DE102017211070A1 - Microscope with a microscope objective and with a tweezers device and method for operating a microscope - Google Patents

Abstract

The approach presented here relates to a forceps device (105), in particular for a microscope objective (100), for removing at least one particle (110) on a surface (115) to be cleaned. The tweezer device (105) comprises a first needle (120), a second needle (125) and a release device (130). The first needle (120) has a first needle tip (135) and the second needle (125) has a second needle tip (140). The release device (130) is coupled or coupleable to the first needle (120) and the second needle (125) and adapted to apply a voltage between the first needle tip (135) and the second needle tip (140) to discharge between the first needle tip (135) and the second needle tip (140) when the tweezer device (105) is positioned adjacent to the particle (110).

Description

A basically finished surface is often nevertheless contaminated with countably few particles in a size range of 5 .mu.m to 100 .mu.m, which have remained from a final purification step or have subsequently been added by handling or storage in a not infinitely particle-free clean room. These particles are usually subsequently removed by blowing off with a macroscopic gas stream, optimally with ionized nitrogen, or by blowing off with a local gas stream and impulse circuit or by mechanical gripping by means of a one-hair brush.

The present approach relates to a tweezer device for a microscope objective for removing at least one particle on a surface to be cleaned, a microscope objective with a forceps device, a microscope with a forceps device and a method for operating a forceps device, and a corresponding control device and computer program product.

Disclosure of the invention

Against this background, the present approach proposes a tweezer device for a microscope objective for removing at least one particle on a surface to be cleaned, a microscope objective with a forceps device, a microscope with a forceps device and a method for operating a forceps device according to the main claims. Advantageous embodiments emerge from the respective subclaims and the following description.

The advantages that can be achieved with the presented approach are that a tweezer device presented here is designed to apply a voltage in the region of a particle which provides a necessary very high force for loosening or loosening the particle from a surface.

A forceps device, in particular for a microscope objective, for removing at least one particle on a surface to be cleaned, comprises a first needle, a second needle and a release device. The first needle has a first needle tip and the second needle has a second needle tip. The release means is coupled or coupleable to the first needle and the second needle and adapted to apply an electrical voltage between the first needle tip and the second needle tip to allow discharge between the first needle tip and the second needle tip when the forceps device adjacent is arranged to the particle. Thus, the particle can be solved by unloading from the surface or at least loosened.

It is therefore advantageous if the first needle and the second needle are formed electrically conductive. The electrical voltage may be, for example, an electrical high voltage of at least 1 kV. The surface may be a glass surface. By means of the tweezers device presented here, it is advantageously possible to loosen and / or release the particle from the surface by means of a pressure wave triggered by means of a voltage discharge of the electrical voltage between the two mentioned needle tips and / or resulting field strength.

In order to use the tweezer device in conjunction with a microscope that makes very small particles with a size of, for example, 5 microns to 100 microns visible, it is advantageous if the tweezers device according to one embodiment has a housing device with a microscope objective of the microscope is formed coupled. The microscope objective may be, for example, a reflected-light microscope objective. The housing device may be formed as a plug-on attachment, which is designed to be plug-in on or on the microscope objective and can be fixed here to the microscope objective, for example by a screw. The housing means may also be shaped to receive the first needle and / or the second needle, for example, such that the two needle tips are disposed facing each other.

In this case, if the housing device is formed in a substantially annular manner, for example, according to a further advantageous embodiment, the needles can each be received obliquely in the annular housing device, in particular wherein the first needle tip and / or the second needle tip can be arranged to be in a region of an opening to protrude the annular shaped housing device. In turn, the microscope objective can be included in this opening. Said region may correspond to a region below the opening in an assembled state of the tweezer device on the microscope objective and / or the microscope.

The release device may comprise at least one Piezozündereinrichtung to generate a necessary electrical voltage can. Thus, the release device can advantageously be designed to effect a high-voltage electrical discharge of 5 kV within a tolerance range of 20% between the first needle tip and the second needle tip to be able to provide very high force for dissolving the particle.

The tweezer device may also include a gas jet device configured to allow delivery of a gas stream. Thus, the loosened and / or dissolved particles can be blown away from the surface.

A microscope objective, in particular a reflected light microscope objective, has a tweezer device which is embodied in one of the presented variants. The tweezer device is coupled to the microscope objective or coupled to the microscope objective.

Alternatively, the tweezer device can also be used without a microscope objective if the tweezer device can not be coupled to the microscope objective. In this embodiment, by means of the microscope objective and / or a suitable defect detection device, the at least one particle can be detected on the surface to be cleaned and the respective position of the particle can be stored on the surface. By means of the tweezer device, the respective position can be approached and the at least one particle can be removed by means of the tweezer device.

A microscope has a tweezers device, which is designed in one of the variants presented, in particular wherein the tweezers device between the microscope objective of the microscope and an object plane of the microscope is arranged or arranged. The object plane can be understood as a plane in which an object to be examined can be arranged.

A method of operating one of the presented tweezer devices comprises at least one step of generating. In the step of generating, an electrical voltage discharge is created between the first needle tip of the first needle and the second needle tip of the second needle, wherein the first needle tip and the second needle tip are disposed adjacent to the particle. The voltage discharge may be a voltage discharge in a high voltage range. Thus, a loosening and / or loosening of the particle is made possible by a triggered pressure wave and / or resulting field strength of the surface.

Additionally, if the method includes a step of providing a gas flow adjacent to the particle, the loosened and / or dissolved particle may be blown away from the surface. The provisioning step may be performed, for example, in response to the step of generating.

A control unit is designed to implement or implement the steps of a variant of a method presented here in corresponding devices. Also by this embodiment of the approach in the form of a controller, the task underlying the approach can be solved quickly and efficiently.

In the present case, a control device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon. The control unit may have an interface, which may be formed in hardware and / or software. In the case of a hardware-based design, the interfaces can be part of a so-called system ASIC, for example, which contains various functions of the control unit. However, it is also possible that the interfaces are their own integrated circuits or at least partially consist of discrete components. In a software training, the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.

A computer program product with program code which can be stored on a machine-readable carrier such as a semiconductor memory, a hard disk memory or an optical memory and is used to carry out the method according to one of the embodiments described above if the program product is installed on a computer or a control unit is also of advantage is performed.

• 1 eine schematische Querschnittsdarstellung eines Mikroskopobjektivs mit einer Pinzettenvorrichtung zum Entfernen zumindest eines Partikels auf einer zu reinigenden Oberfläche gemäß einem Ausführungsbeispiel;
• 2 eine perspektivische Seitenansicht einer Pinzettenvorrichtung gemäß einem Ausführungsbeispiel; und
• 3 ein Ablaufdiagramm eines Verfahrens zum Betreiben einer Pinzettenvorrichtung gemäß einem Ausführungsbeispiel.

The approach will be explained in more detail by way of example with reference to the accompanying drawings. Show it:

• 1 a schematic cross-sectional view of a microscope objective with a tweezers device for removing at least one particle on a surface to be cleaned according to an embodiment;
• 2 a side perspective view of a forceps device according to an embodiment; and
• 3 a flowchart of a method for operating a tweezers device according to an embodiment.

In the following description of favorable embodiments of the present approach, the same or similar reference numerals are used for the elements shown in the various figures and similar acting, with a repeated description of these elements is omitted.

If an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

1 shows a schematic cross-sectional view of a microscope objective 100 with a tweezer device 105 for removing at least one particle 110 on a surface to be cleaned 115 according to an embodiment.

The tweezer device 100 is according to this embodiment of the microscope objective 100 added.

The tweezer device 100 includes a first needle 120 , a second needle 125 and a release device 130 , The first needle 120 has a first needle point 135 and the second needle 125 a second needle tip 140 on. The release device 130 is with the first needle 120 and the second needle 125 coupled and configured to be between the first needle tip 135 and the second needle tip 140 apply an electrical voltage to discharge between the first needle tip 135 and the second needle tip 140 to allow when the tweezer device 105 adjacent to the particle 110 is arranged.

The details of the tweezer device described below 100 are optional:

According to this embodiment, the tweezer device 105 also a housing device 145 on that with the microscope lens 100 is coupled and / or in which the first needle 120 and / or the second needle 125 are included.

The housing device 145 is formed annular, in particular wherein the first needle tip 120 and / or the second needle tip 125 are arranged to protrude into an area of an opening of the annularly shaped housing means 145.

The release device 130 is formed according to this embodiment as a Piezozündereinrichtung.

According to this embodiment, the tweezer device 105 a gas nozzle device adapted to supply a gas flow 150 to enable.

The following is the tweezer device 105 described again in other words:

The here presented tweezer device 105 can also be referred to as particle tweezers or essay.

Already finished surfaces are usually, unless they are not allowed to undergo a new complete cleaning, or by means of a nitrogen gun blown off. However, if particles on the surface are very small or tightly bound, then they will fail to blow off due to the finite forces that can be transferred to the particles and the particles are manually observed under microscopic observation with a probe, e.g. B. with a brush with a sharpened hair, time-consuming dabbed away.

A tweezers device presented here 105 is advantageously designed to provide much higher forces for dissolving or removing particles 110 to provide, as known devices for this purpose. The tweezer device 105 is also inexpensive to manufacture, quick and easy to use and suitably shaped for an available volume between a reflected-light microscope objective and an object plane of a microscope.

In an arrangement shown here, a triggering of a microscopic pressure wave 155 near the particle 110 causes the particle 110 completely shoot away or so off the ground that dissolves the particle 110 Can be carried away from the air flow. The pressure wave 155 This was done by generating a local breakdown of a high voltage between the two needle tips 135 . 140 allows. This punch is in 1 as a spark 160 between the two needle points 135 . 140 shown.

Optionally or additionally, it is also possible for an application to have a high electric field strength in the vicinity of the particle 110 , the particle 110 and the surface in the form of the surface 115 the same name charges, so that the particle 110 then fly away via electrostatic repulsion.

The tweezer device 105 thus makes it possible, not by gas flow 150 removable particles 110 locally without manual or other mechanical contact.

In 1 it can be seen that two needles 120 . 125 under the microscope objective 100 are guided, whose needle tips 135 . 140 to be slightly above the object plane in the object field. A microscope stage on which the surface 115 with the particle 110 is arranged so that the particle to be removed 110 next to a connecting line of the needle tips 135 . 140 to the Lying comes. In this position is between the needle tips 135 . 140 a high-voltage discharge of about 5 kV has been ignited, the pressure wave 155 generated, which in turn is adapted to the particle 110 fortzureißen.

At the microscope objective 100 According to this embodiment, this is an objective designed to produce a 20-fold magnification.

2 shows a perspective side view of a tweezer device 105 according to an embodiment. This may be the in 1 described tweezer device 105 act, which is solved according to this embodiment of the microscope objective and shown reversed standing.

The following is a more detailed description of an embodiment of the tweezer device shown here 105 , here mentioned features of the embodiment are optional:

The housing device 145 has according to this embodiment, a black annular aluminum body, in the two longitudinally pierced brass parts 200 . 201 are screwed, the longitudinal axes are in a point with the longitudinal axis of the annular housing means 145 and thus intersecting the optical axis of the microscope objective when the tweezer device 105 as in 1 shown mounted on the microscope objective. A first brass part 200 is directly in the housing device 145 screwed in, a second brass part 205 for galvanic isolation with a plastic bushing as a transition. The housing device 145 , which can also be referred to as a ring, has a locking screw, with which the housing device 145 can be locked on the microscope objective. The ring is displaceable on the microscope objective in the direction of the optical axis for the purpose of a z-adjustment. In the outer, as screw heads 210 designed ends of the brass parts 200 . 205 are stripped wires of a voltage supply plugged. In longitudinal bores of the two brass parts 200 . 205 are the needles 120 . 125 Inserted in the form of acupuncture needles made of steel with an aluminum handle with a tip radius of 5 μm, they hold force-fit thanks to a slight press fit.

The prepared tweezer device 105 is inserted for use from the object side on the microscope objective mounted in a microscope. Subsequently, the brass screws are reiterated by means of the screw heads 210 as long as rotated and the ring on the microscope lens moved longitudinally until both needle tips 125 . 140 have come to rest in the image field in the object plane.

The to the needles 120 . 125 High voltage applied in the form of electrode needles is passed through the piezo igniter device 215 generated.

With a microscope equipped in this way, it is now possible to remove particles from surfaces in two ways:

As already in 1 are described in a first variant both needles 120 . 125 as electrodes in use. In this case, the particle to be removed becomes approximately between the electrode tips in the form of the needle tips 125 . 140 placed and then triggered a discharge. The particles are characterized by the high electric field strength between the electrodes and / or by the in 1 shown pressure wave of the microscopic explosion thrown. By means of the tweezer device 105 In this way it is possible to remove even particles from the 5 μm class. Furthermore, by means of the gas nozzle remote removal of detached particles is possible.

In a second variant, one of the needles 120 . 125 expediently unscrewed, ie removed from the image field and from the surface. In this case, a particle is attached to the needle 120 . 125 moved up, fixed by this by adhesion and / or electrostatic attraction, the surface down from the needle 120 . 125 pulled away and then the particle with an ethanol-impregnated swab from the needle 120 . 125 stripped.

3 shows a flowchart of a method 300 for operating a forceps device according to an embodiment. This can be a procedure 300 act using one of the in the 1 to 2 featured tweezer devices 105 is executable.

The procedure 300 includes at least one step 305 of generating. Optionally, the method includes 300 according to this embodiment also a step 310 of providing. In step 305 generating an electrical voltage discharge is created between the first needle tip of the first needle and the second needle tip of the second needle, wherein the first needle tip and the second needle tip are disposed adjacent to the particle.

In step 310 the provision of a gas stream is provided adjacent to the particle. The step 310 the provisioning is in this embodiment in response to the step 305 of generating.

The embodiments described and shown in the figures are chosen only by way of example. Different embodiments may be combined together or in relation to individual features. Also, an embodiment can be supplemented by features of another embodiment.

Furthermore, method steps of the approach can be repeated as well as carried out in a sequence other than that described.

Claims (12)

Tweezer device (105), in particular for a microscope objective (100), for removing at least one particle (110) on a surface (115) to be cleaned, the tweezer device (105) comprising the following features: a first needle (120) having a first needle tip (135); a second needle (125) having a second needle tip (140); and a release means (130) coupled or coupleable to the first needle (120) and the second needle (125) and adapted to apply an electrical voltage between the first needle tip (135) and the second needle tip (140) enabling unloading between the first needle tip (135) and the second needle tip (140) when the tweezer device (105) is positioned adjacent to the particle (110). Tweezers device (105) according to Claim 1 , with a housing device (145) which is coupled to the microscope objective (100) and / or in which the first needle (120) and / or the second needle (125) is accommodated. Tweezers device (105) according to Claim 2 in that the housing means (145) is formed substantially annular, in particular wherein the first needle tip (135) and / or the second needle tip (140) are arranged to protrude into an area of an opening of the annular shaped housing means (145). Tweezers device (105) according to one of the preceding claims, wherein the release device (130) comprises at least one piezo ignition device (215). A tweezer device (105) according to any one of the preceding claims, comprising a gas nozzle means adapted to allow delivery of a gas stream (150). Microscope objective (100) with a forceps device (105) according to one of the preceding claims, wherein the forceps device (105) is coupled to the microscope objective (100) or is coupled to the microscope objective (100). Microscope with a tweezers device (105) according to one of Claims 1 to 5 in particular wherein the tweezer device (105) is arranged or arrangeable between the microscope objective (100) of the microscope and an object plane of the microscope. A method (300) of operating a tweezer device (105) according to any one of Claims 1 to 5 wherein the method (300) comprises at least the step of: - generating (305) an electrical voltage discharge between the first needle tip (135) of the first needle (120) and the second needle tip (140) of the second needle (125); first needle tip (135) and the second needle tip (140) are disposed adjacent to the particle (110). Method (300) according to Claim 8 , comprising a step (310) of providing a gas flow (150) adjacent to the particle (110). A controller configured to perform steps of the method (300) according to any one of Claims 8 to 9 execute and / or control in appropriate units. Computer program adapted to at least one of the methods (300) according to one of Claims 8 to 9 perform. Machine-readable storage medium on which the computer program is based Claim 11 is stored.

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