DE1564973A1 - Ion beam generator - Google Patents

Description

. PATENT Attorney DipUng. RUDOLF MAGENBAUER

tattdwakonto ShiHgort 12177 Oirokonlo 14404 Kr * i »parkaiM Esitingm

73 "ESSLINGEN a.N., June June 19, 19oe

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Tal.fon 35565 «

Tdegram *: PATMA Ettlingcniwdcar

ATOIlIG EEISdGI C0MKIS3I0H

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The fume refers to an ion beam generator with a body made of one material »the particle that is desired for these ion beams Atomic type contains »In particular, the invention relates on the generation of rays from each particles carrying a charge, namely on the

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iar its ion beam with the help of an ion source, in which a laser is used to generate the ions, the subject of the invention in particular for use in conjunction with electrostatic Ion accelerator is determined.

3en "" of the invention is the new device through a Lsser-Liohtouelle marked so arranged is de? they oir.en coherent ray of light aimed at the formation of a plasma on this body, in order to vaporize and ionize the atoms, and continue characterized by ds8 in the height of this tlcs: There is an electrostatic grid in front of us: for optional Withdrawal of ions from the plasma and electrodes are provided to accelerate the withdrawn ions, the 59zu dier.en, an ion beam for use in to create an accelerator.

The invention is primarily intended for use in puf dem technical field of heavy ion beam generation for use in electrostatic accelerators in general and in Van de Graaff accelerators in particular determined. Previously, the ion currents had been delivered by such generators and devices -./ could earth, only a low intensity, t-rss was primarily due to »ds?

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more intense ion sources were not available, and. <?: © "Such" sources are not easily found in Eochrppnnun ^ hisri cn dunking the liier in ftp;? - ?, stshendr-n type incorporated could become. The present Srfincunr] -: ρΐιη easily in th field-free area, e.g. 3. the kuscel of a van Throw de Grepff Generetors installed. About that the present ion source delivers ion currents ruit Dens, the Uta larger size - 'eiiordnunneii jcrö'-er than those from usual ion source !! are.

In general, the Ifirfinö.xuifr provides an ion source which is in the La ^ o, sclixTere ions, ch ions with a high atomic or molecular r.geTTicht su ei-zeu- g & n, for use in an ionenkone, in particular EUr Application in electrical ion beam accelerators is suitable. In particular, the present laser beam ion generator is suitable for a Vf? N de Graaff generator to generate a beam of. heavier ions with 3 redder current strength, e.g. 3. Deliver at least 300 amps. Generally speaking, the device according to the present invention creates a plasma which contains a selected, specific type of ion as an epupt constituent, in that a reader light beam is directed onto an impact surface made of a substance which contains molecules of the selected type of ion. The ionizing effect of the incident laser beam frees the

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Ilolecules so that they evaporate the PIssma unö. / or separation of the surface of the impact surface form. The desired ion earths then electrostatically withdrawn from the plesma and accelerated.

The first "advantage of the present ion beam generator" consists in the increased intensity, i. H. in -! er current density of the ion beam generated here, ώΐη first factor, which is the relative speed with which the ions are generated, d. H. the current density of the generated ion beam is the energy level of the light beam striking the impact surface. Any laser preferably emitting 1 kilowatt or more of power is acceptable for use suitable for the ion source according to the present invention, and the light output of the laser device directly determines the achievable otrom level of the ion output.

The production and acceleration of beams of light ions is known. Devices which emit electrons, protons, deuterons and c / particles with relatively high currents are known and are used extensively, particularly in nuclear reaction experiments. With the advent of heavy ionic

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accelerators, such as the Eilac (Heavy Ion Linear Accelerator) at Lawrence Adiation Laboratory of the University of California and the accelerator described in the German Patent No. 2,867 7 ^ 3, the mass range of. Types of atoms that are useful for nuclear reaction experiments, extended to an atomic number of 10, for example. The electrostatic accelerator, particularly the Van de Graaff generator, has numerous advantages, particularly in terms of the smoothness and the low cost of the device. The device can also be used to accelerate both light ions and heavy ions without any fundamental changes. The main limitation on the field of application of the electrostatic accelerators, including the Yan de Graaff generator, is that the ion beams resulting therefrom have a low current strength, with these ion beams usually being in the range of 100 mA to about 1 ampere .

On the other hand, ion beams generated by an electrostatic accelerator can _s

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who uses the ion source according to the present invention, up to at least more ice - /, uei GrVi arrangements in griPor. As a consequence, now the time for the irzeu ^ us: is required by Kernreaktionsprojukten in vernünftif.on I-Ienrsn, much -deiner 3 "In 'ps' iazu contributes, de ^ very much larger ^irt: ! '? erul-'lt .r ^ irlen if isotopes with a very short Ii? ltzait o.ie rs-rllnsohten ii ^ zeu ^ niss ^ nine.Wes αοο'ι --- iohtlfer is: rieaktionen, the fr. iher ni '; su3? ef'ihrt before the sine, veil lie Te.TÜnscht time had a practically no trp "' bpre L" n «re, can now 'in gusrsic'.isn ·' short time r ^; ->'u'ien carried out:; Erlsn, oo z.3. Could be connected to products with a short service life, never in a reasonable sense, ilena-en by the known devices ir ^ eu ^ t, .- / eil' J these products decompose faster than they can be stored in hens, which are sufficient even for experimental purposes.

Another advantage of the present ion beam heater is that ¹ ? only relatively small ion-generating portions or parts of the ion source have to be arranged in the accelerator itself, which advantage facilitates the installation of the new generator in any accelerator system. The auxiliary equipment for the ion source, i.e. the laser light source, the electrical power sources and control and auxiliary

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can be arranged pu'ierhplb: TObei es

is necessary because. ° - a light between the loose material and the material of the contact surface Boschs will ffen

Accordingly, there is a first trend in the. present sn Jirfindung in creating an ion source, which is capable of delivering ion current pulses of up to 300 amps and more.

In particular, there is an object of the present Invention is to provide an ion source, in particular for use with ion accelerators and especially with electrostatic accelerators suitable is.

Another object of the present invention is to provide an ion source which is capable of Ions from heavy elements at high currents, especially from types of atoms with an atomic weight greater to be submitted as 10.

In the drawing are exemplary embodiments of the subject of the invention shown. 1 shows the ion source according to the invention in one

Schematic representation, Fig. Z a in a Van de Graaff accelerator.

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or generator built-in ion and laser beam generator ffem & R of the invention in one Side view in a vertical section,

Fig. 3 is a graph showing the dependency of the ion emission current from the accelerating Illustrates voltage used to extract or subtract the ions emanating from the impact surface will and

Pig. ty a graphical representation showing the Impact surfaces of different materials generated by a single burst of laser light Ion current illustrated.

The ion source of the present invention mainly consists from a laser organ, which is excited to generate a coherent light beam, and from an emitting one Impact body consisting of a material that contains an element that corresponds to a selected, specific one Ion type corresponds, and on which the contiguous light beam is directed to the said element vaporize and ionize. The ions created by the treatment with the laser beam form an on plasma adjacent to the impact surface. The invention further comprises means for extracting certain selected ions from the plasma and for acceleration

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these ions along a certain path to create a collimated ion beam su.

In Fig. 1, an emitting impact surface is shown at 11, which is part of a body, preferably made of solid material, which contains the greatest possible concentration of a type of atoms or isotopes from which an ion beam is to be formed. In principle there is no significant limitation ¹ on the type of ions that can be generated. The ion source according to the invention is particularly suitable for the production of ion beam pulses of elements and isotopes above the atomic weight 10, since already known devices are not particularly effective in this area. However, ions with a smaller atomic weight can also be generated if an effective emitting impact surface can be provided. Any material capable of evaporation and ionization by the lower beam should be suitable for this. It is not necessary that the material be solid. The emitter 11 can, for. B. consist of a supply of liquid, such as mercury, provided that adequate safety precautions are taken to prevent unwanted splashing, or the liquid can be absorbed into a porous ceramic or porous metal body on which a surface-

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layer of liquid is retained. The height of the impact surface is arranged in such a way that it puffs a high-intensity light beam 12 which is attached to it by a laser light beam. The Lr sar-Liohtiuelle may be of any common young age, Ais preferably has a power output of 1 kilojatt or more. De the number of times of impact & llfl ^;; c.ae euspc ^ s, ions would behave proportionally to the release of solvent, sin: ¹ , the other parameters are pale. The var- ■ .yendun? Mirror the ion source.

An optical lens 11 is arranged between the laser 13 and the emitting impact surface 11 in order to collect the luminous flux 12 and concentrate it on a suitable surface of the cutter 11. It has been shown in practice, DA3, the number of increases of the AufprellflXche from? Esto ler.en ions to a maximum, if the laser beam 12 in a focus focused rird ^, the rather just outside the surface of the impingement surface 11 than on this itself lies. Maximum ion generation is achieved when the focal point 16 is approximately 1½ "(6.35 mm) from the surface 17 of the impact surface 11. Although a convex lens is shown in the drawing, it can be replaced by others

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optical focal lenses or a metal mirror lens system or replaced by an optical window. In a typical construction, the emitter 11 is inside the closed end area of a real, tubular D ″ lie 13 arranged be made pus an insulator such as GIeε, where c'ie lens I ^ in a hermetic, impermeable Fit or Lpyerun ^ (not shown) oiler in one opaque sheath is attached, which is in the same Ifeise is used, or with a translucent si-ceii, outside window is provided, ui to let in the laser luminous flux 12. The shell will evacuated by a vacuum pump 19 connected to it made. A filter litter 21 from at a distance from each other lying, parallel conductors runs across the shell 18 at a distance from the emitter 11, and the accelerating Grid electrode 22 is spaced and parallel to the grid and spaced and eccentric attached to suitter 11. The grid 21 and the Electrode 22 can be held simply because they are on the glass or on the ceramic wall of the shell or alternatively attached to protruding insulators or the like. A DC power source 23 is arranged so that its negative connection end 2 ^ with the accelerating Electrode 22 is connected. The positive connection end 26 of the direct current source 23 is connected to the Emitter 11 and generally also with the filter

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fitter 21, that of the outer surface 11 in the cover 18 and the accelerating electrode 22 across the line of the lines or sight lines in between. at a distance of a few centimeters from the acceleration electrode 22 pncebrrclit is. The filter grid 21 forms a Behrens ^ un.-r si in ie for the area occupied by the plasms between Sinitter 11 and grid 21. up it with reference suf •: ie ο "it is positively charged with respect to the electrode 22, zi ' : ht -vr? s grid 21 electrons from within the plasma ρ η un ^r "collects them. Positive ions are withdrawn from the plasma by the negative voltage between the emitter 11 and the electrode 22, whereby they escape through the grid 21 with their higher moments and then in direction of the electrode 22 through the negative, intermediate electrode 22 and Piltrior ^ itter 21 established electric field ~ τε were accelerated. A parallel connected ".iiderstend 27" and a controlling, controlling and regulating luminescent screen or oscilloscope 28 ("monitoring oscilloscope"), which is connected in Heihe to the negative terminal 2k of the power source 23 and the electrode 22, are used to convert to measure the ion current picked up by the electrode 22, this ion current being proportional to the total ion current generated.

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up to which the envelope 18 is emptied depends on the voltage between the network 21 and the electrode 22 is pressed. For a voltage difference of a few thousands of volts between the grid 21 and. the pressure of the electrode 22 should be reduced to at least 10 mm / Hg.

As explained in FIG. 1, the electrode 22 provides the original accelerating voltage for the from Emitter 11 released ions. The electrode is generally provided with an opening so that the ions

through it into a radiation tube or the like. Up
can flow in, the / the end of the shell is attached at a distance and eccentric to the emitter 11. However, a high accelerating voltage can also be applied to the electrode 22 in order to accelerate the ions to energies which, e.g. 3. Are useful in experiments with separation or in the study of the nuclear peculiarities or characteristics of substances. If desired, an impact surface can be attached to or in front of the electrode 22, in which case the EL.ektapde can have a disk-shaped solid shape and is detachably connected to the shell 18.

As mentioned earlier, the area between the grid 21 and the electrode 22 is preferably below a low one Pressure is maintained, but a sufficiently large

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fernunc £ 2: see rl these iileiienten provided an arc to prevent therebetween, ns, however, could be determined, as 2, an arc or glow discharge between these iüLektroden ions with higher Ionisationszustend generated .DH dual, triple and even higher ionized ions . According to this, by changing the conditions accordingly and in which, teise, ^r ls ° - an arc will arise between your grid 21 and the slektroae 22, e.g. For example, by increasing the voltage between these elements or reducing the distance between them, ions with a higher state of ionization can be generated. It is also said in theory that the arc 8 also increases the intensity of the first or primary ion beam by causing the ionization of neutral atoms and molecules released from the impact surface 11 by the laser light beam 12 .

Example 8

A laser ( ^M 4-spoiled ") 13 containing a 6 ^H X 1/2" Corundum Brewster angle ^{bar charged by two 6 M} 6 M xenon linear flash lamps provided a light pulse output of 0.2 joules in 70% Nanoseconds. The light beam 12 was directed onto a nickel impact surface 11 and through a 1.25 inch lens Ii * at 1 / ** inch from the impact surface

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focussed at a distant focal point 16, the voltage line 23 caused a voltage difference of 30 °° volts between the grid 21 and the slektrooe 22. The grid 21 consisted of a 120-mesh 27) & - transmissive nickel grid. The electrode 22 was made solid in order to allow the accumulation of the entire generated kickelion beam on it. The Syrian distance between the grid 21 and the hitter 11 was 1/2 ". The mo :: i xrle or tip ionic current puf of the electrode 22 \ airji -l with the help of a 100 (ohm) Jidei-irndes 27 and a fluorescent screen 23 measured and determined with ZL ^ I-Ampere per Liclits.

More unwholesome crickets with a Lsser 13 ("un-4-sooiled laser"), which has an output of 1.5 joules in For 11 of a light pulse of one -. Expensive of about 200 l.icrosis round to: - ries. The numbers are in the graph of the pig. 3 and k combined. Fig. Shows the dependence of the peak current on the voltage of the grid collector with an output of 1.5 joules. Curve a shows the total effective current including the arc and ion current components at the electrode 22 under operating conditions which correspond to an arc, while curve b represents an estimate of the minimum ion current component occurring on the electrode. The curves af of Figo k show the total peak current that is applied to the electrode

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If different materials are used, the impact factor falls, e.g. B. aluminum, carbon, copper, iron, winding and tantalum. The voltage difference between the grid 21 and the electrode 22 became 5 kV. held. The ionic current component of the total current is at least * JO fo. A typical installation with an ion source according to the invention is shown in FIG. In Plij. Figure 2 shows in section part of the potential spheres of a Vsn de Graaff accelerator or generator. The accelerator shown here belongs to the type in which positively and negatively charged spheres form an electric field between them in order to accelerate an ion beam. As can be seen from the description below, the principle according to the invention can be applied in the same way to a Van de Graaff accelerator having a single potential sphere, in which the ions are accelerated by the electric field between the potential sphere and the ground. A more detailed description of Van de Graaff generators and also of other electrostatic generators or generators can be found in Chapter k of "Applied Nuclear Physics", Pollar and Davidson, 2nd edition, John Wiley and Sons, New York, NY, 1951, contain. For the purposes at hand, Van de Graaff accelerators or generators can basically be seen as follows «

In Fig. 2, a first potential sphere 31 is at one end

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a tubular Eslterung 32 attached. A conventional charge transfer belt mechanism is arranged within the tubular holder 32, which transports the positive charge in the usual manner from the charge guide device (not shown) to the ball 31 via the insulation device or belt 33. Brush collectors 3 ^ · take up the positive charge from band 33 and conduct it to ball 31 · At the same time, the negative charge is removed from ball 31 by atomizer tip 36, which is passed on between the inner surface of ball 31 and the part of 3andes 33 in a conductive manner from which the positive charge is to be removed. B & s positively charged portion 37 attracts electrons from ball 31 to atomizing tip 36, from which they are removed by moving belt 33. Its second potential sphere 38 is arranged at a distance from the first sphere 3I and the sphere 31 is similarly never charged with the usual means (not shown) for the opposite polarity. However, it is pointed out that the ball 33 can be related to the ground potential or can be completely removed. To accelerate the positive ions, the ball 31 must be related to a negative voltage source and a corona or ring discharge between this source and the ball 31. The acceleration tube 39 defines an elongated evacuated tree * H through which the ion beam coming from an ion source is directed to be accelerated. A first end hz of the acceleration tube 39 is hermetically sealed with the ball 31

tied together. In a "similar" junction, the other year 4 3 of the 3 inclination tube 3 is connected to the ball 33 with a hermetic seal. The surfaces of the hulls 31 and 38, which are hermetically sealed with the inner space * KL of the tube 3 ^, have openings kk uiij. 4S, danit a connection between the interior of the beach accelericvmrsröhre 3 ^ ¹ ^ It the corresponding interior ".u: ien of the Ilu-csln 3I and 38". It will open before.

a ■ • leio! y.iH ' ^: i ~ 2n Spsrnun "3'" radient. 2: -. ^r isehen clsn balls 31 uni =. 3Z hersra 3 parts, are vml st disk-shaped conductors ^? In right "3l * a '""i ^ en gaps and the ieschagraphiguncsröire 3 ° herua in' ϊοεreis» ler arrangement for this exi- ? eorc.: iet. These ladder ij-7 create the "easy" .Bicen Spsnnuii '; n ": re served a 3I ^u1 -i ^c1 - 33 between the sleeves by creating a conductive path for a corona discharge from one ring to the other, ie from the ball 31 to the ring 33 Among other things, to keep the ions close to the center of the acceleration tube 39, a drift tube kB is electrically connected to each conductor ^ 7. The cylindrical conductors ^ 8 are coaxially aligned at a distance from one another within the acceleration tube 39. Guiding and holding and the acceleration of the pafciteelchen passed through the bore 39 is achieved by the action of the electric field which is generated in the

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Columns * ί ·? ' is present between adjacent tubular conductors kB .

The areas 51 and 52 are determined by the corresponding balls 31 and 33 are located at the potential, too; the corresponding Ku ^ eI is raised, όγ-den. The ion source, according to the invention, is arranged within the field-free region 51. In particular, the source for charged particles contains the emitting impact surface 53, which supplies cooled ions for the formation of the ion beam. In a Ausführun ^ sfors the impact surface 53 has the shape of a thin wire, a coil of s is stored 5k z. 3. borne by a machine (not shown) and, if necessary, is advanced by friction coils 5 ^ provided with a motor or with a drive from Eand (not shown), in the case 3e, in which the tip 57 of the wire is used to form the Plasma is ablated by a laser light beam 58, which is aligned so that °> it hits this tip.

When the ball 31 has a structure in which it is "unnecessary." is to evacuate them, the laser baffle 53 and the friction coils 56 are in a tubular shape Container 59 hermetically enclosed, which resembles the envelope 18 and which is closed at one end 6l and at the

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opposite end 02 with a hermetic seal : iit der innneosi whether he is surface of the potential sphere 31 below axieler alignment to the opening 44 is connected, as by direct connection or by flange connection (not shown) in order to

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nenreum / the Beschieunigunssröhre 39 in connection. The acceleration rollers 39 and the tubular container 59 are then emptied together by pumps (not shown).

In order to generate charged particles, a reader light beam 53 is generated by a laser light beam 63, which is attached outside the course 31, which is directed through an open seam inside the support column 32 in order to to hit the impact surface 53. So z. B. is the S ^ ood 32 with a light-transmissive window 66 in oi: provided -en ci ^r distance outside the ball 3I and with a Prisms 6], which is arranged in the vicinity of the window 66 in the open äaum the column 32 to to direct the light beam 53 onto the tip S1 of the emitter by flexion. A lens 68 mounted in the wall of the container 59 in the path of the light beam 53 concentrates the light beam on the tip of the impact surface 57t , where it causes ions and electrons to be emitted at certain, limited speeds. For best results, the lens is positioned so that

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its focal point is approximately (6.35 mm) from the surface of the impact surface.

The ions and electrons emitted form a moving plasma in the vicinity of the surface of the impact surface 53, the plasma 6 ° moving away from the impact surface. In order to form a beam of ions, a filter grid 70 is arranged in the path of the moving plasma 69 ′ at a distance from the impact surface 53. As has been stated above, the electrons of the plasma 69 are separated from the positive ions, which are to be combined to form an ion beam, in that both the impingement surface 53 sls and the grid 70 are positively charged. In particular, a voltage generator or generator 71 has a positive terminal end 73 which is connected to the impact surface 53 and the grid 70 and a second, less positive terminal end 72 which leads to an accelerating electrode 7 ^ ·. The current or energy source 7I »which is shown schematically in Pig. 2 is shown, is arranged outside the main part of the Van de Graaff generator and provides a Hehr fa ch-KBV-Pot ent ialunt he left zwisehen the positive terminal end 73 ^ηη & ^ ^em Anschlus end 72. The wire connections are through the interior of Support column 32 to the impact surface 53 »to the grid 70 and to the electrode 7 ^.

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iiiie nibbling or lattice-like r: eschleur.irnn £ -selslitrof.e 7 ^ -lit high "Jbcrtrrr-uiv ^ fhi ^ -ioit has vorzu" s: reis2 an iconic structure and is arranged in such a way, α? " ¹ ihr3 central ?, relaxed part calls the grid 70 times. The high-current ion beam has a tendency to diverge quickly, -ras is due to the fact that "'' -ie. They repel each other on the back side. This tendency to diverge is caused by the ar: i? lI: o: av =:. \ -; iere'.ide electric field develops, which . ;; jiroh the convex? or: i of the re-acceleration electrode 7k- generated - ^T iri. uie 3 es chi eunisoin ^ s electrode 7 ^ ^- serves the -other 2vco ".: to accelerate the positive ionan, -Ms- through the? ε jitter? ΰ in a seal on the acceleric'un: tube? 9 ~ ehen. The beam τ-r is further I: concentrated and fo ^ russisrt by a focuser electrode 76, which is arranged between the acceleration electrode 7 ^ and the opening bk and electrically connected to the negative terminal 77 of the voltage generator. ^ .i is. The voltage delivered to the focusing electrode 76 is negative with respect to the acceleration selector 7 ^ and positive with respect to the rotary sphere 31 ·

During operation, the ions released by the laser beam 6k from the impact surface 53 are drawn together to form an ion beam and by the full potential difference between the grid 70 and the potential battery

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31 prepaidViii'rt. The vorbssohleunirte ion beam passes the opening rHirch kh therethrough in 'the 5eschieunincunirsr'Jhre J. ° a u: id is through the full Fotor.tialunternc'iicd between the Potentis-llcu ^ ELR. 31 and. 35 coschlc? U: .ii ~ t. He is a plump on f IK before? Euftrifft 3, "iände n the tube 39 e-Kcaoränet The accelerated Strshl ^T v ^r ill then aligned so de ^ ^{1. Though T} rohl left impact surface 73 in pi ?. 2 so ^ ezei "t is that £ si ο pn the opening ^ -6 of the Ku ^ eI 38 is arranged, it could puch inrerhprb-" er Ku ¹ JeI 35 or pn every place entlpii ^ d? R liöhrc 3 ° Dii ~ eor ^J .net be.

£, 3 shall still be established, since "the ion source ^ e.Ti". ¹ ^ the Ansö.a.un <? you are suitable to be used in Van de Gr? pff-Geieretoren with a single PotentialZai ^ el. With such devices, the support column 32 serves on the whole to accommodate both the jet pipe and the Lsdunssübertrasunirs-Bs.iidmechaiiisnius. As is the case with Haschinend, who have a Fotentiglkugel, which consists of two interconnected spherical fora, the charge transfer belt mechanism transfers the charge to a section of the interconnected spheres within the support tube provided for this purpose, while the beam tube with the carrier for the other half of the connected spheres is firmly connected or consists of one piece.

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Un find the present request? for making suitable ä.o ° it is distributing '} et associated with electrostatic accelerators of the type eic high voltage Conn ^Q onde more of a charged plate as a closed casing in Kugelforrjnat, NIUs the negative most terminal end of the formation The power source used for the ion beam can be connected directly to the high-voltage connection end of the accelerator. At the same time, care must be taken to ensure that the points connected to the positive connection end do not exceed the acceptable voltage, since these points or points are at a higher potential than at the connection end of the high-voltage accelerator itself .

In all of the above description, the problem of how to separate a particular ion ax from a beam composed of a plurality of positive ions has not been addressed. It is often not necessary to separate one type of ion, such as. 3. In experiments in which the desired product is easily separated from the by-products which are formed by other accompanying ions. However, for those reactions and experiments in which the purity of the ion beam is important ,

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the beam can be split by known methods be e.g. B «in agreement, .with-the. Teaching the The technique of mass flow transfection by using the ion beam through a magnetic field that he reads at right angles to its field lines. In view of the numerous possible embodiments of the present invention - derived from the teachings of the invention, it is requested that the present To limit the invention only as far as this In the following claims is made.

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Claims (1)

Expectations / ly ion straws: i-3rzeu? -3r with a body? from an I> terinl, dns? «* article that contains atoms that are re: slipped for these ion beams, characterized by a Lpser source, which is arranged in such a way as to de3 they • a, ^ ussnnenhönc-ending beam of light to the 21VuHg of a piss?.? ·? Tuf ii ^r ? Sen body, and the ato is 2u evaporate and to ioiii.gieren, and ". shl-. ^{T he} removal of the ions ρ us Ie ^ plasma and electrodes for the • 2es2: ilev.: Ii ~ u: i "the int so ~ enen ions in front of ^ eselien" which serve dp, an ion beam for the end to create an accelerator. 2. ion beam generator according to claim 1, characterized in that ^ 'he (a) an evacuated housing and (b) a disposed within this evacuated housing, an Ele ^v üentenart for creating an ion beam containing emitter, (c) a laser -Light source for aligning a beam of light that is to be ssmmenhanging In sol oh ar Art ₃ ¹ MB er on a surface of the ^ slitter - 27 - 1 C 8 7 9 on meets, ή 'te in the emitter' contained 31ement for the formation. It: PIp smas in the walls of the Shatter "*" to verär'Tipfen and to ionize, (d) means to 2ntsie'.ien ions of the pre-geiiannteii Eggs ent eiiart from cle "i plasma,: and (e) an electric power source alt a Höohspp.nnungs-. And a iiiedersp & miun3s-AnsGhlu. ^O end. Which is suitable, a Kehrfach-KSV-Potentiel-different between the stop ends to accomplish. 3, ion beam generator nsch ^: claim 2, deducted by CiekemiEichnct, there.? a first electrostatic grid is provided to remove the ions from the plr-smr; Saitter is shown, and also a second electrostatic grid. Lattice is generally parallel and at a distance from the first lattice, the first and second lattices acting to withdraw and accelerate the ions from the plasma to form an ion beam. .-; -. ■■ " M -..- ion beam generator -ne ^ h claim 3> characterized in that the first-mentioned electrostatic grid -and.'the. Emitter-are electrically connected to the high-voltage connection end of the power source and the second is electrostatic Grid connected to the low voltage end of the power source. ^V:; VV. ■■■ '·, - ■: ■ "■ " ²⁸ ' - 009809/0679 _BAD - 23 - 5. Iorienr.trp.ilcr-Erseurcr one more: eier claims 2 to -! ·, Ί.? '; Uroh rclncnncciclrict, dp ° drs housing formed as ~ eschlcu "ni ^r " un ^ 3-: ch ".uno co int, da'3 it from a hochintcnsiνcn first el c'.ztxi see field in a "starry lightunr dur.-chdrunTen: ri.rC, -" sQ of the Jiinitter ■ ciii ^ within the Soschlcuni ^ unffstreh ^ uses arranged uii: si oh -vtvr so -.reit ^T .vie dos first electric field, which is surrounded by an envelope running at a distance from it, which defines and defines a hermetically sealed area that is in communication with the interior space that is through the acceleration is determined and defined as the first electric field is extended, -: above.i the envelope contains translucent windows in the immediate vicinity of the impact areas, so that a laser is also provided, which delivers a beam of photons with such energy and density that they lead to The purpose of ionizing and releasing metal ions from the impact surface is that it directs the beam of photons so that it strikes a surface of the impact surface in order to form a plasma * in the area in the immediate vicinity of the impact surface a conductive grid is arranged transversely to the main axis of the shell at a distance from the impact surface, so that an acceleration electrode, which is passive towards these ions, transversely to the first electrical field in the acceleration chamber 009809/0679 * - 29 - BATH ORIGINAL at a distance from the lietellgitter and on the side of this Grid provided eccentrically to the impact surface is, and that a voltage source with a first and a second terminal end is provided, the first terminal end being positive with respect to the second Connection is and electrical with the impact surface and the grid is connected, while the second connection is connected is connected to the acceleration electrode in order to generate a second electrostatic Field to accelerate the ions of the element from the Plasma along a path between the impact surface And. to form the accelerating electrode. ' 6. Ion beam generator according to one of the claims 1 to 5, characterized in that he is a torture agent for focusing the ion beam that contains along the ion path in the area between the acceleration electrode and the grid is arranged and used to combine the ions into a specific, defined beam, ■ 7. Xonenstrählen generator according to one of the claims 1 to 6, characterized in that'die acceleration electrode has a convexly curved shape and so arranged is that their outer parts are evenly inclined and extend axially away from the grid. 3 »ion beam en-Ür z eupcer according to any one of claims 1" to 7,: 1pby cekonnseichnet that the first-mentioned electric field in the acceleration camera is formed by a first prelsuenes conductive connection end of the laigolförlairjen. Shell -rlrd, and the rj es chi eunl 71111: 3 skamner is connected to a first 2nde with the spherical target and extends radially away from it and the spherical shell has an opening in the area in d.3-1 the acceleration chamber and the shell are connected to each other, which opening a: the old RLAL iieschlfiuniTmpcsi ^ 'is aligned xner, -.Tobei, the grid and the accelerating electrode are disposed within ies .teumes ₅ de i-.urch the impact plate with the opening a rf.er: -. ial aligned' spherical Envelope is determined. Q. Ion beam generator according to one of the claims 1 to 8, characterized in that it has a second conductive, charged, spherical shell opposite to the first spherical shell, which with the acceleration chamber, at which of the first spherical Sheath is connected to the distal end. 10. ion beam generator according to claim 9, characterized characterized in that the second spherical shell has an opening that connects to the second electrical 009809/0679 " ³¹ " BAD ORJGiNAL Field aligned, the. Between the first and the second Ims egg-shaped bull to establish a connection between 'dein by the Ξ eschl euni guns; Skammer determined Reua. "and" a part of the interior of the spherical shell is created, this part of the interior of the shell being evacuated and containing a beam impingement surface which runs transversely to the electric field in question. ■ ^; - BATH ORIGINAL 009809/0679 Blank page