DE19983566T1 - Micromachined mirror with a retractable restoring force element - Google Patents
Micromachined mirror with a retractable restoring force elementInfo
- Publication number
- DE19983566T1 DE19983566T1 DE19983566T DE19983566T DE19983566T1 DE 19983566 T1 DE19983566 T1 DE 19983566T1 DE 19983566 T DE19983566 T DE 19983566T DE 19983566 T DE19983566 T DE 19983566T DE 19983566 T1 DE19983566 T1 DE 19983566T1
- Authority
- DE
- Germany
- Prior art keywords
- retractable
- restoring force
- force element
- micromachined mirror
- micromachined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
- G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
- G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10098998P | 1998-09-18 | 1998-09-18 | |
PCT/US1999/021682 WO2000017865A1 (en) | 1998-09-18 | 1999-09-17 | Micromachined mirror with stretchable restoring force member |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19983566T1 true DE19983566T1 (en) | 2001-08-16 |
Family
ID=22282566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19983566T Withdrawn DE19983566T1 (en) | 1998-09-18 | 1999-09-17 | Micromachined mirror with a retractable restoring force element |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP4619538B2 (en) |
KR (1) | KR100473693B1 (en) |
CN (1) | CN1128440C (en) |
AU (1) | AU6254999A (en) |
DE (1) | DE19983566T1 (en) |
GB (1) | GB2362224B (en) |
WO (1) | WO2000017865A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7002215B1 (en) * | 2002-09-30 | 2006-02-21 | Pts Corporation | Floating entrance guard for preventing electrical short circuits |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153870A (en) * | 1989-06-29 | 1992-10-06 | Digital Equipment Corporation | Rotary head actuator for optical disk |
US5202875A (en) * | 1991-06-04 | 1993-04-13 | International Business Machines Corporation | Multiple data surface optical data storage system |
US5629794A (en) * | 1995-05-31 | 1997-05-13 | Texas Instruments Incorporated | Spatial light modulator having an analog beam for steering light |
US5661591A (en) * | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
JPH09152505A (en) * | 1995-11-30 | 1997-06-10 | Sharp Corp | Deformable mirror and its manufacture, and optical device and recording and reproducing device |
US6044056A (en) * | 1996-07-30 | 2000-03-28 | Seagate Technology, Inc. | Flying optical head with dynamic mirror |
WO1998009289A1 (en) * | 1996-08-27 | 1998-03-05 | Quinta Corporation | Optical head using micro-machined elements |
JPH10188319A (en) * | 1996-12-26 | 1998-07-21 | Sharp Corp | Deformable mirror and optical recording and reproducing device using the same |
CA2340192A1 (en) * | 1998-09-02 | 2000-03-09 | Armand P. Neukermans | Micromachined members coupled for relative rotation by torsional flexure hinges |
-
1999
- 1999-09-17 CN CN99812840A patent/CN1128440C/en not_active Expired - Fee Related
- 1999-09-17 KR KR10-2001-7003528A patent/KR100473693B1/en not_active IP Right Cessation
- 1999-09-17 WO PCT/US1999/021682 patent/WO2000017865A1/en active IP Right Grant
- 1999-09-17 AU AU62549/99A patent/AU6254999A/en not_active Abandoned
- 1999-09-17 DE DE19983566T patent/DE19983566T1/en not_active Withdrawn
- 1999-09-17 JP JP2000571445A patent/JP4619538B2/en not_active Expired - Fee Related
- 1999-09-17 GB GB0109131A patent/GB2362224B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2000017865A1 (en) | 2000-03-30 |
GB2362224B (en) | 2003-03-19 |
KR100473693B1 (en) | 2005-03-08 |
JP4619538B2 (en) | 2011-01-26 |
GB2362224A (en) | 2001-11-14 |
KR20010075212A (en) | 2001-08-09 |
GB0109131D0 (en) | 2001-05-30 |
CN1128440C (en) | 2003-11-19 |
AU6254999A (en) | 2000-04-10 |
JP2002525691A (en) | 2002-08-13 |
CN1325530A (en) | 2001-12-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8180 | Miscellaneous part 1 |
Free format text: DIE BEZEICHNUNG IST ZU AENDERN IN: MIKROBEARBEITETER SPIEGEL MIT DEHNBAREM RUECKSTELLKRAFTELEMENT |
|
8139 | Disposal/non-payment of the annual fee |