DE202007001356U1 - Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer - Google Patents

Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer Download PDF

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Publication number
DE202007001356U1
DE202007001356U1 DE200720001356 DE202007001356U DE202007001356U1 DE 202007001356 U1 DE202007001356 U1 DE 202007001356U1 DE 200720001356 DE200720001356 DE 200720001356 DE 202007001356 U DE202007001356 U DE 202007001356U DE 202007001356 U1 DE202007001356 U1 DE 202007001356U1
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DE
Germany
Prior art keywords
vacuum chamber
transformer
transmission device
fixed part
electricity transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200720001356
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English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to DE200720001356 priority Critical patent/DE202007001356U1/de
Publication of DE202007001356U1 publication Critical patent/DE202007001356U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gas-Insulated Switchgears (AREA)
DE200720001356 2007-01-24 2007-01-24 Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer Expired - Lifetime DE202007001356U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200720001356 DE202007001356U1 (de) 2007-01-24 2007-01-24 Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200720001356 DE202007001356U1 (de) 2007-01-24 2007-01-24 Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer

Publications (1)

Publication Number Publication Date
DE202007001356U1 true DE202007001356U1 (de) 2007-04-12

Family

ID=37983188

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200720001356 Expired - Lifetime DE202007001356U1 (de) 2007-01-24 2007-01-24 Vorrichtung zum Übertragen elektrischer Energie von einer Energiequelle außerhalb einer Vakuumkammer zu wenigstens einer Rohrkathode innerhalb der Vakuumkammer

Country Status (1)

Country Link
DE (1) DE202007001356U1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022073581A1 (en) * 2020-10-05 2022-04-14 Applied Materials, Inc. Tumbling protector for cathodes and method for compensating a tumbling of a cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022073581A1 (en) * 2020-10-05 2022-04-14 Applied Materials, Inc. Tumbling protector for cathodes and method for compensating a tumbling of a cathode

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20070516

R163 Identified publications notified

Effective date: 20071031

R150 Term of protection extended to 6 years

Effective date: 20100204

R151 Term of protection extended to 8 years
R151 Term of protection extended to 8 years

Effective date: 20130129

R082 Change of representative

Representative=s name: ZIMMERMANN & PARTNER, DE

Representative=s name: ZIMMERMANN & PARTNER PATENTANWAELTE MBB, DE

R082 Change of representative

Representative=s name: ZIMMERMANN & PARTNER, DE

Representative=s name: ZIMMERMANN & PARTNER PATENTANWAELTE MBB, DE

R152 Term of protection extended to 10 years
R152 Term of protection extended to 10 years

Effective date: 20150129

R071 Expiry of right