DE1951787C2 - - Google Patents

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Publication number

DE1951787C2

DE1951787C2 DE1951787C2 DE 1951787 C2 DE1951787 C2 DE 1951787C2 DE 1951787 C2 DE1951787 C2 DE 1951787C2

Authority

DE

Germany

Prior art keywords

dielectric

gate electrode

layers

substrate

effect transistor

Prior art date

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

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• 239000000758 substrate Substances 0.000 claims description 23
• 230000005669 field effect Effects 0.000 claims description 19
• 230000005684 electric field Effects 0.000 claims description 12
• 239000003989 dielectric material Substances 0.000 claims description 8
• 239000004065 semiconductor Substances 0.000 claims description 7
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
• 239000002184 metal Substances 0.000 description 4
• 230000000694 effects Effects 0.000 description 3
• 230000006870 function Effects 0.000 description 3
• 235000012239 silicon dioxide Nutrition 0.000 description 3
• 239000000377 silicon dioxide Substances 0.000 description 3
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910052760 oxygen Inorganic materials 0.000 description 2
• 239000001301 oxygen Substances 0.000 description 2
• 230000006399 behavior Effects 0.000 description 1
• 239000002800 charge carrier Substances 0.000 description 1
• 230000007547 defect Effects 0.000 description 1
• 230000001066 destructive effect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000013213 extrapolation Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 230000007246 mechanism Effects 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000007787 solid Substances 0.000 description 1
• 230000003068 static effect Effects 0.000 description 1