DE19729450C2 - Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps - Google Patents

Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps

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Publication number
DE19729450C2
DE19729450C2 DE19729450A DE19729450A DE19729450C2 DE 19729450 C2 DE19729450 C2 DE 19729450C2 DE 19729450 A DE19729450 A DE 19729450A DE 19729450 A DE19729450 A DE 19729450A DE 19729450 C2 DE19729450 C2 DE 19729450C2
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DE
Germany
Prior art keywords
bearings
balls
bearing
dollar
rolling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19729450A
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German (de)
Other versions
DE19729450A1 (en
Inventor
Manfred Haendel
Morris Trevor
Richard Offer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHO Holding GmbH and Co KG
Original Assignee
FAG Aircraft Super Precision Bearing GmbH
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Publication date
Application filed by FAG Aircraft Super Precision Bearing GmbH filed Critical FAG Aircraft Super Precision Bearing GmbH
Priority to DE19729450A priority Critical patent/DE19729450C2/en
Priority to JP10227482A priority patent/JPH11117942A/en
Publication of DE19729450A1 publication Critical patent/DE19729450A1/en
Application granted granted Critical
Publication of DE19729450C2 publication Critical patent/DE19729450C2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F04D29/046—Bearings
    • F04D29/0465—Ceramic bearing designs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F04D29/046—Bearings
    • F04D29/048—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F04D29/046—Bearings
    • F04D29/049—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
    • F16C19/16—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
    • F16C19/163—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls with angular contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/20—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows with loose spacing bodies, e.g. balls, between the bearing balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/303—Parts of ball or roller bearings of hybrid bearings, e.g. rolling bearings with steel races and ceramic rolling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/37—Loose spacing bodies
    • F16C33/3713—Loose spacing bodies with other rolling elements serving as spacing bodies, e.g. the spacing bodies are in rolling contact with the load carrying rolling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/60—Raceways; Race rings divided or split, e.g. comprising two juxtaposed rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/60—Ferrous alloys, e.g. steel alloys
    • F16C2204/70—Ferrous alloys, e.g. steel alloys with chromium as the next major constituent
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/70—Diameters; Radii
    • F16C2240/80—Pitch circle diameters [PCD]
    • F16C2240/82—Degree of filling, i.e. sum of diameters of rolling elements in relation to PCD
    • F16C2240/84—Degree of filling, i.e. sum of diameters of rolling elements in relation to PCD with full complement of balls or rollers, i.e. sum of clearances less than diameter of one rolling element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)
  • Sealing Of Bearings (AREA)

Abstract

Um bei einem Wälzlager, insbesondere Notlager für magnetisch gelagerte Vakuumpumpen, mit einfachen Mitteln zu erreichen, daß sie die speziellen bei Notlagern in Turbomolekularpumpen auftretenden Betriebszuständen problemlos verkraften und eine lange Lebensdauer aufweisen, wird vorgeschlagen, DOLLAR A - daß mindestens ein Wälzlager als ein- oder zweireihiges Kugellager ausgebildet ist, das jeweils einen einteiligen und einen zweigeteilten Laufring (10, 11) aufweist, DOLLAR A - daß die Kugeln (12) aus Keramikwerkstoff und die Laufringe (10, 11) aus einem korrosionsbeständigen hochlegierten Chromstahl (z. B. X 30 CrMoN 15 (AMS 5898)) gefertigt sind, DOLLAR A - daß das Lager mit einem Trockenschmierstoff versehen ist und/oder die Laufringe (10, 11) eine Beschichtung aufweisen, DOLLAR A - und daß das lager zwischen Innen- und Außenring beidseitig mit Deckscheiben (13) aus rostfreiem Material versehen sind, welche den zweigeteilten Laufring (11) zu einer Baueinheit zusammenfassen. DOLLAR A Vorteilhaft sind zwischen den Keramikkugeln (12) Abstandskugeln mit kleinerem Durchmesser eingefügt.In order to achieve with a rolling bearing, in particular emergency bearings for magnetically mounted vacuum pumps, with simple means that they can easily cope with the special operating states that occur in emergency bearings in turbomolecular pumps and have a long service life, it is proposed DOLLAR A - that at least one rolling bearing as one or Double-row ball bearing is formed, each having a one-part and a two-part race (10, 11), DOLLAR A - that the balls (12) made of ceramic material and the races (10, 11) made of a corrosion-resistant high-alloy chrome steel (e.g. X 30 CrMoN 15 (AMS 5898)) are manufactured, DOLLAR A - that the bearing is provided with a dry lubricant and / or the races (10, 11) have a coating, DOLLAR A - and that the bearing between the inner and outer ring on both sides with Cover disks (13) made of stainless material are provided, which combine the two-part race (11) to form a structural unit. DOLLAR A Spacer balls with a smaller diameter are advantageously inserted between the ceramic balls (12).

Description

Die Erfindung betrifft ein Wälzlager nach dem Oberbegriff des Anspruchs 1.The invention relates to a rolling bearing according to the preamble of claim 1.

Bei magnetisch gelagerten Vakuumpumpen, insbesondere bei Turbomoleku­ larpumpen bestehen im Hinblick auf Drehzahl, Schmierung, Schwingungsver­ halten und weitere Umgebungsbedingungen hohe Anforderungen, weshalb sie mit aufwendigen magnetischen Lagerungen versehen sind. Dabei tritt jedoch das Problem auf, daß z. B. bei Stromausfall die Magnetlagerung zusammen­ bricht und der sich noch drehende Rotor abgestützt werden muß, um eine Be­ schädigung der Vakuumpumpe zu vermeiden. Für diesen Notfall sind als Not­ lager Wälzlager vorgesehen, die dann die Last übertragen. Im Normalfall ste­ hen die Wälzlager still bzw. drehen mit der Welle ohne Kontakt zum Gehäuse mit, was z. B. durch entsprechendes Spiel zwischen Rotorwelle und Innenring bewirkt wird. Wenn nun der Notfall eintritt, werden die Wälzlager schlagartig in kürzester Zeit von Drehzahl Null auf Betriebsdrehzahl beschleunigt. Die dabei auftretenden Gleitvorgänge zwischen Kugeln und Laufbahn beeinträchtigen die Lebensdauer der Lager erheblich. Die Verwendung von Schmierfetten, um die Gleitvorgänge zu verbessern, scheitert an den Umständen, daß bei Vakuum­ pumpen durch das entstehende Vakuum das Schmierfett "ausdünstet" und somit unwirksam wird, bzw. an der Forderung, daß das Hochvakuum nicht durch Kohlenwasserstoffe verunreinigt werden darf. Beim Einsatz in der Pro­ zeßgastechnik besteht noch die Gefahr, daß die Prozeßgase die Wälzlager chemisch angreifen. Wegen der engen Toleranzen des Magnetlagers ist es weiterhin erforderlich, daß die Wälzlager ebenfalls eine hohe Führungsgenau­ igkeit bei geringem Spiel haben.With magnetically mounted vacuum pumps, especially with turbomolecules Lar pumps exist with regard to speed, lubrication, vibration level hold and other environmental conditions high demands, which is why are provided with elaborate magnetic bearings. However, this occurs the problem that z. B. in the event of a power failure, the magnetic bearing together breaks and the still rotating rotor must be supported in order to be Avoid damage to the vacuum pump. For this emergency are considered an emergency Rolling bearings are provided, which then transfer the load. Usually ste the rolling bearings are stationary or rotate with the shaft without contact with the housing with what z. B. by appropriate play between the rotor shaft and inner ring is effected. If the emergency arises, the roller bearings will suddenly come in Accelerated from zero speed to operating speed in the shortest possible time. The one there occurring sliding processes between balls and raceway affect the Life of the bearings significantly. The use of greases to the Improving gliding processes fails due to the fact that vacuum pump the lubricating grease "evaporates" and thus becomes ineffective, or the requirement that the high vacuum not may be contaminated by hydrocarbons. When used in the Pro zeßgastechnik there is still the risk that the process gases the rolling bearings attack chemically. Because of the tight tolerances of the magnetic bearing, it is further required that the rolling bearings also have a high level of guidance have little play.

Aus der EP 0 446 723 A1 ist ein vollkugeliges Schrägkugellager für Turbomo­ lekularpumpen bekannt, bei dem die Kugeln aus Keramikwerkstoff gefertigt sind und das beidseitig mit Deckscheiben versehen ist. Das Lager ist mit einem Spezialfett mit einer gering flüchtigen Zusammensetzung versehen. Die Lager sind dabei jedoch als Hauptlager für mechanisch gelagerte Vakuumpumpen (also nicht magnetgelagert) ausgeführt, so daß sie keine schlagartigen Be­ schleunigungen erleiden. Außerdem kann in manchen Anwendungsfällen auch das Spezialfett noch zu Problemen führen.EP 0 446 723 A1 describes a full-spherical angular contact ball bearing for Turbomo known lekularpumpen, in which the balls made of ceramic material are and that is provided on both sides with cover plates. The camp is with one Provide special grease with a low volatile composition. Camps  are, however, the main bearings for mechanically mounted vacuum pumps (So not magnetically supported) so that they do not have any sudden loading suffer accelerations. In addition, in some applications the special grease still cause problems.

Es ist Aufgabe der Erfindung, ein Wälzlager der eingangs genannten Art so weiterzubilden, daß sie die speziellen bei Notlagern in magnetisch gelagerten Turbomolekularpumpen auftretenden Betriebszustände problemlos verkraften und eine lange Lebensdauer erreichen.It is an object of the invention, a rolling bearing of the type mentioned to further develop that they are the special ones in emergency camps in magnetic bearings Can easily cope with the operating conditions of turbomolecular pumps and achieve a long lifespan.

Die Lösung dieser Aufgabe gelingt mit den im kennzeichnenden Teil des An­ spruchs 1 angegebenen Merkmalen. Vorteilhafte Weiterbildungen sind im Anspruch 2 genannt. Die Kombination der zum Teil einzeln bekannten Merkmale ergibt dabei für den Anwendungsfall eine optimale Lagerung. So zeigt sich der Laufringwerkstoff im Zusammenspiel mit den Keramikkugeln in hohem Maße verschleißfest und der zweigeteilte Laufring ermöglicht ein hoch­ genaues Abstimmen des Lagerspiels, wobei durch die Deckscheiben eine Baueinheit erzielt wird.This problem is solved with the in the characterizing part of the To pronounced 1 characteristics. Advantageous further developments are in Claim 2 called. The combination of some known individually Features result in optimal storage for the application. So the raceway material shows itself in interaction with the ceramic balls in highly wear-resistant and the two-part race allows a high exact coordination of the bearing play, whereby a through the cover plates Unit is achieved.

Die Erfindung soll an einem Ausführungsbeispiel erläutert werden.The invention will be explained using an exemplary embodiment.

Fig. 1 zeigt eine Turbomolekularpumpe im Schnitt. Fig. 1 shows a turbomolecular pump in section.

Fig. 2 zeigt vergrößert ein Wälzlager, das als Notlauflager Verwendung findet. Fig. 2 shows an enlarged a bearing that is used as an emergency bearing.

In Fig. 1 ist der Hochvakuumanschluß mit 1 und das Gehäuse mit 2 bezeich­ net. Ein Elektromotor 3 treibt mit seinem Rotor 4 mehrere Rotorscheiben an, die mit entsprechenden Statorscheiben 5 zusammenwirken. Der Rotor 4 ist in Magnetlagern 6 gelagert, die über Sensoren 7 steuerbar sind. Zusätzlich ist der Rotor 4 noch an seinem oberen und unteren Ende in Notlauflagern 8 und 9 abgestützt. Diese Notlauflager 8 und 9 sind als Wälzlager ausgebildet und ste­ hen im Normalbetrieb still bzw. drehen auf der Welle ohne Kontakt zum Ge­ häuse mit, da z. B. zwischen Welle und Innenring ein geringer Spalt vorgese­ hen ist. Wenn nun z. B. durch Stromausfall die Magnetlager 6 ausfallen, wird dieser geringe Spalt zu Null und die Wälzlager übernehmen die Lagerung. Da­ durch wird eine Beschädigung des Aggregats vermieden, da der sich noch drehende Rotor nun von den Wälzlagern abgestützt wird, bis er ausgelaufen ist, bzw. bis die Magnetlager 6 wieder aktiv werden.In Fig. 1, the high vacuum connection with 1 and the housing with 2 is designated net. An electric motor 3 drives a plurality of rotor disks with its rotor 4 , which interact with corresponding stator disks 5 . The rotor 4 is mounted in magnetic bearings 6 , which can be controlled via sensors 7 . In addition, the rotor 4 is still supported at its upper and lower ends in emergency bearings 8 and 9 . This emergency bearings 8 and 9 are designed as roller bearings and stand in normal operation standstill or rotate on the shaft without contact with the housing with Ge, since z. B. between the shaft and inner ring a small gap is vorgese hen. If z. B. fail due to power failure, the magnetic bearings 6 , this small gap becomes zero and the rolling bearings take over the storage. Since damage to the unit is avoided, since the rotor, which is still rotating, is now supported by the roller bearings until it has run out or until the magnetic bearings 6 become active again.

Wie aus Fig. 2 ersichtlich ist, sind die Notlauflager 8 und/oder 9 als Wälzlager ausgebildet, die einen einteiligen und einen zweigeteilten Laufring aufweisen. Im dargestellten Beispiel ist der Außenring 10 einteilig und der Innenring 11 zweigeteilt, wodurch sich zum einen die Lager voll mit Kugeln 12 bestücken lassen, was eine hohe Tragzahl ergibt und zum anderen läßt sich dadurch eine hochgenaue Spieleinstellung verwirklichen, was das Lauf- und Schwingungs­ verhalten der Lagerung positiv beeinflußt. Dadurch, daß die Kugeln 12 aus Ke­ ramikwerkstoff und die Laufringe aus hochlegiertem Chromstahl gefertigt sind, ergibt sich eine hohe Verschleißfestigkeit gegen die schlagartige Beschleuni­ gung, wie sie im Notlauffall auftritt. Weiterhin sind derartige Lager auch ohne jegliche Schmierung funktionsfähig. Die Keramikkugeln ergeben zudem eine geringere Fliehkraftbeanspruchung bei den hohen Drehzahlen. Bei der Ver­ wendung von Trockenschmierstoff oder einer Beschichtung der Laufringe wird das Hochvakuum nicht verunreinigt und doch eine "Schmierwirkung" erzielt. Die beiderseits des Lagers angeordneten Deckscheiben 13 aus rostfreiem Material bewirken eine zusätzliche Abdichtung des Lagers und bewirken gleichzeitig einen Zusammenhalt des Lagers, das so als eine Baueinheit trans­ portiert und eingebaut werden kann. Somit ergibt sich durch die Kombination der verschiedenen Merkmale eine optimale Notlagerung der Turbomolekular­ pumpe. Bei der Verwendung von Abstandskugeln, welche kleiner sind als die tragenden Kugeln aus Keramik, ergibt sich eine noch geringere Reibung, wel­ che die Drehfähigkeit erhöht. Die Abstandskugeln können aus Metall oder ei­ nem anderen Werkstoff gefertigt sein und ggf. Schmiereigenschaften aufwei­ sen.As can be seen from FIG. 2, the emergency run bearings 8 and / or 9 are designed as roller bearings which have a one-part and a two-part race. In the example shown, the outer ring 10 is in one piece and the inner ring 11 is divided into two parts, which on the one hand allows the bearings to be fully loaded with balls 12 , which results in a high load rating and, on the other hand, makes it possible to achieve a high-precision adjustment of the play, which is the behavior of the running and vibration the storage positively influenced. The fact that the balls 12 are made of ceramic material and the races are made of high-alloy chrome steel, there is a high wear resistance against the sudden acceleration, as occurs in an emergency. Furthermore, such bearings are functional without any lubrication. The ceramic balls also result in less centrifugal force at high speeds. When using dry lubricant or a coating of the races, the high vacuum is not contaminated and a "lubricating effect" is achieved. The cover disks 13 made of stainless material arranged on both sides of the bearing bring about an additional sealing of the bearing and at the same time bring about a cohesion of the bearing, which can thus be transported and installed as a structural unit. The combination of the various features results in an optimal emergency storage of the turbomolecular pump. When using spacer balls, which are smaller than the supporting balls made of ceramic, there is even less friction, which increases the turning ability. The spacer balls can be made of metal or some other material and possibly have lubricating properties.

Claims (2)

1. Wälzlager, insbesondere Notlager für magnetisch gelagerte Vakuumpum­ pen, wie z. B. Turbomolekularpumpen, wobei der magnetisch gelagerte Rotor von zwei getrennt voneinander jeweils auf der Rotorwelle und im Gehäuse angeordneten Wälzlagern geführt wird, wenn z. B. in Folge von Stromausfall die magnetische Lagerung ausfällt, dadurch gekennzeichnet,
  • 1. daß die Wälzlager als einreihige Kugellager ausgebildet sind, die jeweils einen einteiligen und einen zweigeteilten Laufring (10, 11) aufweisen,
  • 2. daß die Kugeln (12) aus Keramikwerkstoff und die Laufringe (10, 11) aus einem korrosionsbeständigen hochlegierten Chromstahl (z. B. X 30 CrMoN 15 (AMS 5898)) gefertigt sind,
  • 3. daß die Kugellager zwischen Innen- und Außenring beidseitig mit Deckscheiben (13) aus rostfreiem Material versehen sind, welche den zweigeteilten Laufring (11) zu einer Baueinheit zusammenfassen,
  • 4. daß die Kugellager vollkugelig, also ohne Käfig und ohne Einfüllnut ausgeführt sind,
  • 5. daß zwischen den Kugeln (12) aus Keramikwerkstoff Abstandskugeln mit kleinerem Durchmesser angeordnet sind.
1. Rolling bearings, especially emergency bearings for magnetically mounted vacuum pumps, such as. B. turbomolecular pumps, wherein the magnetically mounted rotor is guided by two separate bearings on the rotor shaft and in the housing arranged roller bearings when z. B. the magnetic bearing fails as a result of a power failure, characterized in that
  • 1. that the rolling bearings are designed as single-row ball bearings, each having a one-part and a two-part race ( 10 , 11 ),
  • 2. that the balls ( 12 ) are made of ceramic material and the races ( 10 , 11 ) are made of a corrosion-resistant, high-alloy chromium steel (e.g. X 30 CrMoN 15 (AMS 5898)),
  • 3. that the ball bearings between the inner and outer ring are provided on both sides with cover disks ( 13 ) made of stainless material, which combine the two-part race ( 11 ) to form a structural unit,
  • 4. that the ball bearings are fully spherical, that is to say without a cage and without a filling groove,
  • 5. that spacer balls with a smaller diameter are arranged between the balls ( 12 ) made of ceramic material.
2. Wälzlager nach Anspruch 1, dadurch gekennzeichnet, daß das Lager mit einem Trockenschmierstoff versehen ist und/oder die Laufringe 10, 11) eine verschleißarme Hartbeschichtung aufweisen.2. Rolling bearing according to claim 1, characterized in that the bearing is provided with a dry lubricant and / or the races 10 , 11 ) have a low-wear hard coating.
DE19729450A 1997-07-10 1997-07-10 Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps Expired - Fee Related DE19729450C2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19729450A DE19729450C2 (en) 1997-07-10 1997-07-10 Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps
JP10227482A JPH11117942A (en) 1997-07-10 1998-07-08 Rolling bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19729450A DE19729450C2 (en) 1997-07-10 1997-07-10 Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps

Publications (2)

Publication Number Publication Date
DE19729450A1 DE19729450A1 (en) 1999-02-04
DE19729450C2 true DE19729450C2 (en) 1999-12-09

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DE19729450A Expired - Fee Related DE19729450C2 (en) 1997-07-10 1997-07-10 Rolling bearings, in particular emergency bearings for magnetically mounted vacuum pumps

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149070B4 (en) * 2000-10-05 2004-07-08 Nsk Ltd. Rolling bearings and rolling bearing device
DE10327536A1 (en) * 2003-06-18 2005-01-05 General Motors Corp. (N.D.Ges.D. Staates Delaware), Detroit Rolling bearing arrangement, in particular, for a recirculation pump of a fuel cell system comprises lids rotating together with the motor shaft and axially bracketing the bearing
DE10164848B4 (en) * 2000-10-05 2006-02-02 Nsk Ltd. Rolling bearing, has mutually adjoining rolling elements crossing each other alternately, and the outside diameters of the respective rolling elements always contacted at two points with the raceway surfaces of the first and second race
DE102006049974A1 (en) * 2006-10-24 2008-04-30 Oerlikon Leybold Vacuum Gmbh Turbomachine i.e. turbo-molecular pump, has bearing part of safety bearing made of metal, and bearing surface of bearing part provided with surface coating, which is applied using chemical vapor deposition/physical vapor deposition method
DE102010006423A1 (en) 2010-02-01 2011-08-04 Schaeffler Technologies GmbH & Co. KG, 91074 Rolling bearing has bearing ring having ceramic running surface and basic material differentiating itself and another bearing ring having another ceramic running surface, and rolling unit
WO2012065899A1 (en) 2010-11-20 2012-05-24 Schaeffler Technologies AG & Co. KG Bearing device having a safety bearing
WO2022090720A1 (en) * 2020-11-02 2022-05-05 Edwards Limited Oil feed nut and oil reservoir for a vacuum pump

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757027B4 (en) * 1997-12-20 2004-11-04 Fag Kugelfischer Ag Ball bearings for high speeds
US6575631B2 (en) 1999-05-31 2003-06-10 Nsk Ltd. Rolling bearing and rolling bearing device
FR2811385B1 (en) * 2000-07-06 2002-11-29 Cit Alcatel HYBRID LANDING BEARINGS FOR VACUUM PUMP
DE102006019982A1 (en) * 2006-04-29 2007-10-31 Schaeffler Kg Ball and roller bearing rotary connection for supporting e.g. crane, has single flexible ball race formed in longitudinal section to provide elastic deformation such that roller bearing is prestressed in circumferential area
DE102007033905A1 (en) 2007-07-20 2009-01-22 Schaeffler Kg Fully spherical tapered roller bearing i.e. spindle ball bearing, for machine tool, has balls supported between inner and outer rings in row, where bearing carries average, free distance between two balls
TW201109544A (en) * 2009-09-14 2011-03-16 Prec Machinery Res Dev Ct Bearing and main shaft mechanism of tool machine using the bearing
DE102009058811A1 (en) 2009-12-18 2011-06-22 Schaeffler Technologies GmbH & Co. KG, 91074 Cage-free rolling bearing, particularly cylinder roller bearing, has multiple metallic rolling bodies rolling between two tracks, where two neighboring rolling bodies have different surface finish at contacting surfaces
DE102010022551A1 (en) 2010-06-02 2011-12-08 Schaeffler Technologies Gmbh & Co. Kg Roller bearing e.g. main rotor bearing, for wind-power plant, has inner and outer rings and rolling members comprising different material compositions, so that rings and members have same service life for different mechanical loads
DE102010032110A1 (en) 2010-07-23 2012-01-26 Schaeffler Technologies Gmbh & Co. Kg Retention bearing for a non-contact rotor
DE102011119907A1 (en) * 2011-12-01 2013-06-06 Pfeiffer Vacuum Gmbh Rolling bearing for a vacuum pump
EP2808573B1 (en) * 2013-05-29 2019-03-13 Skf Magnetic Mechatronics Auxiliary bearing for magnetically suspended rotor system
EP2829756B1 (en) * 2013-07-26 2016-06-29 SKF Magnetic Mechatronics S.A.S. Auxiliary bearing of the ball bearing type for a magnetically suspended rotor system
CN114992156B (en) * 2022-08-05 2022-09-30 福安市鑫远电机有限公司 Water pump with bearing connecting device

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DE1779254U (en) * 1956-05-16 1958-12-11 Orenstein & Koppel Ag BALL BEARINGS WITH SEPARATING BALLS ARRANGED BETWEEN THE SUPPORTING BALLS.
EP0446723A1 (en) * 1990-03-05 1991-09-18 Koyo Seiko Co., Ltd. Ball bearing for use in vacuum and turbo-molecular pump incorporating same

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DE338588C (en) * 1918-06-18 1921-06-28 Skf Svenska Kullagerfab Ab Ball bearing without filler hole
DE1779254U (en) * 1956-05-16 1958-12-11 Orenstein & Koppel Ag BALL BEARINGS WITH SEPARATING BALLS ARRANGED BETWEEN THE SUPPORTING BALLS.
EP0446723A1 (en) * 1990-03-05 1991-09-18 Koyo Seiko Co., Ltd. Ball bearing for use in vacuum and turbo-molecular pump incorporating same

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149070B4 (en) * 2000-10-05 2004-07-08 Nsk Ltd. Rolling bearings and rolling bearing device
DE10164848B4 (en) * 2000-10-05 2006-02-02 Nsk Ltd. Rolling bearing, has mutually adjoining rolling elements crossing each other alternately, and the outside diameters of the respective rolling elements always contacted at two points with the raceway surfaces of the first and second race
DE10327536A1 (en) * 2003-06-18 2005-01-05 General Motors Corp. (N.D.Ges.D. Staates Delaware), Detroit Rolling bearing arrangement, in particular, for a recirculation pump of a fuel cell system comprises lids rotating together with the motor shaft and axially bracketing the bearing
DE102006049974A1 (en) * 2006-10-24 2008-04-30 Oerlikon Leybold Vacuum Gmbh Turbomachine i.e. turbo-molecular pump, has bearing part of safety bearing made of metal, and bearing surface of bearing part provided with surface coating, which is applied using chemical vapor deposition/physical vapor deposition method
DE102010006423A1 (en) 2010-02-01 2011-08-04 Schaeffler Technologies GmbH & Co. KG, 91074 Rolling bearing has bearing ring having ceramic running surface and basic material differentiating itself and another bearing ring having another ceramic running surface, and rolling unit
WO2012065899A1 (en) 2010-11-20 2012-05-24 Schaeffler Technologies AG & Co. KG Bearing device having a safety bearing
DE102010052101A1 (en) 2010-11-20 2012-05-24 Schaeffler Technologies Gmbh & Co. Kg Bearing device with a fishing camp
WO2022090720A1 (en) * 2020-11-02 2022-05-05 Edwards Limited Oil feed nut and oil reservoir for a vacuum pump

Also Published As

Publication number Publication date
JPH11117942A (en) 1999-04-27
DE19729450A1 (en) 1999-02-04

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