DE102018202625B8 - Machine measuring device - Google Patents

Machine measuring device Download PDF

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Publication number
DE102018202625B8
DE102018202625B8 DE102018202625.4A DE102018202625A DE102018202625B8 DE 102018202625 B8 DE102018202625 B8 DE 102018202625B8 DE 102018202625 A DE102018202625 A DE 102018202625A DE 102018202625 B8 DE102018202625 B8 DE 102018202625B8
Authority
DE
Germany
Prior art keywords
measuring device
machine measuring
machine
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102018202625.4A
Other languages
German (de)
Other versions
DE102018202625A1 (en
DE102018202625B4 (en
Inventor
Kazunori Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE102018202625A1 publication Critical patent/DE102018202625A1/en
Application granted granted Critical
Publication of DE102018202625B4 publication Critical patent/DE102018202625B4/en
Publication of DE102018202625B8 publication Critical patent/DE102018202625B8/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/249—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using image analysis, e.g. for radar, infrared or array camera images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE102018202625.4A 2017-03-15 2018-02-21 Machine measuring device Active DE102018202625B8 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-049604 2017-03-15
JP2017049604A JP6457574B2 (en) 2017-03-15 2017-03-15 Measuring device

Publications (3)

Publication Number Publication Date
DE102018202625A1 DE102018202625A1 (en) 2018-09-20
DE102018202625B4 DE102018202625B4 (en) 2020-06-18
DE102018202625B8 true DE102018202625B8 (en) 2020-09-10

Family

ID=63371963

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018202625.4A Active DE102018202625B8 (en) 2017-03-15 2018-02-21 Machine measuring device

Country Status (4)

Country Link
US (1) US10203201B2 (en)
JP (1) JP6457574B2 (en)
CN (1) CN108620954B (en)
DE (1) DE102018202625B8 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707200A (en) * 2020-05-26 2020-09-25 东风博泽汽车系统有限公司 Electrode detection device of brushless motor connection unit
CN112857270B (en) * 2021-01-08 2022-12-09 上海科技大学 Method for in-situ real-time quantitative detection of film roughness by using RHEED

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
JPH01193631A (en) * 1988-01-28 1989-08-03 Nissan Motor Co Ltd Surface defect inspecting device
DE4218382A1 (en) * 1992-06-04 1993-12-09 Leonhardt Klaus Prof Dr Ing Ha Optical profilometer for surface roughness measurement with adaptive inclination adjustment and new type of detection system - has control system maintaining beam perpendicular to measurement surface, uses interferometric heterodyne detection
JPH08166214A (en) * 1991-08-07 1996-06-25 Naotake Mori Laser measuring method and device
JP2013029350A (en) * 2011-07-27 2013-02-07 Hitachi Ltd Appearance inspection method and device for the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843681B2 (en) * 1972-06-16 1983-09-28 三菱電機株式会社 Hiyoumenjiyou Taikansokuuchi
JPS6337205A (en) * 1986-07-31 1988-02-17 Tokyo Seimitsu Co Ltd Method for measuring surface roughness
JPH01292202A (en) * 1988-05-20 1989-11-24 Ricoh Co Ltd Measurement of groove shape
JPH0261511A (en) * 1988-08-29 1990-03-01 Nippon Telegr & Teleph Corp <Ntt> Apparatus for measuring cyclic surface structure
US5189490A (en) * 1991-09-27 1993-02-23 University Of Hartford Method and apparatus for surface roughness measurement using laser diffraction pattern
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
JP3932180B2 (en) * 2002-07-03 2007-06-20 松下電器産業株式会社 Teaching method, electronic substrate inspection method, and electronic substrate inspection device
JP3741672B2 (en) * 2002-07-08 2006-02-01 株式会社アドイン研究所 Image feature learning type defect detection method, defect detection apparatus, and defect detection program
JP4447970B2 (en) * 2004-06-14 2010-04-07 キヤノン株式会社 Object information generation apparatus and imaging apparatus
JP5892591B2 (en) * 2010-12-09 2016-03-23 国立大学法人九州工業大学 Three-dimensional surface measuring apparatus and method
US20140152771A1 (en) * 2012-12-01 2014-06-05 Og Technologies, Inc. Method and apparatus of profile measurement
DE102013015932A1 (en) * 2013-09-19 2015-03-19 Carl Zeiss Microscopy Gmbh High-resolution scanning microscopy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
JPH01193631A (en) * 1988-01-28 1989-08-03 Nissan Motor Co Ltd Surface defect inspecting device
JPH08166214A (en) * 1991-08-07 1996-06-25 Naotake Mori Laser measuring method and device
DE4218382A1 (en) * 1992-06-04 1993-12-09 Leonhardt Klaus Prof Dr Ing Ha Optical profilometer for surface roughness measurement with adaptive inclination adjustment and new type of detection system - has control system maintaining beam perpendicular to measurement surface, uses interferometric heterodyne detection
JP2013029350A (en) * 2011-07-27 2013-02-07 Hitachi Ltd Appearance inspection method and device for the same

Also Published As

Publication number Publication date
DE102018202625A1 (en) 2018-09-20
CN108620954B (en) 2020-01-17
US10203201B2 (en) 2019-02-12
JP2018151353A (en) 2018-09-27
JP6457574B2 (en) 2019-01-23
US20180266816A1 (en) 2018-09-20
DE102018202625B4 (en) 2020-06-18
CN108620954A (en) 2018-10-09

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R018 Grant decision by examination section/examining division
R020 Patent grant now final