DE202017107618U1 - Differenzdruckmessaufnehmer - Google Patents

Abstract

Differential pressure measuring module (1), wherein the relative pressure measuring module (1) comprises a carrier (3), a relative pressure sensor (5) arranged on the carrier (3) and a Reference pressure supply line (17), which runs through the carrier (3) and opens into a second pressure measuring chamber (15) enclosed under a measuring diaphragm (7) of the relative pressure sensor (5), via which the second pressure measuring chamber (15) is used when the relative pressure measuring module is used ( 1) in a Relativdruckmessaufnehmer with a reference pressure (pref) can be acted upon comprises, - a relative to the relative pressure sensor (5) upstream, with a pressure-transmitting liquid filled first diaphragm seal via which an outer side of the measuring diaphragm (7) with a first pressure (p1) can be acted upon, and - filled with a pressure-transmitting liquid second diaphragm seal, üb in which the second diaphragm seal comprises a pressure transmission line (29) connected to the reference pressure supply line (17) of the relative pressure measuring module (1), and wherein the two on both sides of the measuring membrane (7) to the measuring membrane (7) adjacent, each filled with the pressure-transmitting liquid inner volumes are at least approximately substantially equal.

Description

The invention relates to a differential pressure transducer.

Differential pressure transducers are used in industrial metrology for the measurement of differential pressures.

Pressure measuring transducers known from the prior art comprise absolute pressure transducers equipped with an absolute pressure sensor, relative pressure transducers equipped with a relative pressure sensor, and differential pressure transducers equipped with a differential pressure sensor.

These pressure transducers usually have a mechanical design matched to their pressure sensor and its corresponding purpose of use as an absolute, relative or differential pressure transducer. This leads to a comparatively large number of different components required for the production of absolute, relative and differential pressure transducers.

The large number of different components offers the advantage that in this way an optimal adaptation of the mechanical structure of the respective sensor to the intended use as absolute, relative or Differenzdruckmessaufnehmer can be achieved, which has an advantageous effect on the achievable measurement accuracy.

The disadvantage, however, is that the large number of different and accordingly only in smaller quantities to be manufactured components leads to the fact that the manufacturing cost of the components and the different pressure transducers are correspondingly high. In addition, semi- or fully automated manufacturing processes in the production of absolute, relative and differential pressure transducers can only be used in a manufacturing cost reducing manner, if the number of produced by these processes and / or interconnected components and / or assemblies of Absolute, relative and / or differential pressure transducer is correspondingly high.

However, due to the adaptation of the components to the respective intended use for absolute pressure, relative pressure or differential pressure measurement, a reduction in the number of different components required for producing absolute, relative and differential pressure transducers is generally not possible without adversely affecting the measurement accuracy.

It is an object of the invention to provide a cost-effective manufacturable differential pressure transducer.

• – einem in einem Relativdruckmessaufnehmer zur messtechnischen Erfassung eines Relativdrucks einsetzbaren Relativdruck-Messmodul,
• – wobei das Relativdruck-Messmodul einen Träger, einen auf dem Träger angeordneten Relativdrucksensor und eine durch den Träger hindurch verlaufende, in einer unter einer Messmembran des Relativdrucksensors eingeschlossenen zweiten Druckmesskammer mündende Referenzdruckzuleitung, über die die zweite Druckmesskammer bei einem Einsatz des Relativdruck-Messmoduls in einem Relativdruckmessaufnehmer mit einem Referenzdruck beaufschlagbar ist, umfasst,
• – einem dem Relativdrucksensor vorgeschalteten, mit einer Druck übertragenden Flüssigkeit befüllten ersten Druckmittler, über den eine Außenseite der Messmembran mit einem ersten Druck beaufschlagbar ist, und
• – einem mit einer Druck übertragenden Flüssigkeit befüllten zweiten Druckmittler, über den eine Innenseite der Messmembran mit einem zweiten Druck beaufschlagbar ist,
• – wobei der zweite Druckmittler eine an die Referenzdruckzuleitung des Relativdruck-Messmoduls angeschlossene Druckübertragungsleitung umfasst, und
• – wobei die beiden zu beiden Seiten der Messmembran an die Messmembran angrenzenden, jeweils mit der Druck übertragenden Flüssigkeit befüllten Innenvolumina zumindest näherungsweise im Wesentlichen gleich groß sind.

For this purpose, the invention comprises a differential pressure transducer, with

• A relative pressure measuring module which can be used in a relative pressure measuring transducer for the metrological detection of a relative pressure,
• Wherein the relative pressure measuring module comprises a carrier, a relative pressure sensor arranged on the carrier and a reference pressure supply line extending through the carrier and opening into a second pressure measuring chamber enclosed by a measuring diaphragm of the relative pressure sensor, via which the second pressure measuring chamber when the relative pressure measuring module is used Relativdruckmessaufnehmer can be acted upon by a reference pressure comprises,
• - An upstream of the relative pressure sensor, with a pressure-transmitting liquid filled first diaphragm seal via which an outer side of the measuring diaphragm is acted upon with a first pressure, and
• A second pressure transmitter filled with a pressure-transmitting liquid, via which an inner side of the measuring diaphragm can be subjected to a second pressure,
• - wherein the second pressure transmitter comprises a pressure transmission line connected to the reference pressure supply line of the relative pressure measuring module, and
• - Wherein the two on both sides of the measuring diaphragm adjacent to the measuring diaphragm, each filled with the pressure-transmitting liquid inner volumes are at least approximately substantially equal.

Differential pressure measuring transducers according to the invention have the advantage that they comprise a relative pressure measuring module that, in an identical embodiment, can also be used in a relative pressure measuring transducer. This further use increases the number of pieces required for the production of relative and differential pressure transducers relative pressure measuring modules, which in turn leads to a reduction of their production costs. At the same time, via the at least approximately equal size of the two volumes filled with the pressure-transmitting liquid, differential pressure measuring transducers according to the invention, despite the use of components and / or assemblies designed for relative pressure transducers, have a comparatively high measuring accuracy.

• – der erste Druckmittler eine von außen mit einem ersten Druck beaufschlagbare Trennmembran umfasst, unter der eine erste Druckempfangskammer eingeschlossen ist, die mit einer den Relativdrucksensor außenseitlich umgebenden ersten Druckmesskammer verbunden ist,
• – der zweite Druckmittler eine von außen mit dem zweiten Druck beaufschlagbare Trennmembran umfasst, unter der eine zweite Druckempfangskammer eingeschlossen ist, die über die Druckübertragungsleitung des zweiten Druckmittlers und die Referenzdruckzuleitung des Referenzdruck-Messmoduls mit der unter der Messmembran eingeschlossenen zweiten Druckmesskammer verbunden ist,
• – das an die Innenseite der Messmembran angrenzende, mit der Flüssigkeit befüllte Innenvolumen die durch die Innenvolumina der zweiten Druckmesskammer, der Referenzdruckzuleitung, der daran angeschlossenen Druckübertragungsleitung und der unter der zweiten Trennmembran eingeschlossenen zweiten Druckempfangskammer gebildeten Teilvolumina umfasst, und
• – das an die Außenseite der Messmembran angrenzende, mit der Flüssigkeit befüllte Innenvolumen die durch die Innenvolumina der ersten Druckmesskammer, der die erste Druckmesskammer mit der ersten Druckempfangskammer verbindenden Druckübertragungsleitung und der ersten Druckempfangskammer gebildeten Teilvolumina umfasst.

A first embodiment is characterized in that

• The first pressure transmitter comprises a separating membrane, which can be acted upon from the outside by a first pressure, under which a first pressure-receiving chamber is connected, which is connected to a first pressure measuring chamber surrounding the relative pressure sensor on the outside,
• The second pressure transmitter comprises a separation membrane which can be acted upon from the outside by the second pressure and which includes a second pressure receiving chamber which is connected via the pressure transmission line of the second pressure transmitter and the reference pressure supply line of the reference pressure measuring module to the second pressure measurement chamber enclosed under the measurement membrane,
• The inner volume, which is adjacent to the inner side of the measuring membrane and filled with the liquid, comprises the partial volumes formed by the inner volumes of the second pressure measuring chamber, the reference pressure feed line, the pressure transmission line connected thereto and the second pressure receiving chamber enclosed under the second separating membrane, and
• The inner volume, which is adjacent to the outside of the measuring diaphragm and filled with the fluid, comprises the partial volumes formed by the inner volumes of the first pressure measuring chamber which connects the first pressure measuring chamber to the first pressure receiving chamber and the first pressure receiving chamber.

• – der erste Druckmittler als ein erstes Druckmittler-Modul, insb. als ein in identischer Form auch in einem Relativdruckmessaufnehmer einsetzbares erstes Druckmittler-Modul, ausgebildet ist, das eine die erste Druckmesskammer bildende, nach außen durch den Träger des Relativdruck-Messmodul abgeschlossene Ausnehmung umfasst, und
• – der zweite Druckmittler als ein mit dem ersten Druckmittler-Modul verbundenes zweites Druckmittler-Modul ausgebildet ist.

A first development is characterized by the fact that

• The first pressure transmitter is designed as a first diaphragm seal module, in particular as a first diaphragm seal module which can also be used in a relative pressure transducer and which comprises a recess which forms the first pressure measuring chamber and is closed outward by the carrier of the relative pressure measuring module , and
• - The second diaphragm seal is designed as a connected to the first diaphragm seal module second diaphragm seal module.

• – das Relativdruck-Messmodul eine durch den Träger hindurch verlaufende Befüll-Leitung umfasst, über die ein dem Relativdrucksensor in einem Relativdruckmessaufnehmer vorgeschalteter erster Druckmittler mit einer Druck übertragenden Flüssigkeit befüllbar ist, und
• – die Befüll-Leitung eine Verbindungsleitung bildet, über die die den Relativdrucksensor außenseitlich umgebende erste Druckmesskammer mit einer an die Druckempfangskammer des ersten Druckmittlers angeschlossenen Druckübertragungsleitung des ersten Druckmittlers verbunden ist.

A second development is characterized by the fact that

• - The relative pressure measuring module comprises a running through the carrier filling line, via which a relative to the relative pressure sensor in a Relativdruckmessaufnehmer upstream first diaphragm seal can be filled with a pressure-transmitting liquid, and
• - The filling line forms a connecting line, via which the pressure sensor outside the surrounding the first pressure measuring chamber is connected to a connected to the pressure receiving chamber of the first pressure transmitter pressure transmission line of the first pressure transmitter.

• – ein Sensorgehäuse, in das das Relativdruck-Messmodul derart eingesetzt ist, dass der Relativdrucksensor außenseitlich von einer die erste Druckmesskammer bildenden Ausnehmung im Sensorgehäuse umgeben ist und die erste Druckmesskammer nach außen durch den Träger des Relativdruck-Messmoduls verschlossen ist, und
• – ein mit dem Sensorgehäuse verbundenes Druckbeaufschlagungsmodul, das den über die Befüll-Leitung des Relativdruck-Messmoduls mit der ersten Druckmesskammer verbundenen ersten Druckmittler und den über die Referenzdruckzuleitung mit der zweiten Druckmesskammer verbundenen zweiten Druckmittler umfasst.

According to a preferred development of the second development, the differential pressure transducer comprises

• A sensor housing into which the relative pressure measuring module is inserted such that the relative pressure sensor is surrounded on the outside by a recess forming the first pressure measuring chamber in the sensor housing and the first pressure measuring chamber is closed to the outside by the carrier of the relative pressure measuring module, and
• A pressure application module connected to the sensor housing and comprising the first pressure transmitter connected to the first pressure measurement chamber via the filling line of the relative pressure measurement module and the second pressure transmitter connected to the second pressure measurement chamber via the reference pressure supply line.

A further development of the second development or its further development is characterized in that the reference pressure supply line, an end region of the pressure transmission line of the second pressure transmitter connected to the reference pressure supply line, the filling line and an end region of the pressure transmission line of the first pressure transmitter connected to the filling line are substantially parallel are arranged to each other.

• – die Referenzdruckzuleitung des Relativdruck-Messmoduls und die Druckübertragungsleitung des zweiten Druckmittlers derart miteinander verbunden sind, dass ein Endbereich einer dieser beiden Leitungen einen Endbereich der jeweils anderen Leitung außenseitlich umgibt, und/oder
• – die Befüll-Leitung des Relativdruck-Messmoduls und die Druckübertragungsleitung des ersten Druckmittlers derart miteinander verbunden sind, dass ein Endbereich einer dieser beiden Leitungen einen Endbereich der jeweils anderen Leitung außenseitlich umgibt.

Further developments of the invention are characterized in that

• - The reference pressure supply line of the relative pressure measuring module and the pressure transmission line of the second diaphragm seal are connected to each other such that an end portion of one of these two lines outside one end region of the other line surrounds, and / or
• - The filling line of the relative pressure measuring module and the pressure transmission line of the first pressure transmitter are connected to each other such that an end portion of one of these two lines surrounds an end portion of the other line on the outside.

• – die Referenzdruckzuleitung und die Druckübertragungsleitung mittels einer Klebung, insb. einer mit einem Kleber auf Epoxidharz-Basis ausgeführten Klebung, druckdicht miteinander verbunden sind, und/oder
• – die Befüll-Leitung des Relativdruck-Messmoduls und die Druckübertragungsleitung des ersten Druckmittlers mittels einer Klebung, insb. einer mit einem Kleber auf Epoxidharz-Basis ausgeführten Klebung, druckdicht miteinander verbunden sind,

Further developments of the last-mentioned further developments are characterized in that

• - The reference pressure supply line and the pressure transmission line by means of a bond, esp. An executed with an adhesive based on epoxy resin bond, are pressure-tightly interconnected, and / or
• The pressure line of the relative pressure measuring module and the pressure transmission line of the first pressure transmitter are pressure-tightly connected to one another by means of an adhesive bond, in particular an adhesive bond carried out with an epoxy resin-based adhesive,

• – das erste und das zweite Druckmittler-Modul oder das Sensorgehäuse und das Druckbeaufschlagungsmodul auf deren einander zugewandten Seiten jeweils einen als Gehäusewand ausgebildeten Abschnitt aufweisen,
• – die beiden einander zugewandten Gehäusewände endseitig miteinander verbunden, insb. mittels einer Schweißung miteinander verbunden, sind, und
• – die beiden Gehäusewände jeweils einen Teilbreich eines in dem Differenzdruckmesaufnehmer eingeschlossenen Gehäuseinnenraums außenseitlich umgeben.

A development of the first development or the preferred development of the second development is characterized in that

• The first and the second diaphragm seal module or the sensor housing and the pressure application module each have a section formed as a housing wall on their mutually facing sides,
• - The two mutually facing housing walls connected to each other end, in particular. By means of a welded joint, are, and
• - The two housing walls each surrounded a Teilbreich a trapped in the Differenzdruckmesaufnehmer housing interior outside.

• – in der Gehäusewand des zweiten Druckmittler-Moduls oder des Druckbeaufschlagungsmoduls eine Öffnung vorgesehen ist, über die eine in dem Gehäuseinnenraum angeordnete, an den Relativdrucksensor angeschlossene Sensorelektronik an eine überordnete Einheit anschließbar ist,
• – wobei auf einem die Öffnung außenseitlich umgebenden Wandbereich der Gehäusewand insb. ein Anschlussstutzen vorgesehen ist, auf dem ein Gehäuse montiertbar ist.

A development of the latter training is characterized by the fact that

• An opening is provided in the housing wall of the second diaphragm seal module or of the pressure application module, via which a sensor electronics arranged in the housing interior and connected to the relative pressure sensor can be connected to a superordinate unit,
• - Is provided on a wall surrounding the opening on the outside wall area of the housing wall esp. A connecting piece, on which a housing is mounted.

A further development of the second development or its preferred development is characterized in that the separation membranes of the two pressure transmitters are arranged side by side in a plane, the separation membranes being arranged in particular on an end face of the pressurization module facing away from the sensor housing.

• – das Druckbeaufschlagungsmodul ein erstes und ein zweite Teilmodul umfasst,
• – das erste Teilmodul einen mit der Befüll-Leitung verbundenen Leitungsabschnitt und einen daran anschließenden senkrecht dazu verlaufenden Leitungsabschnitt der Druckübertragungsleitung des ersten Druckmittlers umfasst,
• – das erste Teilmodul einen mit der Referenzdruckzuleitung verbundenen Leitungsabschnitt und einen daran anschließenden senkrecht dazu verlaufenden Leitungsabschnitt der Druckübertragungsleitung des zweiten Druckmittlers umfasst, und
• – das zweite Teilmodul auf dessen vom ersten Teilmodul abgewandten Seite die nach außen jeweils durch eine der beiden Trennmembranen abgeschlossenen Druckempfangskammern umfasst, an die jeweils ein durch das zweite Teilmodul hindurch verlaufender Leitungsabschnitt der Druckübertragungsleitung des jeweiligen Druckmittlers anschließt,
• – wobei jeweils einer der beiden im ersten und zweiten Teilmodul vorgesehenen, miteinander verbundenen Leitungsabschnitte der Druckübertragungsleitungen der beiden Druckmittler einen vorstehenden Leitungsendbereich aufweist, der in einen Endbereich des damit verbundenen, insb. mittels einer den Leitungsendbereich außenseitlich umgebenden Klebung verbundenen, in dem anderen Teilmodul angeordneten Leitungsabschnitt hineinragt.

A development of the preferred development of the second development is characterized in that

• The pressurization module comprises a first and a second submodule,
• The first submodule comprises a line section connected to the filling line and an adjoining line section of the pressure transmission line of the first pressure transmitter extending perpendicularly thereto,
• - The first sub-module comprises a line connected to the reference pressure supply line section and an adjoining perpendicular thereto line section of the pressure transmission line of the second pressure transmitter, and
• The second submodule, on its side remote from the first submodule, comprises the pressure receiving chambers which are closed outwards in each case by one of the two separating diaphragms, to which a respective line section of the pressure transmission line of the respective pressure transmitter runs, passing through the second submodule,
• - In each case one of the two provided in the first and second sub-module, interconnected line sections of the pressure transmission lines of the two diaphragm seals having a projecting Leitungsendbereich, in one end portion of the associated, esp. By means of a Leitungsendbereich outside surrounding bond connected, arranged in the other sub-module Projecting line section.

• – eine durch das Sensorgehäuse und das mit dem Sensorgehäuse verbundene erste Teilmodul gebildete Baugruppe mittels einer mechanischen Verbindung, insb. einer die Baugruppe außenseitlich umschließende, mit dem zweiten Teilmodul verbundene Bügel, insb. Schraubbügel, umfassenden Verbindung, mit dem zweiten Teilmodul verbunden ist, und/oder
• – die Leitungsendbereiche jeweils außenseitlich von einer zwischen dem ersten und dem zweiten Teilmodul eingespannten Dichtung umgeben sind.

A development of the latter training is characterized by the fact that

• A subassembly formed by the sensor housing and the first submodule connected to the sensor housing is connected to the second submodule by means of a mechanical connection, in particular a bracket surrounding the subassembly, connected to the second submodule, especially a screwed bracket, and /or
• - The Leitungsendbereiche are each surrounded on the outside by a clamped between the first and the second sub-module seal.

• – die beiden zu beiden Seiten der Messmembran an die Messmembran angrenzenden, jeweils mit der Druck übertragenden Flüssigkeit befüllten im Wesentlichen gleich großen Innenvolumina jeweils eine Befüll-Leitung zur Befüllung des jeweiligen Innenvolumens mit der Druck übertragenden Flüssigkeit umfassen und die Innenvolumina dieser beiden Befüll-Leitungen unterschiedlich groß sind,
• – mindestens ein Leitungsabschnitt der Druckübertragungsleitung des zweiten Druckmittlers einen Innendurchmesser aufweist, der größer als ein Innendurchmesser mindestens eines weiteren Leitungsabschnitts der Druckübertragungsleitung des zweiten Druckmittlers ist, und/oder
• – das an die Innenseite der Messmembran angrenzende mit der Flüssigkeit befüllte Innenvolumen eine im Differenzdruckmessaufnehmer angeordnete, insb. im zweiten Druckmittler-Modul oder im Druckbeaufschlagungsmodul angeordnete, mit der Flüssigkeit befüllte Volumenanpassungskammer umfasst.

Further developments of differential pressure transducers according to the invention are characterized in that

• - The two on both sides of the measuring membrane adjacent to the measuring membrane, each filled with the pressure-transmitting liquid substantially equal inner volumes each comprise a filling line for filling the respective inner volume with the pressure-transmitting liquid and the inner volumes of these two filling lines differently are big,
• - At least one line section of the pressure transmission line of the second pressure transmitter has an inner diameter which is greater than an inner diameter of at least one further line section of the pressure transmission line of the second pressure transmitter, and / or
• - Which comprises the inside of the measuring membrane adjacent filled with the liquid inner volume arranged in the Differenzdruckmessaufnehmer, esp. In the second diaphragm seal module or in the pressurization module arranged, filled with the liquid volume adjustment chamber.

• – dessen erster und zweite Druckmittler jeweils als Druckmittler-Modul ausgebildet ist, das mit einem Prozessanschluss verbunden ist, oder
• – der ein den ersten und den zweiten Druckmittler umfassendes Druckbeaufschlagungsmodul umfasst, auf dessen die Trennmembranen der beiden Druckmittler umfassenden Stirnseite ein Prozessanschluss, insb. ein als Prozessanschlussflansch ausgebildeter Prozessanschluss, vorgesehen ist.

Further developments of differential pressure transducers according to the invention are characterized in that

• - The first and second diaphragm seal is in each case designed as a diaphragm seal module, which is connected to a process connection, or
• - Which comprises a first and the second pressure transmitter comprehensive pressurization module on which the separation membranes of the two pressure transmitter comprehensive end face a process connection, esp. A process connection flange designed as a process connection, is provided.

The invention and its advantages will now be explained in more detail with reference to the figures of the drawing, in which three embodiments are shown. Identical elements are provided in the figures with the same reference numerals. In order to represent components of very different dimensions, a not always to scale representation was selected in the figures.

1 shows: a differential pressure transducer with two diaphragm seals modules;

2 shows: a differential pressure transducer with a pressure transfer module;

3 shows: a differential pressure transducer with a pressure transfer module comprising two sub-modules;

4 shows: the relative pressure measuring module of 1 to 3 ;

5 shows: a relative pressure transducer;

6 shows: a back of the carrier of the relative pressure measuring module of 4 ; and

7 shows: a view of the differential pressure transducer of 3 ,

1 . 2 and 3 each show a differential pressure transducer according to the invention, a in 4 illustrated in detail relative pressure measuring module 1 includes. The relative pressure measuring module 1 is designed such that it can be used for metrological detection of a relative pressure in a Relativdruckmessaufnehmer. 5 shows an example of one with the in 4 shown relative pressure measuring module 1 equipped Relativdruckmessaufnehmers.

The relative pressure measuring module 1 includes a carrier 3 and one on the carrier 3 arranged relative pressure sensor 5 , The carrier 3 is in the illustrated examples essentially disc-shaped and may for example consist of a metal, for example made of stainless steel. The relative pressure sensor 5 includes a measuring membrane 7 whose outer side via a relative pressure sensor 5 can be acted upon upstream or upstream with a pressure-transmitting liquid filled, unspecified in the figures, first pressure transmitter with a first pressure p, p1.

For this purpose, the first pressure transmitter preferably comprises a first separation membrane which can be acted upon from outside with a first pressure p, p1 9 , under which a first pressure receiving chamber 11 is included, which via a pressure transmission line with a relative pressure sensor 5 outside surrounding first pressure measuring chamber 13 connected is. The first pressure receiving chamber 11 , the first pressure measuring chamber 13 and the pressure transmission line 35 are filled with the pressure-transmitting liquid, which in measuring operation on the outside of the first separation membrane 9 the first pressure transmitter acting first pressure p, p1 on the outside of the measuring diaphragm 7 transfers.

In addition, under an inside of the measuring diaphragm 7 a second pressure measuring chamber 15 included, the one to the second pressure measuring chamber 15 connected by the carrier 3 passing through reference pressure supply line 17 in Relativdruckmessaufnehmer of 5 with a reference pressure p _ref and in the differential _{pressure transducers} of 1 . 2 and 3 with a second pressure p _{2 can be} acted upon.

As a relative pressure sensor 5 For example, a so-called semiconductor pressure sensor is suitable, for example a silicon-based pressure sensor chip, for example one directly on the carrier 3 , on one on the carrier 3 mounted pedestal or on one by the carrier 3 passed end portion of the reference pressure supply line 17 arranged body 19 has, on which the measuring diaphragm 7 including the second pressure measuring chamber 15 is arranged.

Relative pressure sensors 5 comprise a - not shown here in detail - electromechanical transducer, such as a capacitive, piezoelectric or resistive transducer, which serves in the measuring operation of a on the measuring membrane 7 acting pressure dependent deflection of the measuring diaphragm 7 to convert to an electrical size. This size is then by means of a sensor electronics connected to the transducer 21 measured and converted into a pressure-dependent electrical signal, which is then available for further processing and / or evaluation. The relative pressure sensor 5 is preferably connected to its transducer by the carrier 3 passed through connecting cables 23 with the sensor electronics 21 connected.

In the 1 . 2 and 3 shown differential pressure transducer include in addition to the relative pressure measuring module 1 and the first diaphragm seal arranged upstream of this, in each case one second pressure transmitter filled with a pressure-transmitting fluid, via which an inner side of the diaphragm 7 of the relative pressure sensor 5 in the differential pressure transducer with a second pressure p _{2 can be} acted upon. For this purpose, the second diaphragm seal comprises a to the reference pressure supply line 17 of the relative pressure measuring module 1 connected pressure transmission line 29 , Furthermore, it preferably comprises a second separation membrane which can be impacted externally with the second pressure p ₂ 25 under which a second pressure receiving chamber 27 enclosed, via the pressure transmission line 29 with the reference pressure supply line 17 of the relative pressure measuring module 1 connected is.

The Differenzdruckmessaufnehmer are each formed such that the two on both sides of the measuring diaphragm 7 to the measuring membrane 7 adjacent, filled with the pressure-transmitting liquid inner volumes are at least approximately substantially equal.

This is preferably achieved in that the second pressure transmitter is in each case designed such that a sum of the to the measuring diaphragm 7 adjacent, liquid-filled partial volumes on both sides of the measuring membrane 7 at least approximately the same size. In that regard, this includes the inside of the measuring diaphragm 7 adjacent, filled with the liquid inner volume through the inner volumes of the second pressure measuring chamber 15 , the reference pressure feed 17 , the pressure transmission line connected to it 29 and under the separation membrane 25 enclosed second pressure receiving chamber 27 formed partial volumes. That to the outside of the measuring membrane 7 adjacent inner volume includes the through the inner volumes of the first pressure measuring chamber 13 , the first pressure measuring chamber 13 with the first pressure receiving chamber 11 connecting pressure transmission line and the first pressure receiving chamber 11 formed partial volumes.

The in 5 Relative pressure transducers shown as an example include the relative pressure measuring module 1 and a first pressure transmitter which is connected upstream of the latter and which, in the illustrated example, is identical to the one in FIG 1 is shown first diaphragm seal. In this Relativdruckmessaufnehmer is the outside of the measuring diaphragm 7 in measuring mode via the first diaphragm seal with the first pressure p and the inside of the diaphragm 7 with one via the reference pressure supply line 17 the second pressure measuring chamber 15 supplied reference pressure p _ref acted upon. The sensor electronics deliver accordingly 21 here a signal dependent on the reference pressure p _ref , the first pressure p, which corresponds to the relative pressure to be detected by measurement. As a reference pressure p _ref , for example, is suitable in the vicinity of the end open here reference pressure supply line 17 prevailing ambient pressure, such as an atmospheric pressure.

In contrast, the outside of the measuring diaphragm 7 at the in 1 . 2 and 3 shown differential pressure transducers in the measuring mode via the first diaphragm seal with the first pressure p ₁ and the inside of the diaphragm 7 with one via the reference pressure supply line 17 and the second pressure transmitter of the second pressure measuring chamber connected thereto 15 supplied second pressure p ₂ acted upon. The sensor electronics deliver accordingly 21 Here, one of the differential pressure, namely the pressure difference between the first and second pressure p ₁ , p ₂ dependent signal corresponding to the metrologically to be detected differential pressure.

In the required in the differential pressure transducers for the production of relative pressure transducers components, namely the relative pressure measuring module 1 , as well as preferably also the first pressure transmitter, for example the in 1 and 5 shown first diaphragm seals are used, the total required for the production of relative pressure transducers and differential pressure transducers component diversity is reduced. This can be achieved in larger quantities, which in itself already leads to a reduction of storage costs and to a reduction in the manufacturing cost of both used in Relativdruckmessaufnehmern and in differential pressure transducers components. Further cost savings are achieved with a sufficient number of items, moreover, by a cost-reducing use of partially or fully automated manufacturing processes.

At the same time is on both sides of the diaphragm 7 adjacent, substantially equal, filled in each case with the pressure-transmitting liquid inner volumes of the differential pressure measuring devices ensures that by a thermal expansion of the pressure-transmitting liquid to the outside and the inside of the measuring membrane 7 applied forces on both sides of the measuring diaphragm 7 are essentially the same size and thus cancel each other out. This ensures that the differential pressure-dependent deflection of the measuring diaphragm 7 is not changed by forces caused by the thermal expansion of the liquid.

This ensures that comparatively high measuring accuracies are achieved with these differential pressure transducers, even though they instead of used in the prior art customary, especially adapted to the intended purpose of the differential pressure measurement components, the unchanged in a Relativdruckmessaufnehmer applicable relative pressure measuring module 1 , as well as preferably also the first, preferably likewise unchanged in a Relativdruckmessaufnehmer deployable first diaphragm seal, for example, the in 1 and 5 illustrated first diaphragm seal, include.

Further cost savings can be achieved by designing individual components of the differential pressure transducer as modules that can be interconnected in a simple, cost-effective manner.

Such a cost saving can optionally be achieved by the reference pressure supply 17 of the relative pressure measuring module 1 and the pressure transmission line 29 of the second pressure transmitter of the respective differential pressure measuring transducer are connected to one another such that an end region of one of these two lines surrounds an end region of the respective other line on the outside.

This offers the advantage that the reference pressure supply 17 and the pressure transmission line 29 can be connected to one another by a telescoping of their end regions executable in a simple and cost-effective manner.

Alternatively or additionally, the end regions of the reference pressure supply line 17 and the pressure transmission line 29 preferably by means of a bond 31 pressure-tight connected to each other.

bonds 31 offer the advantage that they can also be made of different materials existing components in a reliable manner pressure-tight connected to each other. So can the reference pressure supply 17 for example, from a to the thermal expansion coefficient of the relative pressure sensor 5 adapted material, such as Kovar or other metallic or non-metallic material, consist and the pressure transmission line 29 from a comparatively cheaper material, such as a metallic material, such as a stainless steel exist. Alternatively, the reference pressure supply line 17 but also from a to the thermal expansion coefficient of the carrier 3 adapted material, such as a stainless steel exist.

As a bond 31 For example, a bond made with an epoxy resin-based adhesive is suitable.

With regard to a further reduction in the production costs, the first and / or the second diaphragm seal are preferably designed as modules which can be connected to one another in a simple manner and / or can also be used or inserted in a relative form in relative pressure sensors.

So is the in 1 illustrated first pressure transmitter designed as a first diaphragm seal module that in identical form in the in 5 used Relativdruckmessaufnehmer can be used or used. The illustrated here as an example first diaphragm seal module comprises a one-piece, preferably metallic body 33 , at one end of which one ends outwardly through the first separation membrane 9 completed, the first pressure receiving chamber 11 forming recess is provided, and in which the first separation membrane 9 opposite end portion of a first pressure measuring chamber 13 forming recess is provided. The first pressure receiving chamber 11 and the first pressure measuring chamber 13 are through one through the body 33 passing, as a pressure transmission line 35 serving bore interconnected. In this embodiment, the relative pressure measuring module 1 both in the 1 represented differential pressure transducer and in the in 5 shown Relativdruckmessaufnehmer connected to the first diaphragm seal module such that the relative pressure sensor 5 in the first pressure measuring chamber 13 located and the carrier 3 the first pressure measuring chamber 13 closes to the outside. In addition, the first diaphragm seal module preferably comprises a housing wall 37 formed section, one on top of the first separation membrane 9 opposite side of the carrier 3 located subspace of a housing interior of the Differenzdruckmessaufnehmers outside surrounds.

Alternatively or additionally, the second diaphragm seal is preferably designed as a second diaphragm seal module. In that regard, this includes in 1 illustrated as an example second diaphragm seal module a preferably metallic body 39 , at one end of which a second pressure-receiving chamber 27 forming recess is provided, in which here at least partially through the body 39 passing through pressure transmission line 29 empties.

Preferably, the second diaphragm seal module also includes on the second separation membrane 25 opposite side as a housing wall 41 formed portion of at least a portion of the pressure transmission line 29 outside surrounding subspace of the housing interior of the differential pressure transducer outside surrounds.

The in 1 illustrated differential pressure transducer has the advantage that its Producing only the relative pressure measuring module 1 by a pressure-resistant, mechanical connection, such as a weld, between the carrier 3 and the body 33 must be used in the first diaphragm seal module. Subsequently, the second diaphragm seal module is mounted so that the reference pressure supply line 17 and the pressure transmission line 29 with the interposition of the adhesive pushed into each other and through the bond 31 connected to each other and the housing walls 37 . 41 the two diaphragm seal modules end connected to each other, for example by means of a peripheral weld welded.

Alternatively or additionally, in the housing wall 41 the second diaphragm seal module preferably has an opening 43 provided over which arranged in the housing interior of the Differenzdruckmessaufnehmers sensor electronics 21 can be connected to a superior unit. Optionally, on one the opening 43 outside wall area of the housing wall 41 a connecting piece 45 provided, on which a not shown here housing can be mounted.

As a superordinate unit, for example, a unit is suitable which has a measuring and / or evaluation electronics for further evaluation and / or processing of the sensor electronics 21 Measurement signals provided in measuring operation, a power supply circuit for supplying power to the relative pressure sensor 5 and / or the sensor electronics 21 and / or an input and / or output device for transmitting data and / or measurement results.

The relative pressure measuring module 1 Optionally, a by the carrier 3 passing through filling line 47 comprise, over which the first pressure transmitter of in 5 represented Relativdruckmessaufnehmers, and accordingly also the same first diaphragm seal of in 1 represented Differenzdruckmessaufnehmers is filled with the pressure-transmitting liquid. 6 shows a view of the of the relative pressure sensor 5 facing away from the back of the carrier 3 on which an example of a possible arrangement of the by the carrier 3 passing through connecting lines 23 by the carrier 3 passing through reference pressure supply line 17 and by the wearer 3 passing through filling line 47 is shown. The filling line 47 will be in the in 1 and 5 shown measuring sensors after the filling of the first diaphragm seal by means of a shutter, not shown here closed end.

Alternatively, this filling line 47 , esp. Provided they are in the same construction and for the production of Relativdruckmessaufnehmern used relative pressure measuring module 1 is present anyway, form a connection line through which the relative pressure sensor 5 outside surrounding first pressure measuring chamber 13 with a to the pressure receiving chamber 11 the first diaphragm seal connected pressure transmission line 49 the first diaphragm seal is connected. Examples of this are in 2 and 3 shown.

There includes the pressure transmission line 49 each of the first diaphragm seal a line section 51 , whose end portion with an end portion of the filling line 47 connected is. This compound is preferably analogous to the previously described connection between the reference pressure supply line 17 and the pressure transmission line 29 formed of the second pressure transmitter. In this case, the two end regions are preferably arranged pushed into one another such that one of the two end regions surrounds the other end region on the outside and preferably together by gluing 31 , such as an adhesive bond made with an epoxy resin-based adhesive 31 , pressure-tight connected.

In this variant, the differential pressure transducer preferably comprises a sensor housing 53 into which the relative pressure measuring module 1 is inserted such that the relative pressure sensor 5 on the outside of a first pressure measuring chamber 13 forming recess in the sensor housing 53 is surrounded and the first pressure measuring chamber 13 outward through the carrier 3 of the relative pressure measuring module 1 is closed.

In addition, the in 2 and 3 as example illustrated differential pressure transducer preferably a pressurization module 55 . 57 that's about the filling pipe 47 of the relative pressure measuring module 1 with the first pressure measuring chamber 13 connected first diaphragm seal and via the reference pressure supply line 17 with the second pressure measuring chamber 15 connected second pressure transmitter comprises.

Here are the reference pressure supply line 17 , one with the reference pressure supply line 17 connected end portion of the pressure transmission line 29 of the second diaphragm seal, the filling line 47 and one with the filling line 47 connected end portion of the pressure transmission line 49 the first diaphragm seal preferably arranged substantially parallel to each other.

That offers the advantage that the connections between the filling line 47 and the pressure transmission line 49 and between the reference pressure feed line 17 and the pressure transmission line 29 can be performed in parallel in a single operation.

Alternatively or additionally, have the sensor housing 53 and the pressurization module 55 . 57 preferably on the sides facing each one as a housing wall 37 . 41 formed section on, each having a subspace of a between the sensor housing 53 and the pressurization module 55 . 57 Enclosed housing interior of the Differenzdruckmessaufnehmers outside surrounds.

Analogous to the in 1 shown second diaphragm seal module also have the pressurization modules 55 respectively. 57 preferably an opening 43 in the housing wall area 41 on, through which arranged in the housing interior of the respective Differenzdruckmessaufnehmers sensor electronics 21 can be connected to the parent unit. Optionally, on the the opening 43 outside wall area of the housing wall 41 also here a connecting piece 45 be provided on which a not shown here housing can be mounted.

The use of the filling line 47 as a connecting line to the pressure transmission line 49 the first pressure transmitter has the advantage that it is thereby possible in a comparatively simple manner, the separation membranes 9 . 25 to arrange the two diaphragm seals parallel to each other in a plane next to each other.

For this purpose, the pressure-receiving chambers 11 . 27 the two Druckmitler eg by on the sensor housing 53 remote end face of the pressurization module 55 juxtaposed, out through the respective separation membrane 9 . 11 completed recesses be formed and the pressure transmission lines connected thereto 29 . 49 the two diaphragm seals substantially parallel to each other up to the associated reference pressure supply line 17 or the associated filling line 47 run. 2 shows an example in which the pressurization module 55 as two substantially parallel to each other arranged pressure transmitter comprehensive diaphragm seal module is formed.

Alternatively, the with the reference pressure supply line 17 connected pressure transmission line 29 one end with the reference pressure supply line 17 connected line section, which is followed by a substantially perpendicular thereto extending line section, which communicates with the pressure receiving chamber 27 the second diaphragm seal is connected, and with the filling line 47 connected pressure transmission line 49 one end with the filling line 47 Having connected line section, which is followed by a substantially perpendicular thereto extending line section, which communicates with the pressure receiving chamber 11 the first diaphragm seal is connected.

3 shows an example in which the pressurization module 57 a first and a second submodule 59 . 61 includes. The first submodule 59 includes the with the reference pressure supply line 17 and with the filling line 47 connected line section, and the two adjacent to these two line sections perpendicular thereto extending line sections. The second submodule 61 includes on the first sub-module 59 side facing away from each other by one of the two separation membranes 9 . 25 completed pressure-receiving chambers 11 . 27 , to each one through the second sub-module 61 passing through line section of the pressure transmission line 29 . 49 connects the respective pressure transmitter.

The first and second submodule 59 . 61 provided line sections of the pressure transmission lines 29 . 49 the two diaphragm seals are connected to each other via a preferably designed as a connector connection. 3 shows an example in which the in one of the two sub-modules 59 . 61 provided line sections each have a projecting Leitungsendbereich 63 have in one end portion of the associated, in the other sub-module 61 . 59 arranged line section protrudes. In this case, the line end 63 For example, each as an integral part of one of the two sub-modules 59 . 61 or as one of the two sub-modules 59 . 61 used, eg welded tubes be formed.

A pressure-tight seal of the connections between the line sections can also here, for example, by a the respective line end 63 external bonding 31 , For example, an adhesive executed with an epoxy resin-based adhesive 31 , be effected.

Alternatively, the pressure-tight seal of the connections between the line sections through a the respective line end 63 Outer seal surrounding 65 be effected. In that case, the seal becomes 65 preferably by one of the two sub-modules 59 . 61 interconnecting mechanical connection between the two sub-modules 59 . 61 clamped. 7 shows as an example of this a schematic representation of a side view of the differential pressure transducer of 3 in which one passes through the sensor housing 53 and that with the sensor housing 53 connected first sub-module 59 formed assembly 67 through the assembly 67 enclosing the outside with the second submodule 61 connected straps 69 , such as the screw bracket shown here, with clamping of the seals 65 with the second submodule 61 connected is.

The substantially same size of the two on both sides of the measuring membrane 7 in the respective Differenzdruckmessaufnehmer each filled with the pressure-transmitting liquid inner volumes can be achieved by different individually or in combination with each other usable measures.

1 shows a measure that consists in that at least one line section of the pressure transmission line 29 of the second pressure transmitter has an inner diameter which is greater than an inner diameter of at least one further line section of the pressure transmission line 29 of the second pressure transmitter is.

2 shows a measure that consists in that the two on both sides of the diaphragm 7 to the measuring membrane 7 adjacent, filled in each case with the pressure-transmitting liquid substantially equal inner volumes each have a filling line 71 . 73 for filling the respective inner volume with the pressure-transmitting liquid and the inner volumes of these two filling lines 71 . 73 are different in size.

1 and 3 show a measure that consists in that on the inside of the measuring diaphragm 7 adjacent, filled with the liquid inner volume arranged in the differential pressure transducer, esp. In the second diaphragm seal module or in the pressurization module 57 arranged, filled with the liquid volume adjustment chamber 75 includes.

The previously based on the in the 1 to 3 illustrated differential pressure transducers can, just as well known from the prior art differential pressure transducers are equipped with corresponding known from the prior art process connections, via which they can be mounted on a measuring point side provided, complementary thereto connection and / or connected to differential pressure lines.

Thus, the two diaphragm seal modules of in 1 represented Differenzdruckmessaufnehmers eg with the in 5 shown as an example, there attached to the same design diaphragm seal module of Relativdruckmessaufnehmers process connection 77 be equipped. The in 5 only shown as an example process connection 77 includes an external thread 79 which can be screwed into a complementary internal thread of a measuring point side provided connection. The process connection 77 For example, can be connected by a screw or a circumferential weld with the respective diaphragm seal module. Alternatively, of course, other known in the art from the prior art process connection forms can be used.

Alternatively, the diaphragm seal modules or the pressure application modules 55 . 57 include a process connection. So can the in 2 and 3 illustrated pressurization modules 55 . 57 for example, on the separation membranes 9 . 25 comprehensive end face in each case one formed for example as Prozessanschlussflansch process connection 81 comprise, via which the differential pressure transducer mounted on a measuring point side provided complementary thereto connector mounted and / or can be connected to differential pressure lines.

LIST OF REFERENCE NUMBERS

1

 Relative pressure measurement module

3

 carrier

5

 Relative pressure sensor

7

 measuring membrane

9

 first separation membrane

11

 first pressure receiving chamber

13

 first pressure measuring chamber

15

 second pressure measuring chamber

17

 Reference pressure supply line

19

 body

21

 sensor electronics

23

 connecting cable

25

 second separation membrane

27

 second pressure receiving chamber

29

 Pressure transmission line

31

 splice

33

 Body of the first diaphragm seal

35

 Pressure transmission line

37

 housing wall

39

 Body of the second diaphragm seal

41

 housing wall

43

 opening

45

 spigot

47

 Filling conduit

49

 Pressure transmission line

51

 line section

53

 sensor housing

55

 Druckbeaufschlagungsmodul

57

 Druckbeaufschlagungsmodul

59

 first submodule

61

 second submodule

63

 Line end portion

65

 poetry

67

 module

69

 hanger

71

 Filling conduit

73

 Filling conduit

75

 Volume adjusting chamber

77

 process connection

79

 external thread

81

 process connection

Claims (15)

Differential pressure transducer, with - in a Relativdruckmessaufnehmer for metrological detection of a relative pressure usable relative pressure measuring module ( 1 ), - wherein the relative pressure measuring module ( 1 ) a carrier ( 3 ), one on the support ( 3 ) arranged relative pressure sensor ( 5 ) and one by the wearer ( 3 ) passing through, in a below a measuring membrane ( 7 ) of the relative pressure sensor ( 5 ) enclosed second pressure measuring chamber ( 15 ) reference pressure feed ( 17 ), via which the second pressure measuring chamber ( 15 ) when using the relative pressure measuring module ( 1 ) can be acted upon in a relative pressure transducer with a reference pressure (p _ref ) comprises, - a the relative pressure sensor ( 5 ) upstream, filled with a pressure-transmitting liquid first diaphragm seal via which an outer side of the measuring diaphragm ( 7 ) can be acted upon with a first pressure (p ₁ ), and - a second diaphragm seal filled with a pressure-transmitting fluid, via which an inner side of the diaphragm ( 7 ) can be acted upon with a second pressure (p ₂ ), - wherein the second diaphragm seal a to the reference pressure supply line ( 17 ) of the relative pressure measuring module ( 1 ) connected pressure transmission line ( 29 ), and - the two on both sides of the measuring membrane ( 7 ) to the measuring membrane ( 7 ) adjacent, each filled with the pressure-transmitting liquid inner volumes are at least approximately substantially equal. Differential pressure sensor according to claim 1, - whose first diaphragm seal a from the outside with a first pressure (p ₁ ) acted upon separating membrane ( 9 ), under which a first pressure-receiving chamber ( 11 ), which is equipped with a relative pressure sensor ( 5 ) outside surrounding first pressure measuring chamber ( 13 ), - whose second diaphragm seal a from the outside with the second pressure (p ₂ ) acted upon separating membrane ( 25 ), under which a second pressure-receiving chamber ( 27 ), which via the pressure transmission line ( 29 ) of the second diaphragm seal and the reference pressure supply line ( 17 ) of the reference pressure measuring module ( 1 ) with the under the measuring membrane ( 7 ) enclosed second pressure measuring chamber ( 15 ), - to the inside of the measuring membrane ( 7 ) adjacent, filled with the liquid inner volume through the inner volumes of the second pressure measuring chamber ( 15 ), the reference pressure supply ( 17 ), the pressure transmission line ( 29 ) and under the second separation membrane ( 25 ) enclosed second pressure receiving chamber ( 27 ) and, to the outside of the measuring membrane ( 7 ) adjacent, filled with the liquid inner volume through the inner volumes of the first pressure measuring chamber ( 13 ), the first pressure measuring chamber ( 13 ) with the first pressure receiving chamber ( 11 ) connecting pressure transmission line ( 35 . 49 ) and the first pressure receiving chamber ( 11 ) comprises partial volumes formed. Differenzdruckmessaufnehmer according to claim 1 to 2, in which - the first pressure transmitter is designed as a first diaphragm seal module, esp. As a deployable in an identical form in a Relativdruckmessaufnehmer first diaphragm seal module, which is a first pressure measuring chamber ( 13 ), outwardly through the carrier ( 3 ) of the relative pressure measuring module ( 1 ) Completed recess comprises, and - the second diaphragm seal is formed as a connected to the first diaphragm seal module second diaphragm seal module. Differential pressure transducer according to claim 1 or 2, wherein - the relative pressure measuring module ( 1 ) one by the carrier ( 3 ) passing through the filling line ( 47 ), via which a relative pressure sensor ( 5 ) in a Relativdruckmessaufnehmer upstream first diaphragm seal can be filled with a pressure-transmitting liquid, and - the filling line ( 47 ) forms a connecting line via which the relative pressure sensor ( 5 ) outside surrounding first pressure measuring chamber ( 13 ) with a to the pressure receiving chamber ( 11 ) of the first pressure transmitter connected pressure transmission line ( 49 ) of the first pressure transmitter is connected. Differential pressure transducer according to claim 4, comprising - a sensor housing ( 53 ) into which the relative pressure measuring module ( 1 ) is inserted such that the relative pressure sensor ( 5 ) on the outside of a first pressure measuring chamber ( 13 ) forming recess in the sensor housing ( 53 ) is surrounded and the first pressure measuring chamber ( 13 ) to the outside by the carrier ( 3 ) of the relative pressure measuring module ( 1 ), and - one with the sensor housing ( 53 ) associated pressurization module ( 55 . 57 ), which via the filling line ( 47 ) of the relative pressure measuring module ( 1 ) with the first pressure measuring chamber ( 13 ) connected first diaphragm seal and via the reference pressure supply line ( 17 ) with the second pressure measuring chamber ( 15 ) connected second pressure transmitter comprises. Differential pressure transducer according to claim 4 or 5, wherein the reference pressure supply line ( 17 ), one with the reference pressure supply line ( 17 ) connected end portion of the pressure transmission line ( 29 ) of the second diaphragm seal, the filling line ( 47 ) and one with the filling line ( 47 ) connected end portion of the pressure transmission line ( 49 ) of the first pressure transmitter are arranged substantially parallel to each other. Differential pressure transducer according to claim 1 to 6, wherein - the reference pressure supply line ( 17 ) of the relative pressure measuring module ( 1 ) and the pressure transmission line ( 29 ) of the second pressure transmitter are connected to one another such that an end region of one of these two lines surrounds an end region of the respective other line on the outside, and / or - the filling line ( 47 ) of the relative pressure measuring module ( 1 ) and the pressure transmission line ( 49 ) of the first pressure transmitter are connected to one another such that an end region of one of these two lines surrounds an end region of the respective other line on the outside. Differential pressure transducer according to claim 7, wherein - the reference pressure supply line ( 17 ) and the pressure transmission line ( 29 ) by means of a bond ( 31 ), esp. An adhesive bond carried out with an epoxy resin-based adhesive ( 31 ), pressure-tightly connected to each other, and / or - the filling line ( 47 ) of the relative pressure measuring module ( 1 ) and the pressure transmission line ( 49 ) of the first diaphragm seal by means of a bond ( 31 ), esp. An adhesive bond carried out with an epoxy resin-based adhesive ( 31 ), pressure-tightly interconnected, Differential pressure transducer according to claim 3 or 5, wherein - the first and the second diaphragm seal module or the sensor housing ( 53 ) and the pressurization module ( 55 . 57 ) on the sides facing each one as a housing wall ( 37 . 41 ) have formed portion, - the two mutually facing housing walls ( 37 . 41 ) are connected to one another at the end, in particular are connected to one another by means of a weld, and - the two housing walls ( 37 . 41 ) each outside a Teilbreich a trapped in the Differenzdruckmessaufnehmer housing interior surrounded on the outside. Differential pressure transducer according to claim 9, wherein - in the housing wall ( 41 ) of the second diaphragm seal module or of the pressure application module ( 55 . 57 ) an opening ( 43 ) is provided, via which a arranged in the housing interior, to the relative pressure sensor ( 5 ) connected sensor electronics ( 21 ) is connectable to a superior unit, - wherein on one of the opening ( 43 ) outside wall area of the housing wall ( 41 ) esp. a connecting piece ( 45 ) is provided, on which a housing is mounted. Differential pressure transducer according to claim 4 or 5, wherein the separation membranes ( 9 . 11 ) of the two diaphragm seals are arranged in a plane next to each other, wherein the separation membranes ( 9 . 11 ) esp. on one of the sensor housing ( 53 ) facing away from the end face of the pressurization module ( 55 ) are arranged. Differential pressure transducer according to claim 5, in which - the pressurizing module ( 57 ) a first and a second submodule ( 59 . 61 ), - the first sub-module ( 59 ) one with the filling line ( 47 ) connected line section and an adjoining perpendicular thereto line section of the pressure transmission line ( 49 ) of the first pressure transmitter, - the first submodule ( 59 ) one with the reference pressure supply line ( 17 ) connected line section and an adjoining perpendicular thereto line section of the pressure transmission line ( 29 ) of the second pressure transmitter, and - the second sub-module ( 61 ) on the first sub-module ( 59 ) facing away from each other by one of the two separation membranes ( 9 . 25 ) completed pressure-receiving chambers ( 11 . 27 ), to each one by the second sub-module ( 61 ) extending therethrough line section of the pressure transmission line ( 29 . 49 ) of the respective pressure transmitter, - wherein in each case one of the two in the first and second sub-module ( 59 . 61 ), interconnected line sections of the pressure transmission lines ( 29 . 59 ) of the two diaphragm seals a projecting line end region ( 63 ), which in an end region of the associated, in particular by means of a line end region ( 63 ) outside bonding ( 31 ), in the other sub-module ( 61 . 59 ) arranged line section protrudes. Differential pressure transducer according to claim 12, wherein - a through the sensor housing ( 53 ) and with the sensor housing ( 53 ) connected first sub-module ( 59 ) formed assembly ( 67 ) by means of a mechanical connection, in particular one of the assembly ( 67 ) enclosing the outside, with the second sub-module ( 61 ) connected brackets ( 69 ), esp. Screw bracket, comprehensive connection, with the second sub-module ( 61 ), and / or - the line end regions ( 63 ) each on the outside of one between the first and the second sub-module ( 59 . 61 ) clamped gasket ( 65 ) are surrounded. Differential pressure transducer according to claim 1 to 13, wherein - the two on both sides of the measuring diaphragm ( 7 ) to the measuring membrane ( 7 ) adjacent, in each case filled with the pressure-transmitting liquid filled substantially equal inner volumes each have a filling line ( 71 . 73 ) for filling the respective inner volume with the pressure-transmitting liquid and the inner volumes of these two filling lines ( 71 . 73 ) are of different sizes, - at least one line section of the pressure transmission line ( 29 ) of the second pressure transmitter has an inner diameter which is greater than an inner diameter of at least one further line section of the pressure transmission line ( 29 ) of the second diaphragm seal, and / or - the to the inside of the diaphragm ( 7 ) adjacent filled with the liquid inner volume arranged in the differential pressure transducer, esp. In the second diaphragm seal module or in Druckbeaufschlagungsmodul ( 57 ), filled with the liquid volume adjustment chamber ( 75 ). Differenzdruckmessaufnehmer according to claim 1 to 13, - whose first and second diaphragm seal is in each case designed as a diaphragm seal module, which with a process connection ( 75 ), or - which comprises a pressurization module comprising the first and second pressure seals ( 55 . 57 ) on which the separation membranes ( 9 . 25 ) of the two diaphragm seals comprehensive end face a process connection ( 81 ), in particular a process connection designed as a process connection flange ( 81 ), is provided.

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