DE2021479A1 - Pressure gauge with double quartz glass diaphragm - Google Patents

Pressure gauge with double quartz glass diaphragm

Info

Publication number
DE2021479A1
DE2021479A1 DE19702021479 DE2021479A DE2021479A1 DE 2021479 A1 DE2021479 A1 DE 2021479A1 DE 19702021479 DE19702021479 DE 19702021479 DE 2021479 A DE2021479 A DE 2021479A DE 2021479 A1 DE2021479 A1 DE 2021479A1
Authority
DE
Germany
Prior art keywords
quartz glass
pressure gauge
discs
glass diaphragm
double quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702021479
Other languages
German (de)
Inventor
Alfred Prof Dr Ehmert
Jens Dr Rer Nat Geerk
Hans Prof Dr-Ing Kleinwaechter
Original Assignee
Kleinwaechter Hans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kleinwaechter Hans filed Critical Kleinwaechter Hans
Priority to DE19702021479 priority Critical patent/DE2021479A1/en
Publication of DE2021479A1 publication Critical patent/DE2021479A1/en
Application status is Pending legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0082Transmitting or indicating the displacement of capsules by electric, electro-mechanical, magnetic, or electro-mechanical means
    • G01L9/0086Transmitting or indicating the displacement of capsules by electric, electro-mechanical, magnetic, or electro-mechanical means using variations in capacitance

Abstract

A double diaphragm consists of two discs of quartz glass joined at the rims or is made from the solid. Pressure fluctuations cause deflections of the discs (which are not falsified by permanent set) and those can be measured directly or by metallizing the discs and measuring the capacitance changes.
DE19702021479 1970-05-02 1970-05-02 Pressure gauge with double quartz glass diaphragm Pending DE2021479A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19702021479 DE2021479A1 (en) 1970-05-02 1970-05-02 Pressure gauge with double quartz glass diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702021479 DE2021479A1 (en) 1970-05-02 1970-05-02 Pressure gauge with double quartz glass diaphragm

Publications (1)

Publication Number Publication Date
DE2021479A1 true DE2021479A1 (en) 1971-11-11

Family

ID=5770017

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702021479 Pending DE2021479A1 (en) 1970-05-02 1970-05-02 Pressure gauge with double quartz glass diaphragm

Country Status (1)

Country Link
DE (1) DE2021479A1 (en)

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
US3952234A (en) * 1973-12-31 1976-04-20 Donald Jack Birchall Pressure transducers
DE2709945A1 (en) * 1976-03-12 1977-09-15 Kavlico Corp Capacitive pressure transducer and process for its manufacture
FR2346704A1 (en) * 1976-03-29 1977-10-28 Setra Systems Inc Capacitive pressure detector
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
FR2442439A1 (en) * 1978-11-24 1980-06-20 Vaisala Oy Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
FR2477709A1 (en) * 1980-03-06 1981-09-11 Bosch Gmbh Robert Manometric capsule
WO1983000385A1 (en) * 1981-07-27 1983-02-03 Rosemount Inc Improved capacitance pressure sensor
US4388668A (en) * 1976-03-12 1983-06-14 Kaylico Corporation Capacitive pressure transducer
DE3505926A1 (en) * 1984-02-21 1985-08-22 Vaisala Oy Capacitive pressure gauges for absolute pressure
DE3523104A1 (en) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode
DE3901492A1 (en) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Pressure sensor and method for its manufacture
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US5001595A (en) * 1989-04-01 1991-03-19 Gerhard Dittrich Capacitive pressure sensor and method of manufacturing same
DE3943475C2 (en) * 1988-07-22 1991-07-25 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De Capacitive pressure transducer with thermal bonded flexible diaphragm
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US5097712A (en) * 1989-09-28 1992-03-24 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US5111698A (en) * 1989-10-06 1992-05-12 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
DE102009051611A1 (en) * 2009-11-02 2011-05-05 Vega Grieshaber Kg cell
US8201456B2 (en) 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor

Cited By (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
US3952234A (en) * 1973-12-31 1976-04-20 Donald Jack Birchall Pressure transducers
US4388668A (en) * 1976-03-12 1983-06-14 Kaylico Corporation Capacitive pressure transducer
DE2709945A1 (en) * 1976-03-12 1977-09-15 Kavlico Corp Capacitive pressure transducer and process for its manufacture
FR2344006A1 (en) * 1976-03-12 1977-10-07 Kavlico Corp A capacitive pressure transducer and method of fabricating such a transducer
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
FR2346704A1 (en) * 1976-03-29 1977-10-28 Setra Systems Inc Capacitive pressure detector
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
FR2442439A1 (en) * 1978-11-24 1980-06-20 Vaisala Oy Aneroid capsule pressure gauge - has corrugated membranes of insulating material carrying flat capacitor plates to give capacitance change on pressure variation
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
FR2477709A1 (en) * 1980-03-06 1981-09-11 Bosch Gmbh Robert Manometric capsule
WO1983000385A1 (en) * 1981-07-27 1983-02-03 Rosemount Inc Improved capacitance pressure sensor
DE3505926A1 (en) * 1984-02-21 1985-08-22 Vaisala Oy Capacitive pressure gauges for absolute pressure
DE3523104A1 (en) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
DE3901492A1 (en) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Pressure sensor and method for its manufacture
US5005421A (en) * 1988-07-22 1991-04-09 Endress U. Hauser Gmbh U. Co. Pressure sensor and method for the manufacture thereof
DE3943475C2 (en) * 1988-07-22 1991-07-25 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De Capacitive pressure transducer with thermal bonded flexible diaphragm
EP0373536A3 (en) * 1988-12-12 1991-03-06 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
EP0373536A2 (en) * 1988-12-12 1990-06-20 Fibronix Sensoren GmbH Overload-proof capacitive pressure sensor
US5050035A (en) * 1989-03-21 1991-09-17 Endress U. Hauser Gmbh U. Co. Capacitive pressure sensor and method of manufacturing same
US5001595A (en) * 1989-04-01 1991-03-19 Gerhard Dittrich Capacitive pressure sensor and method of manufacturing same
US5097712A (en) * 1989-09-28 1992-03-24 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US5111698A (en) * 1989-10-06 1992-05-12 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
US6082199A (en) 1995-02-28 2000-07-04 Rosemount Inc. Pressure sensor cavity etched with hot POCL3 gas
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6089097A (en) 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
DE102009051611A1 (en) * 2009-11-02 2011-05-05 Vega Grieshaber Kg cell
US8201456B2 (en) 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor
US8468894B2 (en) 2009-11-02 2013-06-25 Vega Grieshaber Kg Measuring cell and a method of use therefor

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