DE112017007130T5 - SENSOR DEVICE - Google Patents

Abstract

Provided is a sensor device which has a novel structure and makes it possible to recognize with excellent reliability when a worker or the like is approaching or in contact with a moving part of an automatic device. A sensor device (10) which detects: when a recognition target (A) approaches or is in contact with a moving part (18) of an automatic device (12); and a first sensor (26) that detects the recognition target (A) at positions separated from the moving part (18) and a second sensor that recognizes the recognition target (A) at positions closer to the target moving parts (18) are the first sensor (26), and a third sensor which detects the recognition target (A) at locations closer to the moving part (18) than the first sensor (26). Both the second sensor and the third sensor detect when the recognition target (A) approaches the moving part (18) from positions closer to the moving part (18) than positions detected by the first sensor (26) can be.

Description

Technical area

The present invention relates to a sensor device which detects approach or contact between a moving part of an automatic device, e.g. an industrial robot and a recognition target.

Related Technology

Normally automatic devices, e.g. Industrial robots and automatic guided vehicles (AGV) generally used in factories and the like, e.g. due to the realization of industrial automation. Such an automatic device is a moving part of which the whole or a part is movable to perform a predetermined operation, e.g. an arm of an industrial robot.

Incidentally, because of the use of automatic devices such as e.g. assistant robots working with human workers in the same room has become necessary to improve safety by preventing a collision between a moving part of an automatic device and a worker, using a means instead of a safety fence. For example, For example, in the case where an industrial robot and a worker work in the same room, it is important to prevent the occurrence of accidents caused by an arm colliding with the worker or an outside user such as an operator. a tool or the like used by the worker when the arm or the like of the industrial robot moves, and injury to the worker and damage to the arms, an object such as a worker's hand. a tool and the like to avoid when they come into contact with each other.

That's why it beats Japanese Patent No. 5805208 (Patent Document 1) discloses a safety device capable of avoiding a collision by controlling an operation of a gripper arm of a work process device based on recognition results of a first sensor device and a second sensor device. The safety device includes the first sensor device, having a small distance from the work process device, and the second sensor device, having a greater distance from the work process device than the first sensor device, and contact between the work process device and the worker becomes more than usual by reducing a speed of the work process device prevented when the second sensor device responds, and the operation of the operation device stops when the first sensor device responds.

However, in the safety device of Patent Document 1, since it is impossible to avoid a collision between the operation device and the worker or the like when the first sensor device recognizing a worker or the like at a position closer to the operation device does not fail due to a failure or the like working normally, there is a need for further improvement in reliability.

quote list

patent literature

Patent Literature 1: Japanese Patent No. 5805208

SUMMARY OF THE INVENTION

Technical problem

The present invention has been made in view of the background described above, and it is an object of providing a sensor device having a novel structure capable of approaching or contacting a worker or the like with respect to a moving part of an automatic device with excellent To recognize reliability.

the solution of the problem

Hereinafter, aspects of the present invention which have been made to solve such problems will be described. In addition, elements adopted in each of the aspects described below may be adopted as much as possible in each combination.

That is, the first aspect of the present invention provides a sensor device that detects approach or contact of a recognition target with a moving part that is movably provided in an automatic device. The sensor device includes a first sensor that detects the recognition target at a position away from the moving part, a second sensor that indicates the recognition target a position closer to the moving part than the first sensor, and a third sensor which detects the recognition target at a position closer to the moving part than the first sensor. The approach of the recognition target to the moving part is recognized by both the second sensor and the third sensor at a position closer to the moving part than a position recognizable by the first sensor.

According to the sensor device having the structure of the first aspect, the approaching or contact of the recognition target with the moving part of the automatic device can be reliably recognized by the three sensors. In addition, both the second and third sensors recognize the approach of the recognition target at a position closer to the moving part than a distal end of a recognition area of the first sensor. Therefore, in the approach state in which a risk of collision between the recognition target and the moving part is higher, more reliable recognition is realized by doubly recognizing the recognition target with two sensors, e.g. a collision between the recognition target and the moving part can be more reliably prevented, and if either the second sensor or the third sensor does not operate effectively due to an error or the like, even a collision between the recognition target and the moving part can be avoided.

Further, since the distal end of the detection range of the first sensor is farther away from the moving portion than the detection range of the second sensor and the detection range of the third sensor, the approach of the detection target at a position away from the moving portion is detected by the first sensor, and then further approach of the recognition target by the second sensor and the third sensor can be detected. Therefore, control of the moving part is enabled according to the distance between the moving part and the recognition target, and control of the moving part can also be performed stepwise based on the recognition results of the three sensors. For example, For example, the moving part could be slowed down with respect to the approach recognition by the first sensor, and the moving part could be stopped according to the recognition of further approaching with the second sensor and the third sensor, and the like.

In the second aspect of the present invention, according to the sensor device described in the first aspect, a detection range of the second sensor and a detection range of the third sensor may have different regions in a direction away from the moving part.

According to the second aspect, at a position closer to the moving part than the distal end of the detection area of the first sensor, the approach of the recognition target to the moving part can be stepwise recognized by the second sensor and the third sensor. For example, When the detection range of the second sensor is adjusted to reach a position farther away from the moving part than the detection range of the third sensor, the approach of the detection target to the moving part can be recognized by the second sensor and further approach or contact the recognition target to the moving part can be recognized by the third sensor. Therefore, stepwise control of the moving part based on the detection results of the second sensor and the third sensor is also possible. For example, For example, after the moving part has been further decelerated, the moving part may be stopped according to the detection of the recognition target by the second sensor according to the detection of the recognition target by the third sensor, and the like. Further, e.g. Under normal circumstances, the movement of the moving part may be controlled based on the detection results of the second sensor, and the third sensor may be a presensor which functions when the second sensor fails.

In the third aspect of the present invention, according to the sensor device described in the first or second aspect, the detection range of the second sensor and the detection range of the third sensor may overlap.

According to the third aspect, since the recognition target can be doubly recognized by the second sensor and the third sensor at a position where the recognition range of the second sensor and the recognition range of the third sensor overlap, recognition accuracy can be improved, and the reliability of the recognition can be improved.

In the fourth aspect of the present invention, according to the sensor device described in any of the first to third aspects, at least one of the second sensor and the third sensor may be a contact sensor that detects contact of the recognition target with the moving part.

According to the fourth aspect, the reliability of recognition can be improved by using a contact sensor as at least one of the second sensor and the third sensor, and for example, when the moving member is stopped due to the contact detection between the detection target and the moving member, unnecessary stopping of the moving member can be prevented.

In the fifth aspect of the present invention, according to the sensor device described in the fourth aspect, at least one of the second sensor and the third sensor, which is a contact sensor, may have a structure in which both a first electrode and a second electrode, which are deformable, attached to a surface of a dielectric layer that is elastically deformable, and capacitive sensors that base pressure acting on an opposite portion of the first electrode and the second electrode across the dielectric layer in an opposite direction on changing a capacity value.

According to the fifth aspect, since the contact sensor is a flexible capacitive sensor comprising a dielectric layer and an electrode which are deformable, excellent recognition accuracy is realized and the force acting on the recognition target at the time of contact with the recognition target becomes Easily relaxed, and safety is further improved.

In the sixth aspect of the present invention, according to the sensor device described in one of the first to fifth aspects, the second sensor and the third sensor can recognize the recognition target according to the same recognition principle.

According to the sixth aspect, since the second sensor and the third sensor have the same detection principle, the detection circuits of the second sensor and the third sensor can have the same structure, and the detection circuits of the second sensor and the third sensor can be easily manufactured.

In the seventh aspect of the present invention, according to the sensor device described in the sixth aspect, the second sensor and the third sensor can share a detection circuit.

According to the seventh aspect, since a detection circuit is divided in the second sensor and the third sensor, simplification of the structure and space-saving of the arrangement space of the detection circuit can be achieved.

In the eighth aspect of the present invention, according to the sensor device described in any of the first to seventh aspects, the first sensor may be capable of recognizing a recognition target outside the danger zone in which the moving part is movable.

According to the eighth aspect, the recognition target may be recognized by the first sensor before entering the danger zone in which a collision with the moving part may occur. Further, when the movement of the moving member is limited within a predetermined range as in an arm robot, one having a fixed detection region may be adopted as the first sensor, the arrangement of the first sensor may be facilitated, and the reliability of detection by the first sensor can be improved.

In the ninth aspect of the present invention, according to the sensor device described in any one of the first to eighth aspects, an elastic damping layer for buffering may be disposed outside the moving one, and the second sensor and the third sensor may be disposed outside the elastic damping layer with respect to be arranged moving part.

According to the ninth aspect, a buffering property of the elastic damping layer reduces the acting force when the recognition target comes in contact with the moving part. Further, even if at least one of the second sensor and the third sensor is a contact sensor, the influence of the elastic damping layer on the recognition accuracy can be minimized by disposing the second sensor and the third sensor outside the elastic damping layer.

In the tenth aspect of the present invention, according to the sensor device described in any one of the first to ninth aspects, an intermediate cushioning layer may be disposed between the second sensor and the third sensor.

According to the tenth aspect, the buffering property of the intermediate damping layer reduces the acting force when the recognition target comes into contact with the moving part. Further, when the intermediate attenuation layer is disposed between the second sensor and the third sensor, detection sensitivities of the second sensor and the third sensor can be adjusted using the intermediate attenuation layer.

In the eleventh aspect of the present invention, according to the sensor device described in the tenth aspect, the second sensor may be a contact sensor that detects the contact of the recognition target, the intermediate cushioning layer can be disposed outside the second sensor, and an overlapping surface of the intermediate cushioning layer on the second second sensor can be formed in a rough shape, having convex parts, which projects in the direction of the second sensor.

According to the eleventh aspect, since the convex part of the intermediate cushioning layer is applied to a detection section of the second sensor, For example, reducing the force acting on the detection portion of the second sensor at the time of contact with the detection target can be suppressed by the buffering properties of the intermediate cushioning layer, and the detection of the contact by the second sensor can be realized with high sensitivity.

Advantageous Effects of the Invention

According to the present invention, the approximation or contact of the recognition target with respect to the moving part of the automatic device can be recognized with high reliability by three sensors, and in particular the recognition by two sensors with high reliability is realized at a position closer to the moving part is the first detection area of the first sensor. It is also possible to detect the approach of the recognition target by the first sensor at a position away from the moving part and to recognize further the approach of the recognition target by the second sensor and the third sensor, and e.g. For example, step-by-step controls of the moving part can be performed based on the detection results of the three sensors.

list of figures

• 1 FIG. 10 is a side view showing a robot with a sensor device according to the first embodiment of the present disclosure. FIG.
• 2 FIG. 12 is a cross-sectional view schematically showing a part of an arm of the robot shown in FIG 1 ,
• 3 FIG. 15 is a perspective view schematically showing a first sensor shown in FIG 2 in disassembled condition.
• 4 FIG. 13 is a block diagram of hardware including the first and second sensors and detection circuits thereof shown in FIG 2 ,
• 5 is a block diagram of major functions implemented by the in 4 shown hardware.
• 6 FIG. 12 is a block diagram of alternative hardware including the first and second sensors and the detection circuits thereof shown in FIG 2 ,
• 7 FIG. 12 is a cross-sectional view schematically showing a part of an arm according to another embodiment of the present disclosure. FIG.
• 8th FIG. 12 is a cross-sectional view schematically showing a part of an arm according to still another embodiment of the present disclosure. FIG.
• 9 FIG. 12 is a cross-sectional view schematically showing a part of an arm illustrating a robot with a sensor device according to the second embodiment of the present disclosure. FIG.
• 10 FIG. 12 is a cross-sectional view schematically showing a part of an arm according to still another embodiment of the present disclosure. FIG.
• 11 FIG. 10 is a side view showing a robot with a sensor device according to the third embodiment of the present disclosure. FIG.
• 12 FIG. 12 is a cross-sectional view schematically showing a part of an arm of the robot shown in FIG 11 ,

DESCRIPTION OF EMBODIMENTS

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

1 shows a robot 12 as an automatic device with a sensor device 10 according to the first embodiment of the present disclosure. The robot 12 has a structure in which an arm 18 as a moving part, movable on a support base 16 attached to a ground 14 is attached, and the sensor device 10 provided in the robot 12 , recognizes approach or contact between the arm 18 and a worker A as a recognition target.

In particular, include the arms 18 limbs 20a . 20b . 20c and 20d which are interconnected by hinge parts to be able to tilt relatively, wherein the member 20a tiltably connected to the support base 16 , and a gripping part 22 is on the limb 20d provided as an end effector.

Although the joint parts, which are the limbs 20a to 20d connect together, and a connecting part between the member 20a and the support base 16 , all inclinable around a rotation axis 24 extending in a direction perpendicular to the sheet of 1 extends, the robot can 12 in the embodiment, be able to incline, for example, about an axis of rotation extending in a vertical direction or horizontal direction 1 extends, or to twist about a central axis. Although the gripping part 22 exemplified as the end effector of the arm 18 Furthermore, various known end effectors such as a suction hand and the like can be adopted according to a work performed by the robot 12 ,

Further, in the support base 16 a first sensor 26 provided the sensor device 10 formed. The first sensor 26 is a sensor capable of recognizing the worker A who is located at a position relatively far from the support base 16 and, for example, is a laser sensor or an ultrasonic sensor, and can recognize the worker A, who is the support base 16 from the front approximates to a position away from the support base 16 and the arm 18 by laser light or ultrasonic wave irradiation from the support base 16 forward. A first detection area 28 in which the first sensor 26 the worker A can detect, extends forward from the support base 16 as indicated by a two-dot dashed line in 1 is shown, and reaches a position further away from the robot 12 as compared to a second detection area 38 and a third detection area 56 which will be described later. Furthermore, the first detection area extends 28 in a band or fan shape having a predetermined width in the direction perpendicular to the sheet of FIG 1 ,

In the embodiment, the first sensor becomes 26 on the support base 16 which does not move, and the first detection area 28 of the first sensor 26 includes a danger zone 29 which has an area within which the arm 18 can move, and extends to a danger zone 29 surrounding area. Therefore, the first sensor 26 the worker A recognize outside the danger zone 29 indicated by a dashed dotted line in 1 and can be the worker A recognize before the worker A enters the danger zone. However, the first detection area 28 also be set to change, for example, while the arm 18 emotional.

The danger zone 29 The embodiment is set to extend in the horizontal direction at a predetermined height, and is arranged in front of the support base 16 as shown by a dashed dotted line in 1 , The danger zone 29 does not necessarily have to be a whole zone in which the arm is 18 can move and a collision between the worker A and the arm 18 can occur, and may be part of a zone in which there is a collision between the worker A and the arm 18 can occur. Especially the danger zone 29 eg just in front of the arm 18 be arranged, to which the worker A can be arranged, or can be arranged only in one part in a height direction and can not be arranged above the arm, in which the approach of the worker A no problem. Because the first detection area 28 of the first sensor 26 so adjusted to the outside of the danger zone 29 to extend, recognizes the first sensor 26 in addition to the worker A before contact between the worker A and the arm 18 ,

The first sensor 26 is not limited to a laser sensor or to the support base 16 provided ultrasonic sensor, and various known sensors, which are capable of the intended first detection area 28 to realize, can be taken over. Especially the first sensor 26 to recognize the approach of the worker A to the support base 16 or the like may be configured by, for example, providing a light curtain, a photoelectric sensor, or the like on the support base 16 or around it, and laying a mat-shaped surface pressure sensor on a surface of the floor 14 that are on the page in front of the support base 16 located.

As further in 2 Shielding layers are shown 30 outside the limb 20 provided accordingly. The shielding layer 30 is provided to block electromagnetic waves or the like to the outside of the arm 18 disposed within the shielding layer 30 are emitted, and is formed of, for example, a conductive metal such as iron, copper or an aluminum alloy. The shielding layer 30 According to the embodiment, it is formed by a screen printing method or the like on a surface of a support body 32 which is a flexible and insulating resin film formed of polyethylene terephthalate (PET) or the like using, for example, a paint obtained by dispersing metal powder in a base material such as rubber or a synthetic resin. In addition, the shielding layer becomes 30 arranged around an outer surface of the limb 20 to cover by attaching the support body 32 to the surface of the limb 20 , The shielding layer 30 can be formed of a thin metal plate or grid and can also be obtained by forming a coating film by directly spraying a paint in which metal powder in a base material on the surface of the member 20 or the like is dispersed. Also, the thickness of the support body 32 not particularly limited as long as it can be flexibly deformed.

Further, an elastic damping layer 34 on the outside of the shielding layer 30 provided. The elastic damping layer 34 is formed of rubber, resinous elastomer, or the like, and may be formed of open-cell or closed-cell foam or a mixture of open and closed cells. The material for forming the elastic damping layer 34 is not particularly limited, but eg semi-rigid urethane foam etc. can be taken over. However, the elastic damping layer 34 be formed from non-foamed rubber or resin elastomer.

In the elastic damping layer 34 The embodiment has an inner surface 35 on the limb 20 Side on a shape that coincides with a roughness, which is the outer surface of the limb 20 and an outer surface opposite to the member 20 is formed flat. In the embodiment, the elastic damping layer becomes 34 essentially directly superimposed on the outer surface of the limb 20 because the shielding layer 30 and the support body 32 be arranged between the elastic damping layer 34 and the limb 20 but both the shielding layer 30 as well as the support body 32 are flexible and sufficiently thin and are along the outer surface of the limb 20 arranged. Also can in 2 although the roughness of the outer surface of the limb 20 is shown schematically, the roughness of the outer surface of the member 20 be formed, for example, due to an arrangement of a control circuit or wiring of the arm 18 , a design of a connection housing, a screw structure, and the like.

Furthermore, a second sensor 36 on the outside of the elastic damping layer 34 superimposed. The second sensor 36 is a contact sensor, which contact of the worker A with the arm 18 detects, and in the embodiment, a capacitive-type planar pressure sensor is used. However, various known contact sensors can be adopted for the second sensor 36 and, for example, an impact sensor using piezoelectric ceramics, a touch sensor such as a resistance film type, an infrared type or a surface acoustic wave type, a flow sensor which detects an air flow due to deformation of the elastic layer at the time of contact detects, a membrane switch, and the like. Furthermore, one can be in the robot 12 built-in sensor can be used as the second sensor 36 , and, for example, a force sensor, a torque sensor, a sensor sensor, or the like may be used as the second sensor 36 be used. As indicated by a two-dot dashed line in 1 and 2 shown is the second detection area 38 in which the worker A through the second sensor 36 can be detected, closer to the arm 18 set as the first detection area 28 of the first sensor 26 ,

As in 3 shown, the second sensor 36 of the embodiment, a structure in which a first electrode sheet 44 including a plurality of first electrodes 42 parallel to each other, and a second electrode sheet 48 including a plurality of second electrodes 46 parallel to each other, are superimposed on and attached to both surfaces of a dielectric layer 40 ,

The dielectric layer 40 is an elastically deformable sheet-shaped electrical insulator formed of rubber or resin elastomer, and may be formed of non-foamed rubber which hardly causes volume change. The dielectric layer 40 can be integrally formed with the first electrode sheet 44 and the second electrode sheet 48 , which will be described later.

The first electrode sheet 44 has a structure in which the plurality of strip-shaped first electrodes 42 having conductivity, are formed in parallel on an electrically insulating sheet-shaped base body 50 , Each of the first electrodes 42 is formed by mixing an elastic material such as rubber with a conductive material such as carbon filler or metal powder, and is made stretchable and deformable. The first electrode 42 can on the base body 50 be formed by screen printing or the like.

Like the first electrode sheet 44 has the second electrode sheet 48 a structure in which a plurality of strip-shaped conductive second electrodes 46 which are stretchable and deformable, are formed in parallel on the electrically insulating and sheet-shaped base body 50 , The training material of the second electrode 46 and the second electrode forming method 46 on the base body 50 are the same as those of the first electrode 42 ,

In addition, the second sensor 36 through the first electrode sheet 44 and the second electrode sheet 48 formed on the dielectric layer 40 be applied from each side in the thickness direction, and attached thereto by means such as adhesion or welding. In the applied state of the dielectric layer 40 are the first and second electrode sheets 44 and 48 , a longitudinal direction of the first electrodes 42 and a longitudinal direction of the second electrodes 46 different from each other, and the first electrodes 42 and the second electrodes 46 intersect and lie opposite each other, with the dielectric layer 40 inserted in between. Therefore, a pressure detection part becomes 52 in each intersection and opposite section of the first electrodes 42 and the second electrodes 46 (please refer 2 ) which detects the pressure based on capacitance change acting in an opposite direction. Therefore, the second sensor becomes 36 having a structure in which a plurality of pressure detection parts 52 are arranged in a scattered manner, as a capacitance-type surface pressure sensor that detects the pressure based on the capacitance change acting on the surface. Although the rectangular leaf-shaped second sensor 36 in 3 is shown, the special shape of the second sensor 36 according to the forms of the limbs 20a to 20d or the like adjusted accordingly. In addition, the first electrodes 42 and the second electrodes 46 not limited to a strip shape, and may be formed in a plurality of independent dot shapes, for example, and may be arranged opposite to each other.

Furthermore, a third sensor 54 on the outside of the second sensor 36 superimposed. Because the third sensor 54 by a contact sensor as in the second sensor 36 is configured and substantially the same structure as that of the second sensor 36 A detailed description is omitted and the same reference numerals are provided in the drawings. Furthermore, the third recognition area becomes 56 in which the worker A through the third sensor 54 can be detected, adjusted at a position closer to the arm 18 as the first detection area 28 of the first sensor 26 , Because the third detection area 56 of the third sensor 54 the same as the second detection area 38 of the second sensor 36 , and is arranged at a position which the second detection area 38 overlaps, and the second sensor 36 and the third sensor 54 Contact sensors in the embodiment are the second detection area 38 and the third detection area 56 on a surface of the third sensor 54 arranged as indicated by a two-dot dashed line in 1 and 2 shown.

Further, as in 4 which is a block diagram of the most important hardware detection circuits 58a and 58b correspondingly connected to the second sensor 36 and the third sensor 54 , Because the second sensor 36 and the third sensor 54 are both capacitive sensors, and the worker a is detected based on the same detection principle, ie the capacitance change, here have the detection circuit 58a connected to the second sensor 36 , and the detection circuit 58b , connected to the third sensor, the same structure. The following is the detection circuit 58a described, and the particular configuration of the detection circuit 58b will be omitted and in the drawing is the detection circuit 58a the same reference number provided.

The detection circuit 58a has a structure in which various integrated circuits, connectors and the like are attached to a printed circuit board 59 and connected to the first and second electrodes 42 and 46 of the second sensor 36 at an analog input part 60 , attached to the printed circuit board 59 , Furthermore, the detection circuit includes 58a a CV conversion circuit 62 , which is a detection signal of the capacitance of the second sensor 36 converts to a corresponding voltage and a microcomputer 64 that includes the CV conversion circuit 62 connected is. The microcomputer 64 has a function of controlling the pressure detection by the second sensor 36 is generated, such as a function in which a detection current is supplied to the plurality of pressure detection parts 52 of the second sensor 36 in a scanning manner, and a pressure is detected on each of the pressure detection parts 52 acts. Furthermore, the microcomputer 64 a function for filtering the voltage signal converted from the detection signal of the capacitance of the second sensor 36 to reduce noise and then convert the filtered voltage signal to a digital signal. In addition, an external power supply device (not shown) having a power input part 66 connected, provided in the detection circuit 58a and a DC current of the power supply device becomes the microcomputer 64 supplied by a voltage monitoring part 70 in a state of being a voltage through a DC-DC converter 68 is set.

The microcomputer 64 the detection circuit 58a connected to the second sensor 36 and the microcomputer 64 the detection circuit 58b connected to the third sensor 54 , Can monitor whether or not the second sensor 36 and the third sensor 54 operate normally by comparing a recognition result of the second sensor 36 with a recognition result of the third sensor 54 , or similar.

In addition, digital signals are generated by the microcomputers 64 the detection circuits 58a and 58b , Output of digital output parts 72 and 72 the detection circuits 58a and 58b outward. The output of the digital signals from the detection circuits 58a and 58b are transmitted to eg a security device 74 and a reporting device 76 , The security device 74 can the arm 18 slow down or stop, or the message device 76 eg a monitor or a loudspeaker, eg a warning for approaching the arm 18 Show, a required operation procedure to the stopped arm 18 again, or the like, based on the digital signals generated by the detection signals of the second and third sensors 36 and 54 ,

That is, a block diagram of main functions implemented by hardware including the microcomputer 64 , is in 5 shown. First, in step (hereinafter referred to as S) 1, the current becomes each of the pressure detection parts 52 of the second and third sensors 36 and 54 supplied in a groping manner, and the capacity of each of the pressure detection parts 52 is being measured. Next, in S2, a value of the pressure applied to each of the pressure detection parts 52 acts, based on the capacitance value of each of the pressure detection parts 52 of the second and third sensors 36 and 54 , Next, in S3, the acquired pressure value is compared with a pre-set input threshold and the presence or absence of contact of the worker A with the arm 18 is determined. If it has been determined in S3 that there has been contact with a human body, in S4 is a lock signal of a movement speed of the arm 18 corresponding to a pad output taking into account the pad, an amount of the detected pressure, and the like. The security device 74 controls the work of the arm 18 (eg slows down or stops at the arm 18 ), and the reporting device 76 executes output of a danger notification alarm and the like as needed based on the lock signal of the speed.

Furthermore, special circuit structures of electrical elements of the hardware for realization of in 4 shown hardware block configuration and the in 5 Function block configuration shown the same design. In addition to the analog input part 60 , the CV conversion circuit, the voltage monitoring part, the digital output unit 72 , and the input / output (I / O) part in 4 can the microcomputer 64 from the same housing in different forms such as DIP, SIP, PGA, SOJ or the like. An external storage element may be used as the microcomputer 64 , and a packaged product including a logic circuit for realizing a desired function such as a CPU, a RAM and a ROM may also be used. In addition, for example, value setting of thresholds can be set in the microcomputer 64 , simply be used differently as needed.

Furthermore, as in 6 shown, the second sensor 36 and the third sensor 54 with a detection circuit 77 connected, so the only detection circuit 77 can be shared. That is, in the detection circuit 77 includes the microcomputer 64 eg an input / output channel for the second sensor 36 and an input / output channel for the third sensor 54 , and the controls of the detection of the second sensor 36 and the third sensor 54 , the processing of the detection signals, and the like can be performed in parallel. In addition, a detection circuit by the second sensor 36 and the third sensor 54 be shared as the second sensor 36 and the third sensor 54 Sensors are the same recognition principle for contact recognition based on the capacitance change.

The sensor device 10 The embodiment includes the first, second and third sensors 26 . 36 and 54 , the detection circuit (not shown) of the first sensor 26 , the detection circuits 58a and 58b of the second and third sensors 36 and 54 , the shielding layer 30 , the support body 32 and the elastic damping layer 34 , and will be at the support base 16 attached and the arm 18 of the robot 12 , However, in addition to the sensor device 10 another sensor can be provided to the recognition accuracy of the worker A to improve or to achieve multi-level detection.

As in 1 shown when the worker A as the recognition target to the robot 12 approaching that with the sensor device 10 provided having such a structure becomes the worker A first through the first sensor 26 at a position relatively far away from the arm 18 recognized. If the first sensor 26 the worker A detects, becomes the detection signal of the first sensor 26 converted into a digital signal by a detection circuit (not shown) and transmitted to the security device 74 , the signaling device 76 , and the same. Therefore, the movement speed of the arm 18 reduced by the safety device 74 and the worker A is warned by the message device 76 , from the arm 18 leave. The security device 74 or the reporting device 76 can in the support base 16 or the limb 20 be housed. Furthermore, the detection circuit of the first sensor 26 or the detection circuits 58a and 58b of the second and third sensors 36 and 54 in the support base 16 or the limb 20 be housed.

Although the speed of movement of the arm 18 after deceleration is set according to a distance between the arm 18 and the worker A which passes through the first sensor 26 or the like can be recognized, one on the worker A sufficient force can be reduced, eg by slowing down to 250mm / sec or less, and stop the arm 18 if worker A's contact with his arm 18 is detected by the second and the third sensor 36 and 54 ,

Next, if the worker continues to hold his arm 18 approaching, and therefore the worker A in contact with the arm 18 comes, becomes the worker A through both the second sensor 36 as well as the third sensor 54 recognized at a position closer to the arm 18 as a distal end (a front end) of the first recognition area 28 of the first sensor 26 , In addition, the contact of the worker A with the arm 18 through the second sensor 36 and the third sensor 54 detected, the detection signals of the second and third sensor 36 and 54 , converted into digital signals by the detection circuits 58a and 58b transmitted to eg the security device 74 or the reporting device 76 , and therefore keeps the security device 74 the work of the arm 18 on. The reporting device 76 also warns the worker A , from the arm 18 to go away, and the message device 76 indicates a necessary procedure, the arm 18 to start again.

Therefore, in the embodiment according to the robot 12 provided with the sensor device 10 , three sensors provided, including the first sensor 26 who is the worker A detects at a great distance, and the second sensor 36 and the third sensor 54 who the worker A detect at a short distance. Therefore, the approach and the contact of the worker A be detected with higher reliability based on the detection results of the three sensors 26 . 36 and 54 ,

Further, the approach of the worker A through the first sensor 26 is recognized and the arm 18 slowed down before the worker A in contact with the arm 18 comes, can the arm 18 be stopped immediately if the contact of the worker A with the arm 18 is recognized. That's why the force is on the worker A works through the contact of the arm 18 sufficiently small, and it becomes possible to avoid a problem such as the worker feels pain or damage to the arm 18 because of the contact.

Further, the worker becomes A detected by both the second sensor 36 as well as the third sensor 54 at a position closer to the arm 18 as the first sensor 26 , Therefore, the arm can 18 be stopped with greater reliability when the worker A in contact with the arm 18 comes, and therefore because of the force that exists between the worker A and the arm 18 the safety can be improved.

Because both the second sensor 36 as well as the third sensor 54 is configured by the flexible capacitive type sensor comprising the deformable dielectric layer 40 and the electrodes 42 and 46 Furthermore, excellent recognition accuracy is realized, the force being applied to the worker A works when the worker A and the arm 18 Keeping each other in contact will be further relaxed and safety will be further improved.

In the embodiment, since both the second sensor 36 as well as the third sensor 54 Contact sensors are, and the second detection area 38 of the second sensor 36 and the third detection area 56 of the third sensor 54 overlap, becomes the contact of the worker A with the arm 18 through both the second sensor 36 as well as the third sensor 54 recognized. Because the stopping of the arm 18 based on the detection of the contact between the arm 18 and the worker A Therefore, with better reliability, therefore, the acting force becomes when the arm 18 and the worker A come in contact with each other, more reliably reduced, and safety can be further improved.

Because both the second sensor 36 as well as the third sensor 54 outside the elastic damping layer 34 Further, in the embodiment, the recognition accuracy of the worker's contact can be prevented from being arranged A manufactured by the second sensor 36 and the third sensor 54 , by a buffering property of the elastic damping layer 34 is lowered. If the arm 18 in contact with the worker A can come, therefore, the contact of the worker A effectively through the second and third sensor 36 and 54 be recognized, although the on the worker A acting force by the buffering property of the elastic damping layer 34 is reduced.

Here are both the second sensor 36 and the third sensor 54 , which recognize the worker A at a short distance, capacitive-type sensors, indicating the contact of the worker A Detect based on the capacity change. As described above, the second sensor 36 and the third sensor 54 be configured by sensors having the same detection principle, it becomes possible, the same detection circuits 58a and 58b to use, and unify the structure of the detection circuits 58a and 58b facilitates manufacture or management of the detection circuits 58a and 58b ,

There, as well as in 6 shown, both the second sensor 36 as well as the third sensor 54 with the single detection circuit 77 can be connected, the second sensor 36 and the third sensor 54 the detection circuit 77 sharing, and simplifying the structure and space saving for arranging the detection circuit 77 can be achieved.

Further, in the embodiment, the first detection area becomes 28 of the first sensor 26 firmly set to the environment of the danger zone 29 to include in which the arm 18 can move. Therefore, the worker becomes A before the worker A in the danger zone 29 enters, through the first sensor 26 Detected at a position sufficiently away from the arm 18 , and the arm 18 can be slowed down sufficiently before the contact of the worker A with the arm 18 ,

As in 7 shown can be an intermediate attenuation layer 78 between the second sensor 36 and the third sensor 54 to be provided. The intermediate damping layer 78 is formed of, for example, an elastic material which is the same as that of the elastic damping layer 34 provided between the second sensor 36 and the shielding layer 30 , and is formed in a substantially flat shape. Since according to the structure having such an intermediate damping layer 78 , it is possible to further improve the buffering property when the worker A in contact with the arm 18 comes, and recognition accuracy of the second sensor 36 and the third sensor 54 , which are configured by the contact sensors, can by the intermediate attenuation layer 78 be set. For example, it is easy to get the recognition accuracy of the second sensor 36 lower than the recognition accuracy of the third sensor 54 adjust.

Furthermore, as in 8th shown an intermediate attenuation layer 80 in which an overlapping surface to the second sensor 36 is formed into a rough surface shape, also between the second sensor 36 and the third sensor 54 to be provided. The intermediate damping layer 80 is provided outside the second sensor 36 and includes a plurality of convex portions 82 , which in the direction of the second sensor 36 protrude, and the majority of convex parts 82 is provided at portions corresponding to the plurality of pressure detection parts 52 of the second sensor 36 , and are in contact with the pressure detection parts 52 of the second sensor 36 , Accordingly, if the worker A in contact with the arm 18 comes, the pressure caused by the contact, to act intensely through the convex parts 82 on each of the pressure detection parts 52 , which detection parts of the second sensor 36 are while on the worker A effective force is effectively reduced, and the contact of the worker A with the arm 18 can be detected with excellent accuracy. An aspect of the convex part 82 , corresponding to the pressure detection part 52 , should only efficiently transfer the contact pressure to the pressure detection part 52 and may be, for example, an aspect such as providing the pressure detection parts 52 only at the substantially same positions as the convex portions 82 and providing the convex parts 82 of which, as illustrated, at least some of the pressure detection parts 52 are located.

Further shows 9 a part of a robot 92 as an automatic device with a sensor device 90 according to the second embodiment of the present invention. The robot 92 The embodiment has a structure in which the sensor device 90 on the outside of the limb 20 is attached, which is the arm 18 forms. In the following description, parts that are substantially the same as those of the first embodiment will be indicated by the same reference numerals in the drawings, and the description thereof will be omitted. The entire robot 92 is the same as the robot 12 of the first embodiment, and a first sensor (not shown), which is the same as that of the first embodiment, is provided on a support base (not shown) which supports the arm 18 supported. Also, are in 9 and 10 described later, although the electrodes and the dielectric layers of the second sensor 36 and the third sensor 54 omitted for easy viewing, the particular structures of the second sensor 36 and the third sensor 54 the same as those of the first embodiment.

In particular, an elastic damping layer 34 on the outer surface of the limb 20 attached. In the elastic damping layer 34 has an inner surface 35 of which, on the limb 20 Side, a surface shape corresponding to a surface roughness of the limb 20 , and an outer surface thereof opposite to the member 20 is formed of a plurality of flat surfaces.

A shielding layer 30 and a second sensor 36 are arranged on the outside of the elastic damping layer 34 , The shielding layer 30 the embodiment is applied to a surface of a second electrode sheet 48 of the second sensor 36 printed, and the shielding layer 30 is between the second sensor 36 and the elastic damping layer 34 arranged.

Furthermore, a third sensor 54 on the outside of the second sensor 36 arranged, and the outside of the third sensor 54 is through a cover 94 covered. The cover 94 is formed of a flexible material such as leather, cloth, or an elastomer layer including a vinyl layer or a rubber layer and prevents adhesion of Schmitz to the third sensor 54 , and the same.

Also, in the robot 92 with the sensor device 90 Having the structure according to the embodiment as in the first embodiment, the arm can be prevented from being damaged 18 colliding with a recognition target, such as a worker, using the first sensor (not shown), which recognizes a recognition target in a remote position away from the arm 18 , and the second sensor 36 and the third sensor 54 indicating the contact of the recognition target with the arm 18 recognize.

Also, as shown in the embodiment, the shielding layer 30 be arranged on the inside closer to the limb 20 as the second sensor 36 and the third sensor 54 and may also be arranged outside the elastic damping layer 34 , Further, in the embodiment, since the shielding layer 30 on the second electrode sheet 48 of the second sensor 36 is fixed, a support body for supporting the shielding layer 30 not required, and therefore the structure can be simplified and the number of parts can be reduced.

Even though 9 an example shows in which an outer surface of an elastic damping layer 34 is formed in a substantially rectangular box shape including a plurality of flat surfaces, becomes a simplification for understanding, and as a shape of the outer surface of the elastic damping layer 34 Any surface shape can be used, which provides the second and third sensor 36 and 54 and the shielding layer 30 relieved compared to the surface of the limb 20 , Further, for example, the shape of the outer surface of the elastic damping layer 34 be set to form at least part of a particular design. Furthermore, the surface shape of the member becomes 20 , covered by the elastic damping layer 34 , not particularly limited.

Also, as in 10 shown a structure in which a support cover 96 is provided, the limb 20 covered, and the shielding layer 30 , the elastic damping layer 34 , the second and third sensor 36 and 54 and the cover 94 are provided on the surface of the support cover 96 , The support cover 96 The embodiment is in the form of a hollow box and is placed outside the limb 20 to surround by housing the limb 20 in an accommodation room 98 therein. As described above, because the surface of the limb 20 is covered by support coverage 96 , become the shielding layer 30 , the elastic damping layer 34 , the second and third sensor 36 and 54 , and the cover 94 easily deployed on the outside of the limb 20 , regardless of the roughness of the surface of the limb 20 ,

Furthermore, in 10 the detection circuit 77 or the like of the second and third sensors 36 and 54 be accommodated between the support cover 96 and the limb 20 in the accommodation room 98 , Even though 10 illustrates the structure in which the detection circuit 77 is arranged in the accommodation room 98 in a state of being attached to the support cover 96 , can eg the detection circuit 77 or the like arranged in the accommodation space 98 on the limb 20 be attached.

Further shows 11 a robot 102 as an automatic device with a sensor device 100 according to the third embodiment of the present invention. In the embodiment, a third sensor 106 (please refer 12 ) provided on the arm 18 of the robot 102 , a proximity sensor, which contacts the worker A without contact at a position away from the arm 18 can recognize.

As the third sensor 106 For example, a variety of known proximity sensors can be used, and, for example, a capacitive sensor that detects approaching of a conductor or dielectric to an electrode, an optical sensor such as a light or a laser sensor, an ultrasonic sensor, or the like. As in 12 shown is the third sensor 106 the embodiment, a capacitive sensor comprising a structure in which an electrode 107 is formed by printing on an upper surface of the base body 50 , and is also configured to detect the approach of a conductor (here the worker A), such as a human body to the electrode 107 , as a change in the capacitance of a capacitor formed of the electrode 107 and the leader. Further, as indicated by the two-dot chain line in FIG 11 and 12 shown a third detection area 108 in which the worker A is recognized using the third sensor 106 set to a position closer to the robot 12 as the first detection area 28 of the first sensor 26 and extends to a position further away from the robot 12 as the second detection area 38 of the second sensor 36 ,

The third sensor 106 the embodiment is a sensor in which the worker A is recognized in both a non-contact manner and in a contacting manner. Particularly, for example, when a capacitive proximity detection type sensor which detects capacitance change due to the approach of a conductor such as a human body in a non-contact manner is used as the third sensor 106 , can he Worker A through the third sensor 106 be recognized in both a non-contact state and a contacting state of the worker A with the arm 18 , Therefore, the third detection area extends 108 of the third sensor 106 to a position further away from the arm 18 as the second detection area 38 of the second sensor 36 and includes a surface of the second sensor 36 which is the same as the second detection area 38 , Therefore, the third detection area overlaps 108 partly the second detection area 38 and is set to an area other than the second detection area 38 in one direction away from the arm 18 ,

In the robot 102 with the sensor device 100 Having the structure according to the embodiment becomes approaching of the worker A to the arm 18 gradually detected by the first sensor 26 and the third sensor 106 , and the contact of the worker A with the arm 18 is through both the second sensor 36 as well as the third sensor 106 recognized.

That is, if the worker A the arm 18 Page closer than the distal end of the first detection area 28 of the first sensor 26 and in the third detection area 108 of the third sensor 106 enters, becomes the worker A through the third sensor 106 detected in a non-contact way before the worker A and the arm 18 get in touch with each other. In addition, when approaching the worker A to the arm 18 through the third sensor 106 is detected becomes a detection signal of the third sensor 106 , converted into a digital signal by the detection circuit 58b , transmitted to a safety device (not shown), which controls the movement of the arm 18 controls, or a reporting device warns the worker A , from the arm 18 leave.

Therefore, in the embodiment, for example, the moving speed of the arm 18 gradually reduced due to the recognition of the worker A through the first sensor 26 and the third sensor 106 before the worker A in contact with the arm 18 comes, and therefore it can affect the worker A acting force when in contact with the arm 18 be made smaller. The movement of the arm 18 can be stopped by the recognition of the worker A through the third sensor 106 , In this case, the second sensor 36 also serve as a failover if the third sensor 106 can not correctly recognize the recognition target, eg due to an error or the like.

Further, in the embodiment, since the third sensor 106 not only the approach of the worker A to the arm 18 can recognize, but also the contact, the contact of the worker A with the arm 18 through both the second sensor 36 as well as the third sensor 106 detected, but the third sensor 106 may be able to approach the worker A to the arm 18 to recognize only in the non-contact state.

In the embodiment, since both the second sensor 36 as well as the third sensor 106 are capacitive sensors, a common structure detection circuit may also be employed, such as the detection circuits 58a and 58b the first embodiment. Furthermore, for example, in the detection circuits 58a and 58b of the second sensor 36 and the third sensor 106 , the recognition accuracy of the second sensor 36 and the third sensor 106 can also be adjusted by forming coefficients at the time of signal conversion by the CV conversion circuit 62 different from each other or amplifying the detection signal of the third sensor 106 ,

Although the embodiments of the present invention have been described above in detail, the present invention is not limited by the specific description. For example, For example, the second and third sensors may employ a proximity sensor in combination, in which the recognition target is recognized at a position away from the unarmed arm, and a contact sensor in which contact of the recognition target with the arm is detected, and both the second sensor as well as the third sensor may be proximity sensors or may be contact sensors.

Furthermore, the second detection area of the second sensor and the third detection area of the third sensor need not necessarily be set to partially or completely overlap, and may also be set to different areas without the overlapping section. Also, in such a case, the recognition target can be recognized by both the first sensor and the third sensor, and the slowing and stopping of the arm can be performed on the arm side farther than the distal end of the first recognition range of the first sensor.

Also, the first sensor and the third sensor are not limited to the capacitive sensors, and various well-known proximity sensors or contact sensors such as an electrical resistance type sensor, a laser sensor and an ultrasonic sensor can be used. Further, sensors incorporated in an automatic device such as a sensor which detects a current of a motor for driving a wrist joint part or a sensor which detects a torque acting on a wrist joint part of an arm can also be used as the first sensor and the third sensor. The first sensor and the third sensor is desirably flexible sensors, but may be rigid sensors as long as safety is ensured at the time of contact.

Furthermore, sensors recognizing a recognition target can be based on various recognition principles, such as e.g. capacitive sensors and an electrical resistance sensor, are combined and used as the second sensor and the third sensor. As a result, it is easy to prevent the second sensor and the third sensor from failing at the same time due to a special condition (an input of a large load, temperature environment, and the like), and reliability can be improved.

The first sensor is provided on the support base which is outside the moving part, e.g. the arm as described in the embodiment above, and recognizes intrusion of a recognition target into a fixed set area, and also can be provided in the moving part to detect intrusion of a recognition target into a region that changes as the object moves moving part moves.

Further, the first sensor may be any sensor as long as the first detection range extends further than the second detection range of the second sensor and the third detection range of the third sensor, and may be e.g. adopt a structure in which both the second sensor and the third sensor contact sensors and the first sensor is a proximity sensor, such. a capacitive sensor which detects the approach of the recognition target to a position near the arm.

In the embodiment described above, the worker A is exemplified as the recognition target recognized by the first, second, and third sensors, but the recognition target is not limited to a person and may be an object. Further, it is desirable that damping materials such as e.g. an elastic damping layer and an intermediate damping layer may be arranged to reduce the force acting at the time of contact of the recognition target, but the elastic damping layer and the intermediate damping layer are not essential.

Further, an automatic device in which the sensor device according to the present invention is mounted is not limited to the industrial robot shown in the embodiment described above, and can be applied to e.g. a medical robot or care robot or an automatically controlled vehicle (AGV). In the embodiment described above, the structure in which a part of the automatic device is the moving part is exemplified. However, if e.g. the automatic device is the AGV, the whole automatic device becomes the moving part.

LIST OF REFERENCE NUMBERS

10, 90, 100

sensor device

12, 92, 102

Robot (automatic device)

18

Arm (moving part)

26

first sensor

28

first detection area

29

danger area

34

elastic damping layer

36

second sensor

38

second detection area

40

dielectric layer

42

first electrode

46

second electrode

54, 106

third sensor

56, 108

third detection area

58, 77

detection circuit

78, 80

Between damping layer

82

convex part

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• JP 5805208 [0004, 0006]

Claims (11)

A sensor device that detects approach or contact of a recognition target with a moving part that is movably provided in an automatic device, comprising: a first sensor that detects the recognition target at a position away from the moving part; a second sensor that detects the recognition target at a position closer to the moving part than the first sensor; and a third sensor which detects the recognition target at a position closer to the moving part than the first sensor, wherein the approach of the recognition target to the moving part is detected by both the second sensor and the third sensor, at a position closer to the moving part than a position recognizable by the first sensor. Sensor device according to Claim 1 wherein a detection area of the second sensor and a detection area of the third sensor have different circumference in a direction away from the moving part. Sensor device according to Claim 1 or 2 , wherein the detection range of the second sensor and the detection range of the third sensor overlap. Sensor device according to one of Claims 1 to 3 wherein at least one of the second sensor and the third sensor is a contact sensor that detects the contact of the detection target with the moving part. Sensor device according to Claim 4 wherein at least one of the second sensor and the third sensor, which is a contact sensor, has a structure in which each of a first electrode and a second electrode, which are deformable, is fixed to a surface of a dielectric layer that is elastically deformable and capacitive sensors that detect a pressure acting across the dielectric layer in an opposite direction on an opposite portion of the first electrode and the second electrode based on a change in a capacitance value. Sensor device according to one of Claims 1 to 5 wherein the second sensor and the third sensor detect the recognition target according to the same recognition principle. Sensor device according to Claim 6 wherein the second sensor and the third sensor share a detection circuit. Sensor device according to one of Claims 1 to 7 wherein the first sensor is capable of detecting the recognition target outside a danger zone in which the moving part is movable. Sensor device according to one of Claims 1 to 8th further comprising a buffer elastic cushioning layer disposed outside the moving member, wherein the second sensor and the third sensor are disposed outside the cushioning elastic layer with respect to the moving member. Sensor device according to one of Claims 1 to 9 further comprising an intermediate attenuation layer disposed between the second sensor and the third sensor. Sensor device according to Claim 10 wherein the second sensor is a contact sensor which detects the contact of the detection target, the intermediate damping layer being located outside the second sensor, and an overlapping surface of the intermediate damping layer on the second sensor in a rough shape with convex parts projecting toward the second sensor , is trained.

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