DE112005001583T5 - Kupfermetallisierungs-Analysesystem und -verfahren unter Verwendung von Röntgenfluoreszenz - Google Patents
Kupfermetallisierungs-Analysesystem und -verfahren unter Verwendung von Röntgenfluoreszenz Download PDFInfo
- Publication number
- DE112005001583T5 DE112005001583T5 DE112005001583T DE112005001583T DE112005001583T5 DE 112005001583 T5 DE112005001583 T5 DE 112005001583T5 DE 112005001583 T DE112005001583 T DE 112005001583T DE 112005001583 T DE112005001583 T DE 112005001583T DE 112005001583 T5 DE112005001583 T5 DE 112005001583T5
- Authority
- DE
- Germany
- Prior art keywords
- analysis system
- ray fluorescence
- copper metallization
- metallization
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58683504P | 2004-07-09 | 2004-07-09 | |
PCT/US2005/024463 WO2006010091A2 (en) | 2004-07-09 | 2005-07-08 | Copper metallization analysis system and method using x-ray fluorescence |
Publications (1)
Publication Number | Publication Date |
---|---|
DE112005001583T5 true DE112005001583T5 (de) | 2007-05-16 |
Family
ID=35464148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE112005001583T Withdrawn DE112005001583T5 (de) | 2004-07-09 | 2005-07-08 | Kupfermetallisierungs-Analysesystem und -verfahren unter Verwendung von Röntgenfluoreszenz |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE112005001583T5 (de) |
WO (1) | WO2006010091A2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006009247B4 (de) | 2006-02-28 | 2007-12-27 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Abschätzen der kristallinen Textur gestapelter Metallleitungen in Mikrostrukturbauelementen |
DE102006062015B4 (de) * | 2006-12-29 | 2012-04-26 | Advanced Micro Devices, Inc. | Verfahren zum Testen einer Materialschicht in einer Halbleiterstruktur auf Unversehrtheit |
US9335283B2 (en) * | 2011-09-12 | 2016-05-10 | Xwinsys Ltd. | Method and a system for recognizing voids in a bump |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4839913A (en) * | 1987-04-20 | 1989-06-13 | American Science And Engineering, Inc. | Shadowgraph imaging using scatter and fluorescence |
US6108398A (en) * | 1998-07-13 | 2000-08-22 | Jordan Valley Applied Radiation Ltd. | X-ray microfluorescence analyzer |
US6351516B1 (en) * | 1999-12-14 | 2002-02-26 | Jordan Valley Applied Radiation Ltd. | Detection of voids in semiconductor wafer processing |
US7245696B2 (en) * | 2002-05-29 | 2007-07-17 | Xradia, Inc. | Element-specific X-ray fluorescence microscope and method of operation |
-
2005
- 2005-07-08 WO PCT/US2005/024463 patent/WO2006010091A2/en active Application Filing
- 2005-07-08 DE DE112005001583T patent/DE112005001583T5/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2006010091A3 (en) | 2006-07-20 |
WO2006010091A2 (en) | 2006-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1783483A4 (de) | Röntgenfluoreszenzanalyseverfahren und -system | |
SG117520A1 (en) | Biological information management system, biological information management method and biological information management program | |
NO20051106D0 (no) | System og fremgangsmate ved bronnboring | |
DK2084519T3 (da) | Røntgenfluorescens-analysefremgangsmåde | |
IL179978A0 (en) | Multimarking fiber-type fluorescence microscopic imaging method and system | |
ITRM20040638A1 (it) | Gel piastrinico semisintetico e metodo per la sua preparazione. | |
IS7992A (is) | Dýralaus frumuræktunar aðferð | |
FR2878965B1 (fr) | Systeme et procede de positionnement local | |
DE60305778D1 (de) | Vorrichtung zur Probenvorbehandlung | |
EP1736781A4 (de) | Wirksames verfahren zur funktionsanalyse und zum screening von protein unter nutzung eines mit einem zellfreien proteinsynthesesystem erzeugten fluoreszenzstoffs | |
DE602004004063D1 (de) | Informationsverarbeitungssystem und -verfahren | |
NO20055042L (no) | System og fremgangsmate for avfallshandtering | |
FI20030547A0 (fi) | Menetelmä ja järjestelmä sydänanalyysiä varten | |
DE602005007817D1 (de) | Analyse-Verfahren unter Verwendung von abgeschwächter Totalreflektion | |
ATE468413T1 (de) | Verfahren zur extraktion von platinmetallen | |
ATE336597T1 (de) | Verfahren zur gewinnung von gold | |
GB0510881D0 (en) | System and method for analysing laboratory samples | |
DE602004029183D1 (de) | Biologische photometrische ausrüstung | |
NO20044012D0 (no) | Fremgangsmate og et system | |
EP1816503A4 (de) | Lumineszenzprobenabbildungsverfahren, lumineszenzzellenabbildungsverfahren und objektlinse | |
DE60212776D1 (de) | Spezifisches Bindungsanalyseverfahren | |
DE112005001583T5 (de) | Kupfermetallisierungs-Analysesystem und -verfahren unter Verwendung von Röntgenfluoreszenz | |
NO20042767D0 (no) | Sammenforingssystem, enkeltelementer og fremgangsmate for bruk av dette | |
DE602004017678D1 (de) | Vorrichtung zur Verwaltung von Ressourcen | |
DE602005014523D1 (de) | Vorrichtung zur Aufnahme von Dokumenten |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |