2000-06-27 | Rosemount Inc. | Sintered pressure sensor for a pressure transmitter |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
DE102009051611A1 (en) * | 2009-11-02 | 2011-05-05 | Vega Grieshaber Kg | cell |
US8201456B2 (en) | 2009-11-02 | 2012-06-19 | Vega Grieshaber Kg | Measuring cell and a method of use therefor |
-
1970
- 1970-05-02 DE DE19702021479 patent/DE2021479A1/en active Pending
Cited By (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
US3952234A (en) * | 1973-12-31 | 1976-04-20 | Donald Jack Birchall | Pressure transducers |
US4177496A (en) * | 1976-03-12 | 1979-12-04 | Kavlico Corporation | Capacitive pressure transducer |
DE2709945A1 (en) * | 1976-03-12 | 1977-09-15 | Kavlico Corp | CAPACITIVE PRESSURE TRANSDUCER AND METHOD OF MANUFACTURING IT |
FR2344006A1 (en) * | 1976-03-12 | 1977-10-07 | Kavlico Corp | CAPACITIVE PRESSURE TRANSDUCER AND METHOD FOR MANUFACTURING SUCH A TRANSDUCER |
US4388668A (en) * | 1976-03-12 | 1983-06-14 | Kaylico Corporation | Capacitive pressure transducer |
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
FR2346704A1 (en) * | 1976-03-29 | 1977-10-28 | Setra Systems Inc | CAPACITIVE PRESSURE DETECTOR |
US4084438A (en) * | 1976-03-29 | 1978-04-18 | Setra Systems, Inc. | Capacitive pressure sensing device |
US4176557A (en) * | 1976-06-07 | 1979-12-04 | Bunker Ramo Corporation | Pressure sensor |
US4207604A (en) * | 1976-12-02 | 1980-06-10 | Kavlico Corporation | Capacitive pressure transducer with cut out conductive plate |
FR2442439A1 (en) * | 1978-11-24 | 1980-06-20 | Vaisala Oy | Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation |
EP0018284A1 (en) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Method of vacuum sealing a capacitive pressure capsule |
EP0018283A1 (en) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Pressure sensor |
FR2477709A1 (en) * | 1980-03-06 | 1981-09-11 | Bosch Gmbh Robert | MANOMETRIC CAPSULE |
WO1983000385A1 (en) * | 1981-07-27 | 1983-02-03 | Rosemount Inc | Improved capacitance pressure sensor |
DE3505926A1 (en) * | 1984-02-21 | 1985-08-22 | Vaisala Oy, Helsinki | CAPACITIVE PRESSURE GAUGE FOR ABSOLUTE PRESSURE |
DE3523104A1 (en) * | 1985-06-28 | 1987-01-22 | Leybold Heraeus Gmbh & Co Kg | Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode |
US4982351A (en) * | 1986-05-05 | 1991-01-01 | Texas Instruments Incorporated | Low cost high precision sensor |
US5051937A (en) * | 1986-05-05 | 1991-09-24 | Texas Instruments Incorporated | Low cost high precision sensor |
DE3901492A1 (en) * | 1988-07-22 | 1990-01-25 | Endress Hauser Gmbh Co | PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF |
US5005421A (en) * | 1988-07-22 | 1991-04-09 | Endress U. Hauser Gmbh U. Co. | Pressure sensor and method for the manufacture thereof |
DE3943475C2 (en) * | 1988-07-22 | 1991-07-25 | Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De | Capacitive pressure transducer with thermal bonded flexible diaphragm |
EP0373536A2 (en) * | 1988-12-12 | 1990-06-20 | Fibronix Sensoren GmbH | Overload-proof capacitive pressure sensor |
EP0373536A3 (en) * | 1988-12-12 | 1991-03-06 | Fibronix Sensoren GmbH | Overload-proof capacitive pressure sensor |
US5050035A (en) * | 1989-03-21 | 1991-09-17 | Endress U. Hauser Gmbh U. Co. | Capacitive pressure sensor and method of manufacturing same |
US5001595A (en) * | 1989-04-01 | 1991-03-19 | Gerhard Dittrich | Capacitive pressure sensor and method of manufacturing same |
US5097712A (en) * | 1989-09-28 | 1992-03-24 | Endress U. Hauser Gmbh U. Co. | Differential pressure measuring apparatus |
US5111698A (en) * | 1989-10-06 | 1992-05-12 | Endress U. Hauser Gmbh U. Co. | Differential pressure measuring apparatus |
US6079276A (en) | 1995-02-28 | 2000-06-27 | Rosemount Inc. | Sintered pressure sensor for a pressure transmitter |
US6082199A (en) | 1995-02-28 | 2000-07-04 | Rosemount Inc. | Pressure sensor cavity etched with hot POCL3 gas |
US6089097A (en) | 1995-02-28 | 2000-07-18 | Rosemount Inc. | Elongated pressure sensor for a pressure transmitter |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
DE102009051611A1 (en) * | 2009-11-02 | 2011-05-05 | Vega Grieshaber Kg | cell |
US8201456B2 (en) | 2009-11-02 | 2012-06-19 | Vega Grieshaber Kg | Measuring cell and a method of use therefor |
US8468894B2 (en) | 2009-11-02 | 2013-06-25 | Vega Grieshaber Kg | Measuring cell and a method of use therefor |
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