DE1614115A1 - Seal for an evacuable chamber - Google Patents

Description

PATENT LAWYERS '1 fi'4 L Λ Λ ζ Diving. HAN.-VF.U'SCHKE '

etiUri 33

Minnesota HlBiBg and Manufacturing Coapany, Saint Paul »

Miaaeeota

Poetry for a "takeable Kaaaer"

The invention relates to a device, the bit a seal is made at one end of an evacuable chamber can be "I" particular refers to the invention on a device to produce a seal between a high vacuum chamber and a low vacuum chamber of an electron jet recording device, which means the movement of a flexible, elongated strip · between the said Kaaaern and the irradiation of one side of the strip g sweoki treatment in the HoehvakuuBJcaamer oraösehen.

Be | the previously known Elektronenstrahlaufzeiotoungsgeraten were eatferabare chambers used Wed.% CRTs zusae- Μ6Ά ait Pilatransportgahaueen "That includes" ine PilatransportsiGriohtung, DI® a

Aligns film with respect to a modulated electron beam were highly evacuated · Therefore, no seal was required between the cathode tube chamber and the film transport housing to be provided to maintain a high vacuum in the cathode ray tube chamber · Was in the operation of these recorders If there was a sufficiently high vacuum in the cathode ray chamber and in the housing, the photographic Film is irradiated and on the film by a modulated electron beam An image is created · An opening cover and pressure plate were used in the recording devices, the film after each advance by one frame in the appropriate position with respect to the opening in the cover brings · With these devices, the film was from a spring-loaded Pressure plate pressed against the cover with the opening during the irradiation of the film · As with these devices the same pressure had to be present both in the chamber and in the housing, so no attempt was made between the chamber and Provide a seal around the housing * These recorders however, were not entirely satisfactory as long pumping times were required to move in the chamber, in the housing and throughout

Film roll to create a high vacuum «When unwinding the film

the vacuum was reduced by the gas trapped between the turns of the unirradiated film and escaping »here the pressure in the tube and in the housing was increased with the result that the life of the electron beam generator was significantly increased shortened and its effectiveness was impaired *

In other known recording devices that was the Electron beam generating facility in a highly evacuated

009834/0407

Arranged in - ei *, during the FiIa see outside the canter below The atmospheric pressure was "The photographer! See FiIa was." in this case either through deep slits or or through Kaaaern old of a progressively higher vacuum in the Hoohvakuuakaaaer introduced;" However, this arrangement led to something Wirkaaaen, but unfurling sealing and su elnea own Aufseiohnungsgerätc

The invention provides a device with which a seal "between a wall of an evacuated" Kaaaer containing the electron beam generator and a "building outside the Kaaaer which is open and under the pressure of the ambient air is produced. In the #vakui «rbe? Em Mammr , the © In® string of a fei @ gs®as®n ₉ elongated ■ stripe® is attached to € @ ι» Publmaag ^ ö ^ & msd is ^ ht under de «Boohvakiiiia im. d @? Ina ·? · Ii ©? I & tte alt Ser iffmisig let ait Stegen and ΣΔρρβη v © rs «li ^ a, _: , di @ dl © äffMtng v- ^ T --- mmi _s t over the one stripe w @ M "N ^ ks" ßsiiter te ⁹ plate old the opening is an AMfuelsplstts aiiö Druekutsginm ®nd®r one side eageorinet, which is aligned with the itdg®em of the opening plates and facing these «Bs sd & d means provided that the webs on the pressure plate and on the opening plate, the strip located next to each other is therefore pressed at all times against the webs of the opening plate and then against its lips, the opening being torn off and a seal between the evacuable caaer and the building which has the ambient pressure and the area the plate aa strip uoglbt is produced «

In the case of the torquing according to the invention, a bodice takuuaka also has a flat transport torquing and a high-

009834/0407

- if · ■ - f'i

1614116

Hoohvakuuakaaaer the electron beam generating device The Miedervakuuakaamer stands ait the HochvakuttBkaaaer on one Wall in connection »the old one is provided with an opening that Establishes a connection between the two Kaaaern · Through this opening an electron beam is directed, which falls directly on the fiIa * The Filatransportvorrlohtung works together old a facility, which forms a seal on one wall in such a way that when the film is guided past the opening, the vacuum in the Chamber is not lowered because a seal is made during advancement of the film and during irradiation and is maintained.In this facility, the fluid in the vacuum chamber is continuously degassed, and by continued pumping out of the Miedervalrauakaaaer and through the seal between the two chambers remains the high vacuum in the Hoohvakujakaaaer ratio · * «ig stable because the filler, which are exposed to high vacuums have already been degassed « The gas still escaping from a small fila district sets that HoohvakuuuB in the Hoohvakuuakaaaer not on a prohibited Value down

The invention provides:

a seal-forming structure such that one side of a flexible elongated strip, x.B, of a Filas irradiated in the presence of a vacuumed atmosphere and can be moved in relation to this, during the evacuated ataosphere is maintained

a seal to maintain a stable pressure in an evacuated Kaaaer old an opening over which a strip can be carried away and treated, a device for maintaining a vacuum in the

009834/0407

m 5 -

evacuable longer * when a strip diaroh a new strip • is advised,

a Sinriehtung to seal an electron gun containing ivakolerten Kaaatr, while at the same time a electrostatic · charging of a non-conductive, for electron beams sensitive photographic film is prevented, while this alt the electron beam is irradiated directly

The invention will now be described in detail. In the accompanying drawings
Plg.l a "sefeaubildliehe representation of a recording device according to the invention,

Pig.2 is a longitudinal section through the device according to FIG. 1, (detail) Pig.3 is a representation, seen from the line 3-3 in FIG.
Fig * 4 shows a detail of the device, τοη the

Line ** «- 4 seen in the Pig * 2,

FIG. 5 shows a child reward along the line 5-5 in FIG. 2, FIG. 6 'is a sectional drawing along the line 6-5 in FIG. 2, and FIG according to the invention used device for generating an electron beam shows *

Figure _# l shows an electron beam recording apparatus in de "the erfindungsgeaÜSe sealing of the evacuated chamber is used * The recording apparatus is composed of a high vacuum section 8 and a Nirdervakuumabschnitt 9 with a film chamber lg" In the Fllakammer 12 is the transport device for a means for the electron beam is sensitive, for example a photographic film 14 in the form of a supply roll 16 which is rotatably mounted on an axis 17 in the film chamber XZ, and

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Furthermore, a take-up roll 18 is provided, which is also on a driven axle 19 la of the chamber 12 is mounted 1st · The PIlB is guided around a driven toothed drum 20 in such a way that that this forms two file loops at film window 22 * The two Film rolls 16 and 18 and the toothed drum 20 can be driven by a suitable motor or by several independent motors (not shown). be driven «The tour for film 14 is in charge this past a recording opening 60, as shown in FIG. 2. The details of the film guide 22 and the recording opening 6o will be described later.

As shown in FIG. 1, a mechanical pre-pump 32 is provided via a vacuum line 34 and a film chamber valve 36 with the chamber 12 in connection · In addition, the backing pump 32 is via a vacuum line 42 and a vacuum valve 40 with a Diffusion pump 38 in connection «The diffusion pump 38 has a direct connection with the electron beam chamber 10. As can be seen from FIG. 2, there is 10 in the high vacuum chimney a flap valve 74 is arranged at the end adjacent to the opening 60. Valves 36, 40 and 74 are in the appropriate manner Sequence actuated, the electron beam chamber 10 can be maintained in a high vacuum while in the chamber 12 the film is inserted and removed while recording and during the suction of the air «When using a sol-

A high vacuum of, for example, about 10 to 10 ^v mm QS can be maintained in the electron beam chamber. * In addition, a slightly lower vacuum of e.g. Combinations of pumps and valves are used to do this in each vacuum chamber

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• To create the required vacuum »Depending on the circumstances and the The value in each vacuum chamber of deviate from the specified values within wide limits

In FIG. 2, the high vacuum section 8 surrounds the Hoonvakuumkamjier 10, which contains an electron gun, which is shown in detail in Fig. 7 on one side The cylindrical file of the Kanter 10 is a closure member 44 ■ Attached by means of a hsraetlsoh sealing gasket «The other side of the Absehlussglisdee 44 is sealed with the ! ■ Who 12 in connection * The AbsohlussgXied 44 encloses one ■ Housing 58 provided with an opening, the tubular old one rectangular cross-section and a part of the cash register * 10 forms «Sine plate 62 of the Absohluasglledes 44, the one the Kaaaera 10 and 12 common wall is old one Opening 60 provides a connection between the aforementioned two emperors * One side of the plate 62 is made of * designed to be a fixed plate for the bit 22 as a whole designated Filsführung forms, which zuasaen in the chamber 12 old of a Filstraneporteinlehtung designated as a whole sit 54 is arranged *

The Filsführung ordered from the window plate 62 sit des Filsfenster 60, from a pressure plate 66, which the FiIs against

60

pushes the opening limiting means, and from one the pressure plate supporting device 68 »between the one side 70 of the file · 14 and the boundary of the fill window 60 on the disk 62 a vacuum wire is providedSin of a suitable, not shown device driven gripper 72 moves the FiIs 14 step by step through the F bypass 22 *

0 0 9 8 3 4/0407

The angrensende to the Kaaaer 10 side de Abeehluseglie- · j · 44 de old let an opening 64 provided on the Aoh ·· of% f lindrisehen Keaaer 10 erected on sewle let da · Fllafea- ter • 60 "Da · on the one side old elnea Dichtungering 76 provided flapper valve lh let mounted on a shaft 78 and at "IAEA arm and can be ground into a Offenetellung (Vollimlen) and in one closed position (dashed lines) moves" In the dl "valve flap opening 64 slept * In the closed position, the sealing ring 76 seals the opening 64 at the seldom. If a new FlXa 14 is inserted into the Filatransporteinriehtuag 5k , the vacuum seal "between one side 70 of the Pllaa Xk and the sides of the Pllaa Xk and the sides of the window 60" is interrupted the chamber 12 opened s "B" to blow a · new Pil · · Ik, • ο the flap valve 74 can be closed, among other things The pig 3 shows the side of the window plate 62 seen from the Vledervakuuakaaaaaaaaaen the window plate 62 and the edge of the Filaf window * The plate 62 is provided on both sides of the Fllafeneter · 60 old swel in the longitudinal direction parallel, raised webs 80 and 82, which are arranged in such a way that they are in contact with the angular edges of the Filae Ik.

On the other two sides of the film window 60, lips Bk and 86 are provided, which run between the webs 80 and 82, which have narrow, flat upper sides and rounded edges. The lips 84 and 86 together with dea

009834/0407

Bridges * 30 and $ 2nd one raised; · Edging of the Filafenstere 60 »Die Upper sides of the webs 80 and 82 and the lips 84 and 86 lie Failure-free in one level «to da ·» ti · the radiation app indlioh · Area? 0 of the filas 14 us touching the film window 60, or the lips may have a slightly lower height, among other things a contact old to post the film * The bridge 80 is old one Opening 88 for the Filagrelfer tos Fila window 60 somewhat removed Terpenes through which the gripper 72 enters the perforation of the file 14 can intervene and move the film forward »

The window plate 62 is also old means sub guide des Piles 14 provided »In the embodiment shown, lie these gowns are attached to the longitudinal ribs of the Filas 14 and are made of the spaced apart rare parts 89 and 90, which over the Level of the webs 80 and 82 and the lips 84 and 86 protrude, as can be seen best from Figures 5 and 6, whereby a channel is formed, which the fiIa lings of the webs 80 and 82 leads over the Fila window 60 »

FIG. 4 shows the one running parallel to the window plate 62 Pressure plate 66, which is attached to the back of the Filas 14 in the BodiceTakuuakaaaer 12 rests * The pressure plate 66 1st with two Andruok webs 92 and 94 provided on the side facing the film « The pressure bars. 92 and 94 are at a distance in the transverse direction and run along the parallel edges of the pressure plate 66 The pressure webs 92 and 94 rest on the surface 14 on the longitudinal edges and are aligned with the webs 80 and $ 8 on the Fila window plate 62 * The pressure plate is old an elongated opening 96 provided, by the hinduroh the film gripper 72 the film Torwärtsflbewegunga can »

003834/0407

As can be seen from FIGS. 5 and 6, the pressure plate 66 is carried by a holder 68, which aligns the pressure webs 92 and 94 on the webs 80 and 82, the holder 68 is on the window plate 62 on pins 69 (only one pin is shown) so that the holder and the pressure plate 66 can be swiveled to one side for drawing in the file 14. Its locking device 71 holds the holder 68 in the position of use, as shown in FIGS Bracket $ B mounted on two guide bolts 98. One end of the guide bolts is firmly connected to the pressure plate 66, while the other end is slidably guided through openings in bracket 68 and can be seen with a head 100 on the guide bolt 98 springs 102 are arranged between the pressure plate 66 and the holder. The springs 102 exert from the holder 68 on the pressure plate 66 and then on the pressure webs 92 and 94 a pressure directed against the webs 80 and 82. If the film 14 is inserted between the window plate and the pressure plate, it is pressed against the webs 80 and 82 - and when the lips of the file window are aligned with the webs , against the lips 84 and 86, the film window 60 being sealed. If the lips are a little less high, the FIIb laser is still pressed against the webs on the film window and brought so close to the lips that the film window is in the impact is sealed "

7 shows a schematic representation of a simple triode cathode ray tube 110, which is arranged in the high vacuum chamber 10. The tube 110 generates an electron beam 112 and guides it along a previously loaded path through the opening

009834/0407

Opening 60, the opposite part of the film 14 irradiated according to information in Fora τοη images uew « will »Bine those triode cathode ray tubes that are used for the facility according to the invention is suitable. is in a book with dea title "Electron Optics * from 0« Klcttperer, published 1953 » described «

In the case of the cathode ray tube shown, sun is generated an electron beam as cathode a baarnadelförsiiger HeiEfaden 114 from Wolfraa uses «between an anode 118 and The cathode 114 has a grid electrode 116 arranged on it Cathode 114 and the grid can have a voltage ton -18 * 000 volts "The anode 118, the filakaaeer 12 and the PIIm 14 are kept at Brdpotential. The electrons emerging from the cathode 114, which has a very high negative potential are accelerated by the anode 118 and fall onto the surface 70 of File 14, which shows Brdpotential «Behind the anode 118 If a diaphragm 120 is arranged in an opening 122, the Durohaesser approximately 0.25 ■■ is «The aperture 120 limits the size of the focal spot the electron beam, the spherical aberration is prevented «and transfers the electron beam • in a predetermined path in which it falls on the FiIa "

The electron beam 122 can be modulated by feeding the grid 116 "la variable image signal" The electron beam 112 is focused by an electromagnetic lens 124 so that the beam has a small focal spot, and from elnea deflection yoke 126 after a sampling oyster diverted·

On the front of a triode cathode ray tube

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These components were also provided with additional elements in the cathode ray tube 110 «The first additional component consists of a Faraday cage, which is modulated on the path of the Electron beam 112 is arranged »between the Faraday cage 128 and the aperture 120 are seen two baffles 132 τ or ge. In the preferred embodiment, the baffle 132 is at ground potential, while the plate 130, when connected to it, is negative Voltage of approximately 250 volts is applied, deflects the modulated electron beam 112 into the Faraday cage 128, so that the electron beam is completely removed from the film 14 »see above that the film is not irradiated, or the beam can be considered blank with respect to the film

One with an oscillator arrangement (not shown) related stigmator assembly I36 is used for covering of each horizontal scanning cell in such a way that each scanning line is not as a continuous track but as a single track Intermediate appears when points appearing at intervals the deflection yoke 126 and the film window 60 a ring 138 is arranged along the path of the electron beam 112, which the secondary emission catches near the film 14

The recording medium to be used in this apparatus may consist of a photographic film with a silver halide emulsion consist, ζ · Β · from a Ferrania Poeltivfilm 15, the one high resistance of about 10 ohms per square or more Has the cathode ray tube located in the high vacuum chamber 10 generates an electron beam falling on the film, so the film acts as a capacitor and is charged · The charge of the film 14 takes place as a function of the capacitance as between the

009834/0 4 07

Pil * Ik, the window plate 62 and the pressure plate 66 "In order to achieve a high resolution, thaw" this charge on the fiIn "

The charging of the file Ik creates three difficulties: (1) the charge Q, which accumulates as a result of the scanning by the electron beam, tries to deflect the electron beam in the following scanning lines, (2) the charge on the. FlIn creates a physical force of attraction between the film and the platen, increasing the force that gripper 72 must use to advance the pile and (3) when the charged FlIn is moved out of the film guide after exposure, it becomes capacity between the film and the nearest grounded surface is smaller because of the increasing distance, so that the voltage between the film and the said surface increases to a discharge level that causes such a strong discharge that the film is obscured «

This undesirable charging effect can thereby be reduced that either a film having a conductive layer is used or that one in the recording area separate grounded surface as close as possible to the surface of the film is arranged «If the film contains a conductive layer, so exists between this and the film during irradiation a substantially constant capacitance due to the electron beam when the charged film is moved out of the film guide becomes «The charge accumulated on the FlIn becomes essentially al · function of the resistance value of the film to the conductive Layer derived ":

009834/0407

If a separate earthed surface is used from the film, this is placed as close as possible to the office side of the film « This grounded surface must remain on the film after the film has been irradiated so that it is charged during the irradiation is derived at least to a level at which a later discharge is prevented, which leads to a concealment of the Films would lead

In this case, the pressure webs 92 and 9k on the pressure plate should have a maximum height of approximately 0.25 Bn, and the pressure plate would have to be made of an electrically conductive material, or a conductive plate would have to be arranged between the webs and with their surface "In any case, the capacitance between the film and the conductive surface is large and essentially constant, whereby the voltage gradient between the charged film and the earthed surface is kept small."

On the other hand, the above-mentioned difficulties could also be reduced by the fact that one for the electron beam sensitive recording medium is used that has an internally conductive composition

In the device shown, the webs 80, 82 and 92, 9k have a length of approximately 7.60 cm and a height of 0.05 mm and at most 0.25 mm from the plane of the window plate 62 and the pressure plate Lips 84 and 86 are not in one plane with webs 80 and 82, so the height of the webs should be made smaller hindered · The size of the movie window 60 ent

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corresponds generally to the size of an image field on a film z “B” on a 16 mm “film ·

The invention described in relation to a recording device can of course also be used whenever if a surface of a strip-shaped member is to be treated in the presence of a high vacuum »on the described embodiment the invention can also within the scope of the invention thanks to various changes can be made, for example the window plate is sealed with respect to the high vacuum chamber, arranged movably with respect to a stationary pressure plate will·

00983A / 0407

Claims (13)

Claims I) / device for producing a pressure seal between an evacuable chamber with an opening at the "inner end" has, past which a strip-shaped material is moved, and an atmosphere surrounding the scrapers, characterized by auf_Abs, tand standing webs, the one end and are arranged on opposite edges of the opening, by lips that extend between said webs transversely to these extend in the plane thereof and on opposite edges of the opening, and which form a boundary around the opening, over which the strip-shaped material is moved by a pressure plate which is provided on one side with spaced Andruokstegen facing said one end and are aligned with the webs at the opening, and by a Lagervorriohtung that the pressure webs against the Opening webs press when there is a strip-shaped material between them, the strip-shaped material between the pressure webs and the opening webs and pressed close to the boundary and a seal is made when a strip-shaped material is moved over the opening 2) Device according to claim 1, characterized by a transport device which moves a strip-shaped material between the end having said opening and the pressure plate, wherein successive areas of the strip 0Q9834 / 0407 Streifenföreigen.Mater! al · in a position opposite the aforementioned Opening 3) Device according to claim 2, characterized duroh with respect to said opening arranged guide members which strip-shaped material as it moves forward in a Guide the path in which the strip-shaped material is placed on the opening webs is kept lying down * 4) Device according to claim 1, characterized in that the webs at the opening are arranged in parallel with a transverse spacing, and that the opposing surfaces of the webs at the opening and the Andruokstege parallel Terlaufen « 5) Device according to claim 4, characterized in that the pressure webs to goalkeeper and backwards with respect to the direction of movement of the strip-free material over the said Opening out to Terlaufen « 6) device according to claim 5 $ characterized in that said storage has a support for the pressure plate and a resilient member, and that the support for the pressure plate is pivotably attached to said one end, and that the resilient member, the Andruokstege under one press evenly against the bars at the opening 7) 009834/0407 7) Device according to claim 1 for recording information on a strip of a sensitive to electron beams By means of direct irradiation with an electron beam, the said chamber which can be evacuated being a housing for an electron beam generator contains, which is provided on one wall with a window that connects the outside the said wall and the said housing, which βYakubaren chamber also a said means receiving Has housing which is united with the outside of said wall and surrounds said window, characterized by Window bars on the outside with a transverse spacing of each length of opposite edges of said window are arranged by window lips which are generally transverse between run the window bars and are arranged on opposite edges of the window β, whereby a border with a generally flat surface is created around the window, by a movable pressure plate, which is arranged opposite the said outside and on one side with the said Pressure webs are provided, which face the window webs with a transverse spacing, and by a spring-loaded bearing that supports the pressure plate and seeks to move it in the direction of said wall, with the pressure plate against said wall Window bars are pressed so that the said means on the . ι Window lying between the pressure bars and the window bars compressed and the housing for the electron gun is kept evacuated 8th) 009834/0407 8) Device according to claim 7 for the purpose of use in a recording device which contains a winding roller and an unwinding roller for the recording medium in the Oehäuee for the recording medium, characterized by a transport device which moves the recording medium over the window, and characterized in that said Andruokstege τοη two cross-spaced webs are formed, those of the mentioned d
Facing framing and in the longitudinal direction with respect to the Direction of movement of the recording mottled 9) Recording device according to claim 8, characterized in that the part of the pressure plate located between the pressure webs electrically conductive 1st and a small distance τοη the top the webs and thus τοη the back of the recording medium on « knows which named! great acts as a grounded surface and a excessively strong electrostatic charge in the recording medium prevented by the electron beam and a sudden discharge to an adjoining surface when the transport device points to successive areas of the recording medium * promoted to said window " 10) recording device according to claim 9, characterized by a non-conductive electron beam sensitive recording medium between the pressure plate and said one Wall is arranged «. 11) 009834/0407 11) recording device according to claim 7, characterized in that the β the housing for the electron gun is a partition having the tone of said one wall removed in housing arranged 1st and has an opening through which the electron beam can fall on the recording medium that between said one wall and the partition wall a flap valve is provided, the housing mentioned aa and is movable from a retracted position into a position in which the valve flap rests against the partition wall in a sealing manner and seals the opening if there is no opening at the window zeiohnungsBittel this rests in a sealing manner, whereby the electron gun containing housing is obtained evacuated * 12) A recording apparatus according to claim 7, characterized by a Vakuuapuape additionally evacuation of the electron gun housing containing a pressure of about 10 - 10 "- ⁷ mm QS and the on zeichnungssiittel containing housing to a pressure of about 0.02 μ QS la operating of the device· 13) recording device according to claim 7, characterized by a means sensitive to electron beams old a conductive » Sohioht that between the pressure plate and the said one Wall is arranged 009834/0407 V W ₁ Blank page