DE112020002505A5 - Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich - Google Patents

Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich Download PDF

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Publication number
DE112020002505A5
DE112020002505A5 DE112020002505.5T DE112020002505T DE112020002505A5 DE 112020002505 A5 DE112020002505 A5 DE 112020002505A5 DE 112020002505 T DE112020002505 T DE 112020002505T DE 112020002505 A5 DE112020002505 A5 DE 112020002505A5
Authority
DE
Germany
Prior art keywords
producing
dimensional structure
partial area
flat partial
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112020002505.5T
Other languages
English (en)
Inventor
Ruth Houbertz
Benedikt Stender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Multiphoton Optics GmbH
Original Assignee
Multiphoton Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multiphoton Optics GmbH filed Critical Multiphoton Optics GmbH
Publication of DE112020002505A5 publication Critical patent/DE112020002505A5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/227—Driving means
    • B29C64/232—Driving means for motion along the axis orthogonal to the plane of a layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70416—2.5D lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE112020002505.5T 2019-05-23 2020-05-25 Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich Withdrawn DE112020002505A5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102019113867.1 2019-05-23
DE102019113867 2019-05-23
DE102019121106.9 2019-08-05
DE102019121106.9A DE102019121106A1 (de) 2019-05-23 2019-08-05 Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich
PCT/DE2020/200038 WO2020233757A1 (de) 2019-05-23 2020-05-25 Verfahren und vorrichtung zum erzeugen einer dreidimensionalen struktur mit wenigstens einem flächigen teilbereich

Publications (1)

Publication Number Publication Date
DE112020002505A5 true DE112020002505A5 (de) 2022-03-17

Family

ID=73052515

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102019121106.9A Withdrawn DE102019121106A1 (de) 2019-05-23 2019-08-05 Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich
DE112020002505.5T Withdrawn DE112020002505A5 (de) 2019-05-23 2020-05-25 Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102019121106.9A Withdrawn DE102019121106A1 (de) 2019-05-23 2019-08-05 Verfahren und Vorrichtung zum Erzeugen einer dreidimensionalen Struktur mit wenigstens einem flächigen Teilbereich

Country Status (2)

Country Link
DE (2) DE102019121106A1 (de)
WO (1) WO2020233757A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230133547A1 (en) * 2019-11-26 2023-05-04 Lubbe Steven Devices, systems, and methods for 3d printing
CN115416299B (zh) * 2022-11-04 2023-03-24 杭州爱新凯科技有限公司 一种无需移动对焦的激光振镜3d打印设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201106787D0 (en) * 2011-04-20 2011-06-01 Ucl Business Plc Methods and apparatus to control acousto-optic deflectors
US8903205B2 (en) * 2012-02-23 2014-12-02 Karlsruhe Institute of Technology (KIT) Three-dimensional freeform waveguides for chip-chip connections
EP3287262A1 (de) 2016-08-26 2018-02-28 Multiphoton Optics Gmbh Vorrichtung und verfahren zur lasergestützten bearbeitung von körpern oder oberflächen
FR3056593B1 (fr) * 2016-09-28 2020-06-26 Ecole Centrale De Marseille Procede pour la realisation d’un objet tridimensionnel par un processus de photo-polymerisation multi-photonique et dispositif associe

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DE102019121106A1 (de) 2020-11-26
WO2020233757A1 (de) 2020-11-26

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R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee