DE10217958A1 - Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue - Google Patents

Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue

Info

Publication number
DE10217958A1
DE10217958A1 DE2002117958 DE10217958A DE10217958A1 DE 10217958 A1 DE10217958 A1 DE 10217958A1 DE 2002117958 DE2002117958 DE 2002117958 DE 10217958 A DE10217958 A DE 10217958A DE 10217958 A1 DE10217958 A1 DE 10217958A1
Authority
DE
Germany
Prior art keywords
crucible
quartz
graphite
production
mullite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2002117958
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SCANWAFER GmbH
Original Assignee
SCANWAFER GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCANWAFER GmbH filed Critical SCANWAFER GmbH
Priority to DE2002117958 priority Critical patent/DE10217958A1/en
Publication of DE10217958A1 publication Critical patent/DE10217958A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/0003—Linings or walls
    • F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/10—Crucibles
    • F27B2014/104—Crucible linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/0003—Linings or walls
    • F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
    • F27D1/0009—Comprising ceramic fibre elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/16—Making or repairing linings increasing the durability of linings or breaking away linings
    • F27D1/1678—Increasing the durability of linings; Means for protecting
    • F27D1/1684—Increasing the durability of linings; Means for protecting by a special coating applied to the lining

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Production of a crucible for melting silicon comprises lining a graphite or mullite crucible with quartz fibrous tissue.

Description

Die Erfindung betrifft ein Verfahren zum Herstellen Tiegeln, geeignet zum Schmelzen von Silizium für Photovoltaik Anwendungen. The invention relates to a method for producing crucibles, suitable for Melting silicon for photovoltaic applications.

Bisher werden in der Photovoltaik Industrie beim Herstellen sogenannter multikristalliner Wafer, Tiegel aus Quarz (SiO2) nach dem Schlickergußverfahren hergestellt und eingesetzt. Die mit diesem Verfahren hergestellten Tiegel gehen nach Abschluss des Erstarrungsvorganges zu Bruch und sind damit verloren. So far, quartz (SiO 2 ) crucibles have been produced and used in the photovoltaic industry in the manufacture of so-called multicrystalline wafers using the slip casting process. The crucibles produced with this process break after the solidification process is complete and are therefore lost.

Die Kosten für die Tiegel machen ca. 5% der gesamtem Herstellungkosten eines 300 µm dicken Wafers aus. The costs for the crucibles make up about 5% of the total manufacturing costs of a 300 µm thick wafer.

Um die Verformung der Tiegel bei Schmelztemperatur zu vermeiden werden die Tiegel außen durch Graphitplatten abgestützt. In order to avoid the deformation of the crucibles at the melting temperature, the Crucible supported on the outside by graphite plates.

Es wird deshalb vorgeschlagen, den sowieso vorhandenen Graphittiegel mit einem Gewebe aus Quarzfasern auszukleiden. It is therefore proposed to use the graphite crucible anyway to line a fabric made of quartz fibers.

Das Tiegelgewicht eines konventionellen Tiegels liegt bei einer Tiegelgröße von 690 mm Kantenlänge und einer Tiegelhöhe von 420 mm ein Gewicht von ca. 60 kg. The crucible weight of a conventional crucible is at a crucible size of 690 mm edge length and a crucible height of 420 mm a weight of approx. 60 kg.

Der Tiegel muss auf die volle Schmelztemperatur aufgeheizt werden. The crucible must be heated to the full melting temperature.

Die Energie muss durch Wärmeleitung und Strahlung vom auf der Außenseite des Tiegels angeordneten Heizquelle an das Schmelzgut übertragen werden. The energy has to be through heat conduction and radiation from the outside of the crucible arranged heat source are transferred to the melting material.

Mit der Verwendung eines Tiegels aus Quarzfasern wird die notwendige Energie zum Aufheizen des Tiegels des Tiegels sowie die Kosten für die Tiegel erheblich reduziert. With the use of a quartz fiber crucible, the necessary Energy for heating the crucible of the crucible and the cost of the crucible significantly reduced.

Erfindungsgemäß wird vorgeschlagen den Graphittiegel mit einem Quarzfasergewebe auszukleiden. According to the invention, the graphite crucible with a Lining quartz fiber fabric.

Quarzfasergewebe sind in verschiedenen Ausführungen Kommerziell erhältlich. Zusätzlich kann das Gewebe mit mit Silizium-Nitrid beschichtet werden um die Benetzung des Quarzgewebes mit flüssigem Silizium zu vermeiden. Quartz fiber fabrics are commercially available in various designs. In addition, the fabric can be coated with silicon nitride Avoid wetting the quartz mesh with liquid silicon.

Claims (6)

1. Verfahren zur Herstellung eines zum Schmelzen von Silizium geeigneten Tiegels für photovoltaische Verwendungszwecke, dadurch gekennzeichnet, dass ein Tiegel aus Graphit oder Mullit innen mit einem Quarzfasergewebe ausgekleidet wird. 1. A method for producing a crucible suitable for melting silicon for photovoltaic purposes, characterized in that a crucible made of graphite or mullite is lined with a quartz fiber fabric on the inside. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass der Tiegel nach dem Auskleiden mit Quarzfasergewebe mit Silizium-Nitrid beschichtend wird. 2. The method according to claim 1, characterized in that the crucible after lining with quartz fiber fabric with silicon nitride coating becomes. 3. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass zum Herstellen des Quarzgewebes mit Silizium-Nitrid beschichtete Quarzfasern verwendet werden. 3. The method according to claim 1, characterized in that for manufacturing of the quartz fabric with quartz fibers coated with silicon nitride become. 4. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass das Quarzgewebe vor dem Einbringen in den Tiegel mit Silizium-Nitrid beschichtet wird. 4. The method according to claim 1, characterized in that the quartz fabric is coated with silicon nitride before being introduced into the crucible. 5. Verfahren nach Anspruch 4, dadurch gekennzeichnet, dass die Silizium- Nitrid mit dem Verfahren der Kathodenzerstäubung aufgebracht wird. 5. The method according to claim 4, characterized in that the silicon Nitride is applied using the cathode sputtering process. 6. Verfahren nach Anspruch 2, dadurch gekennzeichnet, dass die Silizium- Nitrid Schicht in form einer Alkohohl/SiN-Pulver Suspension aufgebracht wird. 6. The method according to claim 2, characterized in that the silicon Nitride layer applied in the form of an alcohol / SiN powder suspension becomes.
DE2002117958 2002-04-22 2002-04-22 Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue Withdrawn DE10217958A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2002117958 DE10217958A1 (en) 2002-04-22 2002-04-22 Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002117958 DE10217958A1 (en) 2002-04-22 2002-04-22 Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue

Publications (1)

Publication Number Publication Date
DE10217958A1 true DE10217958A1 (en) 2003-11-06

Family

ID=28798681

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002117958 Withdrawn DE10217958A1 (en) 2002-04-22 2002-04-22 Production of a crucible for melting silicon used in photovoltaic applications comprises lining a graphite or mullite crucible with quartz fibrous tissue

Country Status (1)

Country Link
DE (1) DE10217958A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006128575A1 (en) * 2005-05-31 2006-12-07 Saint-Gobain Industriekeramik Rödental GmbH Multipart, thin-walled crucible with insert of quartz glass fabric or quartz glass felt for cooling si melts
DE102010008089A1 (en) * 2010-02-15 2011-09-08 H.C. Starck Gmbh Crucible for photovoltaic
CN105603374A (en) * 2016-02-19 2016-05-25 中科院微电子研究所昆山分所 Method for preparing Si3N4 film on polycrystalline silicon ingot cast crucible

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006128575A1 (en) * 2005-05-31 2006-12-07 Saint-Gobain Industriekeramik Rödental GmbH Multipart, thin-walled crucible with insert of quartz glass fabric or quartz glass felt for cooling si melts
DE102010008089A1 (en) * 2010-02-15 2011-09-08 H.C. Starck Gmbh Crucible for photovoltaic
DE102010008089B4 (en) * 2010-02-15 2012-12-06 H.C. Starck Gmbh Method for producing a workpiece in the form of a crucible for photovoltaics
CN105603374A (en) * 2016-02-19 2016-05-25 中科院微电子研究所昆山分所 Method for preparing Si3N4 film on polycrystalline silicon ingot cast crucible
CN105603374B (en) * 2016-02-19 2018-06-12 中科院微电子研究所昆山分所 One kind prepares Si on polysilicon ingot crucible3N4The method of film

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