DE102019105163B3 - Plasma nozzle and plasma device - Google Patents

Abstract

The present invention relates to a nozzle device (100) for bringing together an ionizable gas (102, 105) and a base material (101) in an interaction area (103). The nozzle device (100) has a base body (110) which has a transport channel (111) for guiding a base material (101) along a transport direction (106) to an end region (114) of the base body (110). The main body (110) has a first plasma channel (112) for guiding a first ionizable gas (102) along the transport direction (106) and a second plasma channel (113) for guiding a second ionizable gas (105) along the transport direction (106) . The base body (110) has a fastening area (135) for an electrode device (150) such that the first ionizable gas (102) in the first plasma channel (112) and the second ionizable gas (105) in the second plasma channel (113) are ionizable. A nozzle element (120) is coupled to the end region (114) of the base body (110), the nozzle element (120) having a corresponding transport channel 111 and corresponding nozzle outlets (122, 123) for guiding the corresponding ionizable gases (102, 105) ) in such a way that the ionizable gases (102, 105) can flow into the interaction area (103) for reaction with the base material (101).

Description

Technical area

The present invention relates to a nozzle device and a method for bringing together ionizable gases and substances or base material in a process area or interaction area. The present invention also relates to a system for generating chemical and / or physical processes such as generating or recycling a powder from a substance.

Background of the invention

Complex components, especially in the production of small parts and in prototype production, are increasingly being manufactured using additive manufacturing processes. Using additive manufacturing processes, for example, a material is applied layer by layer, creating three-dimensional complex components. The layer-wise build-up is computer-controlled from one or more liquid or solid, in particular powdery, materials. During the construction, physical and chemical processes for the remelting and hardening process take place. Typical materials for 3D printing are plastics, synthetic resins, ceramics and metals. In the meantime, carbon and graphite materials have also been developed for additive manufacturing processes.

For additive manufacturing processes, it is necessary to provide powder as the base material, whereby the particles of the powder should be homogeneous. In particular, it is important to make the particles of the powder small in order to produce filigree components with smooth surfaces using additive manufacturing.

It is known to use plasma-based processes to produce fine powders from a substance or base material. In a plasma atomization process, the base material is melted and atomized by means of an ionized plasma jet. The individual powder particles produced with the plasma atomization process are extremely homogeneous and spherulitic.

The spherulitic powder particles produced in this way can then be used, for example, for additive manufacturing or for further use as reactants with other materials.

U.S. 5,707,419 A discloses a cooling chamber in which three plasma torches are coupled to intersect respective plasma jets at a vertex inside the cooling chamber. In this vertex a wire will be inserted from a wire turn so that it is melted in the vertex.

WO 2015/135075 A1 discloses a method and apparatus for producing powder particles by atomizing a wire. The wire is placed in a plasma torch. A front part of the wire is moved from the plasma torch into an atomizing nozzle of the plasma torch. A leading end of the wire is melted on the surface by the action of one or more plasma jets formed in the atomizing nozzle.

DE 10 2006 044 906 A1 discloses a plasma torch for producing coatings on surfaces and / or for producing nano-powders. The plasma torch has a plurality of cathodes arranged symmetrically about a central longitudinal axis of the torch and surrounding plasma feeds. A collecting anode is arranged centrally to the central axis downstream for generating a corresponding number of arcs between the cathodes and the collecting anode. With a central material feed, powder injection is made possible between the cathode attachment and the anode base of the arc.

DE 10 2007 041 329 A1 discloses a plasma torch with axial powder injection and with at least two separate cathodes and a ring anode arranged concentrically around the powder injection channel. For the temporary division of an arc into two partial arcs per cathode, the central ring anode is assigned a further ring anode surrounding it at a distance.

US 2013/157040 A1 discloses a system and method for producing thermal spray coatings on a substrate from a liquid suspension. The system comprises a thermal spray burner for generating a plasma and a sub-system for delivering a liquid suspension for delivering the liquid suspension with particles to the plasma in order to generate a plasma outflow. A nozzle can create an envelope of inert or reactive gas that completely surrounds the plasma effluent.

In addition to the production of appropriate powder materials, a chemical and / or physical process between substances can also generally be brought about by means of plasma jets.

In order to bring the plasma jets and the substance or the base material together in an apex, complex and multi-part devices are currently provided.

Presentation of the invention

It is an object of the present invention to provide a device for the interaction of one or more substances or base materials with one or more ionizable gases which has a low complexity and a small installation space.

This object is achieved with a nozzle device for bringing together ionizable gases and a base material (or a substance), a system for chemical and / or physical treatment of a base material of the product, such as a powder from a base material, and a method for combining a ionized gas and a base material according to the independent claims.

According to a first aspect of the invention, a nozzle device for bringing together an ionizable gas and a base material in an interaction area or reaction area is provided. The nozzle device initially has a base body which has a transport channel for guiding a substance or a base material along a transport direction to an end region of the base body. The main body also has a first plasma channel for guiding a first ionizable gas along the direction of transport and a second plasma channel (which is spaced from the first plasma channel) for guiding a second ionizable gas along the direction of transport. In the end area of the main body, the first plasma channel has a first gas outlet and the second plasma channel has a second gas outlet.

The base body also has a coupling area for an electrode device such that the first ionizable gas in the first plasma channel and the second ionizable gas in the second plasma channel can be ionized.

Furthermore, the nozzle device has a nozzle element which is coupled to the base body at the end region thereof. The nozzle element has a further transport channel which is coupled to the transport channel in such a way that the base material can be transferred from the base body into an interaction area or reaction area outside the nozzle element along the direction of transport. Furthermore, the nozzle element has a first nozzle outlet which is coupled to the first plasma channel and a second nozzle outlet which is coupled to the second plasma channel.

The first nozzle outlet for guiding the first ionizable gas and the second nozzle outlet for guiding the second ionizable gas are designed such that the first ionizable gas and the second ionizable gas can flow into the reaction region for reaction with the base material.

According to a further aspect of the present invention, a method for bringing together an ionized gas and a substance or base material in a process or interaction area with the nozzle device described above is shown. The method initially has the step of guiding the base material in the transport channel along a transport direction to an end region of the base body, guiding the first ionizable gas along the transport direction in the first plasma channel and guiding the second ionizable gas along the transport direction in the second plasma channel . Furthermore, the method has the step of ionizing the first ionizable gas in the first plasma channel and the second ionizable gas in the second plasma channel by means of an electrode device. The base material is transferred in the further transport channel of the nozzle element from the transport channel into the interaction area outside the nozzle element along the transport direction. The first ionized gas is flowed into the interaction area by means of the first nozzle outlet and the second ionized gas is flowed into the interaction area for reaction with the base material by means of the second nozzle outlet.

The substance or the base material is, for example, a solid such as a wire, for example a copper wire, aluminum wire, nickel wire, titanium wire or a tungsten wire. Alternatively, the base material can also be a liquid material or a gaseous material. The base material is intended to react with the ionizable gas or to be melted or vaporized due to the high temperature of the ionizable gas.

An inert gas or argon (Ar), for example, can be used as the ionizable gas which, in a charged state as plasma gas, hits the base material in the interaction area.

The main body consists of a solid material with a high temperature resistance. The base body can for example consist of aluminum oxide, zirconium oxide, SiAlON.

The base body is in particular formed integrally and in one piece and has the transport channel, the first plasma channel and the second plasma channel. In other words, run away several plasma channels and the first one transport channel in an integral one-piece base body. The base body can have one or a plurality of transport channels for one and the same base material or different base materials. The base body can furthermore have exclusively the first and the second plasma channel or a multiplicity of further first second plasma channels, wherein one and the same ionizable gas or a multiplicity of different ionizable gases can be passed through the plasma channels.

The transport direction defines in particular the propulsion or the flow direction of the base material through the base body and through the nozzle element into the interaction area or reaction area.

In particular, the base body has a coupling area for an electrode device. The electrode device can be attached to the base body directly or indirectly, e.g. on a nozzle housing, and provide an energy input into the corresponding first and / or second plasma channel.

The electrode device has, for example, a radiation head which introduces high-frequency radiation into the corresponding plasma channels. Due to the high energy input, the gas in the plasma channels is ionized and transported further along the direction of transport or directed towards the base material immediately after the ionization process.

The electrode device is centrally coupled to the nozzle element and the base body. With the exemplary use of high-frequency radiation and certain energy input, the geometry and alignment of the plasma channels and the position of the nozzle element to the electrode device determine the desired state of the plasma, such as temperature or flow state, when it hits the substance or the base material.

The nozzle element consists of a solid material with a high temperature resistance. The nozzle element can for example consist of aluminum oxide, zirconium oxide, SiAlON. The nozzle element has in particular a further transport channel, a first nozzle outlet and a second nozzle outlet. The nozzle element is attached to an end region of the base body. In particular, the nozzle element is coupled to the base body in such a way that the transport channel and the further transport channel as well as the first nozzle outlet are coupled to the first plasma channel and the second nozzle outlet to the second plasma channel. The nozzle element can, for example, be formed integrally and in one piece with the base body or can be detachably screwed to the base body, for example by means of a screw connection. The first and / or the second nozzle outlet can also have special tapering channels and correspondingly have the smallest cross section at the exit in the direction of the interaction area. Alternatively, the nozzle outlets can each form a Laval nozzle. The nozzle outlets are designed such that the correspondingly ionized gas flows into the interaction area. The further transport channel is designed so that the base material can be guided through the further transport channel of the nozzle element and protrudes into the interaction area. The first nozzle outlet and the second nozzle outlet are designed in particular such that the first ionizable gas and the second ionizable gas meet at an apex in the interaction area. The further transport channel is designed so that the base material also runs through the apex.

The interaction area or reaction area is correspondingly formed outside the nozzle element in the transport direction. The physical and / or chemical process such as a reaction between the base material and the ionizable or ionized gas takes place in the interaction area. The temperature at the apex can be set on the basis of the energy input into the ionizable gas, the outflow angle of the ionizable gas from the corresponding nozzle outlet and on the basis of the flow velocity of the outflowing ionizable gas. The temperature at the apex can, for example, due to the ionized gas and / or due to an exothermic reaction of the ionized gas with the base material, have a temperature of over 1000 ° C., in particular.

Due to the temperature and other parameters such as gas composition, a physical and / or a chemical process can be generated between the ionized gas and the base material. Alternatively or in addition, the base material is automated due to the temperature of the ionized gas and melted into small, in particular spherical drops. In a subsequent cooling process, the molten droplets can be solidified into particles, so that a powder, which is necessary for additive manufacturing, for example, is provided.

With the present nozzle device for bringing together an ionizable gas with a base material, a desired process can be provided without complex equipment, since the necessary supply lines or Channels are present integrally in the base body and the nozzle element. With the nozzle device, a combined nozzle-waveguide electrode is created, so to speak. The connection from the supply reservoir and the coupling of an electrode device are thus sufficient to bring about a desired process.

With the nozzle device according to the invention, the ionizable gases and the base material are brought into the desired state due to their physical and / or chemical properties. By means of the nozzle device and its geometry, the mass flow rate, the flow of the ionizable gases and the base material is accelerated and / or delayed, and / or expanded and / or rotated and / or rectified, and / or cooled and / or heated accordingly.

According to a further exemplary embodiment, as described above, the base body and the nozzle element are formed integrally. The nozzle element can for example be welded to the base body. In particular, the nozzle element and the base body can be produced together in an additive manufacturing process. Alternatively, the nozzle element and the base body can be produced using a casting process.

According to a further exemplary embodiment, the transport channel is designed as a bore in the interior of the base body. The hole can be made, for example, by means of drilling or milling, or it can be provided during manufacture of the base body using the casting process or additive manufacturing.

According to a further exemplary embodiment, the base body is designed to be rotationally symmetrical, with a central axis of the base body being designed parallel to the transport direction. For example, the base body has a cylindrical shape with a round, oval or polygonal base. The normal of a base area is formed, for example, parallel to the transport direction.

According to a further exemplary embodiment, the transport channel runs along the central axis (axis of rotation) of the base body. The transport channel is thus in the center of the base body and extends in particular in a translatory manner.

According to a further exemplary embodiment, the first nozzle outlet and / or the second nozzle outlet is designed such that the corresponding ionizable gas has a flow direction with a (directional) component that is radial to the central axis.

The direction parallel to the transport direction is defined as the axial direction. The radial direction corresponds to a direction which is formed orthogonal to the axial direction and runs through the central axis or axis of rotation of the base body. The direction of rotation is orthogonal to the axial direction and the radial direction.

With the exemplary embodiment described above, the first or second nozzle outlet is specified in such a way that the ionizable gas flows into the interaction area at a specific angle relative to the transport direction. The angle is defined, for example, between the direction of flow from the corresponding nozzle outlets on the one hand and the axial direction on the other. For example, an angle between the axial direction and the flow direction can be 20 ° to 80 °, in particular 30 °. For example, the nozzle outlets may be off-center, e.g. H. spaced from the central axis nozzle element, are arranged. Due to the angled outflow of the ionizable or ionized gas through the corresponding nozzle outlets, the ionizable or ionized gas flows in the direction of an apex on the center axis of the nozzle element or the base body outside the nozzle device in the process or interaction area in order to be able to interact with the substance or to interact or react with the basic material.

According to a further exemplary embodiment, at least the first nozzle outlet or the second nozzle outlet is designed in such a way that the corresponding ionizable gas has a flow direction with a (directional) component rotating around the central axis. The ionizable gas flowing out is thus given a rotating direction around the central axis. This can produce an improved reaction with the base material in the interaction area or an improved automation of the base material in the interaction area.

The flow direction with a circumferential component (i.e. a component in the circumferential direction) can be generated, for example, by means of a corresponding configuration of the nozzle outlets. In addition, fluid guide elements can be provided which are arranged after the corresponding ionizable gas has emerged and deflect it in a desired direction of rotation.

According to a further exemplary embodiment, at least the second plasma channel is designed as a bore in the interior of the base body. The hole can be made, for example, by means of drilling or milling, or it can be provided during manufacture of the base body using the casting process or additive manufacturing.

The first plasma channel and the second plasma channel can each be formed at a distance from the central axis of the base body. The first plasma channel and the second plasma channel can be at the same distance from the central axis of the main body. Alternatively, the first plasma channel and the second plasma channel can have different distances from the central axis.

According to the present invention, at least the first plasma channel is designed as an open groove along a surface of the base body. The open groove can be made in the base body by means of milling, for example. The ionizable gas flows due to a directed inflow angle into the groove along the same groove. The ionizable gas is easily accessible from the outside through the open groove, in particular for energy input into the electrode device.

According to the present invention, the open groove is at least partially closed with a sleeve which can be plugged over the base body. The sleeve can, so to speak, be plugged or pushed over the base body so that the sleeve rests on the surface of the base body. The open grooves of the corresponding plasma channels can thus be closed. In the coupling area with the electrode device, the open groove can remain free of the sleeve and accordingly not be covered by it. Alternatively, the sleeve can have corresponding openings in the coupling area so that the ionizable gas flowing along the groove can be easily reached through the opening from the electrode device or for the input of energy.

According to a further exemplary embodiment, the main body has a further first plasma channel for guiding a further first ionizable gas along the transport direction and / or a further second plasma channel, which is spaced from the further first plasma channel, for guiding a further second ionizable gas along the transport direction . In the end area of the main body, the further first plasma channel has a further first gas outlet and the further second plasma channel has a further second gas outlet, the further first plasma channel and the further second plasma channel in the main body between the first plasma channel and the second plasma channel on the one hand and the transport channel on the other hand are formed.

Correspondingly, a multiplicity of further first and second plasma channels can be present in the base body and corresponding further nozzle outlets of the nozzle element. In particular, the first or second plasma channel is at a greater distance from the central axis of the main body compared to the further first and further second plasma channels. In other words, the further first and further second plasma channels lie on the central axis and, correspondingly, the transport channel running along this and the first and second plasma channels further outward.

According to a further exemplary embodiment, the nozzle element can be rotated relative to the base body. The nozzle element can be rotatably mounted on the base body, for example by means of a slide bearing or a ball bearing. The corresponding first nozzle outlet and the second nozzle outlet can be designed, for example, as an annular gap in the nozzle element. The corresponding outlets of the plasma channels allow the ionizable gas flowing therein to flow into the annular gaps. Fluid guide elements can also be provided in the annular gaps, so that the rotation of the gas element additionally generates a spin or a rotation of the ionizable gas flowing into the interaction area.

According to a further exemplary embodiment, the nozzle device also has a, in particular disk-shaped, fluid guide element which is coupled to the nozzle element. An annular control channel, which runs around the nozzle element, is formed between the fluid guide element and the nozzle element. The control channel is designed in such a way that the control fluid can flow in or around the interaction area.

The control fluid is, for example, air, nitrogen or an inert gas. The control fluid flows around or into the interaction area. The control channel is designed, in particular, in such a way that the control fluid envelops the ionizable gas flowing into the interaction area and the base material. The fluid pressure of the control fluid can be adjusted in a targeted manner. The level of pressure and / or the speed or the mass throughput of the control fluids controls the local formation of the interaction area or the distance of the interaction area from one end of the nozzle device along the transport direction. The higher the fluid velocity of the control fluid or the higher the fluid pressure of the control fluid, the further away the interaction area in which the apex of the ionized gas and the base material is located is formed.

The fluid guide element can for example by means of a welded connection on the Nozzle element or the base body are attached. Furthermore, the fluid guide element can be formed integrally with the base body or the nozzle element. The fluid guide element extends perpendicular to the transport direction or to the center line, wherein it has a small thickness. The fluid guide element is correspondingly designed in the form of a disk. The fluid guide element can be manufactured additively, for example.

According to a further exemplary embodiment, the fluid guide element is fastened to the nozzle element by means of connecting webs. A corresponding gap is formed between the connecting webs, through which the control fluid can flow into the interaction area.

According to a further exemplary embodiment, the fluid guide element is designed in the form of a disk as described above, the center point of the disk-shaped fluid guide element lying on the central axis of the nozzle element. An extension of the fluid guide element perpendicular to the central axis is greater than the extension along the central axis. In particular, the fluid guide element forms a rotationally symmetrical body with the central axis of the base body and / or of the nozzle element.

According to a further exemplary embodiment, the fluid guiding element has fluid guiding webs for guiding the control fluid in the direction of the control channel. The fluid guide webs form elevations along the surface of the fluid guide element. The fluid webs can run parallel along the transport direction. Furthermore, the fluid guide webs can have a directional component along the circumferential direction, so that a spin or a rotation of the control fluid is generated about the center line.

According to a further exemplary embodiment, the nozzle device has a nozzle housing with an outlet opening, the base body and the nozzle element being arranged in the nozzle housing in such a way that one end of the further transport channel, the first nozzle outlet and the second nozzle outlet are in the outlet opening and the interaction area is outside of the nozzle housing is present. In other words, the ionizable gas and the base material are passed through the outlet opening along the direction of transport so that the interaction area and, accordingly, the apex is outside the housing.

According to a further exemplary embodiment, the nozzle housing has a coupling connection for the electrode device, the coupling connection providing access to the first plasma channel and / or the second plasma channel. For example, the electrode device can be attached to the coupling connection by means of a screw connection or a clamp connection. Furthermore, the coupling connection provides an opening in the housing so that direct access to the corresponding first or second plasma channel is possible.

According to a further exemplary embodiment, the nozzle housing has a plasma gas inlet for coupling to a first gas reservoir, the plasma gas inlet being coupled to at least the first plasma channel.

According to a further exemplary embodiment, the nozzle housing has a further plasma gas inlet for coupling to a second gas reservoir, the further plasma gas inlet being coupled to the second plasma channel.

According to a further exemplary embodiment, the nozzle housing has a further input for coupling to a further fluid reservoir, the further input allowing the control fluid to flow in so that it flows along the transport direction in the direction of the fluid guide element

According to a further aspect of the present invention there is provided a system for chemically and / or physically treating a base material, e.g. for generating chemical and / or physical processes on the base material, e.g. for producing or recycling a powder from a substance or a base material. The system has the nozzle device described above and a housing for receiving the nozzle device. The nozzle device is coupled to the housing in such a way that the interaction area is present in the housing.

With the system, for example, the base material can be brought together with the ionized plasma gas in the interaction area, so that chemical reactions or physical interactions are generated there under high temperature and pressure. Furthermore, the ionized plasma gases can be the base material, such as a solid body, e.g. Wire, ablate to generate fine-dust powder from the base material.

The housing has an inner volume in which the process or interaction area is present. The interaction area is thus protected from external influences. Furthermore, the housing can be filled with inert gas in order to influence contamination of the reaction components in the reaction space. When used as a powder generation system, the housing can also serve as a collecting basin and / or as a separator for the powder generated.

The housing can, for example, be designed to be rotationally symmetrical. A central axis of the housing can be formed parallel to the transport direction. For example, the housing has a hollow cylindrical shape with a round, oval or polygonal base. The normal of a base area is formed, for example, parallel to the transport direction. In particular, the housing is designed such that the center line of the housing is coaxial with the center line of the nozzle element or of the base body.

The housing can, for example, have a flange to which the nozzle device can be attached. For example, the nozzle housing or the fluid guide element can serve as a fastening element with the housing. Alternatively, the housing and the nozzle device can be manufactured integrally and in one piece, for example by means of additive manufacturing.

The housing serves as a flow body and contains a flow chamber. The nozzle element, which accordingly contains the openings of the further transport channel and the nozzle outlets, is fastened to an end opposite the transport direction. The nozzle device thus forms a nozzle base of the flow body. The nozzle base can have one, two or more nozzle devices.

According to a further exemplary embodiment, the housing has a fluid channel which extends away from the nozzle device along the transport direction. The fluid channel can be formed, for example, as a hollow cylindrical tube inside the housing. The process or interaction area is formed in the fluid channel. The fluid channel can be surrounded, for example, with a cooling medium such as cooling air in order to cool it. The fluid channel can be used as a cooling channel, for example.

According to a further exemplary embodiment, the cooling channel has a jacket surface (of the hollow cylindrical tube) with cooling openings, which are designed such that a cooling medium can flow into the cooling space or cooling channel from the surroundings of the jacket surface. The cooling openings can be formed, for example, by means of bores. The cooling openings also each form spaced-apart slots which are formed in the circumferential direction spaced apart from one another in the jacket surface.

According to a further exemplary embodiment, at least one of the cooling openings is designed such that the cooling medium can flow in with a component in the direction of the transport direction. In other words, the cooling medium does not flow purely radially in the direction of the center line but also with an axial component in the direction of the transport direction. Thus, after the interaction area, the reaction product (for example the fine-grain powder) is transported by means of the cooling medium along the transport direction.

According to a further exemplary embodiment, at least one of the cooling openings is designed in such a way that the cooling medium can flow in with a component in the circumferential direction. In other words, the cooling medium does not flow purely radially towards the center line but also with a circumferential component around the transport direction. Thus, after the interaction area, the reaction product (for example the fine-grained powder) is guided by means of the cooling medium in rotation about the central axis or the transport direction. As a result of this circulating flow, for example, a centrifugal force acts on the particles in the reaction product, as a result of which larger particles with a higher mass settle radially outwards more quickly than smaller particles with a smaller mass. Thus, for example, a separation between coarse and finer particles of the reaction product can be carried out. The cooling channel with the complex cooling channel geometry can in particular be produced by means of additive manufacturing processes.

According to a further exemplary embodiment, the cooling channel has a fastening area with the nozzle element, the interaction area being present in the fastening area. The cooling channel has an increasing inner diameter in the fastening area along the transport direction. In other words, the cooling channel from the interface with the nozzle device has a funnel shape in the transport direction. At the end of the fastening area, the cooling channel merges into a hollow cylindrical shape, for example. Due to the funnel shape, the reaction product, which is conveyed by the cooling medium along the transport direction, is relaxed, so that desired fluid-mechanical aspects are achieved.

According to a further exemplary embodiment, the cooling channel is arranged at a distance from an outer wall of the housing in such a way that a supply channel for the cooling medium can be provided. In other words, the supply channel is formed in an intermediate area between the housing and the cooling channel. The cooling medium thus cools the jacket surface of the cooling channel before it enters the cooling channel.

According to a further exemplary embodiment, a flow straightener is arranged in the supply channel, which is set up to feed a cooling medium in a laminar manner To flow into the supply channel. The flow straightener has, for example, a large number of those flow channels which have a direction of extent parallel to the transport direction or central axis. The flow straightener consists, for example, of a hollow cylinder, the cooling channel being passed through an inner opening. The hollow cylinder has the multiplicity of flow channels in its outer surface. The cooling medium thus flows through the flow channels and is thus aligned in a laminar manner parallel to the central axis. Correspondingly, turbulence in the cooling medium in the environment around the inner cooling channel can be reduced. In particular, the flow channels have a channel length that is at least 10 times longer than their diameter. This ensures that the cooling medium is directed in a laminar manner.

According to a further exemplary embodiment, the housing and / or the nozzle element has a deflecting element for the cooling medium, the deflecting element being formed in the supply channel or projecting into it. The deflecting element is designed in such a way that the cooling medium in the supply channel can be deflected from a flow direction with a component against the transport direction into a flow direction with a component along the transport direction.

The deflecting element is, for example, a flat, disk-like element, the surface directed in the direction of transport being curved or bent in order to deflect a deflection of the cooling medium flowing counter to the direction of transport by approx. 100 ° to 180 °. After the deflection, the cooling medium has a flow direction in the transport direction, in particular with a radial directional component. After the cooling medium has been deflected, it can flow into the cooling channel through the openings, for example.

The deflecting element can for example be attached to one end of the housing, to which end the nozzle device is attached.

According to a further exemplary embodiment, the deflecting element has at least one cooling medium guide web (i.e. fluid guide web) which runs along a radial direction. Thus, the cooling medium is guided and diverted in the radial direction. The cooling medium guide web extends in particular from the disk-shaped deflecting element in the transport direction in order to thus form corresponding guide channels. Furthermore, the cooling medium guide web can in particular have a directional component in the circumferential direction.

The fluid guide webs can initially run radially and then parallel to the transport direction. Furthermore, the fluid guide webs can have a directional component along the circumferential direction, so that a spin or a rotation of the cooling medium is generated about the center line. Furthermore, the surface of the fluid guide element of the nozzle device, which surface is directed in the transport direction and forms with the cooling channel, can function as a deflecting element.

According to a further exemplary embodiment, the system has a separation tube which is arranged along the central axis within the cooling channel. The separation tube has an inner channel through which first particles can be removed along the transport direction. An outer channel is formed between the jacket surface and the separation tube, through which second particles can be removed along the transport direction.

According to a further exemplary embodiment, the separation tube has an annular channel for a transport fluid, which extends along the transport direction. The annular channel has at least one inner opening through which the transport fluid can flow into the inner channel in the direction of flow. The inner opening is designed in particular in such a way that the transport fluid can flow in with a directional component in the circumferential direction.

In particular, a suction effect is thus generated into the interior of the separation tube, so that particles can be sucked into the separation tube after the interaction area. The inner openings can for example have a curvature in the circumferential direction or, in particular, the transport fluid can flow in in the tangential direction in the interior of the separation tube.

According to a further exemplary embodiment, the ring channel has a connection for the inflow of the transport fluid against the transport direction. Thus, for example, a transport fluid can be introduced into the ring channel at one end of the housing opposite the nozzle device. In other words, the annular channel forms an axial end counter to the transport direction in such a way that the transport fluid can flow into the cooling channel counter to the transport direction.

According to a further exemplary embodiment, the annular channel has at least one outer opening through which the transport fluid can flow into the outer channel in the flow direction, the outer opening being designed in particular such that the transport fluid can flow in with a directional component in the circumferential direction.

The separation tube thus protrudes into the cooling channel against the transport direction. The separation tube or the immersion tube can be designed as a double-walled hollow body, for example a cylindrical shape (double-walled tube), in order to form the annular channel. In the space between the jacket surfaces of the separation tube, the transport fluid flows, for example, against the transport direction. In the jacket surfaces, at least one deflection element, which deflects the transport fluid due to its angled or curved surface, can be designed with at least one component opening (control opening or control slot) running radially inward or radially outward. In other words, the transport fluid does not flow purely in the transport direction through the jacket surface of the separation tube into the cooling channel or into the inner channel of the separation tube. In addition, the immersion tube can be funnel-shaped at the end opposite to the transport direction and / or have control slots counter to the transport direction. Connecting elements in the hollow body or the annular channel, which connect the deflecting element to the hollow body, can be designed as separator medium guide webs. Separator medium guide webs can be directed radially parallel to the transport direction. Alternatively, they can have a directional component along the circumferential direction, so that a spin or a rotation of the separator control fluid can be initiated about the center line. A separation effect of the reaction material can be controlled via geometric relationships such as, for example, separation tube position, separation tube length, separation tube diameter, control slot size, control slot angle, number of control slots and / or the selection of parameters for separator control fluid such as pressure, mass flow rate. In other words, in an application for powder production, for example, the powder can be separated into two or more fractions (particle sizes). The separation tube is manufactured, for example, from individual elements by connecting, for example, screws, or manufactured integrally, in one piece, by a casting process or in particular by additive manufacturing.

The separation tube is coupled to the housing by a holding device, which consists for example of webs or a flange. The housing and the separation tube can be produced integrally in one piece, for example by a casting process or in particular by additive manufacturing.

In the case of integral additive manufacturing of the housing and / or nozzle device and / or immersion tube, guide bars are used as a support structure.

It is pointed out that the embodiments described here represent only a limited selection of possible embodiment variants of the invention. It is thus possible to combine the features of individual embodiments with one another in a suitable manner, so that for the person skilled in the art, with the embodiment variants explicitly shown here, a large number of different embodiments are to be seen as obviously disclosed. In particular, some embodiments of the invention are described with device claims and other embodiments of the invention with method claims. However, when reading this application it will be immediately clear to the person skilled in the art that, unless explicitly stated otherwise, in addition to a combination of features belonging to one type of subject matter of the invention, any combination of features relating to different types of Subjects of the invention belong.

Figure list

• 1 zeigt eine schematische Darstellung eines Systems zum Erzeugen eines Pulvers aus einem Grundmaterial gemäß einer beispielhaften Ausführungsform der vorliegenden Erfindung, wobei insbesondere der Ausschnitt im Übergang zwischen der Düsenvorrichtung und dem Gehäuse dargestellt ist.
• 2 zeigt eine schematische Darstellung des Systems aus 1.
• 3 zeigt eine schematische Darstellung einer Düsenvorrichtung mit einem Düsengehäuse gemäß einer beispielhaften Ausführungsform der vorliegenden Erfindung.
• 4 und 5 zeigen eine schematische Darstellung einer Düsenvorrichtung gemäß einer beispielhaften Ausführungsform der vorliegenden Erfindung.
• 6 und 7 zeigen Draufsichten auf eine Düsenvorrichtung gemäß einer beispielhaften Ausführung von der vorliegenden Erfindung.
• 8 zeigt eine schematische Darstellung einer Düsenvorrichtung mit Strömungswegen von zwei ionisierbaren Gasen und einem Grundmaterial gemäß einer beispielhaften Ausführung von der vorliegenden Erfindung.
• 9 zeigt eine schematische Darstellung einer Düsenvorrichtung mit Strömungsrichtung von vier ionisierbaren Gasen und einem Grundmaterial gemäß einer beispielhaften Ausführung von der vorliegenden Erfindung.
• 10 zeigt eine schematische Darstellung eines Kühlmediumsleitstegs eines Umlenkelements gemäß einer beispielhaften Ausführung von der vorliegenden Erfindung.
• 11 zeigt eine schematische Darstellung eines Separationsrohres in einem Kühlkanal gemäß einer beispielhaften Ausführung von der vorliegenden Erfindung.
• 12 zeigt eine schematische Schnittdarstellung des Separationsrohres aus 11.

In the following, for further explanation and for better understanding of the present invention, exemplary embodiments are described in more detail with reference to the accompanying drawings.

• 1 shows a schematic representation of a system for producing a powder from a base material according to an exemplary embodiment of the present invention, wherein in particular the section in the transition between the nozzle device and the housing is shown.
• 2 shows a schematic representation of the system from 1 .
• 3 shows a schematic representation of a nozzle device with a nozzle housing according to an exemplary embodiment of the present invention.
• 4th and 5 show a schematic representation of a nozzle device according to an exemplary embodiment of the present invention.
• 6 and 7th 10 show top views of a nozzle device according to an exemplary embodiment of the present invention.
• 8th shows a schematic representation of a nozzle device with flow paths of two ionizable gases and one Base material according to an exemplary embodiment of the present invention.
• 9 shows a schematic representation of a nozzle device with flow direction of four ionizable gases and a base material according to an exemplary embodiment of the present invention.
• 10 shows a schematic representation of a cooling medium guide web of a deflecting element according to an exemplary embodiment of the present invention.
• 11 shows a schematic representation of a separation tube in a cooling channel according to an exemplary embodiment of the present invention.
• 12th shows a schematic sectional view of the separation tube from FIG 11 .

Detailed description of exemplary embodiments

Identical or similar components in different figures are provided with the same reference numbers. The representations in the figures are schematic.

1 and 2 show a system for producing a powder from a base material 101 according to an exemplary embodiment of the present invention, wherein in 1 in particular the section in the transition between the nozzle device 100 and the case 130 is shown. 2 shows a schematic representation of the system from 1 .

The system includes the nozzle device 100 and the case 130 to accommodate the nozzle device 100 on. The nozzle device 100 is to the housing 130 coupled in such a way that an interaction area 103 in the case 130 present.

The nozzle device 100 serves to bring together an ionizable gas 102 , 105 and a base material 101 in the interaction area 103 . The nozzle device 100 initially has a base body 110 on which a transport channel 111 has for guiding the base material 101 along a transport direction 106 to an end area 114 of the main body 110 . The basic body 110 also has a first plasma channel 112 for carrying the first ionizable gas 102 along the direction of transport 106 and a second plasma channel 113 (which from the first plasma channel 112 is spaced) for guiding the second ionizable gas 105 along the direction of transport 106 . In the end area 114 of the main body has the first plasma channel 112 a first gas outlet and the second plasma channel 113 a second gas outlet.

The basic body 110 also has a coupling area 115 for an electrode device 150 such that the first ionizable gas 102 in the first plasma channel 112 and the second ionizable gas 105 in the second plasma channel 105 are ionizable.

Furthermore, the nozzle device 100 a nozzle element 120 on which at the end area 114 of the main body 110 is coupled with this. The nozzle element 120 has another transport channel 121 on which one with the transport channel 111 is coupled such that the base material 101 from the main body 110 in the interaction area 103 outside the nozzle element 120 along the direction of transport 106 is transferable. The nozzle element also has 120 a first nozzle outlet 122 , which with the first plasma channel 112 is coupled and a second nozzle outlet 123 on, which one with the second plasma channel 113 is coupled.

The first nozzle outlet 122 for carrying the first ionizable gas 102 and the second nozzle outlet 123 for carrying the second ionizable gas 105 are designed such that the first ionizable gas 102 and the second ionizable gas 105 in the interaction area 103 to react with the base material 101 are inflow.

The basic material 101 is for example a solid such as a wire, for example a copper wire, aluminum wire, nickel wire, titanium wire or a tungsten wire. As an ionizable gas 102 , 105 , which in a charged state as a plasma gas on the base material 101 in the interaction area 103 meets, for example, an inert gas or argon (Ar) can be used.

The basic body 110 has a cylindrical pin shape. The basic body 110 is in particular formed integrally and in one piece and has the transport channel 111 , the first plasma channel 112 and the second plasma channel 113 on. In other words, there are multiple plasma channels 112 , 113 and the at least one transport channel 111 in an integral one-piece body. In the plasma channels 112 , 113 one and the same ionizable gas or a large number of different ionizable gases can be carried out.

The direction of transport 106 defines in particular the propulsion or the direction of flow of the base material 101 through the main body 110 and through the nozzle element 120 in the interaction area 103 .

In particular, the basic body 110 the coupling area 115 for the electrode device 150 on. The electrode device 150 can in this way on the base body 110 directly or indirectly, e.g. to a nozzle housing 140 , are attached and an energy input into the corresponding first and / or second plasma channel 112 , 113 provide.

The nozzle element 120 consists of a solid material with a high temperature resistance. The nozzle element 120 is at the end 114 of the main body 110 attached. The transport channel 111 is with the further transport channel 121 , the first nozzle outlet 122 is with the first plasma channel 112 and the second nozzle outlet 123 with the second plasma channel 113 are coupled. The first and / or the second nozzle outlet 122 , 123 have tapering channels and accordingly at the exit in the direction of the interaction area 103 have the smallest cross-section. The nozzle outlets 122 , 123 are designed in such a way that the correspondingly ionized gas 102 , 103 in the interaction area 103 is flowed in. The further transport channel 121 is designed accordingly that the base material 101 is passed through and into the interaction area 103 protrudes. The first nozzle outlet 122 and the second nozzle outlet 123 are in particular designed such that the first ionizable gas 102 and the second ionizable gas 105 at a vertex in the interaction area 103 to meet. The further transport channel 121 is designed that the base material 101 also runs through the vertex.

The interaction area 103 lies in the direction of transport 106 outside the nozzle element 120 . The reaction between the base material and the ionizable or ionized gas takes place in the interaction area.

Due to the high temperatures in the apex due to the ionized gas 102 , 105 In particular, there can be a reaction between the ionized gas 102 , 105 and the base material 101 be generated. Generated. The basic material 101 may due to the high temperature of the ionized gas 102 , 105 automated and melted into small, especially spherical drops. In particular, the droplets have a particle size of less than 500 μm, in particular less than 200 μm. In a subsequent cooling process in the cooling channel 131 the melted droplets can be solidified into small particles, so that an extremely fine-grained powder, which is necessary for additive manufacturing, for example, is provided.

The case 130 has an inner volume in which the interaction area 103 present. The interaction area 103 is thus protected from external influences.

The case 130 is designed to be rotationally symmetrical. A central axis 104 of the housing 130 is parallel to the transport direction 106 educated. The case 130 has a hollow cylindrical shape. The center line 104 of the housing 130 is coaxial with the center line 104 of the nozzle element 120 or the base body 110 .

The case 130 has a flange on which the nozzle device 100 is attached.

The transport channel 111 is as a hole in the interior of the body 110 educated. The base body is designed to be rotationally symmetrical, with a central axis 104 of the main body 110 parallel to the transport direction 106 is trained. The transport channel 111 runs along the central axis (axis of rotation) 104 of the main body 110 . Thus the transport channel lies 111 in the center of the body 110 and extends in particular in terms of training.

The first nozzle outlet 122 and the second nozzle outlet 123 are designed such that the corresponding ionized gas has a direction of flow with one to the central axis 104 having radial (directional) component.

As the axial direction, the direction becomes parallel to the transport direction 106 Are defined. The radial direction 107 corresponds to a direction orthogonal to the axial direction and through the center line 104 or axis of rotation of the base body 110 runs. The direction of rotation 108 is orthogonal to the axial direction and the radial direction 107 .

The ionized gas (i.e. the plasma gas) is directed at a certain angle α (see 8th ) relative to the transport direction 106 in the interaction area 103 flowed in. The angle α is between the direction of flow out of the corresponding nozzle outlets 122 , 123 on the one hand and the axial direction on the other hand. Due to the angled outflow of the ionized gas 102 , 105 through the corresponding nozzle outlets 122 , 123 the ionized gas flows 102 , 105 toward a vertex 800 (please refer 8th ) on the central axis 104 in the interaction area 103 to go with the base material 101 to react.

The first nozzle outlet 122 or the second nozzle outlet 123 can also be designed such that the corresponding ionized gas 102 , 105 a direction of flow with one to the central axis 104 circumferential (directional) component, ie in the circumferential direction 108 , having. Thus, the ionized gas flowing out is preserved 102 , 105 a rotating direction in the circumferential direction 108 around the central axis 104 .

The first plasma channel 112 and the second plasma channel 113 are each spaced from the central axis 104 of the main body 110 educated.

The nozzle device 100 furthermore has a, in particular disk-shaped, fluid guide element 124 on which with the nozzle element 120 is coupled. Between the fluid guide element 124 and the nozzle element 120 is an annular control channel 127 formed, which around the nozzle element 120 runs. The control channel 127 is designed such that control fluid 125 , e.g. cooling inert gas or cooling air, in or around the interaction area 103 is flowable.

The control channel 124 is particularly designed such that the control fluid 125 that in the interaction area 103 incoming ionized gas 102 , 105 and the base material 101 enveloped. The fluid pressure of the control fluid 125 is adjustable, for example by means of an appropriate pump device. The level of pressure and / or the speed of the control fluids 125 controls the local formation of the interaction area 103 or the vertex 800 along the direction of transport 106 . The higher the fluid velocity of the control fluid 125 or the higher the fluid pressure of the control fluid 125 the further away the interaction area becomes 103 in which the vertex is 800 of the ionized gas with the base material 101 present, trained.

The fluid guide element 124 extends perpendicular to the transport direction 106 or to the center line 104 , wherein it has a small thickness. The fluid guide element 124 is designed accordingly disk-shaped.

The case 130 has a cooling channel 131 on which is from the nozzle device 100 along the direction of transport 106 extends. The cooling duct 131 is for example as a hollow cylindrical tube inside the housing 130 educated. In the cooling duct 131 becomes the interaction area 103 educated. The cooling duct 131 is with a cooling air or cooling medium 134 surround.

The cooling duct 131 has a lateral surface 132 (of the hollow cylindrical tube) with cooling holes 133 which are designed such that the cooling medium 134 from the surroundings of the lateral surface 132 can flow into the cooling space. The cooling vents 133 are spaced slots or openings, which in the circumferential direction 108 and in the axial direction 106 spaced from each other in the lateral surface 132 are trained.

The cooling vents 133 are designed such that the cooling medium 134 with one component in the direction of the transport direction 106 is inflow. Thus, after the interaction area 103 the reaction product (for example the fine-grained powder) by means of the cooling medium 134 along the direction of transport 106 transported away.

The cooling vents 133 are designed such that the cooling medium 134 with a component in the circumferential direction 108 is inflow. In other words, the cooling medium flows 134 not purely radial towards the center line 104 but also with a peripheral component 108 . Thus, after the interaction area 103 the reaction product (for example the fine-grained powder) by means of the cooling medium 133 in rotation around the central axis 104 steered (see spiral arrows). As a result of this circulating flow, for example, a centrifugal force acts on the particles in the reaction product, creating larger particles 143 with a higher mass settle out radially faster than smaller particles 142 with a smaller mass. Thus, for example, a separation between coarse and finer particles can be achieved 142 , 143 of the reaction product.

A separation tube can be used to increase the separation effect 141 be provided which is along the central axis 104 inside the cooling duct 131 is arranged. The fine particles 142 can inside the separation tube 141 are discharged while the coarse particles 143 outside the separation pipe 141 be discharged.

The cooling duct 131 has a fastening area 135 with the nozzle element 100 on, being in the attachment area 135 the interaction area 103 present. The cooling duct 131 points in the fastening area 135 along the direction of transport 106 an increasing inner diameter corresponding to a funnel shape. At the end of the attachment area 135 goes the cooling duct 131 for example in a hollow cylindrical shape. Due to the funnel shape, the reaction product, which is from the cooling medium 134 along the direction of transport 106 is promoted, relaxed.

The cooling duct 131 is spaced from an outer wall 136 of the housing 130 arranged such that a supply channel 137 for the cooling medium 134 can be provided. Furthermore, the housing 130 and / or the nozzle element 120 or the fluid guide element 124 a deflection element 138 for the cooling medium 134 on, the deflecting element 138 in the supply channel 137 is formed or protrudes into this. The deflection element 138 is designed such that the cooling medium 134 in the supply channel 137 of a flow direction with a component opposite to the transport direction 106 in a flow direction with a component along the transport direction 106 is deflectable.

The deflection element 138 is, for example, a flat, disk-like element, with the in the transport direction 106 directed surface is curved, thus deflecting the cooling medium 134 perform. After the redirection of the Cooling medium 134 this can be done, for example, through the cooling openings 133 in the cooling duct 131 pour in. The deflection element 138 has in particular a cooling medium guide web 139 (ie Fluidleitsteg) on which the cooling medium 134 redirects more effectively.
The surface of the fluid guide element 124 the nozzle device 100 which surface in the transport direction 106 is directed and with the cooling channel 131 forms, acts in the exemplary embodiment as a deflection element 138 .

In the supply channel 137 a flow straightener 201 arranged, which is set up, the cooling medium 134 laminar in the supply channel 137 to flow in. The flow straightener 201 has, for example, a plurality of those flow channels which have an extension direction parallel to the central axis 104 exhibit.

3 shows a schematic representation of a nozzle device 100 with a nozzle housing 300 according to an exemplary embodiment of the present invention.

The nozzle device 100 is inside the nozzle housing 300 arranged and for example via the deflecting element 138 attached to this. Inside the nozzle housing is parallel to the central axis 104 an electrode jacket 307 the nozzle device 100 in which the nozzle device 100 , especially with their pen-like body 110 is pluggable. In the electrode jacket 307 is the coupling area 115 for an electrode device. The electrode device conducts via the coupling connection 302 high-frequency radiation in the direction of the nozzle device 100 .

The nozzle housing 300 also has a plasma gas inlet 303 for the first ionizable gas 102 and optionally a plasma gas inlet 304 for a second ionizable gas 103 on. Furthermore, a coupling area 306 for the base material 101 this in the transport channel 111 be introduced. The ionizable gas 102 , 103 is thus between the electrode jacket 307 and the plasma channels 112 , 113 guided and ionized by means of the electrode device.

In addition, via the fluid inlet 305 a control fluid 125 are flowed in, which on the fluid guide element 124 towards the interaction area 103 is directed.

4th and 5 show a schematic representation of a nozzle device 100 according to an exemplary embodiment of the present invention. 4th Figure 3 shows a view of the nozzle device 100 downstream of the transport direction 106 and 5 a view of the nozzle device 100 upstream of the transport direction 106 .

In 4th becomes the first plasma channel 112 and the second plasma channel 113 as an open groove 402 along a surface of the base body 110 educated. The open groove 402 can for example by milling into the base body 110 be introduced. The ionizable gas 102 , 105 flows into the groove due to a directed inflow angle 402 along the same groove 402 . Through the open groove 402 is the ionizable gas 102 , 105 Easily accessible from the outside, in particular for energy input to the electrode device 150 . in the exemplary embodiment in 4th has the basic body 110 three plasma channels 112 , 113 , 112 ' which are distributed constantly along the surface in the circumferential direction. Accordingly, 3 plasma jets can enter the interaction area 103 are flowed in.

The open groove 402 at least partially with a sleeve 403 which over the main body 110 is pluggable, closed. The sleeve 403 can, so to speak, be pushed over the base body so that the sleeve 403 on the surface of the base body 110 rests. This allows the open grooves 402 the corresponding plasma channels 112 , 113 , 112 ' getting closed. In the coupling area 115 with the electrode device 150 can the open groove 402 free from the sleeve 403 stay.

The fluid guide element 124 is disc-shaped, with the center of the disc-shaped fluid guide element 124 on the central axis 104 of the nozzle element 120 lies. The fluid guide element 124 is by means of connecting bars 401 on the nozzle element 120 attached. Between the connecting webs 401 a corresponding gap forms as a control channel 127 from through which the control fluid 125 in the interaction area 103 can flow in.

The fluid guide element 124 also has fluid guide webs 126 on to conduct the control fluid 125 towards the control channel 127 . The fluid guide bars 126 form elevations along the surface of the fluid guide element 124 out. The fluid webs run here 126 with directional components parallel and radial to the transport direction 106 .

The fluid guide element 124 points to the in the direction of transport 106 facing away from the interaction area 103 a funnel-shaped and convexly curved surface, the areas in the center of the fluid guide element 124 further in the direction of transport 106 lie as edge regions of the fluid guide element 124 .

On the in the direction of transport 106 facing side regarding the interaction area 103 has the fluid guide element 124 a concave domed surface. This curved surface can be used, for example, as a deflecting surface or deflecting element 138 for the cooling medium 134 Act.

6 and 7th show top views of a nozzle device 100 according to an exemplary embodiment.

In 6 are the nozzle outlets 122 , 123 shown, which form a common annular gap. In the center is the further transport channel 101 illustrated by which the base material 101 can be passed through. The nozzle element 120 is with the connecting webs on the fluid guide element 124 coupled.

7th also shows a rotatable element 701 , which has three circumferentially distributed openings through which the ionizable gas 102 , 105 can flow. The rotatable element 701 can the nozzle element 120 form. The nozzle element 120 can be relative to the base body 110 be rotatable. The nozzle element 120 can for example by means of a plain bearing or a ball bearing on the base body 110 be stored in a rotating manner. The corresponding first nozzle outlet 122 and the second nozzle outlet 123 can, for example, as an annular gap in the nozzle element 120 be trained (see 6 ). Fluid guide elements can also be provided in the annular gap, so that the rotation of the ionizable gases 102 , 105 additionally a spin or a rotation of the ionizable gas flowing into the interaction area 102 , 105 generated.

8th shows a schematic representation of a nozzle device 100 with flow paths of two ionizable gases 102 , 105 and a base material 101 .

The nozzle device 100 has the main body 110 and the nozzle element 120 . The transport channel 111 and the further transport channel 121 are coaxial along the center line 104 educated. The basic body 110 also has the first plasma channel 112 for carrying the first ionizable gas 102 along the direction of transport 106 and a second plasma channel 113 (which from the first plasma channel 112 is spaced) for guiding the second ionizable gas 105 along the direction of transport 106 on.

The basic body 110 also has a coupling area 115 for an electrode device 150 such that the first ionizable gas 102 in the first plasma channel 112 and the second ionizable gas 105 in the second plasma channel 105 are ionizable.

The nozzle element 120 has a first nozzle outlet 122 , which with the first plasma channel 112 is coupled, and a second nozzle outlet 123 on, which one with the second plasma channel 113 is coupled to.

The first nozzle outlet 122 for carrying the first ionizable gas 102 and the second nozzle outlet 123 for carrying the second ionizable gas 105 are designed such that the first ionizable gas 102 and the second ionizable gas 103 in the interaction area 103 to react with the base material 101 are inflow.

The ionized gas 102 , 105 (ie the plasma gas) is at a certain angle α relative to the transport direction 106 in the interaction area 103 flowed in. The angle α is between the direction of flow out of the corresponding nozzle outlets 122 , 123 on the one hand and the axial direction on the other hand. Due to the angled outflow of the ionized gas 102 , 105 through the corresponding nozzle outlets 122 , 123 the ionized gas flows 102 , 105 toward a vertex 800 on the central axis 104 in the interaction area 103 to go with the base material 101 to react.

9 shows a schematic representation of a nozzle device 100 with flow direction of four ionizable gases 102 , 102 ' , 105 , 105 ' and a base material 101 .

In comparison to the embodiment, the base body shows 8th another first plasma channel 901 for carrying a further first ionizable gas 102 ' along the direction of transport 106 and another second plasma channel 902 which of the further first plasma channel 112 is spaced, for carrying a further second ionizable gas 105 ' along the direction of transport 105 on. In the corresponding nozzle outlets 122 ' , 123 ' becomes the ionizable gas 102 ' , 105 ' towards the vertex 800 emanated. The nozzle outlets 122 ' , 123 ' have a smaller, shallower angle α 'than the nozzle outlets 122 , 123 .

10 shows a schematic representation of a cooling medium guide web 139 a deflection element 138 according to an exemplary embodiment of the present invention.

The deflection element 138 has at least one cooling medium guide web 139 (ie Fluidleitsteg), which along a radial direction 107 runs towards the center. Thus, the cooling medium 134 in radial direction 107 guided and diverted. The coolant guide bar 139 extends in particular from the disc-shaped deflecting element 138 in transport direction 106 out to thus appropriate To form guide channels. Furthermore, the cooling medium guide web 139 in particular a directional component in the circumferential direction 108 exhibit.

The deflection element 138 can also use the housing 130 through the cooling medium guide webs 139 be connected. The coolant guide bar 139 can to the end of the cooling vents 133 which is the beginning of the cooling duct 131 is gone. Cooling medium guide webs run here 139 for example parallel and radial to the transport direction 106 .

11 shows a schematic representation of a separation tube 141 in a cooling channel 131 according to an exemplary embodiment of the present invention. 12th shows a schematic sectional view of the separation tube from FIG 11 . The separation pipe 141 has an inner channel 1106 on what first particle 142 along the direction of transport 106 are deductible. Between the outer surface 132 and the separation pipe 141 is an outer channel 1107 formed through which second particle 143 along the direction of transport 106 are deductible.

The separation pipe 141 has an annular channel 1101 for a transport fluid 1104 which is along the transport direction 106 extends. The ring canal 1101 has at least one inner opening 1103 on, through which the transport fluid 1104 in the direction of flow into the inner channel 1106 is inflow. The inner opening 1103 is in particular designed such that the transport fluid 1104 with a directional component in the circumferential direction 108 is inflow.

In particular, this creates a suction effect into the interior of the separation tube 141 generated so that smaller particles 142 after the interaction area 103 into the separation tube 141 can be sucked in. The inner openings 1103 can, for example, have a curvature in the circumferential direction 108 have or in particular the transport fluid 1104 in the tangential direction inside the separation tube 141 pour in.

The ring canal 1101 has a connection for the inflow of the transport fluid 1104 against the direction of transport 106 on. Thus, for example, at one end of the housing 130 opposite to the nozzle device 100 a transport fluid can be introduced into the annular channel.

The ring canal 1101 has at least one outer opening 1102 on, through which the transport fluid 1104 in the direction of flow 106 in the outer canal 1107 is inflow, the outer opening 1102 is designed in particular such that the transport fluid 1104 with a directional component in the circumferential direction 108 is inflow.

The separation pipe 141 thus protrudes against the direction of transport 106 in the cooling duct 131 . The separation pipe 14th or the immersion tube can be designed as a double-walled hollow body, for example a cylindrical shape (double-walled tube), around the annular channel 1101 to build. In the space between the outer surfaces of the separation pipe 141 the transport fluid flows 1104 for example against the direction of transport 106 a. In the ring channel 1101 can at least one deflection element, which due to its angled or curved surface, the transport fluid 1104 deflects, be designed with at least one component direction radially inwardly or radially outwardly extending opening (control opening or control slot).

In addition, it should be noted that “comprehensive” does not exclude any other elements or steps and “one” or “one” does not exclude a plurality. It should also be pointed out that features or steps that have been described with reference to one of the above exemplary embodiments can also be used in combination with other features or steps of other exemplary embodiments described above. Reference signs in the claims are not to be regarded as a restriction.

List of reference symbols

100

Nozzle device

101

Base material

102

first ionizable gas

103

Interaction area

104

Central axis

105

second ionizable gas

106

Transport direction

107

Radial direction

108

Circumferential direction

110

Base body

111

Transport channel

112

first plasma channel

113

second plasma channel

114

End area

115

Coupling area

120

Nozzle element

121

another transport channel

122

first nozzle outlet

123

second nozzle outlet

124

Fluid guide element

125

Control fluid

126

Fluid guide bar

127

Control channel

130

casing

131

Cooling duct

132

Outer surface

133

Cooling opening

134

Cooling medium

135

Attachment area

136

Outer wall

137

Supply channel

138

Deflection element

139

Cooling medium guide web

140

Nozzle housing

141

Separation tube

142

Fine particles

143

Coarse particles

150

Electrode device

201

Flow straightener

302

Coupling connection for electrode device

303

Plasma gas inlet for first ionizable gas

304

Plasma gas inlet for second ionizable gas

305

further input for coupling to another fluid reservoir

306

Coupling area for base material

307

Electrode sheath

401

Connecting bridge

402

Groove

403

Sleeve

701

rotatable element

800

Vertex

901

another first plasma channel

902

another second plasma channel

1101

Ring channel

1102

outer opening

1103

inner opening

1104

Transport fluid

1105

axial end

1106

inner channel

1107

outer channel

Claims (24)

Nozzle device (100) for bringing together an ionizable gas (102, 105) and a base material (101) in an interaction area (103), comprising the nozzle device (100) a base body (110) which has a first transport channel (111) for guiding a base material (101) along a transport direction (106) to an end region (114) of the base body (110), the base body (110) having a first plasma channel ( 112) for guiding a first ionizable gas (102) along the transport direction (106) and a second plasma channel (113) for guiding a second ionizable gas (105) along the transport direction (106), wherein in the end region (114) of the base body ( 110) the first plasma channel (112) has a first gas outlet and the second plasma channel (113) has a second gas outlet, the base body (110) having a coupling area (115) for an electrode device (150) such that the first ionizable gas (102 ) are ionizable in the first plasma channel (112) and the second ionizable gas (105) in the second plasma channel (113), a nozzle element (120) which is coupled to the end region (114) of the base body (110), the nozzle element (120) has a second transport channel (111) which is coupled to the first transport channel (111) in such a way that the base material (101) from the base body (110) into an interaction area (103) outside the nozzle element (120) along the transport direction (106) is transferable, a first nozzle outlet (122) coupled to the first plasma channel (112) and a second nozzle outlet (123) which is coupled to the second plasma channel (113), wherein the first nozzle outlet (122) for guiding the first ionizable gas (102) and the second nozzle outlet (123) for guiding the second ionizable gas (105) are designed such that the first ionizable gas (102) and the second ionizable gas ( 105) can flow into the interaction area (103) for reaction with the base material (101), wherein at least the first plasma channel (112) is designed as an open groove (402) along a surface of the base body (110), and wherein the open groove (402) is at least partially closed with a sleeve (403) which can be plugged over the base body (110). Nozzle device (100) according to Claim 1 , wherein the base body (110) and the nozzle element (120) are integrally formed. Nozzle device (100) according to Claim 1 or 2 , wherein the first transport channel (111) is designed as a bore in the interior of the base body (110). Nozzle device (100) according to one of the Claims 1 to 3 , the base body (110) being rotationally symmetrical, with a central axis (104) of the base body (110) being parallel to the transport direction (106), the first transport channel (111) running in particular along the central axis (104). Nozzle device (100) according to Claim 4 , wherein at least the first nozzle outlet (122) or the second nozzle outlet (123) is designed such that the corresponding ionizable gas (102, 105) has a flow direction with a component that is radial to the central axis (104), and / or at least the the first nozzle outlet (122) or the second nozzle outlet (123) is designed in such a way that the corresponding ionizable gas (102, 105) has a flow direction with a component rotating around the central axis (104). Nozzle device (100) according to one of the Claims 1 to 5 , wherein the second plasma channel (113) is designed as a bore in the interior of the base body (110). Nozzle device (100) according to one of the Claims 1 to 6 , wherein the base body (110) has at least one further first plasma channel (901) for guiding a further first ionizable gas (102) along the transport direction (106) and / or a further second plasma channel (902) for guiding a further second ionizable gas (105 ) along the transport direction (106), wherein in the end region (114) of the main body (110) the further first plasma channel (901) has a further first gas outlet and the further second plasma channel (902) has a further second gas outlet, the further first Plasma channel (901) and the further second plasma channel (902) are formed in the base body (110) between the first plasma channel (112) and the second plasma channel (113) on the one hand and the first transport channel (111) on the other. Nozzle device (100) according to Claim 1 wherein the nozzle element (120) is rotatable relative to the base body (110). Nozzle device (100) according to one of the Claims 1 to 8th , further comprising a, in particular disk-shaped, fluid guiding element (124) which is coupled to the nozzle element (120), an annular control channel (127) being formed between the fluid guiding element (124) and the nozzle element (120) which surrounds the nozzle element ( 120), the control channel (127) being designed in such a way that control fluid (125) can flow in or around the interaction area (103), the fluid guide element (124) being fastened to the nozzle element (120) in particular by means of connecting webs (401) . Nozzle device (100) according to Claim 9 , the center of the disk-shaped fluid guide element (124) lying on the central axis (104) of the nozzle element (120), an extension of the fluid guide element (124) perpendicular to the central axis (104) being greater than the extension along the central axis (104). Nozzle device (100) according to Claim 9 or 10 , wherein the fluid guide element (124) has fluid guide webs (126) for guiding the control fluid in the direction of the control channel (127). Nozzle device (100) according to one of the Claims 1 to 11 , further comprising a nozzle housing (140) with an outlet opening, the base body (110) and the nozzle element (120) being arranged in the nozzle housing (140) in such a way that one end of the second transport channel (111), the first nozzle outlet (122) and the second nozzle outlet (123) is in particular present in the outlet opening and the interaction region (103) is present outside the nozzle housing (140). Nozzle device (100) according to Claim 12 , wherein the nozzle housing (140) has a coupling connection (302) for the electrode device (150), wherein the coupling connection (302) provides access to the first plasma channel (112) and the second plasma channel (113), and / or wherein the nozzle housing (140) has a plasma gas inlet (303) for coupling to a first gas reservoir, wherein the plasma gas inlet (303) is coupled to at least the first plasma channel (112), and / or wherein the nozzle housing (140) has a further plasma gas inlet (304) for coupling to a second gas reservoir, the further plasma gas inlet (304) being coupled to the second plasma channel (113). System for the chemical and / or physical treatment of a base material (101), in particular for producing a powder from a base material (101), the system comprising the nozzle device (100) according to one of the Claims 1 to 13th , a housing (130) for receiving the nozzle device (100), the nozzle device (100) being coupled to the housing (130) in such a way that the interaction area (103) is present in the housing (130). System according to Claim 14 wherein the housing (130) has a cooling channel (131) which extends away from the nozzle device (100) along the transport direction (106). System according to Claim 14 or 15th , wherein the cooling channel (131) has a jacket surface (132) with cooling openings (133) which are designed such that a cooling medium (134) can flow into the cooling channel (131) from the surroundings of the jacket surface (132). System according to Claim 16 , wherein at least one of the cooling openings (133) is designed such that the cooling medium (134) can flow in with one component in the direction of the transport direction (106), and / or wherein at least one of the cooling openings (133) is designed such that the cooling medium (134) can flow in with a component in the circumferential direction (108). System according to Claim 15 to 17th , wherein the cooling channel (131) has a fastening area (135) with the nozzle element (120), wherein the cooling channel (131) in the fastening area (135) has an increasing inner diameter along the transport direction (106), the interaction area (103) in Fastening area (135) is formed. System according to one of the Claims 15 to 17th , wherein the cooling channel (131) is arranged at a distance from an outer wall (136) of the housing (130) in such a way that a supply channel (137) can be provided for the cooling medium (134), wherein in the supply channel (137) in particular a flow straightener (201 ) is arranged, which is set up to flow a cooling medium (134) laminar into the supply channel (137). System according to Claim 19 , wherein the housing (130) and / or the nozzle element (120) has a deflecting element (138) for the cooling medium (134), the deflecting element (138) being formed in the supply channel (137), the deflecting element (138) in such a way is designed that the cooling medium (134) in the supply channel (137) can be deflected from a flow direction with a component against the transport direction (106) in a flow direction with a component along the transport direction (106), in particular the deflecting element (138) at least one Has cooling medium guide web (139) which runs along a radial direction (107), wherein in particular the cooling medium guide web (139) in particular has a directional component in the circumferential direction (108). System according to one of the Claims 15 to 20th , further comprising a separation tube (141) which is arranged along the central axis (104) within the cooling channel (131), the separation tube (141) having an inner channel (1106) through which first particles (142) along the transport direction ( 104) can be removed, with an outer channel (1107) being formed between the jacket surface (132) and the separation tube (141) through which second particles (143) can be removed along the transport direction (104). System according to Claim 21 , the separation tube (141) having an annular channel (1101) for a transport fluid (1104), which extends along the transport direction (104), the annular channel (1101) having at least one inner opening (1103) through which the transport fluid ( 1104) can flow into the inner channel (1106) in the flow direction, the inner opening (1103) being designed in particular such that the transport fluid (1104) can flow in with a directional component in the circumferential direction (108), the annular channel (1101) in particular has a connection for the inflow of the transport fluid (1104) against the transport direction (104). System according to Claim 21 , the annular channel (1101) having at least one outer opening (1102) through which the transport fluid (1104) can flow into the outer channel (1107) in the direction of flow, the outer opening (1102) being designed in particular such that the transport fluid (1104) can flow in with a directional component in the circumferential direction (108). Method for bringing together an ionized gas (102, 105) and a base material (101) in an interaction area (103) with a nozzle device (100) according to one of the Claims 1 to 20th , wherein the method comprises guiding the base material (101) in the first transport channel (111) along a transport direction (106) to an end region (114) of the base body (110), Guiding the first ionizable gas (102) along the transport direction (106) in the first plasma channel (112), guiding the second ionizable gas (105) along the transport direction (106) in the second plasma channel (113), ionizing the first ionizable gas ( 102) in the first plasma channel (112) and the second ionizable gas (105) in the second plasma channel (113) by means of an electrode device (150), transferring the base material (101) in the second transport channel (111) of the nozzle element (120) from the first transport channel (111) into the interaction area (103) outside the nozzle element (120) along the transport direction (106), inflow of the first ionized gas (102) by means of the first nozzle outlet and inflow of the second ionized gas (105) by means of the second nozzle outlet into the interaction area (103) for reaction with the base material (101).

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