DE2012360A1 - Patentwesen, Ost-Berlin WPI38673 Method and circuit arrangement for the production of photo stencils with repeating systems of any size, which are arranged in a stencil field that is shifted in a defined manner with respect to a fixed point - Google Patents

Description

Method and circuit arrangement for the production of photo stencils with repetition systems of any size, which in a with respect to a Fixed point defined shifted template field are arranged.

The invention relates to a method and a circuit arrangement, which allow it, in particular for the production of photo templates, the dimensions of the structures arranged in rows and columns in the template field, which are referred to below as repetition systems can be designed to be as large as you want without interfering with the used To reduce the resolution that can be achieved by the projection system and to enlarge the aberrations. The circuit arrangement relates on devices for the production of photo stencils that work according to the "step - and - repeat" principle, so-called photorepeaters, where the 'positioning process is fully or semi-automatic and the sequence of movements takes place in a comb-shaped manner.

The trend in the development of solid-state circuits is characterized on the one hand by the constant reduction in the dimensions of the

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Structural elements and, on the other hand, by increasing the degree of integration This means that the projection systems require the highest possible resolution as well as large image fields with high image quality. Both requirements contradict each other, because it is well known that high resolution, high contrast and low imaging errors limit the usable image field of optical imaging systems.

In all known photorepeaters a compromise between minimum Dimensions of the structural elements and maximum dimensions of the Repeat systems, d. H. between resolution and »image quality and field of view, are closed. With regard to the minimum dimensions of the structural elements, the technical limits are already imposed by the resolving power of light-optical systems can be determined been. A further increase in the degree of integration is therefore only possible by enlarging the image fields, which, however, is achieved by the Properties of the available projection optics are limited.

The purpose of the invention is to create fully or semi-automatic photo repeaters to be supplemented in such a way that much larger repeat systems can be produced than would be possible through the limited image field of the projection optics, but with their optimal imaging properties. can be fully exploited. To the same extent as the dimensions, As the repeating systems increase, the degree of internal integration increases of solid-state circuits.

The invention is based on the object of a method for production of photo stencils with repeat systems of any external dimensions, whereby the sharpness of the structural elements corresponds to that with light-optical Imaging methods corresponds to the maximum achievable resolution, to develop and to create a circuit arrangement for its implementation.

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According to the invention, the requirement is achieved in that the coordinate values x. “Nd y. of the first repetition system of a photo template - im hereinafter referred to as start coordinates - to which all further repetition systems of the characterized by rows and columns, Connect the grid-shaped template field, set in a defined manner or can be preselected. It is to be assumed that the positioning device of the photorepeater is exactly fixed and reproducible has an adjustable reference point that is used as a The zero point of the coordinate system is used · This must be at least during the total time it takes to produce a complete stencil an accuracy of the kind that is retained as the positioning accuracy for all repetition systems contained in the template field is required *

The production of photo stencils with large-area repetition systems, which consist of several different, self-contained individual systems, hereinafter referred to as inhomogeneous complex systems, takes place in such a way that the step-and-repeat cycle corresponds to the number of individual systems with different initial coordinates x. and V. is completed several times in a row. Included the intermediate negative and the associated start coordinates x are exchanged before each cycle. and y, set or preselected. With a suitable choice of the respective value pairs x .; j. the individual systems brought into a certain position to each other and put together to complex repeat systems »

The production of photo stencils with large-area tfiederholsystenj im hereinafter referred to as a homogeneous Koaplex system j composed

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is carried out, like the production of inhomogeneous complex systems, by running the step-and-repeat cycle multiple times, with the intermediate negatives being exchanged and the initial coordinates being set after each cycle. This method must always be used when the dimensions of a homogeneous complex system are so large that it cannot be imaged with the projection system. For this purpose, the complex system is broken down into a suitable number of subsystems, the dimensions of which are adapted to the field of view of the projection system and which are each represented by an intermediate negative. The dividing lines for the division of the homogeneous complex system are laid in such a way that structural elements, ie components of the solid-state circuit, are not cut or only cut at uncritical points. If the sub-systems are reassembled through multiple repetitions of the step-and-repeat cycle with an accuracy that corresponds to the positional accuracy and edge definition of the structural elements, then the resolution of the projection system is fully utilized for all areas of the homogeneous complex system are inserted in a known manner in readjustment · m frame and adjusted using an alignment mark.

By means of a defined setting of the start coordinates x. «Nd y. is it also possible, the template field, d. H. those with rfiederholsysteraen Covered curses of the photo plate to be moved anywhere on the photo plate. This is important, for example, for the production of photo stencils with very small repetition systems. To be in such Cases to use the full field of view of the project! On system and the "• 'esar.t-.jauer of photo-stencil making as well as the burden

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reduce the electronic flash tubes of the photorepeater ■ to a minimum, the intermediate negative must already contain several identical repeat systems arranged in a suitable grid size. This intermediate negative can be made with the photorepeater itself by first an intermediate negative, which contains only a single repeat system, is produced in the usual way. With this' becomes a Photo template produced in the subsequent "step - and - repeat process" serves as an intermediate negative. The template field required for this will have relatively small external dimensions and must be symmetrical to the center of the photo plate. :

Maximum utilization of the usable area of the photographic plates is of particular interest when relatively large repetitive systems, e.g. B * with projection systems with a small image scale, are shown »In the known photorepeaters, the first line is arranged after a line distance Δ y and the first column after a column distance Ji χ based on the zero point of the positioning device. This creates unused edge areas on the photographic plate, the width of which is at least half the total dimension of the repeating system. This loss of usable photographic plate area, which increases with the dimensions of the repeating system, can be reduced by a suitable choice of the initial coordinates x. and y. Eliminate completely.

About the production of large-area repeating systems through composition To guarantee from individual or sub-systems, one of independent setting of the coordinate values of the first repetition system can be provided for the line and column distance. Photorepeater, whose positioning devices automatically perform a comb-shaped movement cycle, the positioning process being based on the count of Output signals of incremental measuring systems are based on preselected

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equipped with counters, on which the line and column distance and which are referred to below as distance counters * The position of the first repetition system is also determined by the set Row and column distance determined.

According to the invention, there is the circuit arrangement for the independent setting of the coordinate values x. and y, the first repeat system from two additional preselection units connected to the distance counters, one for the x and one for the y coordinates. All preselection units are linked to one another by logical circuits and memories so that during the movement cycle the positioning device determines the position of the first line by preselecting the y coordinate and the position of the first column, d. H. each of the first repetition system within a line, determined by the preselection of the x-coordinate of the first repetition system, on the other hand for all further line and column distances the line or column distance preselection units are effective. If there are several successive step and repeat cycles, the line and column distance preselections remain unchanged, while the coordinate values x. and y. readjusted before each cycle and the intermediate ne ^ atives replaced Since then, several template fields are created that are shifted against each other with the same grid dimensions. With a suitable choice of the values x. and y, these template fields are added to such a template field together, whose repeating systems are homogeneous or inhomogeneous complex systems form.

The invention extends the range of application of the photorepeater insofar as than through the defined adjustable initial coordinates x. and y. each stencil field arbitrarily large coaplex systems made of single or Subsystems automatically or semi-automatically assembled or template fields with regard to the border lines of the photo

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plate can be arranged shifted as desired. Since the positioning accuracy of the photorepeater is currently already with the maximum Resolving power of light-optical imaging systems is comparable, can be used on photographic stencils tfiederholsysteme with any size External dimensions are produced with the best image quality using conventional projection systems.

The invention is to be described in more detail below on the basis of exemplary embodiments explained. Ss show the drawings

Fig. 1: the schematic representation of a photo template with inhomogeneous Coapiex systems, which are composed of five individual systems are,

Fig. 2: the schematic representation of a homogeneous complex structure, which is divided into four subsystems because of its too large dimensions,

Fig. 3 ' the schematic representation of a photo template with homogeneous complex systems, which are composed of four sub-systems,

4: the schematic representation of the displacement of a template field on the photo plate,

Fig. 5 ί the schematic representation of the arrangement over a large area Repetition systems with optimal utilization of the photo plate

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Fig. 6 ί the circuit arrangement for. Determination of the start coordinates x, and f. of the template field. .

Sur production of a photo template with inhomogeneous complex systems 38 » which, according to FIG. 1, are composed, for example, of five individual systems, the step - and - repeat cycle becomes five times in a row executed, with one of the äünzelsysteiae 1 to 5 on the Photo plate 36 is projected and the associated initial coordinates

x ^ and Jr ₁ , ie in the example shown (x ^, y ^), (ig, y ^), (χ ,, y) and (.X ^ ₉ y ₂ ) » & n the preselection units. The preselected values of the line distance y and the column distance ^ x remain unchanged for all five cycles.

If a photo template is to be produced using an intermediate negative shown in Fig. 2, whose dimensions A and B exceed the image field of the projection system, then in the present example the intermediate negative is divided into four subsystems 6 to 9. that structural elements are not cut or only cut at uncritical points. All that needs to be guaranteed is an unrestricted mapping of each subsystem. The intermediate negatives of the individual subsystems are usually placed in adjustment frames and thereby brought into a defined position with respect to the optical axis of the projection system. For the purpose of adjustment, the intermediate negatives are provided with adjustment marks. The reassembly of the subsystems to form homogeneous complex systems 39 on the photographic plate 36 takes place by means of four successive step-and-repeat cycles. The first cycle is carried out with the intermediate of the subsystem 6, the P initial coordinates Xg and y_ being set. In the second cycle, the intermediate negative of subsystem 7 is inserted and the initial coordinates x "and y_ are set. This process is repeated until all the subsystems are projected onto the photographic plate in the correct position, as shown in FIG. 3, the set line and column distances remain unchanged during all cycles. The differences X ₁₇ - Xg, y. - y_ or y, - - y ^ of the initial coordinates are calculated from the dimensions of the corresponding subsystems.

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Fig. 4 shows a template field 37 with tfiederholsystemen 40, whose Total area much smaller than the usable area of the photo plate 36 is. By setting the initial coordinates x. and y. of the first Repeating system 4-1 can relate the template field to a specific position the border lines of the photo plate are brought »

In FIG. 5, using the example of a photo template with relatively large dimensions of the repeating systems 40, there is a further advantage of a photorepeater with adjustable start coordinates x. and y. compared to one in which the I * age of the first repetition system 4-1 is determined by the line and column distances. Sine optimal Use of the photo plate 36 is for any dimensions of the repeating system 40 possible in that the location of the first repeat system 41 is determined independently of the respective row and column distances by the initial coordinates x and y *.

The circuit arrangement for determining the initial coordinates x. and y. of the template field is shown in Fig. 6. The signals of an incremental length measuring system, not shown in the drawing, arrive via input 2? to a distance counter 10. Since in the comb-shaped movement of the positioning device, as is usual with photorepeaters, the movements in the row and column directions never take place simultaneously, this distance counter is used both for measuring the line distances / \ y and the column distances

Δ χ used. The line distance is preselected by a preselection unit 12 connected to the distance counter 10 and an AND element 16 connected to it, and the column distance is preselected by a preselection unit 11 and an AND element 15 connected to it, with a signal from each of the AND elements 15 and 16 is issued as soon as one of the pre-selection digits is reached. In addition, the distance counter 10 is a

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Pre-selection unit 14 with an AND element 18 for preselecting the start coordinate y. and a preselection unit 13 with a UID element 17 for preselecting the initial coordinate x. connected · With the outputs of the AND gates 1? and 18 are each connected to a bistable multivibrator 21 or 22, which are each in the basic position shown in the drawing at the beginning of the process cycle and thus block the AND elements 15 and 16 assigned to the distance preselection units 11 and 12, the AND elements 17 and 18 prepare against it · The AND gates 15 and 1? are also connected via the preparation input 28 and the AND gates 16 and 18 via the preparation input 29 to the control unit, not shown in the drawing, of the positioning device. Furthermore, the output signals of the AND gates 15 and 1? after linking by means of an OR element 23 to a column counter 2h and the output signals of the AND elements 16 and 18 via an ODÜR element 25 to a line counter 26 »Via output 32 of column counter 24 and output 33 of the line counter, the control unit of the positioning device Signals for controlling the process flow are supplied. The outputs of the UIJD elements 15 to 18 are linked by means of an OR element and the signals are fed to the input of a monostable multivibrator 20, which causes the distance counter 10 to be reset to the number "Hull".

The usual comb-shaped sequence of movements for making a photo stencil begins with the movement in the y-direction (column direction), with the AND elements 15 and 17 blocked by an 0 signal at preparation input 28 and the AND gates 16 and 18 provided for preselections of the y movement are prepared by an L signal at input 29 static output signals of the bistable hultivibrators in the basic position, the AND gates 15 and 16 blocked, the AND gates

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17 and 18 prepared against it. Since the AND elements 15-17 are blocked, a preselection signal can arise at the output of the AND element 18 as soon as the coordinate value y preselected with the preselection unit 14. is achieved. A signal is thus fed to the line counter 26 via the OR gate 25 and the first line is counted. .bistable multivibrator tilted into its working position, with which the OTiD element is prepared and the AND element 18 is blocked, and a signal to stop the y-movement is fed to the positioning device via output 35 of the control unit (not shown in the drawing). The bistable multivibrator 22 now remains in the working position until the end of the process cycle, so that only the line distance A y set on the preselection unit 12 is effective for all subsequent movements in y directions. The output signal of the AND element 18 also reaches the input of the monostable multivibrator 20 via the OR element 19, which resets the distance counter 10 to the number "KuIl".

After stopping the y movement, the x movement will start as well by an L signal at preparation input 28, the AND gates 15 and 17 prepared and by a G signal at preparation input 29 the AND gates 16 and 18 blocked. The AND gate 15 is, however, through the The bistable multivibrator 21 in the basic position is blocked. As soon as the digit of the distance counter «10 with the by preselection unit 13 preselected coordinate value x, the bistable multivibrator 21 is tilted from its basic position into the working position by the output signal of the AND element 17, whereby the AND element 17 blocked and the AND gate 15 is prepared. The same signal reaches the output 34 via the ODSR element 23, which triggers the exposure process, and the input of the column counter 24, who counts the first column »In addition, the OR element 19 and

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the monostable multivibrator 20 of the distance counter 10 is set to the number "zero". During the further x-movement, only signals at intervals of the column distance preselected with preselection unit 11 from the output of the AND element 15 to the output 3h- _t to the input of the column counter 2h and amf the reset input of the distance counter 10 *

As soon as the maximum number of columns of the template field preselected at the column counter 2h is reached, the x-movement is reversed via output 32, ie. the return of the positioning device and the bistable multivibrator 21 is tilted back into the basic position via input 30.After reaching the line start position, the x-movement is stopped and the y-movement is started, which takes place until the line distance preselected by means of the preselection unit 12 is reached , whereby the y-movement is stopped via output 35, the line counter 26 is advanced by one digit and the distance counter 10 is set to "zero". There are alternating movements in the x and y directions in the manner described until the maximum number of lines preselected on the line counter 26 is reached and the process cycle is terminated via the output. The bistable M "ltivibratoren 21 and \ 22 are respectively brought before or at the beginning of the process cycle through the inputs 30 and 31 in the basic position.

Unless the code units 13 and / or 14 is set to the code number "zero", the associated bistable Hultivibratoren or / and 18 already at the beginning of the process cycle in di · working position so that the Vorwahleinhei th 11 or / and 12 are tilted, effective immediately are.

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Claims (1)

Patent claims: (ly 'process for the automatic production of photo stencils with Repeating systems of any size, which are in an orthogonal Template field with predefined line and column distances are arranged, characterized in that the orthogonal Template field (3?) With respect to one by the positioning device and the optical projection system fixed orthogonal Reference system around defined initial coordinates x ^ and y., which is determined by a program that is specified independently of the line and column distance and is preselected by means of gate dialing units be set, is moved and that several in their Repeating systems different template fields against each other displaced on the photo plate (36) and arranged to one from complex systems (38; 39) existing template field (37) composed will. 2 «The method according to claim 1, characterized in that the complex systems (38) are made up of different, functionally self-contained individual systems (1; 2; 3; 4 ·; 5) by running the step-and-repeat process several times in succession at each ^ eils differently selected initial coordinates, x. and y. of the first repeating system (41), the external dimensions of the individual systems being smaller than the image field of the projection system, while the dimensions of the complex system (38) exceed the image field at will. 009840/1926 - ¹⁴ ~ * 201236Q 3 «The method according to claim 1, characterized in that a functionally closed complex system (39), its dimensions are larger than the image field of the projection system, in different, functionally not closed subsystems (6; 7; 8th; 9), whose dimensions are smaller than the image field of the projection system and whose boundary lines are adapted to the structure content, and that these subsystems are divided by several successive step-and-repeat processes each with different pre-selected initial coordinates x. and y. of the first Repeat system (4-1) can be put together without gaps, with a Complex stencil field is created, its bodice structures from consist of the homogeneous complex system (39). 4 ·. Circuit arrangement for the production of photo templates with repetition systems of any size, which are also in an orthogonal template field which is displaced in a defined manner with respect to a fixed point predetermined line and column distances are arranged, according to claim 1, characterized in that on the distance counter (10) Preselection units for line (12) and column distance (11) and for preselection of the start coordinates x. (13) and y, (14) including the associated AND gates for generating the preset signals (15; 16 »17; 18) are connected, each input of the AND gates (15; 17) jointly connected to a preparation input for Movement in line direction (28) and a further input to one of the outputs of a bistable multivibrator (21) as well as each one input of the AND gates (16; 18) jointly to a preparation input for movement in the column direction (29) and one each Another input are led to one of the outputs of a bistable multivibrator (22), one input of the bistable 009840/1926 " ¹⁵ " »Ti ft · * t # f MultiTibrators (21) is connected to the output of the AND element (17) and the other is the input for preparing a Represents movement in the line direction (30) and an input of the bistable multivibrator «(22) with the output of the AND element (18) is connected and the other represents the input for the preparation of the first step in column direction (31),. while the outputs of all AND gates (15; 16; 17; 18) linked by means of an OR gate (19) and with a monostable Multivibrator for generating the RUcfcstellimpulse (20) for the Distance counter (10) are connected and also the outputs of the AND elements (15; 17) after being linked by an OR element (23) to the input of a column counter (24) or to an output for triggering the exposure process (34) and the outputs of the UID leather (16; 18) after being linked by an OR element (25) to the input of a line counter (26) or to an output for stopping the movement in the column direction (35) are performed. - For this Ύ sheet of drawings - 009840/1926