DE112006003699A5 - Auslenkbares mikromechanisches System sowie dessen Verwendung - Google Patents
Auslenkbares mikromechanisches System sowie dessen Verwendung Download PDFInfo
- Publication number
- DE112006003699A5 DE112006003699A5 DE112006003699T DE112006003699T DE112006003699A5 DE 112006003699 A5 DE112006003699 A5 DE 112006003699A5 DE 112006003699 T DE112006003699 T DE 112006003699T DE 112006003699 T DE112006003699 T DE 112006003699T DE 112006003699 A5 DE112006003699 A5 DE 112006003699A5
- Authority
- DE
- Germany
- Prior art keywords
- deflectible
- micromechanical system
- micromechanical
- deflectible micromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/DE2006/000243 WO2007087767A1 (de) | 2006-02-03 | 2006-02-03 | Auslenkbares mikromechanisches system sowie dessen verwendung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE112006003699A5 true DE112006003699A5 (de) | 2008-10-23 |
DE112006003699B4 DE112006003699B4 (de) | 2012-07-19 |
Family
ID=36282959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE112006003699T Active DE112006003699B4 (de) | 2006-02-03 | 2006-02-03 | Auslenkbares mikromechanisches System sowie dessen Verwendung |
Country Status (4)
Country | Link |
---|---|
US (1) | US7841242B2 (de) |
CN (1) | CN101379377B (de) |
DE (1) | DE112006003699B4 (de) |
WO (1) | WO2007087767A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012087286A1 (en) | 2010-12-20 | 2012-06-28 | Intel Corporation | Micro deflectors on touch sensor |
CN102692705B (zh) * | 2011-06-16 | 2014-05-14 | 重庆大学 | 基于moems工艺集成角度传感器的微扫描光栅 |
EP3082428A4 (de) | 2013-12-09 | 2017-08-02 | Respira Therapeutics, Inc. | Pde5-inhibitorpulverformulierungen und zugehörige verfahren |
US9470503B2 (en) * | 2014-02-26 | 2016-10-18 | Apple Inc. | Strain-based sensing of mirror position |
DE102014217799B4 (de) * | 2014-09-05 | 2019-11-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Piezoelektrischer Positionssensor für piezoelektrisch angetriebene resonante Mikrospiegel |
DE102016206671A1 (de) * | 2016-04-20 | 2017-10-26 | Robert Bosch Gmbh | Längenausdehnungsüberwachung zur Bestimmung der Alterung einer Batteriezelle oder eines Batteriemoduls |
CN108664903B (zh) * | 2018-04-23 | 2019-12-31 | 江苏大学 | 一种触觉信号自动采集装置 |
US11880031B1 (en) | 2020-01-14 | 2024-01-23 | Apple Inc. | Strain-based sensing of dual-axis mirror rotation |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3123788A (en) * | 1964-03-03 | Piezoresistive gage | ||
US4442717A (en) * | 1982-09-20 | 1984-04-17 | Kulite Semiconductor Products, Inc. | Compensation and normalization apparatus for shear piezoresistive gage sensors |
US5034645A (en) * | 1989-01-13 | 1991-07-23 | Digital Equipment Corporation | Micro-beam tactile sensor for the measurement of vertical position displacement |
JPH09232595A (ja) * | 1996-02-26 | 1997-09-05 | Denso Corp | 圧力検出装置 |
CN1139058C (zh) * | 1997-07-29 | 2004-02-18 | 西加特技术有限责任公司 | 低质量盘片驱动器悬架 |
US6134087A (en) * | 1998-06-10 | 2000-10-17 | Magnecomp Corp. | Low voltage, high displacement microactuated disk drive suspension |
US6444487B1 (en) * | 1998-07-28 | 2002-09-03 | Rosemount Aerospace Inc. | Flexible silicon strain gage |
US6239953B1 (en) * | 1999-10-15 | 2001-05-29 | Magnecomp Corp. | Microactuated disk drive suspension with heightened stroke sensitivity |
CN1937037A (zh) * | 2000-11-28 | 2007-03-28 | 新科实业有限公司 | 带有压电微驱动机构的磁头弹簧片组件 |
US6807875B2 (en) * | 2000-12-01 | 2004-10-26 | Honeywell International Inc. | Self-compensating position sensor |
JP2005233953A (ja) * | 2004-02-17 | 2005-09-02 | Robert Bosch Gmbh | マイクロメカニカル式の高圧センサを製造するための方法及びマクロメカニカル式の圧力センサ |
-
2006
- 2006-02-03 US US12/162,404 patent/US7841242B2/en active Active
- 2006-02-03 DE DE112006003699T patent/DE112006003699B4/de active Active
- 2006-02-03 CN CN2006800521905A patent/CN101379377B/zh active Active
- 2006-02-03 WO PCT/DE2006/000243 patent/WO2007087767A1/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
CN101379377B (zh) | 2011-05-11 |
US7841242B2 (en) | 2010-11-30 |
DE112006003699B4 (de) | 2012-07-19 |
US20090293632A1 (en) | 2009-12-03 |
CN101379377A (zh) | 2009-03-04 |
WO2007087767A1 (de) | 2007-08-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
R016 | Response to examination communication | ||
R018 | Grant decision by examination section/examining division | ||
R020 | Patent grant now final | ||
R082 | Change of representative |
Representative=s name: , |
|
R020 | Patent grant now final |
Effective date: 20121020 |