DE19957370C2 - Method and device for coating a substrate - Google Patents

Description

Technical field

The invention relates to a method and an apparatus for Coating a substrate with one or more thin ones Layers using a radiation source. at such methods and devices is by the Radiation source a layer raw material by the herein introduced radiation is changed in any way so that the modified layer raw material then as a layer on the substrate or adheres to a previously applied layer. By doing the radiation in a suitable manner in the desired areas a pattern of some kind can be introduced be generated. The layer thickness can also be adjusted.

Such a coating process is particularly for Production of three-dimensional bodies usable by several thin, individually designed layers are generated sequentially. So are generally under that Rapid prototyping Known making models. Stereolithography too is to be subsumed under this.

State of the art

As already mentioned at the beginning, coating processes are used for where several layers are made in succession, by using the radiation of a radiation source in a targeted manner  to a layered raw material in any way change, for the production of three-dimensional bodies known for a long time. This is a method from US 4,801,477 and a device for producing three-dimensional Bodies known through photopolymerization. Here is in one liquid photopolymer plastic successively through a the liquid plastic introduced radiation source a layer with an opposite substrate predetermined thickness generated. Compared to the generally known Stereolithography here is special in that the Photopolymerization not on the free surface of the liquid plastic takes place, but in the liquid. The radiation source is both opposite the substrate adjustable in height as well as in the XY direction, so that by creating many small solidified ones Plastic sections built a three-dimensional body can be.

Compared to creating a change in the Layer raw material, here the liquid photopolymer Plastic, on the free surface of the plastic bath are due to the below the surface of the plastic caused hardening - for example radical Polymerization for acrylic resins, cationic polymerization for epoxy and vinyl ether resins - which are often used by Problems of surface photopolymerization, such as shrinking and deviating from the target position. However, here the problem arises that between the transparent layer for the transmission of radiation and the opposite substrate or the previously created layer the hardening of the layer raw material takes place, so that the transparent layer of the radiation source and the chemically  modified, hardened plastic layer firmly against each other be liable. In practice it has been shown that due to this Effect that, for example, with the liability effect of two dampened, adjacent plates is comparable, a practical solution for such a device so far was not possible. It is true that in said US 4,801,477 addressed this liability problem and as a supposed one Solution specified, the transparent rigid layer of the To be specially coated, for example with UHMW Polyolefin or fluorinated ethylene-propylene copolymers, such as modified Teflon, but is in the Practice not successfully solving the liability problem.

US 5,164,128 is a stereolithography machine in which in one embodiment a curable Liquid on an immiscible, heavy liquid swims. Through the heavy liquid by means of a UV light source energy into the curable liquid introduced and this in the desired pattern substantiated. Thus, successively different ones Layers of a substrate to be produced, the stick together. After each exposure process there is a Pulling up the substrate, causing the hardened Layer parts should detach from the heavy liquid. To the one should be emphasized that in this view this embodiment cannot be put into practice in practice is. In this way, a defined hardening can take place Embodiment with a liquid as an intermediate layer not done exactly enough and it should be when pulling up the No flat surface at least for a long time for the next exposure process. If a solution that can be implemented in practice is possible at all,  it takes longer periods of calm to get one again perfect layering of the hardenable liquid and the to achieve heavy liquid, which is extremely is uneconomical.

From US 5,089,184 there is also an alternative Process for producing three-dimensional bodies from multiple layers using a radiation source known in which the radiation through a radiation permeable rigid floor surface in a liquid photopolymer plastic is introduced. Opposite the The substrate is radiation-permeable floor surface arranged on which the three-dimensional body is built. The substrate is from the radiation-permeable bottom surface to position at a distance that the respective corresponds to the desired layer thickness to be produced.

But the liability problem explained above also arises here between the rigid floor surface and the substrate or one already applied layer on it. The solution is in In this case, suggested only very small areas one layer and after each irradiation process by increasing the distance between the floor surface and to effect a separation of the layer just produced. Alternatively, the total floor area is proposed relative to the substrate by a certain angular amount tilt. The first supposed alternative solution is when it can be put into practice at all with the problem afflicted that building one or more layers very much long takes what the manufacturing costs for one multilayered body greatly increased. The second supposed Alternative solution is fraught with the problem that continue to exert great mechanical forces on the substrate and the  adhering layers act on the one hand Damage to the layers can lead to the other Can affect the accuracy of a component to be manufactured.

The previously described known procedures and Devices have in common that the per se against one Layer production on the free surface of a Layer raw material cheaper procedure or not can be put into practice with unacceptable results are because the separation process between the straight manufactured layer and the radiation-transmissive The counter surface is not yet controllable.

Presentation of the invention

The technical problem underlying the invention exists therein, a method and an apparatus of the beginning the kind mentioned to improve that a lighter Separation process between the layer produced and one adjacent, opposite surface is feasible.

This technical problem is solved by a procedure according to claim 1 and a device according to claim 14 solved. This is in the method according to the invention Layer raw material between the substrate or one already on the substrate and a layer applied to the substrate opposite, changeable surface of a Solid. By appropriately introducing radiation energy is in the layer raw material as in the prior art changed at least part of the layer raw material, whereby  it then on the substrate or the previously applied layer adheres. The substrate is then removed with the layer of the changeable solid surface, for example, by the substrate from the shape-changing solid surface is pulled away or rotated relative to this. But it would be also conceivable to provide that the form-changeable Solid surface moved away from the substrate or opposite this is twisted. Alternatively, a combination is also possible of these two movements possible.

The layer raw material can be a liquid, solid or be gaseous material. These materials are already in the State of the art well known. The corresponding Processes are known as rapid prototyping u. a. Stereolithography, Selective Laser Sintering, Fused Deposition modeling and laminated object manufacturing designated. All of these known methods are discussed here expressly referred to. For a detailed explanation this known method is unnecessary to avoid Repetitions waived.

The invention is based on the idea instead of - as with State of the art - a rigid surface or one in the Practice problematic liquid as a counterpart to To provide substrate, a reshapeable Solid surface to use. Due to the changeable shape or geometry of the solid surface, in particular one flexible layer element with correspondingly changeable Surface design, it is possible for the first time to create a new one manufactured layer easier to lay down from the Layer thickness and / or the layer shape of the to be generated  To remove layer serving solid surface. This means, a flexible solid surface enables one easier separation process. As already mentioned, it is with the new method according to the invention is also optional possible, the layer shape - in other words, their Cross-sectional geometry or generally the relief of a new one Layer - in advance by appropriate relief design of the shape-changeable solid surface. So that is So for the first time a layer with different thicknesses produced. The energy of the Radiation source depending on the thickness of each Shift range varies. So when using a laser, the energy is increased with a greater layer thickness, correspondingly with a lower layer thickness of the to be produced Layer area whose energy can be reduced. It is here again emphasized that for the first time this is not just a plan Layers with a uniform thickness can be produced, but also layers with any surface geometry. For the Case that areas in the layer to be produced are empty, i. H. should not be filled with layer material, this is with the new process can be easily implemented. This will be easy in the corresponding area there is real contact between the Substrate or a layer already adhering to it and the shape-changeable solid surface. This ideally happens because the flexible Solid surface in the space you want later Has elevation or bulge, so in cross section seen protrude from adjacent surface areas.

This extends the possible range of applications for one significant method according to the invention. For example so u. a. also processed boards or the like or  be made using the appropriate patterns with the required depths are created.

The invention also allows the use of Layer raw materials that are made up of different Put together substances, which in turn under different Conditions can be changed, in particular can be hardened. For example, it would be conceivable to use any liquid photopolymer plastic with thermoplastic components to mix, so then with different Radiation sources the different substances in different areas of the layer to be produced can be created. In particular is for a inventive method a film or a membrane can be used that are flexible and / or elastic from their original location as it was during the making of the Layer is taken, is deflectable and thereby their original surface shape changed. Such a film can for example made of silicone, polyethylene or PVC or at least be coated with it. It goes without saying another three-dimensional solid for this usable, its somehow geometrically Solid surface briefly compliant, flexible or is somehow reshapeable. Core of the present invention So is the special choice of the solid surface that the Opposed substrate and which together with the substrate or the layer thickness of a previously created layer and / or the layer surface geometry of the to be generated Layer of raw material. For example, takes the surface of the solid briefly during the separation process a different shape that differs from the original different. This is how a film is seen in cross section  for example, deflected and released by a certain amount thereby gradually from the adherent, straight manufactured layer, but is after a complete Detachment of the layer advantageously again assume the original position and shape.

Of course it is also possible instead of the substrate to move the changeable solid surface or to move both parts in opposite directions or twist against each other. With all these separations it is essential that the solid surface in its shape is changeable, i.e. its original geometric shape changed to facilitate the separation process. It can, must but no longer return to the original position.

The inventive method as well as the inventive Device basically work according to the procedures as they are are already known in the art and in particular were previously explained. All of these known methods are but modified so that now no rigid removable surface is present, but a changeable in shape or changeable in its geometry Solid surface is used.

In particular, the method according to the invention is with a Feasible film that is stretched wrinkle-free and at Separation process by a certain amount from their original Level is deflected. This film is advantageous then of course, as in the state of the aforementioned Technology coated to further reduce adhesion. The method according to the invention can also be used both with a laser, the laser beam of which is known in the art  Mirror or the like is deflected, however other radiation sources can also be used. The respective Radiation source depends of course on the used Layer raw material.

This means that the process cannot only be carried out with liquid perform photopolymeric plastics, but also with for example, thermally changeable liquids or Solids as well as gases by being out of the gas phase is deposited. So are solidifications of the Layer raw material possible, melting processes can be carried out, other modified embodiments conceivable, such as for example a special activation or passivation of the layer raw material. The layer raw material itself can thus be liquid, powdery, waxy or gaseous.

Towards solidifications on the surface of liquid photopolymer plastics, as in the known Stereolithography are effected, has the inventive Process has the advantage that not only now low-viscosity, but also high-viscosity materials are usable. As is known, a so-called dewetting effect occurs on, the thinner a liquid is distributed; d. H. the thinly distributed liquid contracts again, so that Areas arise that are not covered with layered raw material are. This is exactly what happens when wiping on the free Surface, as in the known stereolithography necessary is. Would you like to get the dewetting effect counteract, use a highly viscous liquid, so the problem would arise that due to the wiping emerging speed profile itself an unacceptable Ripple would result, based on building accuracy  would be extremely detrimental. Since with the invention If there is no clear surface left, step the aforementioned problems did not arise, so that now too highly viscous materials such as plastics, resins and also powdery solids can be used. Beyond that in that no free surface of the layer raw material there is also contact with ambient gases avoidable, which is particularly the case with liquid photopolymers Plastics is an advantage. For the first time it is also far to provide less layered raw material since the bathrooms are far need to be less deep than before, which is due to the very expensive photopolymer plastics in terms of necessary deployment costs is extremely important. Thereby the flexibility of the process is also greatly increased. So can now use different materials for different layers be used. It is also possible to be inexpensive different fabrics, such as colors or Reinforcing fibers to mix in liquid plastics what due to the high cost of the previously required large Plastic or resin quantities not economically feasible was. Since the first time to build a multi-layer body required amount of layer raw material is far less than in the processes that work with a free surface (Stereolithography), it is also not necessary for the first time that the layer raw material has long-term chemical stability having. So far, it was with the Stereolithography necessary to design the resins so that these chemically for at least several weeks or even months are stable. Otherwise there would be no economical production possible with these very expensive resins, which are well known in large quantities stored in a stereolithography machine have to be. Since much less in the invention  Layered raw material to be used at once is theirs Long-term chemical stability no longer a criterion, so that previously overlooked for economic reasons Materials that have manufacturing advantages, can now be used. So theoretically it has to be Material to have a chemical stability that the construction time corresponds to a shift.

The essential features of a coating device a substrate with one or more thin layers using a radiation source are one Substrate carrier on which the substrate to be coated can be attached, a solid body opposite the substrate with a changeable surface and a radiation source to generate radiation. With the radiation is one Layer raw material between the substrate or one already adhesive layer and the shape-changeable Solid surface can be changed and therefore on the substrate or can be adhered to a layer previously generated. Finally a separator is required to make the manufactured Layer from the shape-changeable solid surface separate.

Advantageously, the one opposite the substrate Element is a film that is stretched flat, for example, but can be deflected by pushing or pulling perpendicular to the film plane.

Basically, two embodiments of the device are conceivable. In the one, which is similar in structure to US 4,801,477, the shape-changeable solid surface is the top of the radiation source, which is immersed, for example, in a liquid photopolymer plastic, which is opposite a solid, rigid surface and between which the plastic hardens in the desired manner due to the radiation becomes. With this arrangement, the layer raw material can of course also be a powder to be melted or any type of solid. For example, it is also possible to use wax, etc. The other construction corresponds to the arrangement shown in US Pat. No. 5,089,184 ( FIG. 2 of this prior art), in which a plurality of layers are generated on a substrate carrier and the radiation source is arranged below a radiation-transmissive plate.

According to the invention, the rigid is now in both alternatives Surface of the radiation-transmissive part by a changeable solid surface replaced, such as for example a film that is particularly stretchy, flexible or is elastic.

As with US 5,089,184, it is possible according to the invention that a laser is used as the radiation source, depending on the the layer raw material used is designed and its Beam in the desired way through a deflector is distracted. In addition, however, as is also the case in US Pat. No. 5,089,184 is described, a surface irradiation Device can be used as a radiation source, in which case one Mask is arranged in the beam path to the desired Introduce patterns into the layer to be produced. The mask itself is then preferably integrated into the film by the film is partially translucent, sometimes not is transparent to radiation. An appropriate mask but can be used as a separate part of the changeable Be solid surface upstream.  

Basically, none is originally planned form-changeable solid surface necessary, it can also there is an originally three-dimensional geometry that then a different three-dimensional geometry during the separation process occupies.

In a previously mentioned arrangement in which the Radiation-permeable, form-changeable solid surface part or all of the floor at the same time Forms receiving device for the layer raw material, it can be advantageous as a radiation-permeable support element use a rigid surface, for example a glass plate or similar. In this case, it can be used to support the Separation process be useful between the support element and to bring a fluid into the overlying film. Under Under certain circumstances, the blowing process can take place before or after Start the separation process. Ideally, he is with at the same time Start of separation started. H. when moving the Substrate carrier or the surface. As a fluid in particular air can be used, which is under pressure in the resulting gap between the support element and one of the opposite changeable solid surface Side is introduced.

It should finally be emphasized here that basically all known coating processes in which a layered raw material by using radiation energy in is changed as desired, can be used, wherein between the part to be coated and a counter surface - According to the invention, the layer that can be changed for the first time - the Layer thickness and / or the layer relief is limited.  

In the method according to the invention, the spatial Arrangement of this part to be coated and the counter surface no matter. So the surface to be coated can be over or be arranged below the counter surface. But that's exactly how it is also possible to arrange the two parts laterally to each other, so the layer to be made is essentially one vertical or any other angle to horizontal having. This is the case with free surfaces, as with the Stereolithography are necessary, technically excluded. This is due to the optional spatial arrangement inventive method to all possible spatial and adaptable to other processing situations.

Brief description of the drawings

The following are for further explanation and for better Understanding the invention under several embodiments Described in more detail with reference to the accompanying drawings and explained. It shows:

Fig. 1 is a schematic side view of a first embodiment of a device according to the invention in a first operating phase,

Fig. 2 shows the embodiment of an inventive device in a further operating phase shown in Fig. 1,

Fig. 3 shows the embodiment shown in Fig. 1 of an inventive apparatus in a further operating phase,

Fig. 4 shows the embodiment of Fig. 1 in a further operating phase,

Fig. 5 is a schematic representation of a second embodiment of a device according to the invention,

Fig. 6 is a schematic representation of a third embodiment of a device according to the invention,

Fig. 7 shows the device of Fig. 6 in a different operating phase,

Fig. 8 is a schematic illustration is, however, a further modified embodiment of a device according to the invention, similar to that shown in FIG. 1,

Fig. 9 is a schematic representation of a further modified embodiment of the apparatus shown in Fig. 8,

Fig. 10 is a schematic representation of a further embodiment of a device according to the invention with flächenabstrahlender radiation source,

Fig. 11 is a schematic representation of a further embodiment of a device according to the invention with three-dimensional, shape-variable surface of the substrate opposite element,

Fig. 12 is a schematic representation of a further modified embodiment of a device according to the invention and

FIG. 13a) -d) a plurality of schematic cross sections of a shape-changing surface having a relief for formation of various layer thicknesses in a layer.

Detailed description of embodiments of the invention

A first embodiment of a device according to the invention and a method according to the invention will be explained with reference to FIGS. 1-4. As shown schematically in FIG. 1, the device comprises a container for a liquid photopolymer plastic 7 . The container here consists of a metal ring or frame 1 , which is covered on the bottom with a film 2 . The film edges 21 are folded over on the side wall of the metal ring 1 and fastened there in a sealing manner, for example by means of an adhesive tape. The film here is a silicone or PE film that has a thickness of a few µm to a few millimeters, in particular approximately 5 µm-1 mm. It is tension-free in frame 1 . The frame 1 is rotatably mounted about a central axis 11 (not shown). For rotating the frame 1 about the central axis 11 , a friction wheel 14 is provided, which is operated by a drive, not shown, and is connected to a control system, also not shown.

A deflection device in the form of a controlled, movable mirror 6 is arranged below the container and is used for the directed deflection of a laser beam 4 , 5 . The laser beam is emitted by a radiation source 3 , shown schematically here, for example a UV laser.

A substrate carrier 9 is arranged above the container and can be moved in the Z direction by means of a control (not shown). A substrate 8 in the form of a plate is fastened to the substrate carrier 9 and can have, for example, a plurality of through holes or can be designed in the form of a grid. The adjustability of the substrate carrier 9 in the Z direction is extremely fine. The substrate 8 is coated as follows, as can also be seen in FIGS. 1-4. The liquid photopolymer plastic 7 is filled into the container. The fill level above the film 2 here only has to be a little more than the desired layer thickness of the layer to be produced, which is significantly less than in the case of a device which hardens the liquid photopolymer on a free surface, that is to say works with a wiper.

The substrate carrier 9 is dipped down into the liquid photopolymer, namely so far that the distance between the substrate and the substrate a is equal to the layer thickness d 8 facing surface 2 to be generating layer. Depending on the viscosity of the layer of raw material, in this case, the liquid photopolymer resin 7, even with very thin film thicknesses d ensured during shutdown of the substrate 8 that the gap between the two opposing elements 8 and is filled 2 a completely with layer raw material. 7 In the case of highly viscous liquids, it may be expedient to provide a plurality of through holes or a grid in the substrate 8 , which allow liquid to pass through, so that when the substrate 8 is immersed in the layer raw material 7, it is completely free, without air inclusions between the film 2 and the film Can distribute substrate 8 .

If the layer thickness d is reached, the laser 3 is activated and the laser beam 4 is deflected in the desired pattern with the aid of the mirror device 6 . The deflected laser beam 5 passes through the film 2 and hits the liquid photopolymer plastic with the layer thickness d. At those points where the beam strikes, the layer raw material 7 is changed by a chemical reaction, it hardens. Hardened areas 10 are formed which adhere to the substrate carrier 8 . Adhesion also occurs on the surface 2 a of the film 2 . However, it is undesirable there.

The substrate carrier 9 is now moved away from the film 2 , as already shown for a multilayer model in FIG. 3. Due to the initial strong adhesion of the surface 2 a to the layer 10 just produced, the film 2 is deflected from its original position and occupies the position 2 '. The layer then separates from the last layer 10 produced and returns to its original position due to the flexibility and elasticity present here. Liquid plastic 7 flows back into the resulting gap. By lowering the substrate support 9 and the substrate 8 may be between the film surface 2a and the most recently generated again layer 10 d a desired distance u is. U. differs from the previous distance d can be set. A further layer 10 of the desired pattern can then be generated by reactivating the laser. This last state is shown in FIG. 4. As can be seen, a multi-layer model is created, which can have any three-dimensional shape and whose layers 10 have different thicknesses d, depending on how the distance between the film surface 2 a and the previously generated layer 10 was set.

When the laser beam 5 is introduced into the layer raw material 7 , chemical reactions are brought about in the edge of the hardened areas 10 in the liquid photopolymer, so that individual solidified, loose particles which do not adhere to the layer 10 remain in the liquid photopolymer bath. In order to avoid loss of quality in the subsequent layer to be produced, the entire container is rotated here by a certain angular amount via the friction wheel 14 . The rotation can begin during, at the same time or also shortly before the support carrier 9 is moved upwards. This ensures that the purest possible plastic is available for the new layer 10 to be created. If the rotation begins at the same time as the support carrier 9 is started up, or shortly before, the separation of the hardened layer 10 from the film surface 2 is additionally supported.

It can be seen from the above explanations of the method according to FIGS. 1-4 that, of course, after each layer 10 that has been produced, another layer raw material 7 can also be used for the layers 10 by exchanging the container. For the first time, a body can also be made from several layers of different materials. For example, different colors can also be added to the respective layer raw material 7 , or additives such as glass fibers, etc., in order to increase the strength of the finished model.

From Fig. 5, a further embodiment of the device according to the invention can be seen. Here, a frame 1 is provided on the bottom with the film 2 . In the X direction shown, different compartments are formed by subdivisions 26 , which contain different layer raw materials 23 , 24 , 25 . The entire frame 1 with the film and the various layer raw materials 23 , 24 , 25 can be moved in the X direction. In accordance with the procedure explained above, one or more layers can be formed with the layer raw material 23 on the substrate 8 . Another layer raw material 24 is then moved under the substrate 8 and one or more layers are produced from this layer material 24 . The layer raw material 25 can be used in the same way. Of course, it is also possible to move the substrate carrier 9 not only in the Z direction but also in the X direction. The container with the different layer raw materials remains stationary. The radiation source 3 is not shown in this figure, but the method is otherwise to be carried out as in FIGS. 1-4.

A further embodiment of a device according to the invention can be seen from FIGS. 6 and 7. The device shown schematically here comprises a film 30 in the form of an endless belt, which rotates on deflection rollers 31 . A flat film section extends between the two upper deflection rollers 31 . The film outside 30 a faces a substrate 8 on a substrate carrier 9 . As in the previously mentioned embodiments, the substrate carrier 9 is movable in the Z direction. Below the film 30 there is again a radiation source, the beam 4 of which is to be directed onto the substrate in the desired manner by a deflection device 6 . In the flat surface portion of the film 30 are above the film surface 30 a plurality of memory devices 32, 33, 34 are arranged for different liquid, solid, powdered or highly viscous Schichtrohmaterialien. Depending on requirements, a layer is applied from the memories 32 - 34 shown to the film surface 30 a and smoothed by a smoothing device 35 , so that the layer 36 then formed on the film surface 30 a has a predetermined thickness d '.

By transporting the film 30 in the direction of the arrow, this layer 36 is moved under the substrate 8 . Then the substrate 8 or an already created layer 10 is brought into contact with this layer or immersed in it, as shown in FIG. 7, depending on which layer thickness is desired. Then the radiation source 3 is activated and through the film 30 the predetermined area of the layer raw material 36 is changed by the radiation energy introduced in such a way that a coating 10 with a desired pattern is produced on the substrate 8 or a layer 10 already applied beforehand. Then the substrate carrier 9 is moved with the substrate 8 upwards in the Z direction and the film strip 30 is transported further, where the "used" layer raw material 37 is stripped from the film strip 30 and reprocessed via a scraper 38 or fed directly back to the associated storage device 32-34 becomes. For the next layer, the same or a different layer raw material can then be applied to the film strip 30 from a different store 32-34 . The desired layer thickness d 'can be set by the device 35 also being displaceable in the Z direction.

FIG. 8 schematically shows a modified embodiment of the device shown in FIGS. 1-4. There is a glass plate 12 below the film 2 , which serves to support the film 2 . It is also transparent to the deflected laser beam 5 . Furthermore, this plate 12 has one or more air supply openings 13 , into which air or another fluid can be introduced, in order to introduce the fluid between the film 2 and the glass plate 12 while the substrate carrier 9 is being pulled up, as a result of which the hardening layer 10 made of layer raw material is separated 7 and the film surface 2 a is additionally supported.

In the embodiment shown in FIG. 9, the device shown in FIG. 8 is modified in such a way that a plurality of laser sources 3 , 3 'are present, so that a plurality of laser beams are activated simultaneously to produce a layer, thereby reducing the processing times for producing one Layer can be reduced or different materials in the layer raw material can be changed at the same time or hardened with different photopolymers.

In contrast to the previous embodiments, no radiation source with a beam 4 , 5 is used in the device shown schematically in FIG. 10, but rather a radiation source 3 ″ which causes diffuse or planar radiation 4 ′. The film 2 ′ is here formed as a mask, ie it contains film sections 2 b which are transparent to radiation and other sections which are not transparent to radiation, thus making it possible to achieve a predetermined pattern in the manner already explained by chemical modification of the layer raw material 7 on the substrate 8 film itself has, in turn, a shape-changeable surface 2 a, ie, the film is flexible here. of course, it is also possible not to incorporate the mask in the foil 2 ', but in an underlying glass plate, as for example, in FIG. 9 or 8 is shown.

FIG. 11 schematically shows a device in which an elastic or flexible body 40 , at least in the area of a surface 40 a, serves as a receiving basin for the layer raw material 43 and is equipped with a three-dimensional, shape-changing surface 40 a. The body consists, for example, of a radiation-transmissive silicone rubber or another radiation-transmissive, elastic plastic or the like. A laser beam 5, deflected in the desired manner, can in turn be introduced through the body 40 into the layer raw material 43 , so that a three-dimensional layer 44 is generated on a substrate 45 which is fastened to a substrate carrier 9 . After the production of the layer 44 on the substrate 45 , the substrate carrier 9 is in turn moved upward in the Z direction, as a result of which the elastic formation of the body 40 allows the surface 2 a to yield, that is to say a change in shape, so that the separation process between the hardened layer 44 and the surface 40 a is facilitated.

A further embodiment of a device according to the invention is shown in FIG . Here, the film 2 extends along an elongated basin with liquid photopolymer plastic 7 . A first region 10 ′ is hardened with a first radiation source, but here the energy of the laser beam 5 is set such that no hardening takes place up to the free surface of the plastic 7 . Then the film is moved further with the area 10 ′ to the substrate 8 . Here, the still liquid material 7 is hardened between the lowered substrate and the already hardened area 10 'in the manner described above. The laser beam 5 is guided through the first hardened area 10 '.

Finally, the various schematic cross sections of a film according to FIGS . 13a) -d) show different surface configurations of a counter surface 50a-50d, which itself is of course deformable, in particular elastic. Thus 13a) is a flat surface in Fig. 50 a, which serves to produce a layer 10 with a uniform thickness.

The Fig. 13b) shows a surface 50 b with relief to form two different film thicknesses d ₁ and d _2. This creates a layer 10 b with different layer thicknesses.

FIG. 13c) schematically shows a configuration of the surface 50 c, the different not only for the formation of layer thicknesses d ₁ and d ₂ is used, but has a real relief, with the various contours in the produced layer 10 c are formed.

Finally, Figure 13d shows. A configuration with the fact that not only the surface film 10 d has a relief, but also can be manufactured to be coated substrate 8, a layer 10 d with a relief on two sides.

Claims (33)

1. A method for coating a substrate ( 8 ) with one or more thin layers ( 10 ) using a radiation source ( 3 ), in which

• a) a layer raw material ( 7 ) is present between the substrate ( 8 ) and a shape-changing surface ( 2 a, 30 a, 40 a) opposite the substrate ( 8 ) of a solid ( 2 , 30 , 40 ),
• b) at least a part of the layer raw material ( 7 ) is changed by suitable introduction of radiation energy ( 6 ) and thereby adheres to the substrate ( 8 ) and
• c) the layer ( 10 ) now adhering to the substrate ( 8 ) is separated from the shape-changeable solid surface ( 2 a, 30 a, 40 a).

2. The method according to claim 1, characterized in that the process steps a) - c) are carried out repeatedly, the process steps then being modified as follows:

• 1. a ') a layer raw material ( 7 ) is present between the previously generated layer ( 10 ) and the shape-changeable solid surface ( 2 a, 30 a, 40 a) opposite the substrate ( 8 ),
• 2. b ') the layer raw material ( 7 ) is changed by suitable introduction of radiation energy ( 6 ) in the desired thickness (d) and the desired pattern and adheres to the previously generated layer ( 10 ) and
• 3. c ') the last layer ( 10 ) is separated from the shape-changeable solid surface ( 2 a, 30 a, 40 a).

3. The method according to claim 1, characterized in that the distance between the substrate ( 8 ) and the shape-changeable solid surface ( 2 a, 30 a, 40 a) is set to the desired layer thickness (d) of the layer ( 10 ) to be produced. 4. The method according to claim 2, characterized in that the distance between the one step previously created layer ( 10 ) and the shape-changeable solid surface ( 2 a, 30 a, 40 a) is set to the desired layer thickness (d). 5. The method according to claim 1 or 2, characterized in that process step c) and / or process step c ') are carried out in that the distance between the substrate ( 8 ) and the shape-changing solid surface ( 2 a, 30 a, 40 a) is enlarged. 6. The method according to claim 5, characterized in that the substrate ( 8 ) is moved away from the shape-changeable solid surface ( 2 a, 30 a, 40 a) or the shape-changeable solid surface is moved away from the substrate ( 8 ). 7. The method according to claim 1 or 2, characterized in that process step c) and / or process step c ') are carried out in that the substrate ( 8 ) and the shape-changing solid surface ( 2 a, 30 a, 40 a) against each other be twisted. 8. The method according to claim 3 and 5, characterized in that the method step c) and / or the method step c ') are carried out in that a translational and a rotational movement of the substrate ( 8 ) and / or the shape-changing solid surface ( 2 a , 30 a, 40 a) are superimposed. 9. The method according to any one of the preceding claims, characterized in that a film ( 2 ), in particular an elastic or elastically mounted film, is used so as to provide the shape-changeable solid surface ( 2 a, 30 a). 10. The method according to any one of the preceding claims, characterized in that the shape-changeable solid body surface (2 a, 30 a) for the radiation emanating from the radiation source (3) radiation (4, 5) is transparent and the radiation (4, 5) through the radiation-permeable solid surface is introduced into the layer raw material ( 7 ). 11. The method according to any one of the preceding claims, characterized in that a laser is used as the radiation source ( 3 ). 12. The method according to claim 11, characterized in that the laser beam ( 4 , 5 ) is directed by controlled beam deflection ( 6 ) in the desired pattern in the layer raw material ( 7 ). 13. The method according to any one of the preceding claims, characterized in that it is used to produce a three-dimensional body formed from a multiplicity of thin layers ( 10 ) of hardened material. 14. Device for coating a substrate ( 8 ) with one or more thin layers ( 10 ) with
a substrate carrier ( 9 ) to which the substrate ( 8 ) can be attached,
a solid body ( 2 , 30 , 40 ) opposite the substrate ( 8 ) with a shape-changeable surface ( 2 a, 30 a, 40 a),
a radiation source ( 3 ) for generating radiation ( 4 , 5 ) with which a layer raw material ( 7 ) can be changed and thereby adhered to the substrate ( 8 ) or to a layer ( 10 ) already generated, and
a device for separating a produced layer ( 10 ) from the shape-changing solid surface ( 2 a, 30 a, 40 a). 15. The apparatus according to claim 14, characterized in that a film ( 2 ) is present, the one form-changeable solid surface ( 2 a, 30 a) facing the substrate ( 8 ). 16. The apparatus according to claim 15, characterized in that the film ( 2 ) is at least part of a bottom of a container ( 1 ) and the radiation source ( 3 ) is arranged such that its radiation ( 4 , 5 ) through the film ( 2 ) can be introduced into the layered raw material ( 7 ). 17. Device according to one of claims 14-16, characterized in that the shape-changeable solid surface ( 10 ) is flat or has a relief. 18. Device according to one of claims 15-17, characterized in that the film ( 2 ) has a thickness of 1 µ-3 cm, in particular 2 µ-15 µ. 19. The apparatus according to claim 14, characterized in that the substrate carrier ( 9 ) is movably mounted and a control is available with which the substrate carrier ( 9 ) is adjustable according to the desired distance from the shape-changing solid surface ( 2 a, 30 a). 20. Device according to one of claims 14-19, characterized in that the radiation source is a laser ( 3 ) and a deflection device ( 6 ) is provided with which the beam ( 4 , 5 ) emanating from the laser ( 3 ) in the desired Direction is deflectable. 21. The apparatus according to claim 14, characterized in that the radiation source is a surface-irradiating device ( 3 ") and a mask is arranged in the beam path. 22. The apparatus according to claim 21, characterized in that the mask is integrated in the film ( 3 "). 23. The device according to claim 14, characterized in that a three-dimensional solid ( 40 ) with a three-dimensional shape-changeable solid surface ( 40 a) is present. 24. The device according to claim 15, characterized in that the film ( 2 , 30 ) on the side not coming into contact with the layer raw material ( 7 ) is supported by a support element ( 12 ). 25. The device according to claim 24, characterized in that the support element is a radiation-transparent plate ( 12 ) at least in one section. 26. The device according to claim 24 or 25, characterized in that a device ( 13 ) is present with which a fluid between the film ( 2 , 30 ) and the support element ( 12 ) can be introduced. 27. The device according to claim 26, characterized in that the device ( 13 ) is designed for introducing a fluid for blowing in air. 28. Device according to one of claims 15-27, characterized in that the film is designed as an endless belt ( 30 ). 29. The device according to claim 28, characterized in that at least one feed device ( 32 , 33 , 34 ) is provided with which a layer raw material ( 36 ) can be applied to the film ( 30 ). 30. The device according to claim 14, characterized in that a device is provided with which the solid body ( 2 ) with shape-changeable solid body surface ( 2 a) below the substrate ( 8 ) can be offset by a length and / or angle amount with respect to the substrate. 31. The device according to claim 30, characterized in that the substrate carrier ( 9 ) is displaceable by a length and / or angle amount with respect to the layer raw material ( 7 ) located underneath. 32. Device according to claim 14, characterized in that the separating device consists in that the substrate carrier ( 9 ) is arranged to be movable. 33. Device according to claim 14, characterized in that the separating device consists in that the shape-changeable solid surface ( 10 ) is arranged so as to be movable away from the substrate ( 8 ).