DE1628449A1 - Arrangement for generating ultra-high vacuum - Google Patents

Description

TELEF U NKEU 162844 »

Patentverwertungsgesellschaft mb H ₀

ülm (Danube), Elisabethenstrasse 3

Ulm (Danube), May 7th 1967 lE / PT-Fg / ma - U87 / 67

" Arrangement for generating ultra-high vacuum"

The invention relates to an arrangement for generating from ultra-high vacuum to DBP *,. · ·. ·· (patent application T 28 743 Ic / 27d) with one or more intertwined nested coolers that the working branches rush with With the exception of at least one access opening, surrounded in such a way that all straight lines that can be pulled out from the workstations that are not are directed towards the access opening, the innermost of the Meet cooling devices, each cooling device as double-walled vessel which contains a cooling liquid in the double wall It has been proposed that to further improve the vacuum in a cooling arrangement according to the above patent document (patent application) to arrange one or more metal surfaces in front of the access openings. These decrease as a result of the heat dissipation

BATH ORIGINAL

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radiation emanating from the cooling device, the temperature of the coolant, so that finally all straight lines starting from the work place on cooled surfaces to hit

The cooling of the metal surfaces, preferably aim eim metal vessel are formed, but is relatively slow, so that unfavorable time it takes up ever-Φ® job surrounded entirely by nearly evenly cooled surfaces ·

The invention is based on the object of reducing the amount of time mentioned. The invention consists in a Arrangement for the generation of ultra-high vacuum according to DBP. ... ... (patent application 0? 28? 43 Ic / 27d) with an or a plurality of nested cooling devices that supply the working part oils with the exception of at least one access opening surrounded in such a way that all of the workplaces can be pulled out Straight lines that are not directed to an access opening meet the innermost of the cooling devices, each cooling device being designed as a double-walled vessel that in the double wall contains a cooling liquid, in that further cooling devices, whose effective for cooling

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Area at least as large as that of the access opening are arranged in front of the access openings. Hereinafter the invention is based on exemplary embodiments according to the illustrations explained in more detail »

FIG. 1 shows a vacuum space 1, within which there is an object 2 to be treated, the fastening of which is not shown is located. Around the object 2 is a double-walled one Vessel 3 arranged in a bell shape. The double wall of the vessel 3 is filled with a coolant and is used as a cooling device. Through the opening of the vessel 3 is the object 2 accessible, for example it can after vaporization by means of a vaporization device 4- against one other things are exchanged »Both for shielding the Opening of the vessel 3 against rays that can penetrate from the wall of the vacuum space 1, as well as to Interception of rays emanating from the object 2 in the direction proceeding to the opening of the vessel 3 is another double-walled shielding vessel 4, the double wall of which is also filled with coolant, arranged in front of the opening of the vessel 3. The shielding vessel 5 contains a small opening 6 through which the intended treatment of the object can be carried out. She is a-

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On the other hand, so small that their harmful influence is negligible remains, on the other hand, it can be closed with simple means if necessary

FIG. 2 shows an advantageous further development of the arrangement according to the invention. A bell-shaped vessel 3 is arranged around the object 2; the shielding vessel is replaced by a flat shielding body 7, which is again double-walled, a sufficiently small opening; for the treatment of the object and is fed with coolants through a flexible hose δ from the container 3. Around the entire arrangement of the vessel 3, the shielding body 7 and (Leu Schlaich 8) another, similarly shaped arrangement of double-walled vessels is arranged, which consists of an outer vessel 9> an outer shield body 1o and a supply hose 11, which connects the outer vessel 9 and the The double-walled vessels 9 »Io and 11 are also filled with coolants. A thermal radiation protection film 12 is arranged between the inner vessel arrangement 3, 4, 8 and the outer vessel arrangement 9, 10, 11. The vessels 3, 5» 8 can for example with liquid hydrogen or liquid helium, the vessels 9, 1o, 11

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· to be filled, for example with liquid nitrogen in combination with the WarmestrahlungssohutzfQlie the reservoir arrangement 9 * Iq ₃ Ί1 serves as Mrmestrahlungsschutz to the rate of evaporation of the refrigerant in the vessels 3, 5? 8 decrease. ·

In some cases it is desirable to be inside a vacuum space shield more than one workstation from the molecular radiation on the wall of the vacuum space and also radiation from one of the workplaces to prevent others permanently or temporarily. For example It may be necessary in an evaporation system, on the one hand, to give the substrate the best possible vacuum but also the source of steam in front of the pier ~ Protect eye rays to avoid being harmful Accumulate molecules on the evaporation material and then get onto the substrate during the evaporation process. In such cases, a further development of the inventive Arrangement according to Figure 3 of advantage, in which the Shielding body 7 as a further job 13 enclosing, double-walled vessel filled with coolant is formed. One is not shown in FIG Possibility of access to the interior 13 of the shielding body 7

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For the same purpose is that shown in Figure 4- Further development of the arrangement according to the invention advantageous * The shielding body? here has the form of a cylindrical tube and is tight with a seal 14

on
on the bottom of the vacuum vessel / i approximately halfway up the tubular vessel has an inwardly directed, disk-shaped bulge leaving only a small opening 6 free, which is also accessible to the coolant. Above this bulge is the work site with the object 2 to be treated, which is shielded by the measures according to the invention; Below the bulge there is a second work station, which is shielded from the wall of the vacuum space by an additional disk-shaped double-walled vessel 15. The supply of the coolant into the double-walled vessel 15 is not shown.

It is easily possible to change the temperature of the described Lower double-walled vessels further, in which one or more additional vacuum pumps can be provided, for example vacuum pump 16 in FIG. 2, which increases the pressure via the coolant » lower and thus enable very low temperatures of up to 1.5 ° K (with helium).

Furthermore, it is advantageous to use the arrangement according to the invention

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with devices to utilize the Joule-Thomson effect to unite. The Joule-Thomson effect enables low To liquefy quantities of hydrogen or helium by releasing the gases from pressure bottles. Such expanded arrangement is shown in FIG. The arrangement of FIG. 5 is based on an arrangement according to FIG on. In addition, cooling heads 17 and 18 are built into the supply lines to the vessels 3 and 9 ″. These essentially exist from a highly thermally conductive capillary that is wrapped around a solid core. To the arrangement of the double-walled Vessels according to Figure 2, another bell-shaped double-walled vessel is built around. its double wall is also filled with coolant. The opening of this double-walled vessel 19 is covered with a shielding body 7 » as shown in Figure 3, completed. Inside the double

20 wall receptacle 19 is an additional thermal protection film / attached

arranges. .

In the cooling heads 17 and 18 are suitable from a pressure bottle Gases, for example hydrogen or helium, introduced. Liquefy when flowing out of the cooling heads the gases partly and collect in the ones below Vessels.

The double-walled panels located outside of the cooling heads

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vessels cause cooling of the in the bald heads · «· flowing gases »A charring of; Hydrogen "up to 2oo ° K and from helium up to 33 ° K it leads to the liquefaction of the Gases by relaxation absolutely necessary.

The ones in the Abtoildisngen. The examples shown each represent a favorable compromise between the Teehnian expansion and the goodness #es aku.uiois. Another pressure reduction is "for example dtirchi AnforiEgEEng; further heat sink in the Baxm. 13 around the work place% source) © hme further possible

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Claims (1)

% &_; πΐΒ. & 3OLJgJg. 3? .Ä-jC .. & .Λ , i J jfcHQSi & iwkg zm * Jj ^ zeugiang von 1B.taeAiho6inraku.T3ai maj & h SBP .. O ^ tenfcaninmeldung φ 28 7M3 1 & / 2? ά) with an or imeinanäer gescliaöliteiliea ICuhlyorriöiitaageaij the Arlsei ^ Hstellea with Ausaaljme weaigstems a 2ugriffsöffnung so ümgeben _s that all auöziehMren of the work stations Stralilen ^ the nieht & xt £ a Zugriffsöffniing ge · are ricntet, the innermost of the Könl meet ^ orriehtungen _f wofeei oede iSalilvorriciitung as a double-walled vessel formed which contains a cooling liquid in the double wall, characterized in that further cooling devices, whose effective area for cooling is at least as large as that of the access openings, are arranged in front of the access openings. 2 * Arrangement according to claim 1, characterized in that the further cooling devices are designed as pot-shaped, double-sided vessels * 3 * arrangement aaeh claim 1, dadureh .. gekennäeichngt j that the further cooling devices as flat vessels _BATH V87 / 67 d € t are « 4-. Arrangement according to Claim 1, characterized in that the further cooling devices are designed as vessels enclosing further workplaces. 5 * Arrangement according to one of Claims 1 to 4, characterized in that the further cooling devices are connected to the first-mentioned cooling devices by hoses. - "- 6. Arrangement according to claim 1 to claim 5, characterized in that «the further cooling devices have small passage openings towards the object to be treated. 7 «The assembly of claim 1 to claim 6, characterized in that f is provided at least one pump for lowering the pressure inside the cooling devices" 8. An arrangement according to claim 1 to claim 7, characterized in that gas expansion devices are provided in the cooling devices to utilize the Joule-Fhomson effect. - 11 BATH M. 109838 / 0t || r - 11 - U 87/67 9 · Arrangement according to claim 1 to claim 8, characterized in that radiation protection foils are arranged between the cooling devices. 109838/02 5 6 Lee r side