DE10350574A1 - Solid joint guides - Google Patents

Abstract

The invention relates to solid-body joint guides, which have a solid-state spring element. It is characterized in that parallel spring elements, rhombic spring elements or double parallel spring elements are arranged in series and / or in parallel.

Description

The The invention relates to solid-body articulated guides, which is a solid-state spring element have, preferably for use in optical devices.

The current leadership concepts for the sliding movement optical elements consist in the use of high-precision rods or thin-walled Tube. Both concepts have disadvantages, such as high production costs, Bearing play, compulsive forces and in the case of rod guides high space requirement. The pipe guides have a small space requirement, because the lens in their midst can be included.

The guide of the optical member takes place in the rod guide by 2 parallel precision rods (Surgical and stereomicroscopes). The lens slides at a distance to the guides on the bars. It is to be expected with a lots in the guides of 20 microns, the zoom already claimed the entire available tolerance. A statically overdetermined Storage of the optical sliding elements by one bearing bush each each rod or their mutual bracing caused by springs Constraining forces their overcoming more Motors required. The manufacturing costs and the space requirements of the leadership are considerably.

The guide a pipe guide takes place through 2 concentric tubes (binoculars, spotting scopes, Photo lenses), in the middle of which the lens is arranged. It is to expect a gap between the tubes of 20 microns, the zoom the entire available standing tolerance claimed. Deformations and out-of-roundness can cause compulsive forces. The space requirement is low, but the production costs are high.

linear ball bearings because of their high price and the relatively large dimensions none Zooming or focusing applications in optical devices.

A solid-body joint guide which has a solid-state spring element is known from the DE 31 43 092 A1 known. The wall of a cylinder is provided with recesses which form between them parallel, coincident with the transverse plane of the body leaf springs. The cylinder is slotted so that two parts are formed, which are movably connected to each other via the leaf springs.

Solid spring joints enable due to small forces The use of very small engines, have a high reproducibility of guide of tenths of micrometers and travel ranges of ± 0.5 mm.

The Task is the solid joint guide so to shape that size Travel paths, small actuating forces, sufficient mechanical stability transverse to the guide direction has and inexpensive can be produced. The leadership optical sliding elements should be significantly improved. The Solid joint guides especially for optical elements are created as z. B. in the adjustment of lenses for Zoom or focus in microscopes, binoculars or cameras or also for used x-y table adjustments become. The objectives are travel ranges from 2 to 50mm, guidance accuracies of ± 1μm, actuating forces <1N and manufacturing costs from less than 10 EUR. The solid joints should be free of coercive forces and act without bearing clearance.

According to the invention Task by solid-body joint guides solved, those in the claims 1, 10, 18 and 25 are described. Advantageous developments can be found in the respective subclaims.

A solution idea consists in the use of a thin-walled elastic tube, that in the middle carries a lens or other optical components. The pipe is the geometric one body with the greatest bending stiffness in all directions. The tube is in the axial direction through in the lateral surface incorporated solid-state spring joints elastically easily stretchable and compressible but in the transverse direction and in Torsion direction stiff. Lose and compulsive forces do not occur, however mutual spring forces through the solid joints, the possible be kept low or compensated. The space requirement is low, because the lens is located in the middle. The manufacturing costs should be low. The disadvantage of the low travel ranges of solid joints is resolved by a Variety of solid-state joints be arranged in series whose individual travel paths add up and that several Tubes are nested inside each other with which short ones lengths be achieved. The mechanical instability of pierced thin-walled Pipes will be fixed by their double-walled design. Furthermore are for x-y table guides the Solid joints arranged in two layers.

The Bridge width of the solid joints should as possible be small to small joint sizes, large travel ranges and small forces to achieve.

Practical values for a solid joint guide using parallel spring joints give the following constructive guide values for parallel spring elements that form a solid-body joint guide: material Spring steel sheet thickness d _MF = 0.1 mm web width s _F = 50μm Travel Range ΔI _F = ± 0.5mm joint size h _F = 10mm force F _F = ± 0.05N indulgence N _F = 10mm / N reproducibility 1 μm

Steg Prepare of 50μm lie on the border of the technologically feasible in laser cutting, etching, eroding or punching. They require small material thicknesses of 0.1mm. web widths of 50μm or however, significantly less problems are also involved in procedures photolithography or the LIGA technique.

Thin-walled pipes are not mechanically very stable, similar to an empty beverage can, especially since the pipe wall is still delicately pierced by the spring joints. You can dent in and buckle. However, stability is achieved in that the tube is preferably designed double-walled. This is preferably done by not structuring the thin-walled pipe itself, but rather its unwound and flat lateral surface. This offers the advantage of productive structuring in the package, eg. B. by erosion or punching. The structured lateral surfaces are wound up after structuring via rings to form a double-walled tube. ( 18 and 19 ). These rings, which are arranged at discrete locations at a distance from the solid-body joints, cause the mechanical stabilization of the double-walled tube.

A additional stability is achieved by the Interspace of the double-walled tube in a dipping process z. B. filled with adhesive, plastic or photoresist. Photoresist offers the Advantage that through a common in photolithography Exposure process superior and the elasticity the joints more disturbing Paint can be removed again. Another possibility consists in the use of PMMA as an intermediate layer that through soft x-ray radiation and ethylene developer can be structured photolithographically (LIGA technique).

The Inventions are described below with reference to several embodiments described. In the drawings show:

1 : Parallel spring element of a solid-body joint guide

2 : Solid joint guide consisting of 5 parallel spring elements in a row

3 : Solid joint guide consisting of 15 parallel spring elements in 3 parallel rows

4 : tubular solid joint guide consisting of 5 parallel spring joints in one row and 10 parallel rows

5 : Telescopically nested solid joint guide of 5 tubes with 5 parallel spring elements per row and 10 parallel rows per tube

6 : Solid joint guide according to 5 on average

7 : mirror-image spiral-shaped solid joint guide with 5 turns each

8th : Rhombic spring element for a solid joint guide

9 : Solid joint guide consisting of 3 raw spring elements in one row and 3 parallel rows

10 : Feather knot of 4 spring bars

11 : tubular solid joint guide consisting of 5 rhombic spring elements in one row and 12 parallel rows

12 : telescopically made of 3 tubes nested solid joint guide in the stretched state, consisting of rhombic spring elements

13 : force-invariant spring element

14 : Spring characteristic curves of the force-invariant spring element

15 : Solid joint guide consisting of 5 force-invariant spring elements in a row

16 : Solid joint guide consisting of 10 force-inverted spring elements in one row and 14 parallel rows

17 : Solid joint guide with gimbal ring spring

18 : Lateral surface of a tubular solid joint guide (drawn rotated by 90 °)

19 : Spring rings for stiffening a tubular double-walled solid joint guide

20 : double-walled, eight-sided, prismatic pipe guide made of force-invariant spring elements

21 : xy table with planar, double-layered, double-row, solid-body joint guides made of force-invariant spring elements

22 : Focusing or zooming drive with stepper motor, differential thread spindles and tubular solid joint guides

23 : Symmetrical drive for a telescoped elastic uniaxial pipe system

24 : Zoomantrieb with elastic half tube guides

25 : Zoomantrieb with elastic half pipe guides in the section

26 : Zoomantrieb with elastic full tube guides with partially cut tube walls

The 1 to 3 show how large ranges of, for example, 2.5 mm can be achieved by a series connection of parallel spring elements with unchanged actuating forces. Parallel spring elements consist of two L-shaped webs 2 , which by means of two spring elements 1 and four joints 8th connected to each other. A movable bridge is arcuately displaceable in the x direction. By series connection of several spring elements creates a solid-state joint guide ( 2 ). Thus, the total length of such leadership remains limited, more solid joint guide by coupling links 4 connected and stacked in parallel ( 3 ) or be nested as tubes ( 5 ).

In 4 and 5 pipe guides are shown, the base element is a parallel spring element. The parallel spring elements are connected in series and in parallel with each other. The free ends of the parallel-connected parallel spring elements are connected by coupling links 4 connected with each other. By nesting a plurality of tubes large ways with limited overall length of the guide can be achieved, for. B. 25mm way at 50mm length of the guide.

6 shows the pipe guide according to 5 on average. Shown are thin-walled nested structured tubes, which by coupling links 4 connected to each other.

In 7a is shown an arrangement for zooming or focusing, in which the sheet is wound with the parallel spring elements not to a tube but to a spiral. To compensate for torsional moments, the two spiral guides are wound in mirror image. In order to avoid constraining forces, additional joints are in the edge zones of the spiral 8th available. A sufficient stability of the guide is caused by double-walled tubes and connectors 9 . 9 ' between the two spiral guides. 7b shows a section through the spiral guide according to 7a ,

8th shows a rhombic spring element in three different states: force-free, compressed and stretched. The quill knots 3 (in 10a to be seen in detail) are represented by small circles. The length and width of the rhombus change in opposite directions when stretching or compressing. The external connection points of a lattice-shaped arrangement of rhombic spring elements ( 9 ) are by coupling elements 4 elastically connected. These must allow movements in two directions, otherwise a fixed clamping of the grid would lead to a rigid structure.

10a shows a feather knot 3 , the four spring elements 1 united, in detail. The spring elements 1 have at the joints on rejuvenations, the joints 8th form.

10b shows a feather knot 3 , the two spring elements 1 united and the connection to the coupling member 4 Has. This connection is designed as a spring joint.

11 shows an elastic pipe guide of rhombic spring elements. The connection of the Rhombenfederelemente to the edge zones of the pipe guide is made by spring tongues, which bulge during upsetting of the tube to the outside and during stretching inward. This pipe guide changes its diameter when adjusting. Therefore, their double walledness is not due to the circumference of the tube arranged stabilizing rings, as in 19 to see, manufacturable. The connection between the walls of a double-walled pipe can be done by a dipping process in liquid plastic, adhesive or photoresist or by PMMA. Such a plastic connection must not hinder the functionality of the joints. A hindrance of the movement occurs in a plastic connection between the tube walls to a small extent by the fact that the change in diameter of the outer tube wall is not exactly identical to the change in diameter of the inner tube wall, because the change in diameter of the two tube walls is not equal, but proportional to the diameter. In the other types of tubes, no diameter changes occur during stretching or compression.

12 shows a nested arrangement of a plurality of elastic tubes according to 11 , It allows for a long travel distances a limited length. The diameter of the tubes increases and decreases alternately as they expand or swage.

Another variant is a Doppelparallelfedergelenk that in particular advantageous as a force-inverted spring element after 13 is trained. The force-invariant spring element allows a solid-body joint guide with a constant and always acting from one direction spring force. Similarly, a guide with weight train. As a result, positioning errors are avoided, which arise when spring forces change or change direction, as in the parallel spring element according to 1 , in a rhombic spring element according to 8th or in a gimbal ring spring according to 17 the case is.

The Kraftinvarianz is achieved by the fact that the linear spring characteristic of the spring joint, which has a positive slope, with the Nonlinear spring characteristic of a double parallel spring joint whose Characteristic curve in a subregion has a negative slope, superimposed becomes.

negative Rise of the spring characteristic means that when pulling apart a tension spring or when compressing a compression spring, the spring forces not but decrease (frog effect).

Decisive for this effect is the angle α ₀ , below which the spring elements 1 get cut ( 13 Left). The spring joints must be with their moving part 7 when moving in the direction of force through the legs 6 of the U-shaped frame 5 squeeze through. Here, a compressive force acts first. In the middle position of the parallel spring joints there is an indifferent balance. The force is zero ( 13 Center). Upon further displacement, an increasing thrust force is created on the center piece until it abuts the U-shaped frame ( 13 right).

Based on the characteristics in 14 the effect of Kraftinvarianten spring element will be explained. The spring joints 1 in itself have a spring characteristic with a positive gradient ( 14 Left). The non-linear characteristic caused only by the constraining forces ( 14 Middle) begins in the joint position φ = φ ₀ at zero, then reaches a maximum compressive force, is in the reverse position φ = 0 to zero, then reaches a maximum thrust and would be in the position φ = -φ ₀ again to zero. But before that, the reason of the U-shaped frame works 5 as a stop for the moving part 7 , In the working area, this characteristic has a negative slope.

The overall characteristic of the spring system is created by superposition of the characteristic curve of the spring joints with the characteristic of the constraining forces ( 14 right). In the working range of the spring element thereby acts an approximately constant force F.

By FEM calculations, the web widths s of the spring joints and their cutting angle α ₀ are to be dimensioned so that the increases in the characteristics of spring joint and forced displacement ( 14 left and center) same amount but have different signs, for example, the constant force F = 50mN and a working range of 1 mm is formed.

15 shows a series connection of parallel horse elements.

16 shows a tubular arrangement kraftinvarianter spring elements, in which parallel spring elements are connected in series and in parallel. The free frame 5 as well as the free movement parts 7 the parallel-connected spring elements are each by coupling members 4 connected with each other.

17 shows a solid joint guide from 2 cardanic ring springs. Advantage is their relatively large travel in the positive and negative directions, the ease of manufacture and assembly, but disadvantageous their large space requirement. A series connection gimbal ring springs is indeed possible, however, then, as in a corrugated tube, the bending stability is lost and the deflection can not be done on the reverse position out in the negative direction.

Thin-walled tubes can be structured only with increased effort because of their low mechanical stability. According to 18 Therefore, it is provided that the rolled flat lateral surface of the tube is structured and then bent to the tube. There is no mechanical disadvantage in that the tube is bent from flat lateral surfaces, because the tube consists of struts and the tube ends by the coupling members 4 be firmly clamped. Further stabilization is achieved by rings, which are connected to the lateral surface of the tube.

The rolled-up lateral surface The tube is made by laser cutting, etching, eroding or punching structured. The structures that processes to double-walled pipes Need to become on the inner surface because of its smaller diameter slightly smaller dimensions in Have circumferential direction than the structures on the outer surface.

The precision punching of the lateral surfaces with the solid-state joints is a particular pro Ductive procedure. It requires the provision of dies. Small web widths can be obtained by an electrolytic etching process, which adjoins the punching and the web preparations, which after stamping, for example, 100 .mu.m, reduced to 50 .mu.m. Such etching processes are also used in electrolytic deburring.

A mounting of the lateral surfaces to a double-walled tube takes place in that the inner circumferential surface of the tube in a corresponding number of center rings 11 inserted and by inner spring rings 12 is secured. About the center rings 11 the outer circumferential surface of the pipe is laid and by the outer spring rings 10 secured ( 19 ). All rings 10 . 11 . 12 are located at the locations of the lateral surfaces where no spring elements 1 available. They stabilize the pipe and do not disturb their mobility here. In addition, stability can be achieved by a dip method or by PMMA, by which all spaces between the pipe walls are filled with plastic.

This Manufacturing and assembly process is on elastic pipes with Parallel and force invariant spring elements but not on pipes with rhombic spring elements in which the pipe diameter is stretched or compressed changes, applicable. In the latter, the assembly can be done by pipes Dipping process in plastic or by PMMA done by the the outer and inner spring joints are firmly connected.

A further assembly of the double-walled tube is carried out in that on one raw PMMA carrier inside and outside the thin ones structured steel surfaces, which simultaneously serve as a lithography mask for soft X-radiation, glued on become. The irradiated PMMA parts are then in an ethylene developer dissolved while the non-irradiated PMMA parts as a mechanical stabilizer between inner and outer steel jacket stand still (LIGA technique).

It but it is also possible with methods of conventional Manufacturing technology for the connection of the pipe walls to efficiently manufacture required plastic elements in large quantities and by special mounting and gluing the double-walled To assemble pipe.

The Production of the lateral surfaces The tube can also be obtained by micromechanical methods, such as photolithographic etching of thin Silicon wafers or thin ones photosensitive glasses or by the LIGA technique respectively. These methods offer the option of being particularly small Bridge widths of z. B. 10 microns to achieve. Silicon also offers the advantage of a much higher load capacity of the spring joints across from Stole. Ceramics and plastics are also used as materials Question. For plastics may possibly affect the double walledness The tube will be omitted because of certain plastic in one wide range are elastically deformable and only small forces during Bending, stretching and compression of the tube occur.

In 20 an arrangement kraftinvarianter spring elements is shown in a double-walled prismatic tube. This arrangement has the advantage that act on the spring elements no transverse torsions, because the inner and outer spring elements are flat and equal.

The Assembly of prismatic pipe guides is easier to design, because in a first step even double-walled Wall elements can be mounted, which are then assembled to form the prismatic tube.

at double-walled prismatic tubes have the same inner and outer solid-state joints Dimensions on.

21 shows an xy table with planar, two-ply solid-body joint guides that can be arranged under the table to save space. Perpendicular to the plane of the drawing, the stiffness of these guides is less than that of a tube. The attached to the right-side end of the guide table should therefore be supported, for. B. also by solid joint guides.

at two-ply planar solid-body joint guides have the inner and outer solid joints same dimensions.

22 shows a zoom or focusing drive consisting of 2 mechanically coupled pipe systems and a high-resolution differential spindle drive 15 with stepper motor 16 consists.

The Advantages of solid joint guide exist in that the Reverseless about 1 micron is, with rod or pipe guides 20 μm.

The Abbec comparator principle is respected. The space requirement is comparatively very low.

The Force is in the solid joint guide in of the order of magnitude of less than ± 0.5N, compared to rods or pipe guides at ± 1N.

The Manufacturing costs are about 5 times lower.

23 shows a symmetrical drive system to avoid bending moments and Forcing forces on the spring joint guide, which in the example a telescopically nested elastic pipe system 18 is. The double motor drive 16 . 16 ' is shown for a single-axis pipe system, the two engines 16 . 16 ' and two pairs of differential lead screws 15 and 15 ' having. To avoid torsional moments on the elastic pipe system, one of the differential thread spindles has right-hand threads and the other has left-hand threads. The force is coupled to the elastic tube via additional joints 8th between the connector 9 and the tube are arranged. These avoid bending moments on the pipe 18 ,

24 shows a nesting of half-pipe systems, which is biocular. The tubes of a solid-body joint guide are designed here as half-tubes, wherein each half-tube guide a lens 19 adjusted. The lenses are both within the length of the guides. 25 shows the biocular optics system according to 24 on average. Here, too, provide differential thread pairs 15 and 15 ' with motor drives 16 and 16 ' for the uniform adjustment of each of the half tube guides in both optical paths on trajectories.

26 shows a further embodiment, which makes it possible to position optics within the length of the solid-state joint guides. In this example, two independent solid joint guides are coaxially nested. The respective outer solid joint guides have cutouts whose length is dimensioned according to the desired adjustment path. Interconnects 9 connect the associated optical systems of a biocular array.

The arrangements according to the 7 . 22 . 24 and 25 such as 26 are also executable in the embodiment with a single optical beam path. Then the differential thread spindle receives a correspondingly stable storage, which avoids tilting. Alternatively, the adjustment by the double differential threaded spindle assembly accordingly 23 respectively.

1

spring element

2

web

3

spring node

4

coupling member

5

frame

6

leg

7

moving part

8th

joint

9

Interconnects

10

External spring ring

11

Mid-spring ring

12

Inside spring ring

13

pipe

14

Ringfeder

15

Differential screw

16

engine

17

x-y table

18

telescopically boxed

pipe

19

lens

20

pipe sections

Δφ

angle the spring deflection

α

cutting angle of the

spring elements

F

force for deflection

F _B

Biegkraft

F _Z

constraining force

s

web width of the joint

l

Length at rest

.DELTA.l

deflection

Dy

offset

H

Length of the spring element

d _M

thickness the spring material

c

spring constant

x

x-direction

y

y-direction

Claims (28)

Solid-body joint guide, which has a solid-state spring element, characterized in that the solid-state spring element consists of four spring elements ( 1 ), which are arranged as a quadrangle, two spring elements ( 1 ) at its junction a spring node ( 3 ), which has a weakening of the material cross-section, wherein at least two adjacent spring nodes ( 3 ) of a spring joint spring elements of another solid-state spring joint and several of these solid state spring elements are arranged in series and / or parallel connection and the free ends of the parallel-connected solid state spring elements by a respective elastic coupling member ( 4 . 4 ' ) are connected. Solid joint guide according to claim 1, characterized in that in the square the spring elements ( 1 ) are parallel to each other on two opposite sides. Solid joint guide according to claim 2, characterized in that in the square the four spring elements ( 1 ) have an equal length. Solid joint guide according to claim 1, characterized in that the coupling member ( 4 ) has a stable frame on which solid-state springs are formed, which are in communication with the free ends of the parallel-connected solid state spring elements. Solid joint guide according to claim 1, characterized in that it consists of a single solid spring element and on two diagonally opposite spring nodes ( 3 ) the coupling links ( 4 . 4 ' ) are arranged. Festkörpergelenkführung according to Claim 1, characterized in that this structured as a single layer Plate is formed, leave the planar or the after structuring cylindrical or spiral is shaped. Festkörpergelenkführung according to Claim 1, characterized in that this as a two-ply plate is formed, leave the planar or the after structuring cylindrical or spiral is formed, wherein between the two structured plates stabilizing intermediate layer is introduced. Festkörpergelenkführung according to Claim 5 or claim 6, characterized in that the cylindrical Form a round or oval tube or this polygonal prismatic is or these cylindrical shapes halved or these long sides are cut out. Solid joint guide according to Claim 5 or Claim 6, characterized in that at least two molded plates are provided at each of their ends by a dimensionally stable coupling member (10). 4 ) are interconnected so as to form a layered arrangement or a telescopically nested arrangement. Solid-body joint guide, which has a solid-state spring element, characterized in that the solid-state spring element has a U-shaped frame ( 5 ), wherein on the insides of the opposite U-legs ( 6 ) at least two spring elements ( 1 ) are held at first ends and the second ends of the at least four spring elements ( 1 ) each with a moving part ( 7 ), wherein the support points of the spring elements ( 1 ) Joints ( 8th ) exhibit. Solid joint guide according to claim 10, characterized in that the spring elements at a positive angle α greater than 90 ° and less than 120 ° relative to the U-legs ( 6 ) are cut out and thus the at least four spring elements ( 1 ) in the powerless state with their second ends preferably in a same direction. Solid joint guide according to claim 10 or 11, characterized in that a plurality of solid-state spring elements, by connection of the moving part ( 7 ) of a solid state spring element with the U-shaped frame ( 5 ) of another solid-state spring element in series connection and / or by connecting a plurality of movement parts ( 7 ) and several U-shaped frames ( 5 ) are arranged one below the other in parallel. Festkörpergelenkführung according to Claim 10 or 11, characterized in that this structured as a single layer Plate is formed, leave the planar or the after structuring cylindrical or spiral is shaped. Festkörpergelenkführung according to Claim 10 or 11, characterized in that this as a two-ply plate is formed, leave the planar or after structuring cylindrical or spiral is formed, wherein between the two structured plates stabilizing intermediate layer is introduced. Solid joint guide according to claim 14, characterized in that groups of reinforcing rings ( 10 . 11 . 12 ) are provided, each group having a slotted outer spring ring ( 10 ), an unslotted center spring ring ( 11 ) and a slotted inner spring ring ( 12 ) and the group are arranged in areas of the plates in which no spring elements ( 1 ) are formed. Festkörpergelenkführung according to Claim 13 or 14, characterized in that the cylindrical shape a round or oval pipe or this is polygonal prismatic or halve these cylindrical shapes or these are cut out along the side. Solid joint guide according to claim 13 or 14, characterized in that at least two molded plates at each one of its ends by a dimensionally stable coupling member ( 4 ) are interconnected so as to form a layered arrangement or a telescopically nested arrangement. Solid-body joint guide, which has a solid-state spring element, characterized in that the solid-state spring element has at least two spring elements ( 1 ) and two dimensionally stable webs ( 2 ) has, with which a thin-walled tube or a thin plate is structured so that adjacent solid-state spring joints connected to their webs connected in series and / or parallel. Solid joint guide according to claim 18, characterized in that the webs ( 2 ) have an L-shape and each of the longer legs of the L-shape with two spring elements ( 1 ) connected is. Solid joint guide according to claim 18 or 19, characterized in that this as a layered structured plate is left, which is left planar or after structuring cylindrically or spirally shaped. Festkörpergelenkführung according to Claim 18 or 19, characterized in that this as a two-ply plate is formed, leave the planar or the after structuring cylindrical or spiral is formed, wherein between the two structured plates stabilizing intermediate layer is introduced. Solid joint guide according to claim 21, characterized in that groups of reinforcing rings ( 10 . 11 . 12 ) are provided, each group having a slotted outer spring ring ( 10 ), an unslotted center spring ring ( 11 ) and a slotted inner spring ring ( 12 ) and the group are arranged in areas of the plates in which no spring elements are formed. Festkörpergelenkführung according to Claim 20 or 21, characterized in that the cylindrical shape a round or oval pipe or this is polygonal prismatic or halve these cylindrical shapes or these are cut out along the side. Solid joint guide according to claim 20 or 21, characterized in that at least two molded plates at each one of its ends by a dimensionally stable coupling member ( 4 ) are interconnected so as to form a layered arrangement or a telescopically nested arrangement. Solid joint guide comprising a solid spring element, characterized in that at the ends of a rigid tube ( 13 ) an inner spring of a gimbal annular spring ( 14 ) is attached. A solid-body joint guide according to one or more of the preceding claims, characterized in that two solid-state spring joint guides are arranged parallel next to one another, one end of each solid-state spring joint guide having a first connector ( 9 ) and the other ends of the solid state spring hinge guides with a second connector ( 9 ' ), wherein between the connectors ( 9 . 9 ' ) a differential threaded spindle ( 15 ), preferably by a motor ( 16 ) is driven. Solid joint guide according to one or more of claims 1 to 25, characterized in that a solid-body spring joint guide is arranged, one end of each solid-state spring joint guide with a connector ( 9 ) and the other end of the solid-state spring joint guide with the connector ( 9 ' ), wherein between the connectors ( 9 . 9 ' ) two differential threaded spindles ( 15 . 15 ' ) are arranged as a pair, which are preferably each of a motor ( 16 . 16 ' ) are driven. Solid-body joint guide according to one or more of the preceding claims, characterized in that two solid-body spring articulated guides are provided at each end with the coupling member ( 4 ) are arranged at right angles to each other, a solid-body spring joint guide at its other end a fixed coupling member ( 4 ' ) and the other solid-state spring joint guide at its other end an xy-table ( 17 ) Has.