DE102020115601A1 - Method and device - Google Patents

Abstract

According to various embodiments, a method (100) may include: gas-conductively coupling a receptacle to a first surface area of a permeable (e.g., gas-permeable) solid and thereafter to a second surface area of the solid; supplying a test fluid through the solid into the collection container; detecting a time-dependent condition representing an amount of the test fluid in the reservoir when the reservoir is coupled to the first surface area and thereafter when the reservoir is coupled to the second surface area.

Description

Various exemplary embodiments relate to a method and an apparatus.

In general, a substrate can be treated (processed), e.g. coated, in such a way that the chemical and / or physical properties of the substrate can be changed. In general, flexible substrates in the form of a tape (e.g. metal tape, foil tape or glass tape) can be processed in a continuous system, e.g. in a foil coating system. The coating system can have a vacuum chamber so that the strip substrate can be processed in a vacuum. For some processing operations it may be necessary for the substrate to be tempered (i.e. cooled and / or heated). One possibility for this is that the substrate is thermally coupled to a transport roller. So that the thermal contact is as good as possible, a gas is conventionally introduced between the substrate and the transport roller, which gas bridges the lack of thermal conductivity of the vacuum. One possibility for this is to bring the gas directly to the substrate through a porous outer shell of the transport roller.

According to various embodiments, it was clearly recognized that the heat transfer requires a delicate balance. On the one hand, the gas should flow evenly out of the transport roller (e.g. roller surface) in an amount that is sufficient. On the other hand, the amount of gas should be such that the substrate does not lift off the transport roller (e.g. roller surface).

In this context, it was recognized that the actual permeability of the porous outer shell has a very strong influence on the equilibrium, but is difficult to access as a process parameter or is difficult to set in a targeted manner. Initially, all components, i.e. at least the transport roller and the gas supply, are coordinated with one another. If the permeability of the porous outer shell changes over time, it is difficult to react, so that the complete transport roller is often replaced or the outer shell completely renewed.

For example, it has so far only been difficult to determine whether the permeability or its homogeneity still meets the specification. The specification can include, for example, that the permeability is spatially distributed particularly uniformly (e.g. has no local deviations) and / or lies within a specified range of values. Likewise, it has so far only been difficult to determine whether and to what extent a cleaning process changes the permeability.

According to various embodiments, a method and a device are provided which facilitate access to the permeability as a process parameter, for example to record the permeability (e.g. its spatial distribution) and / or to change (e.g. increase) the permeability.

A measurement configuration is clearly provided which makes it easier to record the permeability of the transport roller at various points on the porous outer casing (also referred to as roller casing) of the transport roller. Furthermore, a cleaning configuration is provided which makes it easier to change the permeability of the transport roller at different points. This makes it possible on the one hand to set the permeability as a process parameter in a targeted manner and also to determine the result of the setting. The process of setting and determining the result can be repeated until the permeability of the transport roller meets the requirements.

However, the aspects described here do not necessarily have to be restricted to a transport role. What has been described can apply more generally by analogy to any permeable solid.

• 1 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagramm;
• 2 das Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Diagramm;
• 3A und 3B jeweils eine Erfassungsvorrichtung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 4A und 4B jeweils eine Erfassungsvorrichtung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht oder Querschnittsansicht;
• 5 einen Auffangbehälter gemäß verschiedenen Ausführungsformen in einer schematischen geschnittenen Seitenansicht;
• 6 die Erfassungsvorrichtung gemäß verschiedenen Ausführungsformen in verschiedenen Ansichten;
• 7 eine Messanordnung gemäß verschiedenen Ausführungsformen in einer schematischen Querschnittsansicht;
• 8 ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagramm;
• 9 den Festkörper gemäß verschiedenen Ausführungsformen in einer schematischen Querschnittsansicht;
• 10 und 11 jeweils das Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Diagramm; und
• 12 und 13 jeweils eine Reinigungsvorrichtung gemäß verschiedenen Ausführungsformen in einer schematischen Seitenansicht.

Show it

• 1 a method according to various embodiments in a schematic flowchart;
• 2 the method according to various embodiments in a schematic diagram;
• 3A and 3B each a detection device according to various embodiments in a schematic side view or cross-sectional view;
• 4A and 4B each a detection device according to various embodiments in a schematic side view or cross-sectional view;
• 5 a collecting container according to various embodiments in a schematic sectional side view;
• 6th the detection device according to various embodiments in different views;
• 7th a measuring arrangement according to various embodiments in a schematic cross-sectional view;
• 8th a method according to various embodiments in a schematic flowchart;
• 9 the solid body according to various embodiments in a schematic cross-sectional view;
• 10 and 11th in each case the method according to various embodiments in a schematic diagram; and
• 12th and 13th each a cleaning device according to various embodiments in a schematic side view.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which there is shown, for purposes of illustration, specific embodiments in which the invention may be practiced. In this regard, directional terminology such as “up”, “down”, “front”, “back”, “front”, “back”, etc. is used with reference to the orientation of the character (s) being described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It goes without saying that other embodiments can be used and structural or logical changes can be made without departing from the scope of protection of the present invention. It goes without saying that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

In the context of this description, the terms “connected”, “connected” and “coupled” are used to describe both a direct and an indirect connection (e.g. ohmic and / or electrically conductive, e.g. an electrically conductive connection), a direct or indirect connection as well as a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference symbols, insofar as this is appropriate.

According to various embodiments, the term “coupled” or “coupling” can be understood in the sense of a (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect, connection and / or interaction. Several elements can, for example, be coupled to one another along an interaction chain, along which the interaction (e.g. a signal) can be transmitted. For example, two elements that are coupled to one another can exchange an interaction with one another, e.g. a mechanical, hydrostatic, thermal and / or electrical interaction. According to various embodiments, “coupled” can be understood in the sense of a mechanical (e.g. physical or physical) coupling, e.g. by means of direct physical contact. A clutch can be set up to transmit a mechanical interaction (e.g. force, torque, etc.).

The term “permeable” or “permeability” in connection with a solid can be understood to be fluid-permeable. In other words, a permeable solid body can be designed to be fluid-permeable. If the permeable solid is arranged between two areas, these areas can exchange a fluid (i.e. comprising or formed from a gas and / or a liquid) through the solid, e.g. driven by a pressure difference between the two areas. The fluid can then get into the solid body on one side and emerge from the solid body on the other side.

The terms "porosity" and "porous" in connection with a solid body (e.g. a layer, a stack of layers, a roll cover or the like) can be related to the physical nature of the solid body and can be understood as the solid body having a large number of pores ( eg cavities and / or channels). According to various embodiments, porosity can be understood to be a dimensionless measured variable which denotes the ratio of cavity volume to total volume. The mass density of a unit cube inside the solid body can decrease with increasing porosity of the solid body, clearly because the pores and their content are taken into account.

A porous solid can also be viewed as part of a heterogeneous mixture, i.e. a mixture of two substances, of which the solid is a first substance in a solid state and a second substance is in a fluid (i.e. liquid or gaseous) state. The second substance can clearly be the content of the pores. The first substance, i.e. the solid, forms the so-called matrix of the heterogeneous mixture, i.e. a coherent framework in which the second substance is embedded. The matrix and the multitude of pores or their content can penetrate one another.

The pores of the solid body can optionally be designed as a network of interconnected pores, so that interconnected Pores can exchange the second fluid substance with one another. For example, the network of interconnected pores can penetrate the porous solid body from a first side of the solid body to a second (eg opposite) side of the solid body, so that the solid body can be permeable (ie fluid-conducting). The permeable solid body can thus take up a fluid (ie a liquid and / or a gas) by means of the first side and release it again by means of the second side, so that the fluid is passed through the solid body. A heterogeneous mixture of the solid and fluid can thus be formed in the pores of the solid.

The solid body can have micropores and / or macropores, for example. Micropores of the solid can have an extension (e.g. pore diameter) of less than about 2 nm. Mesopores can have an extension in the range from approximately 2 nm to approximately 50 nm. Macropores of the solid body can have an extension of more than approximately 50 nm but less than 1 micrometer (µm). The dimension of a pore can be understood as the diameter of a sphere which has the same volume as the pore.

According to various embodiments, a method is provided which facilitates the determination of a permeability (ie fluid permeability) of a solid by measuring a time-varying gas concentration (also referred to as test gas concentration) over time and calculating the permeability (eg gas permeability) based on this . According to various embodiments, a measurement setup for performing a method is provided which facilitates the measurement of the permeability of a porous solid or the corresponding volume flow from the surface of the porous solid.

The test gas emerging from the solid is clearly captured by means of a collecting container and its quantity is recorded in it. For example, any large / small porosity or gas permeability of the solid can be determined because the collecting container is scalable and / or because the collecting container covers the solid well.

For example, the permeability of a porous layer can be recorded.

The measurement setup enables the distribution / uniformity of the test gas on the surface to be measured and the amount of test gas per area and unit of time to be recorded. By means of geometrical adaptation of the detection device, both flat plates and rollers as well as any conceivable geometrical surface can be detected. The gas sensor enables operational use on site. Furthermore, various influences on the gas permeability can be determined, for example influences from drying the solid, influences from heating the solid, influences from cooling the solid, influences from wear mechanisms of the solid, influences from friction reduction, influences from cleaning the solid, etc.

Reference is made here to a test gas for easier understanding. What has been described can generally apply to a test fluid, i.e. for example also a test liquid. By analogy, what is described herein for a gas can also apply to a liquid.

1 illustrates a procedure 100 according to various embodiments in a schematic flowchart. The procedure 100 has, in 101, gas-conducting coupling of a collecting container to a first surface area of a permeable (eg gas-permeable) solid and then to a second surface area of the permeable solid; in 103, supplying a test gas through the permeable solid into the collecting container; in 105, detecting a time-dependent state which represents an amount of the test gas in the collecting container when the collecting container is coupled to the first surface area and then when the collecting container is coupled to the second surface area.

The first surface area of the permeable solid body and the second surface area of the permeable solid body can for example have one or more than one opening from which the test gas passing through the solid body emerges.

In principle, all chemical compositions which can be sensed (ie detectable) and which are gaseous (for example containing exactly one gas or a gas mixture) are suitable as test gas. Examples of the test gas include: carbon dioxide (CO ₂ ), methane, carbon monoxide (CO), hydrogen (eg molecular hydrogen), oxygen (eg molecular oxygen) or a gas mixture of several of these gases. Carbon dioxide, for example, is non-toxic and can be provided in high purity at low cost. The test gas can, for example, be or will be provided oil-free. As an alternative or in addition, the test gas can be or will be provided anhydrous (dried).

According to various embodiments, the solid body can be porous, ie a plurality of Have pores. The porous (eg permeable) solid has, for example, a multiplicity of interconnected pores which, for example, can provide channels that penetrate the solid. For example, the solid body can have pores connected to one another to form channels, so that it is fluid-permeable (for example gas-permeable).

According to various embodiments, a porosity of the solid body (ie the partial volume of the pores provided in the solid body in relation to the total volume) can be less than approximately 75% (e.g. less than approximately 50%, e.g. less than approximately 25%, e.g. less than approximately 10%) , eg smaller than about 5%, eg smaller than about 1%) and / or larger than about 10% (eg larger than about 25%, eg larger than about 50%).

The following is an example of a chemical gas composition inside the collecting container 302 referred to as a time-dependent state which represents the amount of test gas in the collecting container. The chemical gas composition can be determined, for example, by the test gas concentration in the collecting container 302 is used as a measured variable. What has been described can generally also apply analogously to one or more than one other measured variable which represents the amount of the test gas in the collecting container. Examples of the one or more than one measured variable have one or more than one chemical variable and / or one or more than one physical variable. The measured variable can generally resistive, chemo-resistive, capacitive, potentiometric, amperometric, thermal, thermochemical, thermal-physical, gravimetric (e.g. measured by means of a quartz oscillator), optically (e.g. spectrally) and / or biochemically recorded, i.e. by means of a corresponding installed sensor (also referred to herein as a gas sensor).

Examples of such a measured variable, which represents the amount of test gas in the collecting container, include: partial pressure, permittivity in the collecting container (e.g. measured by means of a capacitor of the gas sensor), molecular mass, diffusion behavior, molecular structure, conductivity in the collecting container (e.g. by means of a gas-sensitive Layer of the gas sensor measured), thermal conductivity in the collecting container, etc. So that the measured variable also represents the amount of test gas in the collecting container, the measured variable can be a function of the amount of test gas in the collecting container.

The gas sensor can be set up, for example, to detect the test gas itself (i.e. to quantify its amount) or at least one measured variable influenced by the test gas. A metal oxide semiconductor gas sensor, for example, can be used as a less complex gas sensor. Several gas sensors can optionally be used, e.g. several different gas sensors. This improves the accuracy of the measurement. As an alternative or in addition, various test gases and corresponding gas sensors can be used. This improves the accuracy of the measurement.

2 illustrates the process 100 according to various embodiments in a schematic diagram 200 in which the chemical gas composition 203 in the collecting container 302 over time 201 is illustrated. The chemical gas composition 203 is specified here as the proportion of the test gas (also referred to as concentration or test gas concentration) in the collecting container. The procedure 100 shows the time dependency m = dy / dx of the chemical gas composition 203 to be recorded, e.g. by means of time-discrete measured values. Examples of the concentration include: a molar concentration (also referred to as molar concentration, (e.g. molar percentage in percent)), a mass concentration (e.g. mass percentage in percent) or a volume-related concentration (e.g. standard volume percentage in percent).

According to the procedure 100 the time-varying test gas concentration is recorded over time. Furthermore, based on the recorded change in the test gas concentration over time, a permeability of the solid can be determined, for example its fluid permeability (for example gas permeability).

For a solid, the permeability describes its property of allowing a fluid (e.g. one or more than one gas and / or one or more than one liquid comprising or formed from) to pass. Darcy is often used as the unit of permeability.

In the following, reference is made to CO ₂ as a test gas as an example. What has been described can apply analogously to another test gas.

The test gas concentration 203 (also referred to as “y” in relations) is recorded, for example by means of the gas sensor, as a function of time 201 (also referred to as "x" in relations). In other words, y = y (x). For example, the following relation ( 3 ) can be used, where m denotes the time dependence and covered values in each case mean values. $$m=\frac{{\displaystyle \sum \left(x-\overline{x}\right)\left(y-\overline{y}\right)}}{{\displaystyle \sum {\left(x-\overline{x}\right)}^2}}$$

In the following, reference is made to examples of a device (also referred to as a detection device) for implementing the method. In other words, the procedure can 100 be carried out by means of the detection device. It can be understood that the procedure 100 can also be implemented by means of a differently set up detection device.

As explained above, the detection of the test gas concentration 203 take place by means of the gas sensor. The gas sensor can be part of a measuring chain which has a corresponding infrastructure (for example having a processor, storage medium and / or bus system or the like). The measurement chain can be set up to control the corresponding gas sensor, to process its measured variable as an input variable and, based thereon, to provide an electrical signal as an output variable, which represents the actual state of the input variable at the time of detection. The part of the measurement chain which is set up to process the input variable and to provide an electrical signal as an output variable based thereon is also referred to herein as an evaluation unit.

For example, information about the gas composition and / or information about the permeability of the solid (e.g. its gas permeability) can be output as the output variable, e.g. its spatial distribution.

3A illustrates the sensing device 300 according to various embodiments in a schematic side view or cross-sectional view. The detection device 300 has: a collecting container 302 to collect a test gas, a gas intake opening 302o which is set up by means of the gas intake opening 302o absorbed test gas to an interior 302i of the collecting container 302 to feed; a gas sensor 304 (eg chemosensor), which is set up to detect the time-dependent state, which the amount of test gas in the interior 302i of the collecting container 302 represents.

As illustrated, the collecting container 302 (For example, its housing) have a hood, which the gas intake opening 302o having. In that case, the gas intake opening 302o the inside 302i of the collecting container 302 uncover. This reduces the volume into which the test gas flows and thus improves the measurement of the test gas (eg increases the accuracy of the measurement).

The gas-conducting coupling can then have the surface area by means of the collecting container 302 to cover.

3B Figure 11 illustrates a sensing device 300 according to various embodiments 300b in a schematic side view or cross-sectional view, in which the detection device 300 a (e.g. flexible) gas line 308 having, which the gas intake opening 302o with the inside 302i of the collecting container 302 couples gas-conducting. This makes the measurement easier, since only the gas line and not the entire collection container 302 needs to be relocated. Optionally, the gas line 308 the hood 306 (For example a bell or cap), which the gas intake opening 302o having. This makes it easier to adapt and scale to the solid body to be measured.

The gas-conducting coupling can then have the surface area by means of the hood 306 to cover.

4A illustrates the sensing device 300 according to various embodiments 400a in a schematic side view or cross-sectional view, in which the detection device 300 also a circulation mechanism 604 , 402 having.

The circulation mechanism 406 , 402 is to overturn the inside 302i (ie the internal volume, e.g. the gas in it) of the collecting container 302 furnished. The circulation or the circulation mechanism 406 , 402 can facilitate the detection of the test gas concentration (e.g. without a time delay) and / or enable a more precise detection of the test gas concentration (e.g. by inhibiting spatial concentration fluctuations).

In general, the circulation mechanism 406 , 402 one or more than one fluid energy machine 406 (also as a gas displacement device 406 designated), which drives the circulation, ie the gas inside 302i of the collecting container 302 supplies kinetic energy.

As for the embodiments 400a shown, the circulation mechanism 406 , 402 a pump 406 exhibit as a fluid energy machine. For example, the pump 406 be set up, the interior 302i of the collecting container 302 To withdraw gas and the withdrawn gas to the collecting container 302 to supply again, so that a self-contained gas cycle 402 provided. The gas cycle 402 can for example have two gas lines, which on one side by means of the pump 406 are coupled to one another and on the other side by means of the collecting container 302 are coupled to each other. The pump 406 can for example be a positive displacement pump or a flow pump.

Alternatively or in addition to the pump, the circulation mechanism 406 , 402 have a propeller (not shown) as a fluid energy machine, which inside 302i of the collecting container 302 is arranged. In that case is the gas cycle 402 not absolutely necessary.

As for the embodiments 400a shown, the one or more than one gas sensor 304 the detection device 300 be set up to detect the chemical composition, which through the gas cycle 402 flows through it. Alternatively or additionally (e.g. if there is no gas circuit 402 is present) can have one or more than one gas sensor 304 set up the chemical composition inside 302i of the collecting container 302 capture. For example, the one or more than one gas sensor 304 internally 302i of the collecting container 302 be arranged.

4B Figure 11 illustrates a sensing device 400 according to various embodiments 400b in a schematic side view or cross-sectional view when carrying out the method 100 . The following is based on two surface areas 408a , 408b of the solid 408 Referenced. By analogy, what has been described can also have more than two surface areas 408a , 408b be valid.

The gas-conducting coupling of the collecting container 302 may have a first surface area 408a of the gas-permeable solid 408 by means of the receiving opening 302o to cover. The gas-conducting coupling of the collecting container 302 may further comprise after the first surface area 408a a second surface area 408b of the gas-permeable solid 408 by means of the receiving opening 302o to cover (not shown).

Through the porous solid 408 the test gas flows 410 through, for example from one side of the solid 408 to the side of the solid 408 (Arrows 410 ), on which the two surface areas 408a , 408b are arranged. That from the first surface area 408a escaping gas can by means of the receiving opening 302o the collecting container 302 be fed if this is the first surface area 408a covers. The one from the second surface area 408b escaping gas can by means of the receiving opening 302o the collecting container 302 are supplied when this is the second surface area 408b covers.

The second surface area 408b can for example be a distance from the first surface area 408a have or only partially overlap.

The solid 408 can have a multiplicity of pores. The pores of the solid 408 can on the second surface area 408b and / or the first surface area 408a so that these openings are exposed in the second surface area 408b and / or the first surface area 408a form. This achieves that the solid 408 supplied gas from the second surface area 408b and / or the first surface area 408a can emerge.

The procedure 100 may also have an indication of the permeability of the solid 408 at the second surface area 408b and / or the first surface area 408a to be determined based on the recorded time-dependent test gas concentration in the collecting container 302 .

$$q_{pV}=\frac{p\times V}{t}$$

For example, the following relations ( 1 ) and (2) are used to provide an indication of the permeability of the solid 408 to determine. $$\mathrm{L.}\left(\mathrm{C.}{O}_2\right)=\frac{q_{pV}\left(\mathrm{C.}{O}_2\right)}{\mathrm{\Delta }p}$$

$$q_{pV}=\frac{p\times V}{t}$$

Specify here: Δp is the pressure drop across the solid 408 , p the pressure inside 302i of the collecting container 302 , V is the volume of the interior 302i of the collecting container 302 (also known as the internal volume), and t is the time.

Using relations ( 1 ) the conductance L (CO ₂ ) can be used as an indication of the permeability of the solid 408 be determined, for example in each case at the point by means of the receiving opening 302o is covered. This accomplishes that for each of the surface areas 408a , 408b an indication of the permeability of the solid 408 can be determined. On this basis, the spatial distribution of the permeability of the solid can optionally be determined 408 be determined.

In one example, the sensing device 400 on: a measuring bell 302 , a circulation pump 406 and a gas concentration sensor 304 . According to the procedure 100 can the measuring bell 302 placed one after the other on each surface area of the solid to be measured. The test gas can flow through the surface area of the solid. The measuring bell 302 contains an internal volume of a first chemical composition (for example an initial gas concentration of the test gas). The internal volume can be permanently connected to the gas concentration sensor 304 to be circulated over. The gas concentration sensor 304 can record the test gas concentration circulated past it as a time-dependent state. For example, the change in concentration over time can be recorded and the conductance L (CO ₂ ) calculated from this.

The volume and / or pressure in the receptacle 302 can optionally be kept constant, for example by placing between the receiving opening 302o and the solid 408 a gap remains through which gas from the collecting container 302 can escape. Alternatively or additionally, the volume and / or the pressure in the collecting container 302 be kept constant by the collection container 302 has a pressure relief valve through which gas from the collecting container 302 can escape. The volume kept constant reduces the number of unknowns and thus improves the measurement.

5 Fig. 3 illustrates a collection container 302 the detection device 300 according to various embodiments 500 in a schematic sectional side view. The gas intake opening 302o may have an annular contour that has an uneven (eg curved and / or angled) surface 301 spans. This makes it easier to pick up test gas from an uneven surface, for example from a transport roller, as will be described in more detail later. The annular contour can run along a self-contained path which does not necessarily have only sections that are at the same distance from a common point (ie need not lie on a body of revolution). For example, the ring-shaped contour can also be angular.

For example, the gas intake opening 302o from a wall 504 (clearly a hollow cylinder) of the collecting container 302 be surrounded (eg limited), the end face 301s the uneven surface 301 spans.

The surface 301 can for example be curved, for example with a radius that is greater than an extension of the gas intake opening 302o in the area 301 .

Should the gas cycle 402 can be provided, the collecting container 302 two connections 502 have on which the gas lines of the gas cycle 402 can be connected.

In principle, the gas intake opening described herein 302o by hand on the permeable solid 408 being held. For example, the gas intake opening 302o to the surface of the solid 408 and the concentration development of the gas volume in the measurement setup is recorded for several minutes. With this procedure it is possible to measure the conductance of the permeable solid at different points. In the following it is described how this process is reproducible and / or facilitated by the hood, which the gas intake opening 302o has, is movably mounted. For this purpose, reference is made to the collecting container as a hood. What has been described can apply analogously to those embodiments according to which the hood is coupled to the collecting container by means of a gas line (cf. for example 3B) .

6th illustrates the sensing device 300 according to various embodiments 600 in a schematic perspective view and detailed view 600b .

The detection device 300 can be a guiding device 604 having one or more than one joint 604 has, with which the collecting container 302 is movably mounted. The guiding device 604 (e.g. one or more than one joint 604 ) can go to the collecting container 302 provide one or more than one degree of freedom, for example one or more than one degree of translational freedom and / or one or more than one degree of freedom of rotation. For example, the guide device can have one or more than one translational joint (also referred to as a linear guide) and / or one or more than one rotational joint.

In the illustrated embodiments 600 has the guide device 602 a frame 602 on which the guide device 604 holds. The guiding device 604 has a guide rail 604a that provides exactly one degree of translational freedom. This achieves that the collection container 302 can be positioned reproducibly so that the same surface area of the solid body can be covered several times in succession.

Optionally, the detection device 300 have an actuator (for example a motor) which is set up, the collecting container 302 to relocate, according to one or more than one degree of freedom. Optionally, the detection device 300 have a control device which is set up to control the actuator, for example according to a measurement sequence.

The measurement sequence can have several phases, each phase of which has the collecting container 302 to relocate to a surface area of the solid until the collecting container 302 covers the surface area. The multiple phases can differ from one another in the location of the surface area. For example, the solid 408 automatically scanned will. Optionally, each phase can have the collecting container 302 to purge with a different purge gas from the test gas. The purge gas can, for example, comprise air or be formed from it.

The detection device 300 according to various embodiments 600 enables a significantly more reproducible measurement result. With this measurement setup, the measurement setup is, for example, on a rail 604a with constant contact pressure on the surface of the solid 408 led along. On the rail 604a can snap points 604b be arranged that allow reproducible measurements at one point.

7th illustrates a measuring arrangement 700 according to various embodiments in a schematic cross-sectional view (with a viewing direction along an axis of rotation 701 ) which the detection device 300 and a transport roller 702 having. The transport role 702 may generally have a body of revolution on its outer surface 712 (also referred to as jacket surface) a plurality of openings are formed from which a fluid (eg a gas) can exit.

The transport role 702 (also referred to as a transport roller) can be the axis of rotation 701 have around which the transport roller 702 is rotatably mounted. The transport role 702 can also be a permeable roll cover 702o have as solids, which the surface 712 the transport roller 702 having. The or each surface area 408a , which is covered by means of the collecting container, an area of the surface 712 the transport roller 702 being.

The transport role 702 can have a supply connection 706 (e.g. fluid connection 706 ) and a gas pipe 704 have, the gas line 704 the supply connection 706 fluid-conducting with the roller cover 702o couples. On the supply connection 706 supplied gas can by means of the roller cover 702o to the surface 712 the transport roller 702 and are handed in there (ie leaving).

The role cover 702o may have a plurality of pores that define the roll cover 702o in the radial direction of the transport roller 702 make fluid-conducting. The pores can be on the surface 712 the transport roller 702 exposed, ie form openings.

The role cover 702o can for example have one or more than one layer, as is described in more detail below. The role cover 702o can, for example, have a porous ceramic layer which, for example, forms the surface of the transport roller 702 having. The role cover 702o can alternatively or additionally have a perforated metal layer (eg a sheet metal). The role cover 702o can alternatively or additionally have several gas ducts, which the pores of the roller cover 702o connects with each other. The metal layer can, for example, couple the pores of the ceramic layer to one another in a fluid-conducting manner. Alternatively or additionally, the metal layer can couple the gas channels to the porous ceramic layer in a fluid-conducting manner.

The procedure 100 can have: the supply connection 706 the transport roller 702 to supply the test gas when the receiving opening 302o with the first surface area of the transport roller 702 is fluidly coupled; then the receiving opening 302o and the transport roller 702 relative to each other (e.g. by turning the transport roller 702 and / or moving the receiving opening 302o) ; and then the supply connection 706 the transport roller 702 to supply the test gas when the receiving opening 302o with the second surface area of the transport roller 702 is fluidly coupled.

The axis of rotation 701 can for example be parallel to a degree of translational freedom that the joint 604 the collecting container 302 provides and / or according to which the receiving opening 302o is relocated.

In one example, the transport roller comprises: a cylindrical roller cover 702o which has a plurality of gas outlet openings; a temperature control device (eg cooling device) which is set up to supply and / or withdraw thermal energy from the cylindrical roller cover; a gas connection 706 ; and a gas pipe 704 which the gas connection 706 and the plurality of gas outlet openings are coupled to one another in a gas-conducting manner.

8th illustrates a procedure 800 according to various embodiments in a schematic flowchart. The procedure 800 can for example before and / or after the procedure 100 be performed. For example, by means of the method 100 a result of the procedure 800 , a change through the process 800 and / or a starting point of the procedure 800 be determined.

The procedure 800 can be on the solid 408 be used, which has a network of interconnected pores, which on a surface area of the solid 408 exposed. The surface area can have an impurity adjoining at least one of the pores. The contamination can, for example, extend into and / or into the pore at least partially cover so that the pore is at least partially clogged.

The procedure 800 has, in 801, arranging a liquid (also referred to as barrier liquid) in the interconnected pores, for example until these are completely filled with the barrier liquid; and in 803, etching the contamination by means of an etching fluid when the barrier liquid is arranged in the interconnected pores, so that the barrier liquid disposed in the pores inhibits penetration of the etching fluid into the interconnected pores.

The barrier liquid can, for example, comprise or be formed from water, e.g. distilled water and / or demineralized water (also referred to as deionized water or DI water).

The barrier liquid arranged in the pores can clearly serve as a blocker that inhibits the penetration of the etching fluid. This ensures that the interior of the pores is not attacked by the etching fluid.

The procedure 800 can be used, for example, to clean a porous solid, for example its ceramic surface. The porous solid body can, for example, be a component of a vacuum coating system, for example part of a transport roller 702 the vacuum coating system (e.g. its roll cover).

The etching fluid can be liquid (also referred to as etching liquid) and / or gaseous, for example. The use of a liquid etching fluid is also known as wet chemical etching.

Examples of the etching fluid include: nitric acid (HNO ₃ ), dilute nitric acid, iron (III) chloride solution (FeCl ₃ solution), saturated iron (III) chloride solution, ammonia-hydrogen peroxide mixture (NH ₃ - H ₂ O ₂ mixture), or a mixture of several of these.

The impurity can include or be formed from copper, for example. The etching of the impurity by means of the etching fluid can include, for example, that one or more than one copper impurity is removed from a porous ceramic layer by means of the etching fluid.

As an alternative or in addition, the contamination can comprise or be formed from a material with which a substrate is coated that lies on the transport roller. The substrate can be coated by means of physical vapor deposition.

The procedure 800 is gentler than conventional mechanical cleaning (e.g. by means of particle blasting or brushing), so that the pore structure of the solid is less impaired. For example, the damage to or change in the properties of the pore structure (eg a ceramic surface) or a porous layer composite can be reduced.

Alternatively or additionally, cleaning is possible without having to remove the component that has the porous solid body. The procedure 800 can, for example, have the contamination of a transport roller being etched by means of the etching fluid while the transport roller is arranged in a vacuum chamber.

Alternatively or additionally, selective cleaning is possible, for example without mechanical, thermal or chemical attack on the ceramic surface or an underlying layer. The use of an etching fluid is particularly inexpensive and quick.

An example of the procedure 800 comprises: saturating the porous solid body (eg the roll cover) with DI water; Application of the etching liquid by hand (e.g. protected by means of a chemically resistant glove) to the surface (e.g. ceramic surface) of a porous coating of a transport roller by means of a textile (e.g. by means of a fleece cloth, a fabric and / or a synthetic substance). The etching liquid can comprise or be formed from a chemical solution of dilute NH ₃ and H ₂ O _2. The transport roller may have copper contamination on the surface. The etching liquid can be worked into the surface until the copper contamination is removed or reacted. Finally, the etching liquid, other chemical residues and / or the reaction product can be removed from the transport roller by means of a textile soaked in DI water.

As a follow-up treatment, the procedure 800 have: optional rinsing of the solid (eg the roller cover) with DI water and / or (eg then) with ethanol; optional heating of the solid (eg the roll cover) for drying; optional blowing out of the solid body (eg the roller cover), eg with the test gas (eg by supplying gas to the supply connection) 706 the transport roller), optional pumping out of the vacuum chamber in which the solid body (e.g. the roller cover) is arranged.

The procedure 800 can alternatively or in addition to the wet chemical etching, remove the contamination from the solid by means of mechanical cleaning with a fleece Brush, dry ice blasting and / or laser ablation, as will be described in more detail later.

9 illustrates the solid 408 (e.g. the roll cover 702o) according to various embodiments 900 in a schematic cross-sectional view, for example the roll cover 702o . The solid 408 can be a first layer 902 have (also as a distribution layer 902 referred to), which is clearly attacked quickly by the etching fluid, ie is etched by it.

The distribution layer 902 can for example comprise or be formed from a metal, for example the perforated metal layer.

The distribution layer 902 can for example from multiple channels 908 be penetrated. The distribution layer 902 can for example chemically react with the etching fluid faster than the contamination 911 (e.g. with a multiple of the reaction rate). This reflects a scenario in which to remove the contamination 911 an etching fluid is used, which is also the solid 408 , e.g. its distribution layer 902 , attacks.

The solid 408 (e.g. the surface layer 702o) can optionally have an additional layer (also as a cover layer 904 referred to), which of the network of interconnected pores 912 is penetrated and which between the impurity 911 and the distribution layer 902 is arranged. The cover layer 904 can for example be a sintered or sprayed-on layer, the pores between the sintered or sprayed-on particles 912 are formed.

The cover layer 904 For example, it may chemically react more slowly with the etching fluid than the contamination 911 (eg with a fraction of the reaction rate) and / or the distribution layer 902 . This reflects a scenario in which to remove the contamination 911 an etching fluid is used against which the cover layer 904 is chemically inert (also referred to as inert), eg that this is less reactive than the distribution layer 902 .

The cover layer 904 can for example comprise or be formed from a ceramic, for example the ceramic layer.

10 illustrates the process 100 according to various embodiments in a schematic diagram 1000 , in which the time-dependent chemical gas composition 203 over time 201 is illustrated, determined by means of the method 100 , for different points in time after applying the procedure 800 . As can be seen, the permeability of the solid increases 408 , which is proportional to dy / dx, gradually decreases.

11th illustrates the process 100 according to various embodiments in a schematic diagram 1100 in which the permeability 1103 of the solid 408 at several points 1101 of the solid 408 is illustrated so that the spatial distribution of permeability 1103 of the solid 408 is obtained.

From the values in the diagram 1000 can provide information on the permeability based on the increase dy / dx in the test gas concentration 1103 of the solid can be determined. This increase provides the conductance of each surface area of the solid via equations (1), (2), (3) 408 as an indication of the permeability 1103 of the solid.

For example, the permeability of the roll cover 702o axially measured at several points. For example, the axis of rotation 701 the transport roller 702 parallel to a degree of translational freedom that the joint 604 the collecting container 302 provides. Will the procedure 100 performed several times at different times, between which by means of the transport roller 702 a substrate is deflected and / or the substrate on the transport roller 702 is coated on the surface, the development of the permeability of the transport roller over time 702 be tracked. This makes it possible to determine the point in time at which the transport roller 702 should be cleaned or replaced.

12th illustrates a cleaning arrangement 1200 according to various embodiments in a schematic side view showing the transport roller 702 and a cleaning device 1210 (looking at right angles to the axis of rotation 701 ) when cleaning a transport roller 702 having.

The cleaning device 1210 has a functional unit 1220 to clean the roll cover 702o which can optionally be set up for chemical cleaning (eg by means of etching), for thermal cleaning (eg by means of laser ablation) and / or for mechanical cleaning (eg by means of dry ice blasting and / or by means of a brush). For example, the functional unit 1220 be set up for laser ablation cleaning, brush cleaning, wet chemical cleaning and / or dry ice blasting.

The cleaning device 1210 further comprises: a frame 1 (e.g. a height-adjustable frame), a step 2 (e.g. a sliding step); multiple wheels 3 (e.g. lockable wheels); a drip pan 4th with drain; a lighting 5 (e.g. circumferential); a longitudinal guide 6th (also as Designated guide rail); a transport carriage 7th (e.g. a spring-loaded transport carriage); a drip tray 8th for the functional unit, a seal 9 , a cleaner 10 , a drain 11th , a suction 12th and several spray nozzles 13th .

For example, the cleaning device 1210 be driven manually or by a motor.

For example, the frame 1 have a lifting device, by means of which a vertical position of the functional unit 1220 can be changed (to adapt to the transport roller).

For example, the functional unit 1220 be mobile and / or pivotable. For example, the functional unit 1220 be manually slidable or motor-driven. For example, is the functional unit 1220 fixed, adjustable or by means of the transport roller 702 Spring-loaded arranged on a translation joint.

The drip pan and / or drain can be optional components (i.e., they do not necessarily have to be present). The surrounding lighting can be an optional component.

For example, the functional unit 1220 have the cleaner, the drip tray or cover, one or more than one spray nozzle, and one or more than one suction device.

For example, the cleaner can have one or more than one sponge, one or more than one brush, one or more than one textile. For example, the cleaner can be mounted rotating and / or swinging. Alternatively, the cleaner can be stored permanently.

For example, the cleaning agent (e.g. the etching fluid) can be brought to the cleaner by means of an immersion bath or spray nozzles.

For example, the functional unit 1220 lengthways transport roller 702 shifted when cleaning the transport roller 702 .

13th illustrates a cleaning arrangement 1200 according to various embodiments 1300 in a schematic side view (looking at right angles to the axis of rotation 701 ). The cleaning device 1310 can use a laser 1304 have for cleaning the transport roller 702 by means of laser ablation. The laser can be set up as the functional unit 1220 to feed a laser beam, which by means of the functional unit 1220 on the transport roller 702 is judged.

The transport role 702 can be driven by means of a motor, so that its surface can be scanned by means of the laser beam. Furthermore, the functional unit can be a control device 1302 have which is set up to rotate the transport roller 702 by means of the motor and / or to control the irradiation of the transport roller by means of the laser beam (for example the spatial distribution of the irradiation).

Various examples are described below which relate to those described above and shown in the figures.

Example 1 is a method comprising: gas-conducting coupling of a collecting container to a first surface area of a permeable (e.g. gas-permeable) solid and then to a second surface area of the solid; Supplying a test fluid (e.g. test gas) through the solid into the collecting container; Detecting a time-dependent state which represents an amount of the test fluid (e.g. test gas) in the collecting container when the collecting container is coupled to the first surface area and then when the collecting container is coupled to the second surface area.

Example 2 is the method according to Example 1, the solid body being porous. This reflects a measurement in a difficult environment and thus expands the application possibilities.

Example 3 is the method according to Example 1 or 2, wherein the time-dependent state is a chemical gas composition in the receiver. This makes the measurement easier.

Example 4 is the method according to any one of Examples 1 to 3, wherein the time-dependent condition is a concentration of the test fluid (e.g. test gas) in the receptacle. This makes the measurement easier.

Example 5 is the method according to one of Examples 1 to 4, the collecting container having a hood which is pressed against the solid. This makes the measurement more precise.

Example 6 is the method according to any one of Examples 1 to 5, wherein the test fluid (e.g. test gas) comprises at least carbon and / or hydrogen. This type of test fluid is inexpensive.

Example 7 is the method according to Example 6, wherein the test fluid (e.g. test gas) comprises at least one of carbon dioxide and carbon monoxide. These gases are even cheaper.

Example 8 is the method according to one of Examples 1 to 7, wherein the test fluid (eg test gas) comprises oxygen. This gas is easier to detect.

Example 9 is the process according to any one of Examples 1 to 8, wherein the solid body comprises or is formed from a (e.g. cylindrical) roller cover (e.g. a transport roller). This reflects a measurement in a difficult environment and thus expands the application possibilities.

Example 10 is the method of any one of Examples 1 to 9, further comprising: agitating the interior of the receptacle, e.g., while sensing. This makes the measurement more precise.

Example 11 is the method according to one of Examples 1 to 10, further comprising: determining an indication of a permeability (e.g. gas permeability) of the solid in each case of the first surface area and the second surface area. This achieves to learn more about the state of the solid.

Example 12 is a device, e.g. for carrying out the method according to one of Examples 1 to 11, having: a collecting container for collecting a test fluid (e.g. test gas), a gas intake opening which is set up to hold test fluid (e.g. test gas) inside to feed the collecting container; a sensor (e.g. chemosensor) which is set up to detect a time-dependent state which represents an amount of the test fluid (e.g. test gas) in the interior of the collecting container.

Example 13 is the device according to example 12, further comprising: an evaluation unit which is set up to determine a gas permeability based on the time-dependent state. This makes the measurement easier.

Example 14 is the device according to Example 12 or 13, the gas intake opening having a contour such that it can be placed on a curved surface. This facilitates the measurement on a curved solid.

Example 15 is the device according to one of Examples 12 to 14, further comprising: a gas displacement device (e.g. pump) which is set up to circulate the interior of the collecting container and / or to supply it to the sensor. This makes the measurement more precise.

Example 16 is the device according to one of Examples 12 to 15, further comprising: a gas line which couples the sensor to the collecting container in a gas-conducting manner. This makes the measurement more precise.

Example 17 is the device according to any one of Examples 12 to 16, further comprising: a frame; a joint (e.g. having a guide rail) which supports the gas intake opening and / or the collecting container so as to be displaceable relative to the frame. This makes the measurement more reproducible.

Example 18 is a use of the device according to any one of Examples 12 to 17 for determining a gas permeability of a permeable (e.g. gas-permeable) solid.

Example 19 is a method for processing a solid body which has a network of interconnected pores which is exposed on a surface area of the solid body, the surface area having an impurity adjacent to at least one of the pores, the method comprising: arranging a liquid in the interconnected connected pores, etching of the contamination by means of an etching fluid when the liquid is arranged in the interconnected pores, so that the liquid arranged in the pores inhibits penetration of the etching fluid into the interconnected pores.

Example 20 is the method according to Example 19, the solid body having a first permeable layer which couples the pores of the network to one another in a gas-conducting manner, adjoins the network or is penetrated by it, and which reacts chemically with the etching fluid, e.g. with more than the Reaction rate of the impurity, e.g. 10 times the reaction rate of the impurity.

Example 21 is the process of Example 20, wherein the solid has a second layer (e.g. ceramic layer) which is penetrated by the network of interconnected pores and which is located between the impurity and the first layer.

Example 22 is a device comprising: a functional unit which is set up to carry out a cleaning process (e.g. according to the method according to one of Examples 19 to 21); a frame for supporting on a ground; a joint which couples the functional unit to the frame and by means of which the functional unit is mounted so as to be movable relative to the frame.

Example 23 is a device according to Example 22, wherein the joint has a translation joint, by means of which the functional unit is mounted displaceably relative to the frame.

Example 24 is the device according to Example 22 or 23, wherein the joint has a rotary joint, by means of which the functional unit is mounted displaceably relative to the frame.

Example 25 is the device according to one of Examples 22 to 24, further comprising: one or more than one actuator (e.g. motor) which is set up to move the functional unit (e.g. relative to the ground and / or at least to the frame).

Example 26 is the device according to Example 25, further comprising: a control device which is set up to control the one or more than one actuator, e.g. according to a cleaning sequence which has: moving the functional unit (e.g. relative to the ground and / or at least to the frame ) when performing the cleaning process.

Example 27 is the device according to Example 26, wherein the control device is also set up to control an actuator for rotating a transport roller, e.g. according to the cleaning sequence, which includes: rotating the transport roller when performing the cleaning process, with the functional unit being displaced along a rotation axis of the transport roller, for example will.

Example 28 is the device according to Example 27, the rotation of the transport roller and the displacement of the functional unit being synchronized with one another, e.g. in such a way that the transport roller is scanned.

Example 29 is the device according to one of Examples 22 to 28, wherein the functional unit is set up to carry out a chemical (e.g. wet chemical) cleaning process.

Example 30 is the device according to Example 29, the functional unit being set up to supply an etching fluid (e.g. supplied by means of a nozzle and / or from a reservoir) or to dispense it in order to carry out the cleaning process.

Example 31 is the device according to one of Examples 22 to 30, wherein the functional unit is set up to stimulate a cyclical movement (e.g. a vibration and / or a rotation) in order to carry out the cleaning process.

Example 32 is using the apparatus of any of Examples 22 to 31 to clean a (e.g., permeable) transport roller.

Claims (10)

Method (100), comprising: • gas-conducting coupling (101) of a collecting container to a first surface area of a permeable solid and then to a second surface area of the solid; • feeding (103) a test fluid through the solid into the collecting container; • Detecting (105) a time-dependent state which represents an amount of the test fluid in the collecting container when the collecting container is coupled to the first surface area and then when the collecting container is coupled to the second surface area. Method (100) according to Claim 1 , wherein the solid is porous. Method (100) according to Claim 1 or 2 , wherein the time-dependent state comprises a concentration of the test fluid in the collecting container that is detected. Method (100) according to one of the Claims 1 until 3 , wherein the collecting container has a hood which is pressed against the solid. Method (100) according to one of the Claims 1 until 4th , wherein the test fluid comprises at least carbon and / or hydrogen. Method (100) according to one of the Claims 1 until 5 , wherein the solid is a roller cover. Method (100) according to one of the Claims 1 until 6th , further comprising: circulating an interior of the collecting container. Method (100) according to one of the Claims 1 until 7th , further comprising: determining an indication of a permeability of the solid in each case of the first surface area and the second surface area. Device (300), comprising: • a collecting container (302) for collecting a test fluid, • a gas intake opening (302o) which is set up to supply test fluid received by means of the gas intake opening (302o) to an interior of the collecting container (302); • a sensor (304) which is set up to detect a time-dependent state which represents an amount of the test fluid in the interior of the collecting container (302). Using the device (300) according to Claim 9 for determining a gas permeability of a permeable solid body (408).

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