DE112018005661A5 - Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren - Google Patents

Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren Download PDF

Info

Publication number
DE112018005661A5
DE112018005661A5 DE112018005661.9T DE112018005661T DE112018005661A5 DE 112018005661 A5 DE112018005661 A5 DE 112018005661A5 DE 112018005661 T DE112018005661 T DE 112018005661T DE 112018005661 A5 DE112018005661 A5 DE 112018005661A5
Authority
DE
Germany
Prior art keywords
humidity
sensor element
manufacturing
dew point
measurement method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112018005661.9T
Other languages
English (en)
Inventor
Wendelin Stark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TRAFAG AG
Original Assignee
TRAFAG AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRAFAG AG filed Critical TRAFAG AG
Publication of DE112018005661A5 publication Critical patent/DE112018005661A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G01N5/025—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content for determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0253—Condensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE112018005661.9T 2017-11-20 2018-11-19 Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren Pending DE112018005661A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017127341.7 2017-11-20
DE102017127341.7A DE102017127341B4 (de) 2017-11-20 2017-11-20 Feuchte-Sensorelement, Verfahren zum Herstellen eines Feuchte-Sensorelements, Feuchte- oder Taupunkt-Sensor und Feuchtemessverfahren
PCT/EP2018/081825 WO2019097069A1 (de) 2017-11-20 2018-11-19 Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren

Publications (1)

Publication Number Publication Date
DE112018005661A5 true DE112018005661A5 (de) 2020-10-15

Family

ID=64500356

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102017127341.7A Active DE102017127341B4 (de) 2017-11-20 2017-11-20 Feuchte-Sensorelement, Verfahren zum Herstellen eines Feuchte-Sensorelements, Feuchte- oder Taupunkt-Sensor und Feuchtemessverfahren
DE112018005661.9T Pending DE112018005661A5 (de) 2017-11-20 2018-11-19 Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102017127341.7A Active DE102017127341B4 (de) 2017-11-20 2017-11-20 Feuchte-Sensorelement, Verfahren zum Herstellen eines Feuchte-Sensorelements, Feuchte- oder Taupunkt-Sensor und Feuchtemessverfahren

Country Status (3)

Country Link
US (1) US11460390B2 (de)
DE (2) DE102017127341B4 (de)
WO (1) WO2019097069A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111982753A (zh) * 2020-07-28 2020-11-24 青岛海尔空调器有限总公司 用于检测换热器翅片疏水能力的方法及系统
DE102020123710A1 (de) 2020-09-11 2022-03-17 Trafag Ag Messverfahren, Messvorrichtung, Steuerung und Computerprogrammprodukt
CN114644888B (zh) * 2022-04-01 2022-10-21 飞思仪表（深圳）有限公司 一种改性湿敏材料及其制备方法及应用、湿度传感器
DE102022211284A1 (de) * 2022-10-25 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Lautsprecher

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE631020A (de) 1961-05-15
US3677066A (en) 1970-07-31 1972-07-18 Exxon Research Engineering Co Method for preconditioning piezoelectric sorption detectors
US6150089A (en) * 1988-09-15 2000-11-21 New York University Method and characterizing polymer molecules or the like
JP2648941B2 (ja) 1988-10-08 1997-09-03 司フェルト商事株式会社 合成樹脂製筆記用ペン軸
US5482371A (en) 1991-04-18 1996-01-09 Osaka Sanso Kogyo Ltd. Method and apparatus for measuring the dew point and/or frost point of a gas having low water content
JPH07260661A (ja) 1994-03-25 1995-10-13 Nok Corp 水晶振動子湿度センサ
GB9706990D0 (en) * 1997-04-05 1997-05-21 Univ Heriot Watt Dew point and bubble point measurement
US6126311A (en) 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
US6295861B1 (en) 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
US7421885B2 (en) * 2004-06-28 2008-09-09 Air Products And Chemicals, Inc. Method for characterizing porous low dielectric constant films
US7134319B2 (en) 2004-08-12 2006-11-14 Honeywell International Inc. Acoustic wave sensor with reduced condensation and recovery time
US20080108122A1 (en) * 2006-09-01 2008-05-08 State of Oregon acting by and through the State Board of Higher Education on behalf of Oregon Microchemical nanofactories
US8109161B2 (en) * 2008-02-27 2012-02-07 Baker Hughes Incorporated Methods and apparatus for monitoring deposit formation in gas systems
CN101620057B (zh) * 2009-06-02 2011-03-30 上海大学 基于有序介孔材料sba-15的石英晶体微天平湿度传感器的制备方法
US8904850B1 (en) * 2010-10-07 2014-12-09 Sandia Corporation Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere
US9581574B2 (en) 2013-12-06 2017-02-28 Battelle Memorial Institute Method and device for detecting odorants in hydrocarbon gases
US10408794B2 (en) * 2014-10-30 2019-09-10 Brigham Young University (Byu) Porous resonant sensors
US10268114B2 (en) * 2014-11-07 2019-04-23 University Of Massachusetts High performance quartz crystal microbalance enhanced by microstructures for biological applications

Also Published As

Publication number Publication date
US20200355591A1 (en) 2020-11-12
DE102017127341A1 (de) 2019-05-23
WO2019097069A1 (de) 2019-05-23
US11460390B2 (en) 2022-10-04
DE102017127341B4 (de) 2019-08-14

Similar Documents

Publication Publication Date Title
DE112018005661A5 (de) Feuchte-sensorelement, verfahren zum herstellen eines feuchte-sensorelements, feuchte- oder taupunkt-sensor und feuchtemessverfahren
DK3232404T3 (da) Fremgangsmåde og system til måling af en målgenstands dimensioner
DE112016001020A5 (de) Filterelement und verfahren zum herstellen eines filterelements
DE102016209675A8 (de) Verfahren und System zum Herstellen eines Kleidungsstücks
FR3018916B1 (fr) Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique
GB2545137B (en) Method and apparatus for sensing and for improving sensor accuracy
DE112015005964A5 (de) Bauelement und Verfahren zur Herstellung eines Bauelements
DE102015114205B8 (de) Wegmessverfahren für einen magnetischen Sensor und Sensor
DE112014006936A5 (de) Sensorelement eines induktiven Näherungs- oder Abstandssensor und Verfahren zum Betreiben des Sensorelements
DK3622247T3 (da) Fremgangsmåde til referencering af flere sensorenheder og tilhørende måleindretning
DE112016002790A5 (de) Vorrichtung und Verfahren zur Druckmessung am Herzen eines Patienten
DE102016216556B8 (de) Feinstaubsensor und messverfahren dafür
DE112017005966A5 (de) Messgerät und Verfahren zum Betreiben des Messgeräts
DE112016001670B8 (de) Bauelement und Verfahren zur Herstellung eines Bauelements
SE1650769A1 (sv) Fingerprint sensing device and method for manufacturing a fingerprint sensing device
DK3465183T3 (da) Fremgangsmåde til kalibrering af en sensor og automatiseret fremgangsmåde til online-overvågning af et flydende legemes ændringer
SG11202101693SA (en) Sensors and methods for measuring ph
DE112016002614A5 (de) Verfahren zum Rücksetzen eines magnetorsistiven Umdrehungssensors und entsprechender Umdrehungssensor
FR3022633B1 (fr) Instrument et procede de mesure de la concentration d'ozone
FI20165529A (fi) Laitteisto ja menetelmä ilmanvirtauksen mittaukseen
DE112017005234A5 (de) Verfahren zur Korrektur von Messabweichungen eines Sinus-Cosinus-Rotationssensors
DE112015006258A5 (de) Näherungssensor und Verfahren zur Messung des Abstands eines Targets
DE102017123431A8 (de) Drucksensoren und Verfahren zum Bilden eines MEMS-Drucksensors
DE112014007276A5 (de) Näherungssensor und Verfahren zur Messung des Abstands eines Targets
KR20180084800A (ko) 마이크로 기계식 요 레이트 센서 및 그 제조 방법