DE102021118092A1 - Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung - Google Patents

Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung Download PDF

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Publication number
DE102021118092A1
DE102021118092A1 DE102021118092.9A DE102021118092A DE102021118092A1 DE 102021118092 A1 DE102021118092 A1 DE 102021118092A1 DE 102021118092 A DE102021118092 A DE 102021118092A DE 102021118092 A1 DE102021118092 A1 DE 102021118092A1
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DE
Germany
Prior art keywords
sensor
detected
reading head
scale
reference position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102021118092.9A
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German (de)
English (en)
Inventor
Josef Siraky
David Reger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neura Robotics GmbH
Original Assignee
Neura Robotics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neura Robotics GmbH filed Critical Neura Robotics GmbH
Priority to DE102021118092.9A priority Critical patent/DE102021118092A1/de
Priority to TW111123204A priority patent/TW202303181A/zh
Priority to PCT/EP2022/068222 priority patent/WO2023285165A1/de
Publication of DE102021118092A1 publication Critical patent/DE102021118092A1/de
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24485—Error correction using other sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001—Calibrating encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • G01D5/2497—Absolute encoders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE102021118092.9A 2021-07-13 2021-07-13 Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung Ceased DE102021118092A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102021118092.9A DE102021118092A1 (de) 2021-07-13 2021-07-13 Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung
TW111123204A TW202303181A (zh) 2021-07-13 2022-06-22 用於至少部分線性化實物量具的編碼器系統及方法
PCT/EP2022/068222 WO2023285165A1 (de) 2021-07-13 2022-07-01 ENCODERSYSTEM SOWIE VERFAHREN ZUR ZUMINDEST ABSCHNITTSWEISEN LINEARISIERUNG EINER MAßVERKÖRPERUNG

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102021118092.9A DE102021118092A1 (de) 2021-07-13 2021-07-13 Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung

Publications (1)

Publication Number Publication Date
DE102021118092A1 true DE102021118092A1 (de) 2023-01-19

Family

ID=82361316

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102021118092.9A Ceased DE102021118092A1 (de) 2021-07-13 2021-07-13 Encodersystem sowie Verfahren zur zumindest abschnittsweisen Linearisierung einer Maßverkörperung

Country Status (3)

Country Link
DE (1) DE102021118092A1 (zh)
TW (1) TW202303181A (zh)
WO (1) WO2023285165A1 (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7432497B2 (en) 2005-09-29 2008-10-07 Mitutoyo Corporation Absolute linear encoder
US20110218760A1 (en) 2010-01-20 2011-09-08 Canon Kabushiki Kaisha Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5866629B2 (ja) * 2011-10-25 2016-02-17 株式会社ミツトヨ 変位検出装置、目盛の校正方法及び目盛の校正プログラム
WO2014053296A1 (en) * 2012-10-01 2014-04-10 Asml Netherlands B.V. A method for calibration of an encoder scale and a lithographic apparatus
EP2908098B1 (de) * 2014-02-18 2016-11-30 Hexagon Technology Center GmbH Lineargeber mit Kalibrierfunktionalität

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7432497B2 (en) 2005-09-29 2008-10-07 Mitutoyo Corporation Absolute linear encoder
US20110218760A1 (en) 2010-01-20 2011-09-08 Canon Kabushiki Kaisha Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus

Also Published As

Publication number Publication date
TW202303181A (zh) 2023-01-16
WO2023285165A1 (de) 2023-01-19

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R003 Refusal decision now final