DE202005015618U1 - Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation - Google Patents

Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation Download PDF

Info

Publication number
DE202005015618U1
DE202005015618U1 DE200520015618 DE202005015618U DE202005015618U1 DE 202005015618 U1 DE202005015618 U1 DE 202005015618U1 DE 200520015618 DE200520015618 DE 200520015618 DE 202005015618 U DE202005015618 U DE 202005015618U DE 202005015618 U1 DE202005015618 U1 DE 202005015618U1
Authority
DE
Germany
Prior art keywords
vacuum apparatus
piece plate
plate free
dirt accumulation
allow dirt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200520015618
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE200520015618 priority Critical patent/DE202005015618U1/en
Publication of DE202005015618U1 publication Critical patent/DE202005015618U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Abstract

A vaporization screen for covering or masking the vapor source in high-vacuum apparatus has a one-piece base plate (1b).

Description

Bedampfungsblende üblicher Bauart besteht aus mehreren metallischen Bauteilen, die miteinander durch Schweißnähte verbunden werden.Evaporator panel more usual Design consists of several metallic components, which together connected by welds become.

Die herkömmliche Bedampfungsblende besteht aus Grundplatte (1), Seitenwand (2), Aufdopplung (3) und Verstärkung (4).The conventional fume hood consists of base plate ( 1 ), Side wall ( 2 ), Doubling ( 3 ) and reinforcement ( 4 ).

Der im Schutzanspruch gegebenen Erfindung, bezeichnet als Bedampfungsblende, liegt das Problem zugrunde, eine Bedampfungsblende zu schaffen, die einerseits keine offenen Hohlräume in der Konstruktion aufweist, in denen sich zwangsläufig Verschmutzung ansiedeln kann.Of the in protection claim given invention, referred to as Bedampfungsblende, the problem is to create a fume hood on the one hand has no open cavities in the construction, in which inevitably Pollution can settle.

Die Erfindung beruht darauf, dass die Grundplatte der Bedampfungsblende, bedingt durch ihren Aufbau keine Aufdopplung und Verstärkung benötigt und aus einem Stück gefertigt ist.The Invention is based on the fact that the base plate of the Bedampfungsblende, due to their construction no duplication and reinforcement needed and out of one piece is made.

Die im Schutzanspruch gegebenen Bedampfungsblende besteht aus der Grundplatte (1b) und dem Seitenteil (2b), verbunden durch eine Schweißnaht (3b), dadurch können sich keine Schmutzpartikel in offenen Hohlräumen ansammeln.The protection claim given vaporization consists of the base plate ( 1b ) and the side part ( 2 B ), connected by a weld ( 3b ), thus no dirt particles can accumulate in open cavities.

Das von uns als Bedampfungsblende bezeichnete Teil, dient in Hochvakuumanlagen zum Abdecken der Aufdampfquellen. Zur Steuerung eines Aufdampfprozesses kann diese Bedampfungsblende elektromagnetisch oder mit Pressluft (automatisch oder manuell) angesteuert und somit geöffnet bzw. geschlossen werden.The Part of us called evaporating panel, used in high-vacuum systems for covering the evaporation sources. For controlling a vapor deposition process This fume hood can be electromagnetically or with compressed air (automatic or manual) controlled and thus opened or closed become.

Damit keine Verunreinigungen während des Öffnens oder Schließens der Bedampfungsblende in die Schmelze der Quelle eindringen können, ist es besonders wichtig, dass die Blendenoberflächen sauber gehalten werden können. Verschmutzungen durch Reste von Strahlsand können Spritzer verursachen oder Veränderungen der Eigenschaften der Schmelze hervorrufen. Je höher der Schmelzpunkt des verwendeten Aufdampfmaterials ist, desto höher ist auch die thermische Belastung der Quelle (Shutter).In order to no impurities during of opening or closing the evaporation aperture can penetrate into the melt of the source is It is especially important that the panel surfaces are kept clean can. Dirt from residues of blasting sand can cause splashing or changes cause the properties of the melt. The higher the melting point of the used Vapor material is the higher also the thermal load of the source (shutter).

Die Bedampfungsblende ist außerdem nicht magnetisch, da bei der heute üblichen Verwendung von Elektronenstrahlquellen, zum Aufheizen der Schmelze, der Elektronenstrahl durch Magnetfelder abgelenkt werden könnte.The Evaporator panel is also non-magnetic, since in today's conventional use of electron beam sources, for heating the melt, the electron beam is deflected by magnetic fields could be.

Claims (3)

Das von uns als Bedampfungsblende bezeichnete Teil, zum Abdecken der Aufdampfquellen in Hochvacuumanlagen, wird dadurch gekennzeichnet, dass die Grundplatte (1b) aus einem Stück gefertigt ist.The part designated by us as an evaporating panel, for covering the evaporation sources in high-vacuum systems, is characterized in that the base plate ( 1b ) is made in one piece. Bedampfungsblende nach einem der vorhergehenden Ansprüche wird dadurch gekennzeichnet, dass die Bedampfungsblende, bedingt durch ihren Aufbau keine zusätzliche Aufdopplung(3) und Verstärkung(4) benötigt.Evaporator panel according to one of the preceding claims, characterized in that the Bedampfungsblende, due to their structure no additional doubling ( 3 ) and reinforcement ( 4 ) needed. Bedampfungsblende nach einem der vorhergehenden Ansprüche wird dadurch gekennzeichnet, dass die Bedampfungsblende in ihrer Bauart keine offenen Hohlräume aufweist.Effervescent panel according to one of the preceding claims characterized in that the Bedampfungsblende in their design no open cavities having.
DE200520015618 2005-10-03 2005-10-03 Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation Expired - Lifetime DE202005015618U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200520015618 DE202005015618U1 (en) 2005-10-03 2005-10-03 Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200520015618 DE202005015618U1 (en) 2005-10-03 2005-10-03 Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation

Publications (1)

Publication Number Publication Date
DE202005015618U1 true DE202005015618U1 (en) 2006-05-18

Family

ID=36571526

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200520015618 Expired - Lifetime DE202005015618U1 (en) 2005-10-03 2005-10-03 Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation

Country Status (1)

Country Link
DE (1) DE202005015618U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012139714A1 (en) 2011-04-12 2012-10-18 Createc Fischer & Co. Gmbh Evaporator cell closure device for a coating plant

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012139714A1 (en) 2011-04-12 2012-10-18 Createc Fischer & Co. Gmbh Evaporator cell closure device for a coating plant
DE102011016814A1 (en) * 2011-04-12 2012-10-18 Createc Fischer & Co. Gmbh Evaporator cell closure device for a coating system
DE102011016814B4 (en) * 2011-04-12 2017-03-23 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Evaporator cell closure device for a coating system

Similar Documents

Publication Publication Date Title
DE102006014694B3 (en) Process chamber and method for processing a material with a directed beam of electromagnetic radiation, in particular for a laser sintering device
DE3043830C2 (en)
DE102007035622B4 (en) Lid for a furnace for receiving molten metal, in particular metal, and furnace for receiving molten material
DE69826940T2 (en) Grader stove oven to refine Titanium
DE102015117238A1 (en) Machining module for an additive manufacturing device
DE3814652C2 (en)
DE102014203576A1 (en) Laser processing head with a crossjet nozzle close to the workpiece
DE3942049A1 (en) METHOD AND DEVICE FOR GENERATING FEED MATERIAL FLOWS BY MEANS OF TRANSVERSAL LASER JETS
WO2013092981A2 (en) Method for protecting the surface of an optical component and device for processing work pieces
DE102006031244B4 (en) Device for evaporating a material by means of an electron beam and for depositing the vapor on a substrate
DE69917551T2 (en) The vacuum degassing
DE102009019146B4 (en) Process and apparatus for high rate coating by high pressure evaporation
DE102006005807A1 (en) Filter element for extractor hood
DE202005015618U1 (en) Vaporization screen for use in high-vacuum apparatus is made as a one-piece plate free of hollow zones liable to allow dirt accumulation
DE102014103635B4 (en) Vacuum chamber with a protective housing
DE3244691A1 (en) SPRAYER OR SPRAYING DEVICE
EP2050837B1 (en) Method for ion-plasma application of film coatings and a device for carrying out said method
DE3632027C1 (en) Process and vacuum vapor deposition system for metallizing foil surfaces
DE2152094A1 (en) Heating system for an electron beam furnace
WO2000016373A1 (en) Target array for an arc vapor deposition chamber
DE102006023463A1 (en) Electron beam vaporization apparatus has hood between crucible and substrate to be coated which is in form of frustrum of cone or pyramid with narrow end near substrate, window in mantle wall allowing electron beam to penetrate
DE102013202483B4 (en) Method and machine for producing a surface coating
DE19818868A1 (en) Method and apparatus for filtering material vapours containing macro particles
DE3901016C2 (en)
DE19925330A1 (en) Sputter target, used for thin film cathodic sputter deposition, is produced or regenerated by passing an IR source over target material to effect melting on a cast plate or worn target region

Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20060622

R156 Lapse of ip right after 3 years

Effective date: 20090501