DE102024128883A1 - Überwachungsmodul, röntgenbeugungsvorrichtung und überwachungssystem - Google Patents

Überwachungsmodul, röntgenbeugungsvorrichtung und überwachungssystem Download PDF

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Publication number
DE102024128883A1
DE102024128883A1 DE102024128883.3A DE102024128883A DE102024128883A1 DE 102024128883 A1 DE102024128883 A1 DE 102024128883A1 DE 102024128883 A DE102024128883 A DE 102024128883A DE 102024128883 A1 DE102024128883 A1 DE 102024128883A1
Authority
DE
Germany
Prior art keywords
monitoring
stepper motor
monitoring module
section
ray diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102024128883.3A
Other languages
German (de)
English (en)
Inventor
Yuji Hatayama
Yoshihiro Iba
Tomoyasu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of DE102024128883A1 publication Critical patent/DE102024128883A1/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/34—Testing dynamo-electric machines
    • G01R31/343—Testing dynamo-electric machines in operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20016—Goniometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20025—Sample holders or supports therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P8/00—Arrangements for controlling dynamo-electric motors rotating step by step
    • H02P8/34—Monitoring operation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P2209/00—Indexing scheme relating to controlling arrangements characterised by the waveform of the supplied voltage or current
    • H02P2209/09—PWM with fixed limited number of pulses per period

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Control Of Stepping Motors (AREA)
DE102024128883.3A 2023-10-24 2024-10-08 Überwachungsmodul, röntgenbeugungsvorrichtung und überwachungssystem Pending DE102024128883A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023182868A JP2025072256A (ja) 2023-10-24 2023-10-24 監視モジュール、ｘ線回折装置および監視システム
JP2023-182868 2023-10-24

Publications (1)

Publication Number Publication Date
DE102024128883A1 true DE102024128883A1 (de) 2025-04-24

Family

ID=95251543

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102024128883.3A Pending DE102024128883A1 (de) 2023-10-24 2024-10-08 Überwachungsmodul, röntgenbeugungsvorrichtung und überwachungssystem

Country Status (4)

Country Link
US (1) US20250132706A1 (https=)
JP (1) JP2025072256A (https=)
CN (1) CN119881636A (https=)
DE (1) DE102024128883A1 (https=)

Also Published As

Publication number Publication date
US20250132706A1 (en) 2025-04-24
CN119881636A (zh) 2025-04-25
JP2025072256A (ja) 2025-05-09

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