DE1224278C2 - - Google Patents
Info
- Publication number
- DE1224278C2 DE1224278C2 DE1960S0082649 DES0082649A DE1224278C2 DE 1224278 C2 DE1224278 C2 DE 1224278C2 DE 1960S0082649 DE1960S0082649 DE 1960S0082649 DE S0082649 A DES0082649 A DE S0082649A DE 1224278 C2 DE1224278 C2 DE 1224278C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES82649A DE1224278B (de) | 1960-11-30 | 1960-11-30 | Verfahren zum Herstellen von dotierten, einkristallinen Halbleiterschichten |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES82649A DE1224278B (de) | 1960-11-30 | 1960-11-30 | Verfahren zum Herstellen von dotierten, einkristallinen Halbleiterschichten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1224278B DE1224278B (de) | 1966-09-08 |
| DE1224278C2 true DE1224278C2 (de) | 1967-03-16 |
Family
ID=7510495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DES82649A Granted DE1224278B (de) | 1960-11-30 | 1960-11-30 | Verfahren zum Herstellen von dotierten, einkristallinen Halbleiterschichten |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE1224278B (de) |
-
1960
- 1960-11-30 DE DES82649A patent/DE1224278B/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE1224278B (de) | 1966-09-08 |