DE102020004617A1 - NV center based quantum sensor with great sensitivity - Google Patents

Abstract

The invention relates to a circuit (IC) and the method carried out by the circuit for use with a paramagnetic center (NV1) in the material of a sensor element with a driver for operating a pump radiation source (PL1) for emitting pump radiation (LB), a receiver (PD1) ) for the selective detection of fluorescence radiation (FL) of the paramagnetic center (NV1), with an evaluation circuit (M1, TP, M2, S&H, G) for generating a sensor output signal (out), which is generated by the fluorescence radiation (FL) of the paramagnetic center (NV1 ) depends in the material of a sensor element and / or quantum technological device element and with a holding circuit (S&H), - wherein the receiver (PD1) is provided to essentially not detect the pump radiation (LB) in terms of said selectivity. The holding circuit (S&H) is in the signal path between receiver (PD1) and sensor output signal (out) and holds its output signal at its output essentially constant in the first time periods and changes its output signal at its output in second time periods that are different from the first time periods Output changes depending on the signal at its input. This scanning suppresses residues of the copper signal in the sensor output signal (out).

Description

First of all, this application takes priority of the division from the as yet unpublished German patent application DE 10 2019 120 076.8 from 07/25/2019. The file number of the German Patent and Trademark Office of this division from the as yet unpublished German patent application DE 10 2019 120 076.8 dated July 25, 2019 is still unknown at the time of registration of the German patent application presented here and will be submitted later. The priority of the as yet unpublished German patent application DE 10 2019 120 076.8 dated July 25, 2019 itself is expressly not used, as this will expire the as yet unpublished German patent application DE 10 2019 120 076.8 of July 25, 2019 by claiming the internal priority.

Second, this application takes priority of the division from the as yet unpublished German patent application DE 10 2019 121 137.9 from 08/05/2019. The file number of the German Patent and Trademark Office of this division from the as yet unpublished German patent application DE 10 2019 121 137.9 dated 05.08.2019 is still unknown at the time of filing the German patent application presented here and will be submitted later. The priority of the as yet unpublished German patent application DE 10 2019 121 137.9 of 05.08.2019 itself, however, is expressly not used as this will expire the as yet unpublished German patent application DE 10 2019 121 137.9 from 05.08.2019 by claiming the internal priority.

Generic term

The invention is directed to a sensor system and / or quantum technology system, the optical transmitter of the sensor system being chopped and, by a special measure, all residues of the copper frequency being removed from the spectrum of the sensor output signal. The sensor system and / or quantum technological system comprises a paramagnetic center in the material of a sensor element and / or quantum technological device element which is part of the sensor system and / or quantum technological system. The paramagnetic center is preferably an NV center in a diamond crystal as the sensor element and diamond as the material.

General introduction

Recently, a great many publications have been made on the use of NV centers as quantum dots for quantum sensing, quantum computing and quantum cryptography.

One problem is the insufficient signal-to-noise ratio of all systems.

task

The proposal is therefore based on the object of creating a solution which does not have the above disadvantages of the prior art and has further advantages.

This object is achieved by devices according to claims 1 and 10 and methods according to claims 3 and 6 and 9.

Solution of the task

The invention relates to a quantum sensor system, the sensor system having a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system. The sensor system and / or quantum technology system includes a pump radiation source ( PL1 ) for pump radiation ( LB ) with which the pump radiation source ( PL1 ) the paramagnetic center ( NV1 ) irradiated. The pump radiation ( LB ) causes the paramagnetic center ( NV1 ) to emit fluorescence radiation ( FL ). The pump radiation source ( PL1 ) for the pump radiation ( LB ), for example an LED, is via an optical path with the paramagnetic center ( NV1 ) coupled. The pump radiation source is preferred ( PL1 ) a green LED or a pump laser with green pump radiation ( LB ), while the fluorescence radiation ( FL ) is typically red.

The sensor element and / or quantum technological device element is preferably a diamond crystal. The paramagnetic center ( NV1 ) is preferably an NV center in said diamond crystal. Such a sensor system is in the as yet unpublished German patent application DE 10 2018 127 394 .0 described.

For the sake of simplicity, the term sensor element is used below as a synonym for a sensor element and / or a quantum technological device element.

An integrated circuit for use with a paramagnetic center ( NV1 ) in the material of a sensor element with a driver for operating a pump radiation source ( PL1 ) for pump radiation ( LB ) and with a recipient ( PD1 ), for the detection of fluorescence radiation from the paramagnetic center ( NV1 ) and with an evaluation circuit for generating a sensor output signal ( out ) caused by the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) in the material of a sensor element is proposed. The sensor element is preferably a diamond crystal. The paramagnetic center ( NV1 ) is preferably an NV center in the diamond crystal.

A preferred integrated circuit ( IC ) for use with a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element with a driver for operating a pump radiation source ( PL1 ) for emitting pump radiation ( LB ) and with a recipient ( PD1 ) for the selective detection of fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) suggested. Recipient ( PD1 ) is preferably provided for the purpose of said selectivity, the pump radiation ( LB ) essentially undetectable. The integrated circuit ( IC ) further preferably comprises an evaluation circuit ( M1 , TP , M2 , G ) to generate a sensor output signal ( out ) caused by the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) depends in the material of a sensor element and / or quantum technological device element. The integrated circuit ( IC ) preferably has a hold circuit ( S&H ). The hold circuit ( S&H ) has an input and an output. The hold circuit ( S&H ) is preferably in the signal path between the receiver ( PD1 ) and sensor output signal ( out ) switched. A hold circuit is preferred ( S&H ) between first multiplier ( M1 ) and filter and / or integrator ( TP ) and / or after the filter and / or integrator ( TP ) inserted into the signal path. The hold circuit ( S&H ) keeps its output signal essentially constant at its output in the first time periods, i.e. it virtually locks it in. The hold circuit ( S&H ) changes in second time periods that are different from the first time periods, its output signal at its output as a function of the signal at its input. So it is more or less transparent in these second periods.

The sensor element and / or quantum technological device element is preferably a diamond crystal, the paramagnetic center ( NV1 ) is an NV center and / or an ST1 center in the diamond crystal.

In a method disclosed here for operating a sensor system and / or quantum technological system, the sensor system and / or quantum technological system includes a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system. The method then includes, for example, the step of modulated transmission of a modulated pump radiation ( LB ) in particular by a pump radiation source ( PL1 ) for pump radiation ( LB ), whereby the modulation of the transmission by means of a transmission signal ( S5 ) he follows. Another step of the process is the generation of modulated fluorescence radiation ( FL ) by means of a paramagnetic center ( NV1 ) in a material of a sensor element and / or quantum technological device element that is affected by the modulated pump radiation ( LB ) depends. This is followed by the step of receiving the modulated fluorescence radiation ( FL ) and generating a received signal ( S0 ). This is typically followed by the correlation of the received signal ( S0 ) with the transmission signal ( S5 ), especially with the help of a synchronous demodulator, and generation of a filter output signal ( S4 ), where the filter output signal ( S4 ) on the intensity of the correlation of the modulation of the fluorescence radiation ( FL ) with the transmission signal ( S5 ) depends. It has now been found that sampling the filter output signal ( S4 ), in particular by means of a hold circuit ( S&H ), with the determination of a sequence of samples and the use of the sequence of samples as the sensor output signal ( out ) are particularly advantageous, as this method is able to record the traces of the copper signal in the form of the transmitted signal ( S5 ) in the spectrum of the sensor output signal ( out ) to be removed almost completely.

The correlation can be done with the step of forming a feedback signal ( S6 ) depending on the sensor output signal ( out ) and the transmission signal ( S5 ), whereby the feedback signal ( S6 ) has a signal component that is complementary to a signal component of the transmitted signal ( S5 ) is modulated. In addition, the subtraction of the feedback signal ( S6 ) from the received signal ( S0 ) to the reduced received signal ( S1 ), which then closes the controller's feedback loop later. For correlation, the reduced received signal is preferably multiplied ( S1 ) with the transmission signal ( S5 ) to the filter input signal ( S3 ) and a subsequent filtering of the filter input signal ( S3 ) with a filter and / or integrator ( TP ) to the filter output signal ( S4 ), which then closes the control loop.

The formation of a feedback signal ( S6 ) preferably takes place depending on the sensor output signal ( out ) and the transmission signal ( S5 ) by multiplying the sensor output signal ( out ) with the transmission signal ( S5 ) to the feedback signal ( S6 ) possibly combined with the multiplication of a suitable sign and possibly combined with the addition of a suitable offset.

The correlation is preferably carried out with the steps of multiplying the received signal ( S0 ) with the transmission signal ( S5 ) to the filter input signal ( S3 ) and the filtering and / or integration of the filter input signal ( S3 ) with a filter and / or integrator ( TP ) to the filter output signal ( S4 ), where the filter output signal ( S4 ) may be multiplied by a factor of -1. If this is the case, there is no multiplication by -1 in the second multiplier ( M2 ). Furthermore, the filter output signal is sampled ( S4 ), in particular by means of a hold circuit ( S&H ), with the determination of a sequence of samples and the use of the sequence of samples as the sensor output signal ( out ). By multiplying the sensor output signal ( out ) with the transmission signal ( S5 ) preferably forms a second multiplier ( M2 ) the feedback signal ( S6 ). Controlling a compensation radiation source ( PLK ) preferably takes place with the feedback signal ( S6 ). As a result, compensation radiation is typically emitted by the compensation radiation source ( PLK ) depending on the feedback signal ( S6 ). Compensation radiation then radiates into the receiver ( PD1 ). There then takes place a typically superimposed, in particular summarily superimposed, reception of the fluorescence radiation ( FL ) and the compensation radiation in the receiver ( PD1 ) and the formation of the received signal ( S0 ) depending on this superposition, which closes the control loop again.

In another method presented here ( 13 ) To operate a sensor system and / or quantum technological system, the sensor system and / or quantum technological system comprises a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system. As a step, the method comprises the modulated transmission of modulated compensation radiation (KS), this modulation by means of a compensation transmission signal ( S7 ) is modulated. In contrast to the previously presented method, this procedure now regulates the compensation transmission signal and not the transmission signal ( S5 ). The broadcast signal ( S5 ) is thus operated quasi-statically with this method. Both basic methods can, however, be combined, whereby a rule must be defined in which way the compensation transmission signal ( S7 ) and / or the broadcast signal ( S5 ) are to be regulated. In the example discussed in this section, the compensation transmit signal ( S7 ) regulated. Therefore, the method discussed here in this section involves generating modulated fluorescence radiation ( FL ) by means of a paramagnetic center ( NV1 ) in a material of a sensor element and / or quantum technological device element, which is generated by a modulated pump radiation ( LB ) and possibly other parameters, in particular the magnetic flux density B, depends. Here, too, there is a superimposing, in particular summing superimposing, reception of the modulated fluorescence radiation ( FL ) and the compensation radiation (KS) and the generation of a received signal ( S0 ) depending on this superposition. A correlation of the received signal ( S0 ) with the compensation transmission signal ( S7 ), especially with the help of a synchronous demodulator, to generate a filter output signal ( S4 ) carried out. The filter output signal is now sampled ( S4 ), in particular by means of a hold circuit ( S&H ), with the determination of a sequence of samples. This causes the suras of the compensation transmission signal ( S7 ) in the sensor output signal ( out ) repaid or massively suppressed. This is followed by the use of the sequence of sampled values adjusted in this way as the sensor output signal ( out ). Now the generation of a compensation transmission signal ( S7 ) modulated complex feedback signal ( S8 ) with the help of this sensor output signal ( out ) and the formation of the transmission signal ( S5 ) from the pre-send signal ( S8 ), in particular through offset addition and / or power amplification. A pump radiation source is then controlled ( PL1 ) with the transmit signal formed in this way ( S5 ) and the emission of a pump radiation ( LB ) by the pump radiation source ( PL1 ) for pump radiation ( LB ), in particular by an LED or a laser, depending on the transmitted signal ( S5 ).

The correlation is preferably carried out with the steps of multiplying the received signal ( S0 ) with the compensation transmission signal ( S7 ) to the filter input signal ( S3 ) and the filtering and / or integration of the filter input signal ( S3 ) with a filter and / or integrator ( TP ) to the filter output signal ( S4 ), whereby in particular the filter output signal ( S4 ) can be multiplied by a factor of -1.

The complex feedback signal is preferably formed ( S8 ) by multiplying the filter output signal ( S4 ) with the compensation transmission signal ( S7 ) to the complex feedback signal ( S8 ).

In a further method presented here for operating a sensor system and / or quantum technological system, the sensor system and / or quantum technological system comprises a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system. The method again comprises the modulated transmission of a modulated pump radiation ( LB ) in particular by a pump radiation source ( PL1 ) for pump radiation ( LB ), whereby the modulation of the emission of the pump radiation ( LB ) by means of a transmission signal ( S5 ) he follows. The method also includes the generation of modulated fluorescence radiation ( FL ) by means of a paramagnetic center ( NV1 ) in a material of a sensor element and / or quantum technological device element that is affected by the modulated pump radiation ( LB ) and the reception of the modulated fluorescence radiation ( FL ) and generating a received signal ( S0 ) as well as determining the intensity of the modulated fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) in the material of the sensor element in the form of a filter output signal ( S4 ) at times when the modulated emission of the modulated pump radiation ( LB ) in particular by the pump radiation source ( PL1 ) for pump radiation ( LB ) not taking place. As before, a sampling of the filter output signal ( S4 ), in particular by means of a hold circuit ( S&H ), proposed to determine a sequence of samples in order to detect traces of the transmitted signal ( S5 ) from the spectrum of the sensor output signal ( out ) to increase the sensitivity. The sequence of the sampled values is then used as the sensor output signal ( out ).

Finally, a sensor system and / or quantum technological system is proposed, the sensor system and / or quantum technological system having a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system, and wherein the sensor system and / or quantum technological system is a pump radiation source ( PL1 ) for pump radiation ( LB ), in particular an LED or a laser. The pump radiation ( LB ) initially causes the paramagnetic center ( NV1 ) to emit fluorescence radiation ( FL ). The sensor system and / or quantum technological system then includes means ( PD1 , A1 , M1 , TP , M2 , A2 , G , M1 ' , TP ' , M2 ' ), which at second times, which are different from the first times, the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) in the form of an additional filter output signal ( S4 ' ) and the additional filter output signal ( S4 ' ) sample in the form of an additional sequence of additional sample values and this additional sequence of additional sample values as an additional sensor output signal ( out' ) that emits from the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) depends on these second times. This allows the fluorescence to be measured at times when the pump radiation source ( PL1 ) is already switched off. The sensor system and / or quantum technology system includes further means for generating these sampled values ( S&H ' ) to switch between the received signal ( S0 ) and the additional sensor output signal ( out' ) the respective signal at the point of insertion of these further means ( S&H ' ) to be scanned.

advantage

Such a housing and the sensor built on it enable, at least in some implementations, the compact design and the combination of conventional circuit technology with quantum sensors. The advantages are not limited to this.

Figure list

• 1 shows the basic structure of a proposed system.
• 2 shows a simple system for an exemplary sub-function of the integrated circuit ( IC ).
• 3 shows the system of 2 with an optical compensation.
• 4th shows the system of 2 with optical compensation via the transmitter.
• 5 shows the system of 2 with an electrical compensation and a measurement of the afterglow of the fluorescence radiation ( FL ), which means doing without the first filter ( F1 ) allows.
• 6 shows the system of 5 without first filter ( F1 ).
• 7th shows a schematically simplified fluorescence behavior as a function of the magnetic flux density B when the alignment is decalibrated.
• 8th Shows the resulting course of the 7th when decalibrating the alignment of the crystal using the example of the intensity of the fluorescence radiation ( FL ) as a function of the magnitude of the strength of the magnetic flux density B 8a and its differentiation as a sensitivity curve in 8b with the point of maximum sensitivity at approx. 5-10mT.
• 9 Shows the setting of the optimal operating point by means of an operating point control signal (S9), which is slowly readjusted by means of a controller (RG), for energizing a compensation coil (LC), which sets the magnetic flux density B at the location of the paramagnetic center ( NV1 ) readjusts.
• 10 shows the claimed basic system with a hold circuit ( S&H ).
• 11 shows the system of 2 supplemented by the hold circuit ( S&H ).
• 12th shows the system of 3 supplemented by the hold circuit ( S&H ).
• 13 shows the system of 4th supplemented by the hold circuit ( S&H ).
• 14th shows the system of 5 supplemented by the hold circuit ( S&H ).
• 15th shows the system of 6 supplemented by the hold circuit ( S&H ).
• 16 shows the system of 7th supplemented by the hold circuit ( S&H ).

Description of the figures

Figure 1

1 shows the basic structure of a proposed system. It includes an integrated circuit ( IC ), which includes a receiver (PD). Above the receiver is a first filter ( F1 ), which is preferably an optical filter, arranged. This first filter ( F1 ) is preferred to the surface of the integrated microelectronic circuit ( IC ) glued. The bond is preferably transparent to the fluorescence radiation ( FL ) a paramagnetic center ( NV1 ) in the material of a sensor element that is placed on the receiver ( PD1 ) facing away from the first filter ( F1 ) is mounted. The integrated microelectronic circuit ( IC ) is preferably a single crystal. The integrated microelectronic circuit is preferred ( IC ) a CMOS circuit, a bipolar circuit or a BiCMOS circuit. The material of the microelectronic circuit ( IC ) is preferably silicon. If a III / V material is used as the carrier material for the integrated microelectronic circuit ( IC ) is used, a co-integration of an LED or a laser as a pump radiation source ( PL1 ) with the microelectronic circuit ( IC ) and with the receiver (PD) conceivable. Instead of a vertical arrangement, a lateral arrangement makes sense. In the case of the 1 for the sake of simplicity we assume that the pump radiation source ( PL1 ) is not co-integrated, but separately. In the example of the 1 is a sensor element by means of a fastener ( Ge ) with the first filter ( F1 ) mechanically connected. It is preferably solidified gelatin. The pump radiation source ( PL1 ) for pump radiation ( LB ), more precisely the LED or the laser, irradiates the paramagnetic centers ( NV1 ) in the material of the sensor element with pump radiation ( LB ). This excites the paramagnetic centers ( NV1 ) in the material of the sensor element to emit fluorescent radiation ( FL ) at. The material of the fastener ( Ge ) is preferably transparent for the pump radiation ( LB ) the pump radiation source ( PL1 ) and transparent for the fluorescence radiation ( FL ) of the paramagnetic centers ( NV1 ) in the material of the sensor element. The first filter ( F1 ) is preferably transparent for fluorescence radiation ( FL ) of the paramagnetic centers ( NV1 ) in the material of the sensor element. The first filter ( F1 ) is preferably not transparent for the pump radiation ( LB ) the pump radiation source ( PL1 ). Ultimately, the recipient forms ( PD1 ) together with the first filter ( F1 ) a receiver that is essentially only for the fluorescence radiation ( FL ) of the paramagnetic centers ( NV1 ) is sensitive in the material of the sensor element and essentially not for the pump radiation ( LB ) the pump radiation source ( PL1 ) is sensitive. The integrated circuit ( IC ) now preferably generates a modulation of the pump radiation ( LB ) the pump radiation source ( PL1 ) the pump radiation ( LB ), i.e. the LED or the laser. This modulated pump radiation ( LB ) meets the paramagnetic centers ( NV1 ) in the material of the sensor element. Depending on the magnetic flux at the location of the paramagnetic centers ( NV1 ) in the material of the sensor element they then emit a modulated fluorescence radiation ( FL ) whose modulation depends on the modulation of the incoming pump radiation ( LB ) depends.

This modulation of the pump radiation ( LB ) thus has a correlated modulation of the fluorescence radiation ( FL ) result. Therefore, the received signal ( S0 ) Recipient ( PD1 ) the integrated circuit ( IC ) caused by the modulated fluorescence radiation ( FL ) is hit, also modulated. Since the intensity of the fluorescence radiation ( FL ) from the magnetic flux at the location of the paramagnetic centers ( NV1 ) depends on the material of the sensor element, the modulation of the received signal depends on ( S0 ) also from the magnetic flux at the location of the paramagnetic centers ( NV1 ) in the material of the sensor element.

The integrated circuit can now modulate the received signal ( S0 ) and, depending on this, activate actuators or change their activity. For example, the integrated circuit can have a first coil ( L1 ) energized differently and thus a change in the magnetic field that the integrated circuit due to a modulation change in the received signal ( S0 ) compensate. Preferably said first coil ( L1 ) Part of the integrated circuit. It can then be manufactured, for example, as a single or multi-layer coil. The first coil ( L1 ) can also be manufactured separately.

Figure 2

2 shows a simple system for an exemplary sub-function of the integrated circuit ( IC ). A signal generator ( G ) shows a transmission signal ( S5 ). The pump radiation source ( PL1 ) converts the transmitted signal into a modulated pump radiation ( LB ) directly or indirectly as described above hits the sensor element. There this reflected pump radiation excites ( LB ) the paramagnetic centers ( NV1 ) in the material of the sensor element to emit fluorescence radiation ( FL ) at. The first filter ( F1 ) lets the fluorescence radiation ( FL ) happen while the modulated pump radiation ( LB ) does not let happen. The fluorescence radiation ( FL ) is correlated to the pump radiation ( LB ) modulated. The modulated fluorescence radiation ( FL ) we after passing the first filter ( F1 ) from the recipient ( PD1 ) received and converted into a modulated received signal ( S0 ) converted. The recipient may include ( PD1 ) further amplifiers and filters. A first adder ( A1 ) subtracts a feedback signal ( S6 ) from the received signal ( S0 ). The result is the reduced received signal ( S1 ). This reduced received signal ( S1 ) is further processed in a synchronous demodulator. To do this, a first multiplier multiplies ( M1 ) the reduced received signal ( S1 ) with the transmission signal ( S5 ) and thus forms the filter input signal ( S3 ). In a filter and / or integrator ( TP ) the DC component of the filter input signal is allowed through. The result is the filter output signal ( S4 ) as the output signal of the filter and / or integrator ( TP ). Formally, the first multiplier forms ( M1 ) and the filter and / or integrator ( TP ) a scalar product of the reduced received signal ( S1 ) and the transmission signal ( S5 ). The value of the filter output signal ( S4 ) then indicates how much of the transmission signal ( S5 ) proportionally in the reduced received signal ( S1 ) is available. This filter output signal ( S4 ) can be compared with a Fourier coefficient in its function.

A second multiplier ( M2 ) multiplies the filter output signal ( S4 ) with the transmission signal ( S5 ) and thus forms the feedback signal ( S6 ). Is the gain of the filter and / or integrator ( TP ) very large, the reduced received signal contains ( S1 ) typically no more part of the transmission signal apart from a control error in the case of stability. The value of the filter output signal ( S4 ) is then a measure of the amplitude of the fluorescence radiation ( FL ) that the recipient ( PD1 ) reached. This receiver output signal ( S4 ) is then used as the sensor output signal ( out ) is output via one of the lead frame surfaces using a bond wire.

Figure 3

3 shows the system of 2 with the difference that the feedback of the feedback signal ( S6 ) now does not have a first adder ( A1 ) takes place electrically, but via a compensation radiation source ( PLK ). For this purpose, the level and the offset of the feedback signal ( S6 ) through a matching circuit ( OF ) appropriately adapted. A compensation transmission signal results ( S7 ) as the output signal of the adapter circuit ( OF ). With this compensation transmission signal ( S7 ) the compensation radiation source ( PLK ) operated. The compensation radiation source ( PLK ) then radiates into the receiver ( PD1 ) on. In order to reproduce the subtraction, it is now provided that the output of the filter and / or integrator ( TP ) is executed inverting. So it does not matter at which point this inversion is carried out in the control cycle, but only that it takes place. The device with a first barrier ( BA1 ), which prevents the compensation radiation source ( PLK ) the paramagnetic centers ( NV1 ) irradiate in the material of the sensor element and thus emit fluorescence radiation ( FL ) can stimulate. So it is a barrier for electromagnetic radiation and / or light.

The device with a second barrier ( BA2 ), which prevents the pump radiation source ( PL1 ) the recipient ( PD1 ) can irradiate directly. This is also a barrier for electromagnetic radiation and / or light. For control reasons, a certain amount of direct irradiation may be required to a very limited extent, in order to improve the control's capture range.

Figure 4

4th serves to clarify the procedure for optical compensation via a regulated compensation radiation source ( PLK ). The sensor system again includes a paramagnetic center ( NV1 ) in the material of a sensor element that is part of the sensor system. The process for operating a sensor system then runs in such a way that a compensation transmission signal ( S7 ) a modulated emission of a modulated compensation radiation (KS) by the modulated operated compensation radiation source ( PLK ) he follows. A modulated fluorescence radiation ( FL ) is determined by means of a paramagnetic center ( NV1 ) in a material of a sensor element by modulated pump radiation ( LB ) caused. whose origin of the pump radiation ( LB ) will be described later. In the receiver ( PD1 ) there is an overlapping reception of the modulated fluorescence radiation ( FL ) and the modulated compensation radiation (KS) and the generation of a received signal ( S0 ). If the control described below has settled in the absence of interferers, the received signal contains ( S0 ) no longer prefers modulation. A correlation of the received signal ( S0 ) with the modulated compensation transmission signal ( S7 ), especially with the help of a synchronous demodulator, and generation of a sensor output signal ( out ) is carried out to determine the modulated component in the received signal ( S0 ) and then using the transmission signal ( S5 ) to compensate. The suggested alternative method includes the generation of a compensation transmission signal ( S7 ) modulated transmission signal ( S5 ) using the sensor output signal ( out ). The sensor output signal ( out ) on the intensity of the correlation of the modulation of the fluorescence radiation ( FL ) with the compensation transmission signal ( S7 ) from.

• • Multiplikation des Empfangssignals (S0) mit dem Kompensationssendesignal (S7) zum Filtereingangssignal (S3);
• • Filtern des Filtereingangssignals (S3) mit einem Filter und/oder Integrator (TP) zum Filterausgangssignal (S4), wobei das Filterausgangssignal (S4) mit einem Faktor -1 multipliziert ist;
• • Multiplikation des Filterausgangssignals (S4) mit dem Kompensationssendesignal (S7) zum komplexen Rückkoppelsignal (S8);
• • Bilden des Sendesignals (S5) aus dem komplexen Rückkoppelsignal (S8);
• • Ansteuern einer Pumpstrahlungsquelle (PL1) als Sender mit dem Sendesignal (S5);
• • Aussenden einer Pumpstrahlung (LB) durch die Pumpstrahlungsquelle (PL1) in Abhängigkeit von dem Sendesignal (S5);
• • Verwendung des Filterausgangssignals (S4) zur Bildung des Sensorausgangssignals (out), wobei das Sensorausgangssignal (out)im Sinne dieses Merkmals gleich dem Filterausgangssignal (S4) sein kann.

The correlation is preferably carried out with the steps

• • Multiplication of the received signal ( S0 ) with the compensation transmission signal ( S7 ) to the filter input signal ( S3 );
• • Filtering the filter input signal ( S3 ) with a filter and / or integrator ( TP ) to the filter output signal ( S4 ), where the filter output signal ( S4 ) is multiplied by a factor of -1;
• • Multiplication of the filter output signal ( S4 ) with the compensation transmission signal ( S7 ) to the complex feedback signal ( S8 );
• • Formation of the transmission signal ( S5 ) from the complex feedback signal ( S8 );
• • Control of a pump radiation source ( PL1 ) as a transmitter with the transmission signal ( S5 );
• • Sending a pump radiation ( LB ) by the pump radiation source ( PL1 ) depending on the transmission signal ( S5 );
• • Use of the filter output signal ( S4 ) to generate the sensor output signal ( out ), where the sensor output signal ( out ) for the purposes of this feature is equal to the filter output signal ( S4 ) can be.

Figure 5

5 corresponds to an extended system of 2 . 3 and 4th can be expanded in an analogous way. Also 5 shows a simple system for an exemplary sub-function of the integrated circuit ( IC ). A signal generator ( G ) shows a transmission signal ( S5 ) and one related to the scalar product that is given by the first multiplier ( M1 ) and the filter and / or integrator ( TP ) is implemented here as an example, to the transmission signal ( S5 ) orthogonal reference signal ( S5 ' ). For the sake of simplicity we assume that the transmit signal ( S5 ) and the orthogonal reference signal ( S5 ' ) are periodic. The filter and / or integrator is then preferred ( TP ) provided with an output memory, which at the end of each period of the period of the transmission signal ( S5 ) samples the reached filter output value immediately before its output and outputs it until the end of the next period. This latch or this sample & hold circuit is in the 15th , 16 , 20th and 21st not shown for the sake of simplicity, but very useful in order to precisely define the temporal integration limits of the scalar product. This also applies to the additional filter and / or integrator ( TP ' ) and the additional first multiplier ( M1 ' ). For the sake of simplicity, it is assumed here that the additional first multiplier ( M1 ' ) has the same properties as the first multiplier ( M1 ). Furthermore, it is assumed that the additional filter and / or integrator (TP ') has the same properties as the filter and / or integrator ( TP ). The pump radiation source ( PL1 ) converts the transmission signal ( S5 ) back into a modulated pump radiation ( LB ), which hits the sensor element directly or indirectly as described above. There this reflected pump radiation excites ( LB ) the paramagnetic centers ( NV1 ) in the material of the sensor element to emit fluorescence radiation ( FL ) at. The first filter ( F1 ) lets the fluorescence radiation ( FL ) due to their fluorescence wavelength, while the modulated pump radiation ( LB ) does not let happen. The fluorescence radiation ( FL ) is correlated, but typically defined out of phase with the pump radiation ( LB ) modulated. This can now be exploited. The modulated fluorescence radiation ( FL ) after passing through the first filter ( F1 ) from the recipient ( PD1 ) received and converted into a modulated received signal ( S0 ) converted. The recipient may include ( PD1 ) further amplifiers and filters. A first adder ( A1 ) subtracts a complex feedback signal ( S8 ) from the received signal ( S0 ). The result is the reduced received signal ( S1 ). This reduced received signal ( S1 ) is now processed further in two synchronous demodulators.

First synchronous demodulator

A first multiplier ( M1 ) multiplies the reduced received signal ( S1 ) with the transmission signal ( S5 ) and thus forms the filter input signal ( S3 ). In the filter and / or integrator ( TP ) the DC component of the filter input signal is allowed through. The result is the filter output signal ( S4 ) as the output signal of the filter and / or integrator ( TP ). Formally, the first multiplier forms ( M1 ) and the filter and / or integrator ( TP ) a scalar product of the reduced received signal ( S1 ) and the transmission signal ( S5 ). The value of the filter output signal ( S4 ) then indicates how much of the transmission signal ( S5 ) proportionally in the reduced received signal ( S1 ) is available. This filter output signal ( S4 ) can be compared with a Fourier coefficient in its function. A second multiplier ( M2 ) multiplies the filter output signal ( S4 ) with the transmission signal ( S5 ) and thus forms the feedback signal ( S6 ). Is the gain of the filter and / or integrator ( TP ) very large, the reduced received signal contains ( S1 ) typically no part of the transmit signal apart from a control error in stability ( S5 ) more. The value of the filter output signal ( S4 ) is then a measure of the amplitude of the fluorescence radiation ( FL ) that the recipient ( PD1 ) reached. This Receiver output signal ( S4 ) is then used as the sensor output signal ( out ) is output via one of the lead frame surfaces using a bond wire.

Second synchronous demodulator

An additional first multiplier ( M1 ' ) multiplies the reduced received signal ( S1 ) with the orthogonal reference signal ( S5 ' ) and thus forms the additional filter input signal ( S3 ' ). In the additional filter and / or integrator ( TP ' ) the DC component of the additional filter input signal ( S3 ' ) let through. The result is the additional filter output signal ( S4 ' ) as the output signal of the additional filter and / or integrator ( TP ' ). Formally, the additional first multiplier ( M1 ' ) and the additional filter and / or integrator ( TP ' ) a scalar product of the reduced received signal ( S1 ) and the orthogonal reference signal ( S5 ' ). The value of the additional filter output signal ( S4 ' ) then indicates how much of the orthogonal reference signal ( S5 ' ) proportionally in the reduced received signal ( S1 ) is available. This additional filter output signal ( S4 ' ) can be compared in its function with another Fourier coefficient. An additional second multiplier ( M2 ' ) multiplies the additional filter output signal ( S4 ' ) with the orthogonal reference signal ( S5 ' ) and thus forms the additional feedback signal ( S6 ' ). Is the gain of the additional filter and / or integrator ( TP ' ) very large, the reduced received signal contains ( S1 ) typically no part of the orthogonal reference signal except for a control error in stability ( S5 ' ) more. The value of the additional filter output signal ( S4 ) is then a measure of the amplitude of the fluorescence radiation ( FL ) that the recipient ( PD1 ) reached at times when there is no pump radiation ( LB ) from the pump radiation source ( PL1 ) is sent out. This additional receiver output signal ( S4 ' ) is then used as an additional sensor output signal ( out' ) is output via one of the lead frame surfaces using a bond wire. The advantage of this arrangement is that when measuring via the additional sensor output signal ( out' ) the filter ( F1 ) as well as the corresponding first adhesive for attaching the first filter ( F1 ) can be omitted, which further significantly reduces the costs of the system.

This system then implements a method for operating a sensor system and / or quantum technological system, the sensor system and / or quantum technological system having a paramagnetic center ( NV1 ) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system. By means of a transmission signal ( S5 ) there is a modulated emission of a modulated pump radiation ( LB ) in particular by the pump radiation source ( PL1 ) for pump radiation ( LB ). A paramagnetic center ( NV1 ) in a material of a sensor element and / or quantum technological device element generates a modulated fluorescence radiation ( FL ) from the modulated pump radiation ( LB ) depends. As already described, the paramagnetic center is preferably an NV center in a diamond as a sensor element. As also mentioned, the modulated fluorescence radiation ( FL ) typically compared to the modulated pump radiation ( LB ) phase shifted in time. The paramagnetic center ( NV1 ) in the material of the sensor element and / or quantum technological device element therefore lights up after the excitation by the modulated pump radiation ( LB ) and then gives off modulated fluorescence radiation ( FL ) if there is no modulated pump radiation ( LB ) on the paramagnetic center ( NV1 ) is irradiated more in the material of the sensor element and / or quantum technological device element. This afterglow is caused by the additional sensor output signal ( out' ) represented here. The modulated fluorescence radiation is thus received ( FL ) and generating a received signal ( S0 ). To determine the afterglow, the intensity of the modulated fluorescence radiation is determined ( FL ) of the paramagnetic center ( NV1 ) in the material of the sensor element at times when the modulated emission of the modulated pump radiation ( LB ) in particular by the pump radiation source ( PL1 ) for pump radiation ( LB ) not taking place. The corresponding dimension is the value of the additional sensor output signal ( out' )

A second adder ( A2 ) sums the feedback signal ( S6 ) and the additional feedback signal ( S6 ' ) to the complex feedback signal ( S8 ) whereby the control loop is closed. The sign and the gain of the filter and / or integrator ( TP and TP ' ) are chosen in such a way that stability is established in the control loop and essentially the reduced received signal ( S1 ) no components of the complex feedback signal ( S8 ) and the transmission signal ( S5 ) contains more except for system noise and control errors.

Figure 6

6 shows a system of 2 without the first filter ( F1 ) and without the first glue. Its basic structure corresponds to a system 5 .

In the system of 6 it is thus a sensor system and / or quantum technological system, the sensor system and / or quantum technological system having a paramagnetic center ( NV1 ) in the material of a Sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system, and wherein the sensor system and / or quantum technological system is a pump radiation source ( PL1 ) for pump radiation ( LB ), in particular an LED or a laser. The from the pump radiation source ( PL1 ) pump radiation emitted at the beginning ( LB ) causes the paramagnetic center ( NV1 ) to emit fluorescence radiation ( FL ). This is out of phase with the pump radiation ( LB ). The sensor system and / or quantum technological system therefore includes means ( PD1 , A1 , M1 , TP , M2 , A2 , G , M1 ' , TP ' , M2 ' ), for example the 5 , which at second times, which are different from the first times, the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) to capture. For example, the pump radiation ( LB ) by a PWM signal as a transmit signal ( S5 ) be modulated with an exemplary duty cycle of 50%. The orthogonal reference signal ( S5 ' ) then, for example, a PWM signal with 50% duty cycle is also preferred, which is preferably 90 ° compared to the transmission signal ( S5 ) is out of phase when the level of the transmitted signal ( S5 ) and the orthogonal reference signal ( S5 ' ) are symmetrical around 0, e.g. jumping back and forth between 1 and -1. If the levels are 1 and 0, the orthogonal reference signal ( S5 ' ) preferably 180 ° against the transmission signal ( S5 ) shifted, i.e. compared to the transmission signal ( S5 ) inverted. Other combinations of orthogonality (eg different frequencies) are conceivable. In the case of the level definition with 0 and 1, the operation of LEDs or lasers as pump radiation source ( PL1 ) particularly advantageous. For example, accordingly 21st generated additional sensor output signal ( out' ) then represents a value for the fluorescence radiation ( FL ) of the paramagnetic center s ( NV1 ) at times when there is no pump radiation ( LB ) is sent out. Since the time course of the afterglow of the paramagnetic centers ( NV1 ) is known and thus the phase shift is predetermined, this value depends on the additional sensor output signal ( out' ) is represented, then by the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) and thus, for example, from which this fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) influencing magnetic flux at the location of the paramagnetic center ( NV1 ) from. The advantage is that in this way only three components have to be installed in the housing.

Figure 7

If the direction of the crystal direction of the sensor element, for example a diamond crystal with NV centers as paramagnetic centers, is misaligned with respect to the direction of the magnetic flux density B (de-calibration), a poor quantum number is used, which leads to a mixture of the quantum states and thus to a decrease the intensity of the fluorescence radiation ( FL ) leads. An additional magnetic field is applied which does not point in the direction of the first direction of the crystal axis. If the magnetic flux density is aligned with certain crystal axes, resonances occur. In this context, reference is made to the German patent application that was unpublished at the time of filing this disclosure DE 10 2018 127 394.0 , the disclosure content of which is a full part of this disclosure. Resonance points (peaks) are only recognizable when the direction of the magnetic field is aligned with the crystal axis. 7th shows the course resulting from decalibration of the alignment (i.e. a different first and second direction). Only then is any orientation of the magnetic field possible. How easy in the 7th can be seen, the dependence between the magnetic flux density B and the fluorescence is greatest in an optimal operating point range. A bias field can be superimposed on the field to be measured by means of an additional permanent magnet and / or an electrical coil that is energized, thereby maximizing the change in fluorescence.

A non-alignment of the first direction with respect to the second direction can be recognized from the fact that essentially no resonances occur. Of course, you can always align the magnetic field so that these resonances occur. However, if a device is intended and suitable for measuring magnetic fields in which the first and second directions do not match, then it is also within the scope of the corresponding claims if their other features apply, even if they are in a certain magnetic field direction has the said resonances.

By avoiding the resonance cases, the curve of FIG 7th which is then also bijective and can therefore be calibrated in these areas. Only then will it be possible to mass-produce a measuring system.

Figure 8

28a again shows the resulting course of Fluorescence intensity of the fluorescence radiation ( FL ) of the paramagnetic center ( NV1 ) when decalibrating the alignment. The figure corresponds to the 7th . Only then is any orientation of the magnetic field possible. How easy in the 8th can be seen, is the relationship between the magnetic flux density B and the fluorescence intensity of the fluorescence radiation ( FL ) largest in an optimal operating point range. A bias field can be superimposed on the field to be measured by means of an additional permanent magnet and / or an electrical compensation coil (LC) that is energized, whereby the change in the fluorescence radiation intensity is maximized.

A non-alignment of the first direction with respect to the second direction can be recognized from the fact that no resonances occur. Of course, you can always align the magnetic field so that these resonances occur. However, if a device is intended and suitable for measuring magnetic fields in which the first and second directions do not match, then it is also within the scope of the corresponding claims if their other features apply, even if they are in a certain magnetic field direction has the said resonances.

Avoiding the resonance cases thus results in the curve of, which falls monotonically over wide areas 8a which is then also bijective and therefore calibratable. Only then will it be possible to mass-produce a measuring system.

A differentiation of the curve of the 8a according to the magnetic flux density B approximately gives the curve of 8b . The optimum working point with the greatest sensitivity is clearly visible.

The actual operating point of a sensor system is preferably placed above this optimal operating point in order to ensure that the control always reacts with the correct sign. The distance between the selected working point and the optimal working point is preferably chosen depending on the respective application so that a jump in the current system status from the area to the right of the optimal working point to a new system status to the left of the optimal working point is caused by a jump in an externally superimposed one magnetic flux density is unlikely.

Figure 9

9 shows the setting of the optimum operating point by means of an operating point control signal (S9), which is slowly readjusted by means of a controller (RG), for energizing a compensation coil (LC), which sets the magnetic flux density B at the location of the paramagnetic center ( NV1 ) readjusts.

Figure 10

10 shows the basic sensor system claimed here, which is then further refined in the following figures. The pump radiation source ( PL1 ) emits pump radiation ( LB ) depending on a transmission signal ( S5 ). The pump radiation ( LB ) meets the paramagnetic center ( NV1 ) within the sensor element. The paramagnetic center ( NV1 ) is dependent on the intensity of the pump radiation ( LB ) and the magnitude of the magnetic field B at the location of the paramagnetic center ( NV1 ) to emit fluorescence radiation ( FL ).

The fluorescence radiation ( FL ) typically a fluorescence wavelength to that of the pump wavelength of the pump radiation ( LB ) differs. The paramagnetic center is preferably ( NV1 ) around an NV center in Diamant. A sensor element can be such a diamond. However, there can also be several diamonds and / or diamond powder and / or nanodiamonds. The sensor element preferably comprises several paramagnetic centers. The paramagnetic centers are preferably present in a particularly high density.

A first filter ( F1 ) is preferred for fluorescence radiation ( FL ) transparent to the extent that its absorption effect in relation to the fluorescent radiation ( FL ) can be neglected with regard to the technical effect to be achieved.

A first filter ( F1 ) is preferred for pump radiation ( LB ) not transparent to the extent that its transmission effect in relation to the pump radiation ( LB ) can be neglected with regard to the technical effect to be achieved.

Thus essentially only fluorescence radiation reaches ( FL ) the recipient ( PD1 ). This converts the amplitude modulation of the intensity of the fluorescence radiation ( FL ) into a received signal ( S0 ) around. In a first multiplier ( M1 ) the received signal ( M1 ) with the transmission signal ( S5 ) or one from the transmission signal ( S5 ) For example, the signal derived from the delay to the filter input signal ( S3 ) mixed. A filter that is preferably a filter and / or integrator ( TP ), filters the filter input signal to a filter output signal ( S4 ).

The signal generator ( G ) generates the transmission signal ( S5 ). At the transmit signal ( S5 ) it can be, for example, a PWM signal with a 50% duty cycle. The broadcast signal ( S5 ) typically has a DC signal component, which can also be 0. The broadcast signal ( S5 ) has a transmission signal period. Preferably on End of the transmission signal period before the occurrence of an edge of the transmission signal ( S5 ) the signal generator generates ( G ) a trigger signal ( STR ). The trigger signal ( STR ) preferably has a first signal state and a second signal state. The trigger signal is in the first signal state during a transmission signal period. Only at the end of the transmit signal period of the transmit signal ( S5 ) brings the signal generator ( G ) the trigger signal ( STR ) to the second signal state.

The hold circuit ( S&H ) (English Sample & Hold) saves the trigger signal during the phase of the second signal state ( STR ) last applied value of the filter output signal ( S4 ) for the duration of the pending first signal state of the trigger signal ( STR ). Only with the transition of the trigger signal ( STR ) from the first signal state to the second signal state is typically the hold circuit ( S&H ) transparent and the sensor output signal ( out ) follows in this phase a trigger signal in the second signal state ( STR ) the filter output signal ( S4 ). With the transition of the trigger signal ( STR ) from the second signal state to the first signal state the hold circuit freezes ( S&H ) the level of the sensor output signal ( out ) until there is another transition from the first signal state to the second signal state of the trigger signal ( STR ) entry. This increases the chopper frequency of the transmission signal ( S5 ) massively suppressed. This suppression can be up to 60dB. Without this holding circuit, a 10th order filter would be used as a filter and / or integrator ( TP ) necessary to achieve the same effect. The suppression is stronger, the shorter the duration of the phase of the second signal state of the trigger signal ( STR ) is relative to the transmit signal period. The phase of the second signal state of the trigger signal is preferably ( STR ) at the end or almost at the end of a transmission signal period. This temporal placement of the phase of the second signal state of the trigger signal ( STR ) at the end or almost at the end of a transmission signal period has the advantage that an unavoidable low-pass characteristic of the pump radiation source ( PL1 ), the paramagnetic center ( NV1 ) and the recipient ( PD1 ) and possibly other elements in the signal path have a smaller effect at the end of a transmission signal period. Is the filter and / or integrator ( TP ) an integrator, the holding circuit ensures that the indefinite integral that the integrator forms becomes a definite integral, with the phase of the second signal state of the trigger signal ( STR ) at the end or almost at the end of a transmission signal period, the integration then runs from 0 to 2π over a transmission signal period. For example, it can easily be calculated that the integral of sin (ω) cos (ω) only disappears if integration is only ever carried out over a whole period. The error that otherwise occurs leads to a massively reduced signal-to-noise ratio and a loss of up to 60dB resolution.

Figure 11

11 equals to 2 . The 2 is about the hold circuit ( S&H ) and the trigger signal ( STR ) added. The 11 also corresponds to the 10 . The 10 is around the second multiplier ( M2 ) added. The second multiplier ( M2 ) mixes the sensor output signal ( out ) with the transmission signal ( S5 ) to the feedback signal ( S6 ). The feedback signal is preferably complementary to the transmission signal ( S5 ) educated. This can be done by adding the multiplication with a suitable sign and a suitable offset, which is not shown for the sake of simplicity. The feedback signal ( S6 ) is in the first adder ( A1 ) from the received signal ( S0 ) deducted. The first adder ( A1 ) thus forms the reduced received signal ( S1 ) that as the input signal for the first multiplier ( M1 ) instead of the received signal ( S0 ) in 10 is now used. Due to the complementary design of the feedback signal ( S6 ) in the steady state of the control, there is preferably essentially a constant signal as a reduced received signal ( S1 ). The interference caused by the said low-pass properties of the pump radiation source ( PL1 ), Recipient ( PD1 ) and the paramagnetic center can initially be neglected in this consideration.

Figure 12

Shows in an analogous manner 12th the system of 3 supplemented by the hold circuit ( S&H ) and the trigger signal ( STR ).

Figure 13

Shows in an analogous manner 13 the system of 4th supplemented by the hold circuit ( S&H ) and the trigger signal ( STR ).

Figure 14

Shows in an analogous manner 14th the system of 5 supplemented by the hold circuit ( S&H ) and the trigger signal ( STR ).

Figure 15

Shows in an analogous manner 15th the system of 6 supplemented by the hold circuit ( S&H ) and the trigger signal ( STR ).

Figure 16

Shows in an analogous manner 16 the system of 9 supplemented by the hold circuit ( S&H ) and the trigger signal ( STR ).

List of reference symbols

A1

first adder;

A2

second adder;

BA1

first barrier;

BA2

second barrier;

F1

first filter. The first filter is transparent to the fluorescence radiation ( FL ) the paramagnetic centers ( NV1 ) in the material of the sensor element. This is preferably the fluorescence radiation of an NV center, the sensor element preferably being a nano-diamond with diamond as the material;

FL

Fluorescence radiation of the paramagnetic centers ( NV1 ) in the material of the sensor element. This is preferably the fluorescence radiation of an NV center, the sensor element preferably being a nano-diamond with diamond as the material;

G

Signal generator;

Ge

Fixing means with which the sensor element with the paramagnetic centers ( NV1 ) in the material of the sensor element on the first filter ( F1 ) and / or on the integrated circuit ( IC ) and / or at the pump radiation source ( PL1 ) is attached. The fastening means is preferably transparent to fluorescent radiation ( FL ) of the paramagnetic centers ( NV1 ) in the material of the sensor element. The fastening means is preferably transparent for the fluorescent radiation ( FL ) of the paramagnetic centers ( NV1 ) in the material of the sensor element. The fastening means is preferably transparent for the pump radiation ( LB ) the pump radiation source ( PL1 ).

IC

integrated circuit;

L1

first coil. The first coil is an optional element that is preferably part of the integrated circuit ( IC ) and can generate a magnetic field. The first coil is preferably energized by the integrated circuit.

LB

Pump radiation;

M1

first multiplier;

M1 '

additional first multiplier;

M2

second multiplier;

M2 '

additional second multiplier;

NV1

paramagnetic center in the material of the sensor element. The paramagnetic centers radiate when irradiated with pump radiation ( LB ) the pump radiation source ( PL1 ) Fluorescence radiation ( FL ) from. This fluorescence radiation from a parametric center typically depends on the magnetic flux density at the location of the respective paramagnetic center. The crystal orientation of the material of the sensor element can typically determine this radiation and the dependence of this radiation of the fluorescence radiation ( FL ) from the magnetic flux B. The paramagnetic center is preferably an NV center. The material is preferably diamond. The sensor element is preferably a diamond crystal, even more preferably a diamond nanocrystal. It can also be several crystals with several paramagnetic centers, for example several diamond crystals with several NV centers and / or other suitable impurities;

OF

Matching circuit;

out

Sensor output signal;

out'

additional sensor output signal;

PD1

Receiver. The receiver is for the fluorescence radiation ( FL ) of the paramagnetic centers ( NV1 ) sensitive in the material of the sensor element. It is preferably fluorescent radiation ( FL ) an NV center, the sensor element preferably being a nano-diamond with diamond as the material. The receiver is preferably part of the integrated circuit ( IC ). It is preferably a photodiode. It can be, for example, an APD (avalanche photo diode) or a SPAD (single photo avalanche diode), etc.;

PL1

Pump radiation source. It is preferably an LED. It can consist of another suitable radiation source, such as a laser diode or another suitable light source. The pump radiation source emits pump radiation ( LB ), which are the paramagnetic centers ( NV1 ) in the material of the sensor element to emit fluorescence radiation ( FL ) stimulates;

PLK

Compensation radiation source. The compensation radiation source can also be an LED or a laser diode or another suitable light source;

S0

Received signal;

S1

reduced received signal;

S3

Filter input signal;

S3 '

additional filter input signal;

S4

Filter output signal;

S4 '

additional filter output signal;

S5

Transmit signal;

S5 '

orthogonal reference signal;

S6

Feedback signal;

S6 '

additional feedback signal;

S7

Compensation transmission signal;

S8

complex feedback signal;

STR

Trigger signal;

S&H

Hold circuit (English sample & hold circuit);

S&H '

additional hold circuit (sample & hold circuit);

TP

Filters, in particular a low-pass filter and / or integrator;

TP '

additional filter, in particular an additional low-pass filter and / or additional integrator;

List of scriptures cited

• DE 10 2017 122 365 B3 ,
• DE 10 2018 127 394 .0 ;
• DE 10 2019 114 032.3
• EP 1490 772 B1 ,

QUOTES INCLUDED IN THE DESCRIPTION

This list of the documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Patent literature cited

• DE 102019120076 [0001]
• DE 102019121137 [0002]
• DE 102018127394 [0009, 0040, 0061]
• DE 102017122365 B3 [0061]
• DE 102019114032 [0061]
• EP 1490772 B1 [0061]

Claims (11)

Circuit, in particular integrated circuit (IC), for use with a paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element with a driver for operating a pump radiation source (PL1) for emitting pump radiation (LB); with a receiver (PD1), - for the selective detection of fluorescence radiation (FL) of the paramagnetic center (NV1), - wherein the receiver (PD1) is provided to essentially not detect the pump radiation (LB) in terms of said selectivity, and with an evaluation circuit (M1, TP, M2, S&H, G) - to generate a sensor output signal (out), - which depends on the fluorescence radiation (FL) of the paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element, with a holding circuit (S&H), - The holding circuit having an input and an output, and - The holding circuit (S&H) is connected in the signal path between the receiver (PD1) and the sensor output signal (out) and - The holding circuit (S&H) holding its output signal at its output essentially constant in the first time periods and. - The holding circuit (S&H) changing its output signal at its output as a function of the signal at its input in second time periods which are different from the first time periods. Circuit after Claim 1 - the sensor element and / or quantum technological device element being a diamond crystal and / or - the paramagnetic center (NV1) being an NV center and / or an ST1 center in the diamond crystal. Method for operating a sensor system and / or quantum technology system wherein the sensor system and / or quantum technological system comprises a paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element that is part of the sensor system and / or quantum technological system, comprehensive the steps Sending a modulated pump radiation (LB), modulated by means of a transmission signal (S5), in particular by a pump radiation source (PL1) for pump radiation (LB); Generating a modulated fluorescence radiation (FL) by means of a paramagnetic center (NV1) in a material of a sensor element and / or quantum technological device element, which depends on the modulated pump radiation (LB); Receiving the modulated fluorescence radiation (FL) and generating a received signal (S0); Correlation of the reception signal (S0) with the transmission signal (S5), in particular with the aid of a synchronous demodulator, and formation of a filter output signal (S4), the filter output signal (S4) depending on the intensity of the correlation of the modulation of the fluorescence radiation (FL) with the transmission signal (S5 ) depends; Sampling of the filter output signal (S4), in particular by means of a hold circuit (S&H), while determining a sequence of sampling values and Use of the sequence of the sampled values as the sensor output signal (out); Method for operating a sensor system and / or quantum technology system according to Claim 3 The correlation takes place with the steps of forming a feedback signal (S6) as a function of the sensor output signal (out) and the transmission signal (S5), the feedback signal (S6) having a signal component that is modulated complementarily to a signal component of the transmission signal (S5) ; Subtracting the feedback signal (S6) from the received signal (S0) to the reduced received signal (S1); Multiplication of the reduced received signal (S1) by the transmitted signal (S5) to form the filter input signal (S3); Filtering the filter input signal (S3) with a filter and / or integrator (TP) to form the filter output signal (S4). Method for operating a sensor system and / or quantum technology system according to Claim 4 , whereby the formation of a feedback signal (S6) as a function of the sensor output signal (out) and the transmission signal (S5) by multiplying the sensor output signal (out) with the transmission signal (S5) for the feedback signal (S6), possibly combined with the multiplication of a suitable sign and possibly combined with the addition of a suitable offset. Method for operating a sensor system and / or quantum technology system according to Claim 4 and / or 5 wherein the correlation is carried out with the steps of multiplying the received signal (S0) with the transmitted signal (S5) to form the filter input signal (S3); Filtering and / or integrating the filter input signal (S3) with a filter and / or integrator (TP) to form the filter output signal (S4), the filter output signal possibly being multiplied by a factor of -1; Sampling of the filter output signal (S4), in particular by means of a hold circuit (S&H), while determining a sequence of sampling values and Use of the sequence of samples as sensor output signal (out); Multiplication of the sensor output signal (out) with the transmission signal (S5) to form the feedback signal (S6); Controlling a compensation radiation source (PLK) with the feedback signal (S6); Emitting a compensation radiation (KS) by the compensation radiation source (PLK) as a function of the feedback signal (S6); Radiation of compensation radiation into the receiver (PD1); Superimposing, in particular summarily superimposing, receiving of the fluorescence radiation (FL) and the compensation radiation (KS) in the receiver (PD1) and formation of the received signal (S0) as a function of this superposition. Procedure ( 13 ) for operating a sensor system and / or quantum technological system, the sensor system and / or quantum technological system comprising a paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element, which is part of the sensor system and / or quantum technological system, comprising the steps By means of a compensation transmission signal (S7), modulated emission of a modulated compensation radiation (KS), in particular by a compensation radiation source (PLK); Generating a modulated fluorescence radiation (FL) by means of a paramagnetic center (NV1) in a material of a sensor element and / or quantum technological device element, which depends on a modulated pump radiation (LB) and possibly further parameters, in particular the magnetic flux density B; Superimposing, in particular summarily superimposing, receiving the modulated fluorescence radiation (FL) and the compensation radiation (KS) and generating a received signal (S0) as a function of this superposition; Correlation of the received signal (S0) with the compensation transmission signal (S7), in particular with the aid of a synchronous demodulator, and formation of a filter output signal (S4); Sampling the filter output signal (S4), in particular by means of a hold circuit (S&H), determining a sequence of sampled values and using the sequence of sampled values as the sensor output signal (out); Generating a complex feedback signal (S8) modulated with the compensation transmission signal (S7) with the aid of the sensor output signal (out). Forming the transmission signal (S5) from the transmission pre-signal (S8), in particular by offset addition and / or power amplification; Controlling a pump radiation source (PL1) with the transmission signal (S5); Emitting a pump radiation (LB) through the pump radiation source (PL1) for pump radiation (LB), in particular through an LED and / or a laser, as a function of the transmission signal (S5); Procedure according to Claim 7 the correlation being carried out with the steps of multiplying the received signal (S0) with the compensation transmission signal (S7) to form the filter input signal (S3); Filtering and / or integrating the filter input signal (S3) with a filter and / or integrator (TP) for the filter output signal (S4), in particular the filter output signal can be multiplied by a factor of -1. Procedure according to Claim 7 and / or 8 The complex feedback signal (S8) is formed by multiplying the filter output signal (S4) with the compensation transmission signal (S7) to form the transmission pre-signal (S8). Method for operating a sensor system and / or quantum technology system wherein the sensor system and / or quantum technological system comprises a paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element which is part of the sensor system and / or quantum technological system, comprising the steps Sending a modulated pump radiation (LB), modulated by means of a transmission signal (S5), in particular by a pump radiation source (PL1) for pump radiation (LB); Generating a modulated fluorescence radiation (FL) by means of a paramagnetic center (NV1) in a material of a sensor element and / or quantum technological device element, which depends on the modulated pump radiation (LB); Receiving the modulated fluorescence radiation (FL) and generating a received signal (S0); Determination of the intensity of the modulated fluorescence radiation (FL) of the paramagnetic center (NV1) in the material of the sensor element in the form of a filter output signal (S4) at times when the modulated emission of the modulated pump radiation (LB) in particular by the pump radiation source (PL1) for pump radiation ( LB) does not take place; Sampling the filter output signal (S4), in particular by means of a hold circuit (S&H), while determining a sequence of sampled values; Use of the sequence of the sampled values as the sensor output signal (out); Sensor system and / or quantum technological system, the sensor system and / or quantum technological system having a paramagnetic center (NV1) in the material of a sensor element and / or quantum technological device element that Part of the sensor system and / or quantum technology system, includes and wherein the sensor system and / or quantum technology system comprises a pump radiation source (PL1) for pump radiation (LB), in particular an LED and / or a laser, and wherein the pump radiation (LB) is first Times causes the paramagnetic center (NV1) to emit fluorescence radiation (FL) and the sensor system and / or quantum technology system means (PD1, A1, M1, TP, S&H, M2, A2, G, M1 ', TP', S&H ' , M2 '), which at second times, which are different from the first times, - detect the fluorescent radiation (FL) of the paramagnetic center (NV1) in the form of an additional filter output signal (S4') and - the additional filter output signal (S4 ') sample in the form of an additional sequence of additional sample values and - this additional sequence of additional sample values as an additional sensor output signal (out '), which is generated by the fluorescence radiation (FL) of the paramagnet ic center (NV1) depends on these second times and wherein the sensor system and / or quantum technology system comprises further means (S&H ') to the respective signal at the point in the signal path between the received signal (S0) and the additional sensor output signal (out') the insertion of these further means (S&H ') to obtain the additional sequence of additional samples.

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