DE19983421D2 - Elektrostatisch durchstimmbare mikromechanische Kapazität mit großer Kapazitätsvariation - Google Patents

Elektrostatisch durchstimmbare mikromechanische Kapazität mit großer Kapazitätsvariation

Info

Publication number
DE19983421D2
DE19983421D2 DE19983421T DE19983421T DE19983421D2 DE 19983421 D2 DE19983421 D2 DE 19983421D2 DE 19983421 T DE19983421 T DE 19983421T DE 19983421 T DE19983421 T DE 19983421T DE 19983421 D2 DE19983421 D2 DE 19983421D2
Authority
DE
Germany
Prior art keywords
capacity
variation
tunable micromechanical
electrostatically tunable
large capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19983421T
Other languages
English (en)
Inventor
Bernd Hillerich
Ignaz Schiele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE19983421D2 publication Critical patent/DE19983421D2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
DE19983421T 1999-06-10 1999-06-10 Elektrostatisch durchstimmbare mikromechanische Kapazität mit großer Kapazitätsvariation Expired - Fee Related DE19983421D2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE1999/001731 WO2000077804A1 (de) 1999-06-10 1999-06-10 Elektrostatisch durchstimmbare mikromechanische kapazität mit grosser kapazitätsvariation

Publications (1)

Publication Number Publication Date
DE19983421D2 true DE19983421D2 (de) 2001-08-30

Family

ID=6918834

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19983421T Expired - Fee Related DE19983421D2 (de) 1999-06-10 1999-06-10 Elektrostatisch durchstimmbare mikromechanische Kapazität mit großer Kapazitätsvariation

Country Status (2)

Country Link
DE (1) DE19983421D2 (de)
WO (1) WO2000077804A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10145721A1 (de) * 2001-09-17 2003-04-10 Infineon Technologies Ag Vorrichtung zum mechanischen Steuern einer elektrischen Kapazität und Verfahren zur Herstellung derselben
GB0205794D0 (en) 2002-03-12 2002-04-24 Montelius Lars G Mems devices on a nanometer scale
CN1874955B (zh) * 2003-10-31 2011-03-30 爱普科斯公司 电子器件的制造方法和电子器件
ES2293767B1 (es) * 2005-03-23 2009-02-16 Angel Iglesias, S.A. Procedimiento de fabricacion de membranas metalicas ultrafinas de espesor controlado por ataque ionico reactivo y con parada automatica y microestructuras capacitivas resultantes.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312025A (en) * 1978-12-06 1982-01-19 Rca Corporation Magnetic variable capacitor
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5901031A (en) * 1995-02-01 1999-05-04 Murata Manufacturing Co., Ltd. Variable capacitor

Also Published As

Publication number Publication date
WO2000077804A1 (de) 2000-12-21

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee