DE112014007078A5 - Gitterspektrometer mit verbesserter auflösung - Google Patents

Gitterspektrometer mit verbesserter auflösung Download PDF

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Publication number
DE112014007078A5
DE112014007078A5 DE112014007078.5T DE112014007078T DE112014007078A5 DE 112014007078 A5 DE112014007078 A5 DE 112014007078A5 DE 112014007078 T DE112014007078 T DE 112014007078T DE 112014007078 A5 DE112014007078 A5 DE 112014007078A5
Authority
DE
Germany
Prior art keywords
spectrometers
grid
improved resolution
resolution
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112014007078.5T
Other languages
English (en)
Other versions
DE112014007078B4 (de
Inventor
Wolfram Bohle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spectro Analytical Instruments GmbH and Co KG
Original Assignee
Spectro Analytical Instruments GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spectro Analytical Instruments GmbH and Co KG filed Critical Spectro Analytical Instruments GmbH and Co KG
Publication of DE112014007078A5 publication Critical patent/DE112014007078A5/de
Application granted granted Critical
Publication of DE112014007078B4 publication Critical patent/DE112014007078B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20—Rowland circle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
DE112014007078.5T 2014-12-22 2014-12-22 Gitterspektrometer mit verbesserter auflösung Active DE112014007078B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/079056 WO2016101984A1 (de) 2014-12-22 2014-12-22 Gitterspektrometer mit verbesserter auflösung

Publications (2)

Publication Number Publication Date
DE112014007078A5 true DE112014007078A5 (de) 2017-08-17
DE112014007078B4 DE112014007078B4 (de) 2022-01-20

Family

ID=52144716

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112014007078.5T Active DE112014007078B4 (de) 2014-12-22 2014-12-22 Gitterspektrometer mit verbesserter auflösung

Country Status (2)

Country Link
DE (1) DE112014007078B4 (de)
WO (1) WO2016101984A1 (de)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB765441A (en) * 1953-03-24 1957-01-09 William George Fastie Spectroscopic device
US2922331A (en) 1953-03-24 1960-01-26 Walter G Finch Spectroscopic device
US2868063A (en) * 1957-05-16 1959-01-13 Leeds & Northrup Co Adjustable mirror support in successive dispersion monochromator
JP3861496B2 (ja) * 1998-07-13 2006-12-20 横河電機株式会社 ２段式分光器
US6061129A (en) * 1999-01-22 2000-05-09 Cymer, Inc. Compact high resolution grating spectrometer
DE69931885T2 (de) 1999-02-26 2007-05-31 Yokogawa Electric Corporation Doppelmonochromator
US20020135879A1 (en) * 2001-02-20 2002-09-26 Valdimir Pogrebinsky Super high resolution optical resonator
FR3009616A1 (fr) * 2013-08-06 2015-02-13 Commissariat Energie Atomique Spectrometre a plusieurs reseaux de diffraction

Also Published As

Publication number Publication date
DE112014007078B4 (de) 2022-01-20
WO2016101984A1 (de) 2016-06-30

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R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final