DE202021004248U1 - Rapid microscopic ultra-depth-of-field measuring device - Google Patents

Abstract

Microscopic rapid ultra-depth-of-field measuring device, characterized in that it comprises a measuring frame (1) to which an optical assembly is connected, a mobile measuring platform (2) being arranged below the optical assembly; and wherein a zoom lens (3) is arranged in the optical assembly.

Description

TECHNICAL AREA

The present invention relates to a dimensional measuring device, particularly to a high-speed microscopic ultra-depth-of-field measuring device.

STATE OF THE ART

A measuring microscope is a microscope device that displays the image seen by the microscope on the microscope's own screen or on a computer by means of digital-to-analog conversion; at the same time, it measures the height of the surface of the measuring point using high-precision optical focus detection. The existing measuring microscope generally uses a main lens with a zoom function or multiple objective lenses with different magnifications to achieve stable measurement of the measuring point. If the size of the workpiece to be inspected is large, the main lens or objective lens will reduce the magnification factor, so that the measurement point can be within the depth of field of the lens; when the requirements of imaging sharpness and imaging size at the measuring point are increased, the main lens or objective lens increases the magnification factor to improve the imaging effect of the measuring point. However, as the magnification of the lens increases, the depth of field decreases, so if there is a difference in height between the workpieces to be inspected, different areas of the image cannot be clearly displayed at the same time. At the same time, increasing the magnification factor of the lens reduces the measurement range of the workpiece to be inspected, so for large workpieces, the measuring microscope cannot display the entire image of the workpiece in one go; Due to the lateral movement of the workpiece, the image can also become blurred due to height deviations at different measuring points, so that it has to be refocused after changing the measuring point.

For this kind of work piece with height difference on the surface, the current measurement method is to use the measuring microscope to measure the work piece at local positions at different heights several times, in each measurement, focusing is realized by manually or electrically adjusting the height of the lens, and finally the image from each local position is combined to obtain a complete measurement image; at each focusing, the Z-axis position of the lens is measured by the grating scale, and in relation to the focal length of the lens, the calculation is performed to obtain the height information of the measuring point. However, this method requires focusing by adjusting the height of the lens, and it takes about 3-5 seconds to raise the lens each time it is raised, resulting in a measurement time of about 10 seconds for a single measurement point. When the workpiece is at different heights within the measuring range, the measuring microscope also needs to adjust the height of the lens several times within the same measuring range, and thus focus on different height positions, further reducing the overall efficiency of measuring the workpiece to be inspected; if the workpiece is at different heights within the measurement range, the corresponding focus point must be selected manually, which further reduces the measurement efficiency; In the captured image, there are still some unselected blurred positions that reduce the imaging effect of the measuring microscope.

In order to ensure efficient measurement of the sample, the current measuring microscope lowers the standard of image sharpness when taking the image to expand the detection range of the clear parts of the image, so that the measuring microscope can obtain a complete two-dimensional image of the sample with just a few images Sample can get. This results in a sharp reduction in the sharpness of the composite image and inferior imaging effect. At the same time, the reduction in image sharpness can cause the measuring microscope to detect parts of the workpiece surface with small height differences as the same height when acquiring height information, thereby reducing the recognition accuracy of the workpiece and the accuracy of the model in subsequent three-dimensional modeling.

Because of this, the existing measuring microscopes have a problem of low measuring efficiency and poor imaging efficiency.

CONTENT OF THE PRESENT INVENTION

The purpose of the present invention is to provide a high-speed microscopic ultra-depth-of-field measuring device and a measuring method. The present invention has the characteristics of high measurement efficiency and good imaging effect.

The technical solution of the present invention consists in: a microscopic ultra-depth-of-field rapid measuring device, comprising a measuring frame to which an optical assembly is connected, wherein below the optical Module is arranged a mobile measurement platform; and wherein a zoom lens is arranged in the optical assembly.

In an above microscopic ultra-rapid depth-of-field measuring device, the optical assembly includes a camera, a zoom lens, a main lens, and an objective lens connected in series, the zoom lens being a liquid lens or an electric zoom lens.

In an above rapid microscopic ultra-depth-of-field measuring device, the lower end of the mobile measuring platform is connected to the measuring frame via the shock-absorbing working platform, and the bottom of the measuring frame is provided with a buffer layer.

In an above rapid microscopic ultra-depth-of-field measuring device, the measuring frame is connected to the shock-absorbing working platform via a marble base plate, and the buffer layer is at the bottom of the marble base plate.

In an above microscopic ultra-fast depth of field measuring device, the optical assembly is provided with an illumination light source on one side, the illumination light source being a halogen lamp of 100W or more, and the emitted light of the halogen lamp being ring light or coaxial light of a point light source.

1. A. Platzieren einer Probe auf einer mobilen Messplattform unterhalb der optischen Baugruppe und Positionieren des zu messenden Bereichs der Probe in der Anzeigemitte der optischen Baugruppe;
2. B. sequentielles Ändern der Fokussierbrennweite des Zoomobjektivs gemäß mehreren vorbestimmten Parameterwerten und Veranlassen der optischen Baugruppe, Bilder des zu messenden Bereichs nach jedem Zoom zu erfassen, um mehrere Bilder des zu messenden Bereichs bei unterschiedlichen Brennweiten zu erhalten, wodurch A-Bilder erhalten werden;
3. C. Auswählen eines klaren Teils jedes A-Bildes und anschließendes Zusammensetzen der klaren Teile aller A-Bilder, um ein vollständiges klares Bild des zu messenden Bereichs zu erhalten, wodurch B-Bilder erhalten werden;
4. D. sequentielles Ändern des zu messenden Bereichs der Probe durch die mobile Messplattform und erneutes Erhalten des vollständigen klaren Bildes des zu messenden Bereichs gemäß dem Schritt B und dem Schritt C nach jeder Änderung des zu messenden Bereichs, um mehrere vollständige klare Bilder verschiedener zu messender Bereiche zu erhalten, wodurch C-Bilder erhalten werden;
5. E. Zusammensetzen der B-Bilder und der C-Bilder, um ein zweidimensionales Bild der Probe zu erhalten;
6. F. Erstellen eines dreidimensionalen Modells der Probe basierend auf dem zweidimensionalen Bild der Probe im Schritt E.

A measuring method based on the above rapid microscopic ultra-depth-of-field measuring device, comprising the following steps:

1. A. Placing a sample on a mobile measurement platform below the optical assembly and positioning the area of the sample to be measured in the display center of the optical assembly;
2. B. sequentially changing the focusing focal length of the zoom lens according to a plurality of predetermined parameter values and causing the optical assembly to capture images of the area to be measured after each zoom to obtain multiple images of the area to be measured at different focal lengths, thereby obtaining A-images;
3. C. Selecting a clear portion of each A-scan and then compositing the clear portions of all A-scans to obtain a complete clear image of the area to be measured, thereby obtaining B-graphs;
4. D. sequentially changing the area to be measured of the sample by the mobile measurement platform and again obtaining the complete clear image of the area to be measured according to step B and step C after each change of the area to be measured to obtain multiple complete clear images of different areas to be measured to obtain, thereby obtaining C-images;
5. E. compositing the B-images and the C-images to obtain a two-dimensional image of the sample;
6. F. Create a three-dimensional model of the sample based on the two-dimensional image of the sample in step E.

In a measurement method above, the height value of each A-frame is recorded in step B at the time of acquisition according to the parameter value of the current zoom lens; each clear part in step C is indicated by the corresponding pairs of gray values corresponding to the height value of the corresponding image of each clear part at the time of synthesis to form an 8-bit grayscale image with the height information of the sample, thereby obtaining a D-grayscale image ; in step E, the D grayscale images of different areas to be measured are synthesized to obtain the complete image of the sample displayed in grayscale values, namely the E grayscale image; in step F, the height information of the sample is obtained at different positions corresponding to the grayscale values of the E grayscale image, and then the E grayscale image is stretched based on the height information using existing modeling software to obtain a three-dimensional model of the sample.

• B1. Verwenden eines Standardblocks mit einer 45°-Schräge mit einer Skala als Prüfmuster, die mittlere Skala des Prüfmusters ist die 0-Position, die Schräge des Prüfmusters ist mit n Skalenstrichen sowohl auf der oberen als auch auf der unteren Seite der 0-Position versehen, 2n Skalenstriche sind in gleichen Höhenabständen entlang der Schräge angeordnet; so dass das Zoomobjektiv im Referenzzustand durch Bewegen der optischen Baugruppe in vertikaler Richtung die Fokussierung auf das Prüfmuster in der 0-Position und jeden Skalenstrich realisiert, und eine einheitliche Fokussierungswirkung wird durch die Bildschärfebewertungsfunktion bei der Fokussierung erzielt; gleichzeitig wird die Höheninformation der optischen Baugruppe bei verschiedenen Fokussierungspositionen mit Hilfe der Gitterskale aufgezeichnet, und die Skala wird auf Null gesetzt, wenn die optische Baugruppe bei Position 0 fokussiert ist, um die Höheninformation H[2n] zu erhalten;
• B2. Zurückstellen der optischen Baugruppe in die 0-Position der Gitterskale, dann werden die Parameterwerte des Zoomobjektivs nacheinander so eingestellt, dass die optische Baugruppe auf verschiedene Skalenstriche fokussieren kann, während die Parameterwerte V[2n] des Zoomobjektivs bei verschiedenen Skalen aufgezeichnet werden;
• B3: Anpassen der aus der Aufzeichnung gewonnenen 2*n Datensätze (H[2n]+V[2n]), um eine Umrechnungsfunktion H=f(V) zu erhalten.

In a measurement method above, the height value of the image is calculated in step B according to the parameter value of the zoom lens and the conversion function, and the acquisition of the conversion function includes the following steps:

• B1 using a standard block with a 45° bevel with a scale as the test specimen, the middle scale of the test specimen is the 0 position, the bevel of the test specimen is provided with n graduation marks on both the upper and lower sides of the 0 position, 2n scale lines are arranged at equal height intervals along the slope; so that the zoom lens in the reference state, by moving the optical assembly in the vertical direction, realizes the focusing on the test pattern at the 0 position and each tick mark, and a uniform focusing effect is achieved by the focus evaluation function in the focusing; at the same time, the height information of the optical assembly different focus positions are recorded using the grating scale and the scale is set to zero when the optical assembly is focused at position 0 to obtain the height information H[2n];
• B2. returning the optical assembly to the 0 position of the grating scale, then adjusting the zoom lens parameter values sequentially so that the optical assembly can focus on different tick marks while recording the zoom lens parameter values V[2n] at different scales;
• B3: Adjusting the 2*n data sets (H[2n]+V[2n]) obtained from the recording to obtain a conversion function H=f(V).

In a measurement method above, the zoom lens is an electric zoom lens, the parameter value of the electric zoom lens is the rotation angle value, when the rotation angle value is 0° in step B1, the zoom lens is in the reference state.

• (1) die vorliegende Erfindung wählt ein elektrisches Zoomobjektiv oder ein Flüssigobjektiv als Zoomobjektiv in der optischen Baugruppe aus, und auf dieser Grundlage ermöglichen die voreingestellten Parameterwerte dem Zoomobjektiv, Bilder des Werkstücks in dem zu messenden Bereich bei verschiedenen Brennweiten direkt zu erfassen, so dass die vorliegende Erfindung nicht auf die angegebene Position in dem zu messenden Bereich durch Anheben des Objektivs fokussieren muss, sondern sich auf die bei verschiedenen Brennweiten erfassten Bilder stützt, um klare Bilder in verschiedenen Höhen innerhalb des zu messenden Bereichs zu erhalten, wodurch der Bereich der Bildschärfe und die Abbildungswirkung im Vergleich zu den bestehenden Verfahren erheblich verbessert werden können; da das Flüssigobjektiv eine Zoomrate im Mikrosekundenbereich und das elektrische Zoomobjektiv eine Zoomrate im Millisekundenbereich erreichen kann, können mit der vorliegenden Erfindung mehr als 100 Messbilder in demselben zu messenden Bereich innerhalb von 0,5 Sekunden gemessen werden, wodurch die Messeffizienz des Werkstücks im Vergleich zu den bestehenden Verfahren erheblich verbessert werden kann;
• (2) basierend auf dem obigen Inhalt optimiert die vorliegende Erfindung weiter das Verfahren zum Erfassen des Höhenwerts der klaren Teil des Bildes, so dass die vorliegende Erfindung die Höheninformationen von verschiedenen Positionen im Bild durch den Parameterwert des Zoomobjektivs direkt umrechnen kann, um die Höhenmessung des Werkstücks und die anschließende dreidimensionale Modellierung zu realisieren; gleichzeitig kann die Aufzeichnung der Höheninformation des Werkstücks durch den Graustufenwert auch die Verarbeitungseffizienz der Software für die nachfolgenden Bilder und die Rate während der dreidimensionalen Modellierung effektiv verbessern, so dass die vorliegende Erfindung innerhalb von 1 Sekunde die Synthese der zweidimensionalen Bilder der Probe und innerhalb von 2 Sekunden die dreidimensionale Modellierung vervollständigen kann; und mehr Bilder können in einem Erkennungsprozess unter Verwendung der vorliegenden Erfindung erfasst werden, um die endgültige Abbildungswirkung zu verbessern;
• (3) durch die Optimierung der Installationsstruktur der mobilen Messplattform kann die vorliegende Erfindung auch den Vibrationsdämpfungseffekt auf das Werkstück effektiv verbessern, so dass die optische Baugruppe bei der Aufnahme von Bildern nicht vibriert, was keine Unschärfeprobleme bei der Aufnahme von Bildern verursacht, und somit vermeiden, dass die Software aufgrund von Klarheitsproblemen bei der Synthese von Bildern nicht normal aussortieren kann, wodurch die vorliegende Erfindung eine gute Stabilität aufweist und in der Lage ist, die Aufnahme und Höhenerkennung von Werkstückbildern unter den Bedingungen einer 15- bis 800-fachen Vergrößerung zu erreichen;

aufgrund dessen weist die vorliegende Erfindung die Eigenschaften einer hohen Messeffizienz und einer guten Abbildungswirkung auf.Compared to the prior art, the present invention has the following properties:

• (1) The present invention selects an electric zoom lens or a liquid lens as the zoom lens in the optical assembly, and based on this, the preset parameter values allow the zoom lens to directly capture images of the workpiece in the area to be measured at different focal lengths, so that the present invention does not need to focus on the specified position in the area to be measured by raising the lens, but relies on the images captured at different focal lengths to obtain clear images at different heights within the area to be measured, thereby expanding the range of image sharpness and the imaging effect can be significantly improved compared to the existing methods; Since the liquid lens can achieve a microsecond zoom rate and the electric zoom lens can achieve a millisecond zoom rate, the present invention can measure more than 100 measurement images in the same area to be measured within 0.5 seconds, which improves the measurement efficiency of the workpiece compared to the existing procedures can be significantly improved;
• (2) Based on the above content, the present invention further optimizes the method of detecting the height value of the clear part of the image, so that the present invention can directly convert the height information of different positions in the image by the parameter value of the zoom lens to measure the height of the to realize the workpiece and the subsequent three-dimensional modelling; at the same time, the recording of the height information of the workpiece by the grayscale value can also effectively improve the processing efficiency of the software for the subsequent images and the rate during the three-dimensional modeling, so that the present invention can complete the synthesis of the two-dimensional images of the sample within 1 second, and within 2 seconds can complete the three-dimensional modeling; and more images can be captured in a recognition process using the present invention to improve the final imaging effect;
• (3) by optimizing the installation structure of the mobile measurement platform, the present invention can also effectively improve the vibration damping effect on the workpiece, so that the optical assembly does not vibrate when taking pictures, which does not cause blurring problems when taking pictures, and thus avoid That the software cannot sort out normally due to clarity problems in the synthesis of images, making the present invention has good stability and is able to achieve the capture and height detection of workpiece images under the conditions of 15X to 800X magnification ;

because of this, the present invention has the characteristics of high measurement efficiency and good imaging effect.

character list

• 1 Fig. 12 shows a schematic structural view of the present invention.
• 2 shows the images of an area to be measured in step B at an arbitrary focal length.
• 3 shows a clear image of the sample in step C in an area to be measured.
• 4 Fig. 14 shows a grayscale image of the sample in step C in an area to be measured.
• 5 Figure 1 shows a three-dimensional model of a sample detected by the present invention.

Reference List

1

measuring frame

2

Mobile measurement platform

3

zoom lens

4

camera

5

main lens

6

objective lens

7

Shock absorbing work platform

8th

illumination light source

DETAILED DESCRIPTION

The present invention is explained in more detail below in connection with figures and embodiments, but the present invention is not limited thereto.

Example:

A rapid microscopic ultra-depth-of-field measuring device, as in 1 shown comprising a measuring frame 1 to which an optical assembly is connected, a mobile measuring platform 2 being arranged below the optical assembly; and wherein a zoom lens 3 is arranged in the optical assembly.

The optical assembly comprises a camera 4, a zoom lens 3, a main lens 5 and an objective lens 6 connected in series, the zoom lens 3 being a liquid lens or an electric zoom lens, the electric zoom lens 6 being a commercially available high-speed electrically controlled zoom lens STOT-EL-10-30-C type focus lens; the liquid lens may be a C-S-25H0-026 liquid lens manufactured by Corning (CORNING) of the USA.

The mobile measurement platform 2 can adopt a high-precision XY electric mobile platform, the lower end of the mobile measurement platform 2 is connected to the measurement frame 1 via the shock-absorbing working platform 7, and the bottom of the measurement frame 1 is provided with a buffer layer.

The measuring frame 1 is connected to the shock-absorbing work platform 7 via a marble base plate, the buffer layer being at the bottom of the marble base plate.

The optical assembly is provided with an illumination light source 8 on one side, the illumination light source 8 is a halogen lamp of 100W or more, the emitted light of the halogen lamp is ring light or coaxial light of a point light source; the halogen lamp uses a beam of totally reflective optical fibers to guide the light under the lens, with small optical fibers distributed along the ring shape on the halogen lamp.

1. A. Platzieren einer Probe auf einer mobilen Messplattform unterhalb der optischen Baugruppe und Positionieren des zu messenden Bereichs der Probe in der Anzeigemitte der optischen Baugruppe;
2. B. sequentielles Ändern der Fokussierbrennweite des Zoomobjektivs gemäß mehreren vorbestimmten Parameterwerten und Veranlassen der optischen Baugruppe, Bilder des zu messenden Bereichs nach jedem Zoom zu erfassen, um mehrere Bilder des zu messenden Bereichs bei unterschiedlichen Brennweiten zu erhalten, wodurch A-Bilder erhalten werden;
3. C. Auswählen eines klaren Teils jedes A-Bildes und anschließendes Zusammensetzen der klaren Teile aller A-Bilder basierend auf dem Depth-from-focus-Verfahren, um ein vollständiges klares Bild des zu messenden Bereichs zu erhalten, wodurch B-Bilder erhalten werden;
4. D. sequentielles Ändern des zu messenden Bereichs der Probe durch die mobile Messplattform und erneutes Erhalten des vollständigen klaren Bildes des zu messenden Bereichs gemäß dem Schritt B und dem Schritt C nach jeder Änderung des zu messenden Bereichs, um mehrere vollständige klare Bilder verschiedener zu messender Bereiche zu erhalten, teilweises Überlappen von Bildern von den benachbarten zu messenden Bereichen, um C-Bilder zu erhalten;
5. E. Zusammensetzen der B-Bilder und der C-Bilder, um ein zweidimensionales Bild der Probe zu erhalten;
6. F. Erstellen eines dreidimensionalen Modells der Probe basierend auf dem zweidimensionalen Bild der Probe im Schritt E.

A measuring method based on the above rapid microscopic ultra-depth-of-field measuring device, comprising the following steps:

1. A. Placing a sample on a mobile measurement platform below the optical assembly and positioning the area of the sample to be measured in the display center of the optical assembly;
2. B. sequentially changing the focusing focal length of the zoom lens according to a plurality of predetermined parameter values and causing the optical assembly to capture images of the area to be measured after each zoom to obtain multiple images of the area to be measured at different focal lengths, thereby obtaining A-images;
3. C. Selecting a clear part of each A-image and then compositing the clear parts of all A-images based on the depth-from-focus method to obtain a complete clear image of the area to be measured, thereby obtaining B-images;
4. D. sequentially changing the area to be measured of the sample by the mobile measurement platform and again obtaining the complete clear image of the area to be measured according to step B and step C after each change of the area to be measured to obtain multiple complete clear images of different areas to be measured to obtain partially overlapping images from the adjacent areas to be measured to obtain C images;
5. E. compositing the B-images and the C-images to obtain a two-dimensional image of the sample;
6. F. Create a three-dimensional model of the sample based on the two-dimensional image of the sample in step E.

The height value of each A-frame in step B is recorded at the time of acquisition according to the parameter value of the current zoom lens; each clear part in step C is indicated by the corresponding pairs of gray values corresponding to the height value of the corresponding image of each clear part at the time of synthesis to form an 8-bit grayscale image with the height information of the sample, thereby obtaining a D-grayscale image ; in step E, the D grayscale images of different areas to be measured are synthesized to obtain the complete image of the sample displayed in grayscale values, namely the E grayscale image; in step F becomes the height information of the sample is obtained at various positions corresponding to the gray level values of the E gray level image, and then the E gray level image is stretched based on the height information using existing modeling software to obtain a three-dimensional model of the sample.

• B1. Verwenden eines Standardblocks mit einer 45°-Schräge mit einer Skala als Prüfmuster, die mittlere Skala des Prüfmusters ist die 0-Position, die Schräge des Prüfmusters ist mit n Skalenstrichen sowohl auf der oberen als auch auf der unteren Seite der 0-Position versehen, 2n Skalenstriche sind in gleichen Höhenabständen entlang der Schräge angeordnet; so dass das Zoomobjektiv im Referenzzustand durch Bewegen der optischen Baugruppe in vertikaler Richtung die Fokussierung auf das Prüfmuster in der 0-Position und jeden Skalenstrich realisiert, und eine einheitliche Fokussierungswirkung wird durch die Bildschärfebewertungsfunktion bei der Fokussierung erzielt; gleichzeitig wird die Höheninformation der optischen Baugruppe bei verschiedenen Fokussierungspositionen mit Hilfe der Gitterskale aufgezeichnet, und die Skala wird auf Null gesetzt, wenn die optische Baugruppe bei Position 0 fokussiert ist, um die Höheninformation H[2n] zu erhalten;
• B2. Zurückstellen der optischen Baugruppe in die 0-Position der Gitterskale, dann werden die Parameterwerte des Zoomobjektivs nacheinander so eingestellt, dass die optische Baugruppe auf verschiedene Skalenstriche fokussieren kann, während die Parameterwerte V[2n] des Zoomobjektivs bei verschiedenen Skalen aufgezeichnet werden;
• B3: Anpassen der aus der Aufzeichnung gewonnenen 2*n Datensätze (H[2n]+V[2n]), um eine Umrechnungsfunktion H=f(V) zu erhalten.

The height value of the image in step B is calculated according to the parameter value of the zoom lens and the conversion function, the acquisition of the conversion function includes the following steps:

• B1 using a standard block with a 45° bevel with a scale as the test specimen, the middle scale of the test specimen is the 0 position, the bevel of the test specimen is provided with n graduation marks on both the upper and lower sides of the 0 position, 2n scale lines are arranged at equal height intervals along the slope; so that the zoom lens in the reference state, by moving the optical assembly in the vertical direction, realizes the focusing on the test pattern at the 0 position and each tick mark, and a uniform focusing effect is achieved by the focus evaluation function in the focusing; at the same time, the height information of the optical assembly is recorded at different focusing positions using the grating scale, and the scale is set to zero when the optical assembly is focused at position 0 to obtain the height information H[2n];
• B2. returning the optical assembly to the 0 position of the grating scale, then adjusting the zoom lens parameter values sequentially so that the optical assembly can focus on different tick marks while recording the zoom lens parameter values V[2n] at different scales;
• B3: Adjusting the 2*n data sets (H[2n]+V[2n]) obtained from the recording to obtain a conversion function H=f(V).

The zoom lens is a liquid lens, the parameter value of the liquid lens is the input voltage value, when the input voltage value is 1 0 in step B, the zoom lens is in the reference state.

The zoom lens is an electric zoom lens, the parameter value of the electric zoom lens is the rotation angle value, when the rotation angle value is 0° in step B1, the zoom lens is in the reference state.

The display effect of one of the A frames in step B is in 2 shown, the display effect of the B pictures in step C is in 3 shown, the display effect of the D grayscale image of the sample in step C is in 4 is shown, and the display effect of the three-dimensional model of the sample in step F is in 5 shown.

The working principle of the present invention is as follows: in the measurement of the present invention, the workpiece is first manually placed in the center of the field of view of the optical assembly, then the magnification rate of the main lens 5 is adjusted or the objective lens 6 is switched so that the area to be measured of the workpiece is within the field of view of the lens; after confirming the area of the workpiece to be measured, the software adjusts the focal length of the zoom lens one by one according to the preset parameter values, so that the optical assembly is able to capture a clear image of the workpiece at different heights within the area to be measured separately and then selecting and composing the clear parts of the image to obtain a clear image of the area to be measured; the image is composed to show, separated by different grayscale values, the clear parts of the zoom lens taken at different focal lengths, this allows each grayscale value to correspond separately to the height value of the sample, so that a grayscale image (i.e. a D-grayscale image) with Information about the amount of the sample can be obtained. Because the present invention does not require elevating focusing, there is no need to manually adjust the focus position, resulting in a significant time saving in capturing images of the area to be measured. For example, given an image of 640*512 pixels, the liquid lens can complete the acquisition, analysis and synthesis of 91 images in less than a second, thus obtaining the best-formed image.

When multiple measurement points are measured consecutively, the present invention can realize seamless stitching of micrographs with a small field of view and improve the overall imaging effect by moving the mobile measurement platform 2 to move the workpiece to be inspected horizontally; the combination of the shock absorbing work platform 7, the marble base plate and the buffer layer effectively reduces the image shake of the workpiece to be inspected at high magnification rate and further improves the measurement speed and image sharpness of the present invention.

Claims (5)

Microscopic rapid ultra-depth-of-field measuring device, characterized in that it comprises a measuring frame (1) to which an optical assembly is connected, a mobile measuring platform (2) being arranged below the optical assembly; and wherein a zoom lens (3) is arranged in the optical assembly. Rapid microscopic ultra-depth-of-field measuring device claim 1 , characterized in that the optical assembly comprises a camera (4), a zoom lens (3), a main lens (5) and an objective lens (6) connected in series, the zoom lens (3) being a liquid lens or an electric zoom lens is. Rapid microscopic ultra-depth-of-field measuring device claim 1 , characterized in that the lower end of the mobile measuring platform (2) is connected to the measuring frame (1) via the shock-absorbing working platform (7), the bottom of the measuring frame (1) being provided with a buffer layer. Rapid microscopic ultra-depth-of-field measuring device claim 3 , characterized in that the measuring frame (1) is connected to the shock-absorbing work platform (7) via a marble base plate, the buffer layer being at the bottom of the marble base plate. Rapid microscopic ultra-depth-of-field measuring device claim 1 , characterized in that the optical assembly is provided with an illumination light source (8) on one side, the illumination light source (8) being a halogen lamp of 100W or more, and the emitted light of the halogen lamp being ring light or coaxial light of a point light source.

Images