DE102017121676A1 - Transport device, coating arrangement and method - Google Patents

Abstract

According to various embodiments, a transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d), comprising: a plurality of transport rollers, of which at least two adjacent transport rollers (102) are spaced apart and spaced by their outer periphery (102m ) a transport surface (102t) is defined for transporting a substrate along the transport surface (102t) in a transport direction (purple); a collecting roll (101), which extends at least between two transport rollers (102) in the transport direction (111a) and which is arranged at a distance (101d) to the transport surface (102t), so that between the transport surface (102t) and the outer Scope of the collecting roll (101) a gap (101s) is formed.

Description

The invention relates to a transport device, a coating arrangement and a method.

In general, substrates can be processed or treated, e.g. edited, heated and / or structurally changed. One method of coating (coating) a substrate is physical vapor deposition (PVD), also referred to as physical vapor deposition. In this case, a particle stream is generated from a material to be deposited. In other words, a material (the so-called evaporation material, coating material or target material) is converted into the vapor phase (gas phase) by means of physical processes by means of a material source.

Subsequently, a substrate to be coated can be moved by means of a transport device into or through the generated particle stream (illustratively a vapor cloud). Physical vapor deposition is suitable for a wide range of materials to be deposited, and a wide range of substrates.

The atomized or vaporized material, i. the generated particle stream (also referred to as gaseous coating material) may be scattered by interactions with other particles. As a result, coating material also deposits on other surfaces which are exposed, e.g. at the back of the substrate (also referred to as parasitic coating). For example, plate-shaped substrates (e.g., glass plates) are transported on transport rollers with the back of the substrate exposed between the transport rollers. For example, tape-shaped substrates (e.g., film tape, metal tape, glass ribbon) are transported along transport rollers, for example, along a transport path that leads along a plurality of transport rollers from an unwind to a take-up reel. As a result, coated strips can occur in the edge region of the substrate, which results in quality losses.

Conventionally, substrates, for example plate-shaped substrates, are placed in a frame (a so-called carrier), which reduces the parasitic coating. The substrates must be placed in the carrier before coating, removed from the carrier after coating and the carrier must be cleaned on a regular basis, which increases the effort and thus the operating costs.

Alternatively, elastic belts or endless spiral springs are guided on the transport rollers, on which the edge region of a substrate rests, so that the edge region is shielded from parasitic coating by the belt (or the endless spiral springs). However, the coating material also attaches to the belt (or the endless spiral springs) and impairs their elasticity. As a result, the belts (or the endless spiral springs) can no longer be reliably guided on the transport rollers.

Alternatively, on the side facing away from the substrate to be coated, side of the substrate and, for example, between the transport rollers collecting plates in a so-called Gegensputterebene arranged stationary. Between collecting tray and substrate, a gap is formed. This gap must typically be dimensioned such that the layer deposited on the collecting tray during a process campaign remains so thin that the gap between collecting tray and substrate is maintained in order to prevent transport disruptions. In other words, the gap between the collecting tray and the substrate can not be chosen as small as would be necessary to avoid a parasitic coating.

According to various embodiments, a transport device is provided which reduces the parasitic coating. In this way, substrates can be clearly and precisely coated so that additional shielding measures can be dispensed with. For example, it is possible to dispense with carriers, belts or endless spiral springs.

According to various embodiments, the transport device illustratively has a particularly low maintenance. This is accomplished by shielding the transport device and the substrate from each other. Since deposits on the transport device are thus reduced, for example distributed over a larger area, narrower gaps between substrate and transport device can be realized without causing transport disturbances. The narrower gaps allow less material vapor to pass through so that the back of the substrate is better shielded.

According to various embodiments, a transport device is provided by means of which deposits on the transport device can be removed stochastically or deterministically from the gap between the transport device and the substrate. As a result, narrower gaps between substrate and transport device can be realized without causing transport disturbances. In other words, the duration of a process campaign can be extended. Vividly the time to closing the gap (unwanted state) between the transport plane and the outer circumference of the collecting roll be extended. In other words, the size of this gap can be adjusted to minimize the parasitic coating on the back side of a substrate to be coated on the front without limiting the duration of the process campaign. At least the duration of the process campaign according to various embodiments may be extended over the known solution in which the coating material is not stochastically or deterministically removed from this gap.

According to various embodiments, a transport device may comprise: a plurality of transport rollers, of which at least two adjacent transport rollers (ie, two or more pairs of adjacent transport rollers) are spaced apart and a transport surface defined by the outer periphery thereof for transporting a substrate along the transport path Transport surface in a transport direction; a collecting roll, which extends at least between two transport rollers in the transport direction and which is arranged at a distance from the transport surface, so that between the transport surface and the outer periphery of the collecting roll, a gap is formed.

The plurality of transport rollers may each have an axis of rotation (e.g., a rotational symmetry axis) about which they are rotatably supported, e.g. rotationally symmetrical. The axes of rotation of the plurality of transport rollers, or the at least two adjacent transport rollers, may define a rotation axis surface of the plurality of transport rollers (in which the axes of rotation lie), which illustratively describes a plane along which the plurality of transport rollers are mounted.

The catcher roll may have one or more catcher rolls each having an axis of rotation (e.g., a rotational symmetry axis) about which they are rotatably mounted, e.g. rotationally symmetrical. The axis of rotation of a collecting roll can be aligned substantially transversely to the axes of rotation of the transport rollers. The axis of rotation of a collecting roll can, for example, be aligned parallel to the axis of rotation of the transport rollers.

The transport surface can also be referred to as a transport plane and at least partially curved and / or at least partially planar. Between the at least two adjacent transport rollers, the transport surface may be e.g. planar. The axis of rotation surface can also be referred to as a rotation axis plane and at least partially curved and / or at least partially planar. Between the at least two adjacent transport rollers, the axis of rotation surface may be e.g. planar.

The transport rollers may, according to various embodiments, comprise elastic belts or endless spiral springs on which a substrate can rest or be placed. The elastic belts or endless spiral springs may have a larger outer diameter than the respective transport roller without elastic belts or endless spiral springs, so that the outer circumference of the transport roller is defined as the diameter of the transport roller in the area of the elastic belts or endless spiral springs. The outer circumference of the transport roller defines the transport surface.

The transport rollers may have disc rollers according to various embodiments. Transversely to the transport direction, a plurality of disc rollers may each be arranged spaced apart along the transport roller or be. The disc rollers may be arranged on a common shaft or be. The outer circumference of the disc rollers defines the outer circumference of the transport roller defining the transport surface.

According to various embodiments, the plurality of transport rollers may be arranged to transport the substrate along the transport direction, e.g. in the transport direction and / or against the transport direction.

The collecting roll may, according to various embodiments, be arranged on the side of the transport surface in which the axis of rotation of the transport rollers is arranged. The gap between the transport surface and the outer circumference of the collecting roll can be defined, for example, by the smallest distance between the transporting surface and the outer circumference of the collecting roll. Clearly, the axis of rotation of the collecting roll between the transport surface and the axis of rotation surface of the transport rollers can be arranged or. Alternatively, the axis of rotation of the collecting roll can be arranged in the axis of rotation surface of the transport rollers or be.

According to various embodiments, it may be provided that the collecting roll is arranged without drive (passive). Furthermore, it can be provided that the axis of rotation of the collecting roll is arranged transversely to the transport direction, that on the lateral surface of the collecting role depositing material due to the now additional mass generates a torque on the collecting roll, by which, after overcoming the frictional force of a storage of the collecting roll a rotational movement (Rotation) of the collecting role until the forces acting on the collecting roll torques are in equilibrium (stochastic movement, rotation, rotational movement). In other words, the axis of rotation of the collecting roll can be arranged so transversely to the transport direction or that the center of gravity of the depositing on the lateral surface of the collecting roll material is not congruent with the Lot of the transport surface to the axis of rotation of the collecting roll. The frictional forces of the bearings of the collecting roll must be sufficiently low, so that they can be overcome even after growth of a thin layer (for example, 0.5 mm). The thickness of the raised layer on the catch roller to overcome frictional forces may, according to various embodiments, be a fraction, for example less than one-fifth, for example less than one-sixth, for example less than one-eighth, for example less than one-tenth of the distance between the transport surface and the outer circumference the catch roll. In other words, during the process campaign, the catch roll can rotate at intervals as (stochastically) the torque of the grown layer overcomes frictional forces.

According to various embodiments, a transport device may further comprise: drive means for rotating (active) the catch roll, the drive means being mechanically coupled to the catch roll. Clearly, the coating material deposited on the collecting roll can be distributed uniformly (deterministically) along the circumference of the collecting roll onto its lateral surface.

The drive device may, according to various embodiments, comprise an electric drive which is mechanically coupled at least to a collecting roller. Alternatively or additionally, the drive device may be designed or set up as a pneumatic drive, for example a pneumatic rotary drive. It can be provided to mechanically couple a group of collecting rollers with one and the same electric drive, so that the collecting rollers of this group of collecting rollers are driven synchronously, for example at the same speed. The speed may be only a fraction of the speed of the transport rollers, for example, less than a tenth, for example less than a fiftieth, for example less than a hundredth, for example less than one-thousandth, for example less than one ten-thousandth.

According to various embodiments, a transport device may have a drive device embodied as a gear, the drive of which is mechanically coupled to one of the plurality of transport rollers and the output of which is connected to the collecting roller. Alternatively, the transmission may be mechanically coupled to a group of catch rollers, so that the catch rollers of that group of catch rollers are synchronously driven, for example, rotating at the same speed. The transmission may have a ratio such that the speed of the catch roller or group of catch rollers is only a fraction of the speed of the transport rollers, for example less than one tenth, for example less than one fiftieth, for example less than one hundredth, for example less than one thousandth For example, less than a ten-thousandth.

According to various embodiments, a transport device may further comprise: cooling means for cooling the catch roll, the cooling means being thermally coupled to the catch roll. Clearly, the cooling device can be set up to minimize thermal deformation of the collecting roll. Alternatively or additionally, the condensation of coating material on the lateral surface of the collecting roll can be accelerated or even made possible in the first place. Thus, uncontrolled dripping of liquid coating material can be minimized or prevented.

According to various embodiments, a transport device may further comprise: a bearing arrangement for (rotatably) supporting the catch roller, wherein the bearing arrangement is arranged for aligning and / or positioning the catch roller. The bearing arrangement can be configured to align and / or position the collecting roll parallel to the transport direction and / or transversely to the transport direction (for example in a plane parallel to the transport surface and / or a plane perpendicular to the transport surface). Clearly, the gap between the transport surface and the outer circumference of the collecting roll for the respective process campaign (for example for different coating materials) can thus be set or become.

According to various embodiments, a transport device may further include: a transport portion which is bounded by the transport surface in the direction of the transport rollers and which has a lateral boundary (ie, transverse to the transport direction and transverse to the transport surface) according to a width of a transported substrate; and a panel, wherein the panel is spaced from the lateral boundary, such that between the lateral boundary and an edge of the panel, a further gap (collecting gap) is formed, and wherein the distance between the transport surface and the outer periphery of the collecting roll is smaller as the Distance between the lateral boundary and the edge of the panel.

According to various embodiments, the diaphragm may have a surface, for example a planar or planar surface, which is congruent with the transport surface. Alternatively, a planar or planar surface of the bezel may or may be disposed parallel to the transport surface, i. above or below. Clearly, the panel can be arranged decoupled from the transport rollers and / or the collecting roll on a support structure. By means of the support structure, the size of the further gap between the lateral boundary and the edge of the diaphragm can be set or become. In other words, the position of the center of gravity of the material deposited on the collecting roll can be varied transversely to the transport direction, for example adjusted, for example, shifted transversely to the transport direction.

According to various embodiments, a transport device (i.e., one or more transport rollers) may be configured or arranged such that at least one transport roller of the plurality of transport rollers has one or more circumferential grooves into which the collection roller partially extends.

According to various embodiments, a transport device may be designed or arranged such that the collecting roller is designed to be tapered in the region of the circumferential grooves.

According to various embodiments, it may be provided that the collecting roll has a roughness R _a of greater than 3 μm.

According to various embodiments, it can be provided that the collecting roll comprises or is formed, for example, from at least one material from the following group of materials: a ceramic (eg a non-oxidic ceramic such as a carbide or a nitride or eg an oxidic ceramic), a metal (such as eg aluminum, steel, stainless steel, structural steel, iron, copper, titanium) a metal alloy (comprising at least one metal and another chemical element). Furthermore, collecting roll can be coated with a further functional material or have a further functional material, so that, for example, the chemical and / or physical properties of the wall element and / or the bottom element can be adapted to the process conditions.

According to various embodiments, it can be provided that a plurality of collecting rollers are arranged at a distance from one another transversely to the transport direction. Clearly, the collecting rolls can be arranged at a distance from one another transversely to the conveying direction so that in each case one collecting roll is arranged in the region of a lateral boundary of the transport region. In other words, the substrate and the collecting roll of the transport device, projected onto the transport surface of the transport device, can at least partially overlap. For example, it can be provided to arrange three collecting rolls next to one another transversely to the transport direction, when two substrates spaced transversely to the transporting direction are transported simultaneously (side by side), the middle of the three collecting rolls being arranged in the region between the two transporting regions.

According to various embodiments, it may be provided to align the plurality of transport rollers substantially vertically (substantially vertically oriented axis of rotation of the transport roller). Essentially, the deviation from the vertical (vertically corresponds to the direction of action of the gravitational acceleration) may be less than or equal to 7 °. Alternatively it can be provided to align the transport rollers substantially horizontally (substantially horizontally oriented axis of rotation of the transport roller).

The transport device may have a drive device which is coupled to each transport roller of the plurality of transport rollers. The drive device may be configured to transmit a torque to the transport rollers, which are coupled to the drive device. The drive device can be coupled to a transport roller, for example, by means of at least one chain, a shaft and / or a toothed wheel.

Further, the transport device may include a controller for controlling the drive means, or for controlling the driving of the plurality of transport rollers, and for controlling the drive means of the collecting roller or the collecting rollers. For example, the controller may control or regulate a mechanical torque transmitted to each transport roller of the plurality of transport rollers. As a result, a rotational speed with which each transport roller of the plurality of transport rollers, or the collecting roller or the collecting rollers is respectively driven, that is, can be clearly shown. rotated, will, be controlled and / or regulated. For example, the controller may control or regulate a rotational speed with which each transport roller of the plurality of transport rollers rotates. As a result, a torque with which each transport roller of the plurality of transport rollers, or the collecting roller or the collecting rollers are respectively driven, that is to say, can be indicated. rotated, will, be controlled and / or regulated.

According to various embodiments, a coating arrangement may comprise: a vacuum processing chamber in which a processing area is arranged; a source of material for providing a gaseous coating material in the processing area; and a transport device according to one of the embodiments for transporting a substrate through the processing area.

According to various embodiments, the vacuum processing chamber may be configured as a sputtering chamber. In this case, the material vapor source may include or be formed from a sputtering source, e.g. a so-called magnetron arrangement. Illustratively, the vacuum processing chamber may then be configured for sputtering (i.e., for performing a sputtering process).

For example, in a sputtering process (also referred to as sputtering or Sputterdeposition), the target material to be atomized and thereby transferred to the vapor phase. In other words, the coating material is sputtered from a target, i. atomized. For magnetron sputtering (magnetic field assisted sputtering), a magnetron assembly may include, for example, a tubular target which rotates during the sputtering process, with a magnet assembly disposed within the tube cathode for plasma formation and, thus, inter alia sputtering rate and / or other process parameters to influence the sputtering process. Furthermore, a magnetron arrangement can also have a plurality of tube cathodes (tube targets), for example in a so-called double tube magnetron (a so-called RDM-rotatable dual magnetron).

According to various embodiments, the vacuum processing chamber may be configured as an evaporation chamber, for example for thermal evaporation and / or electron beam evaporation (EB-PVD). In this case, the material vapor source may include or be formed from an evaporation source. Illustratively, the vacuum processing chamber may then be configured for vaporizing (i.e., for performing an evaporation process).

According to various embodiments, an upper surface of the (transported) substrate may be processed, e.g. be coated by means of a gaseous coating material, wherein the upper side of the substrate of the transport device, or the at least two transport rollers, directed away. The underside of the substrate opposite the upper side can rest on the transport surface, or the at least two transport rollers, for transporting, i. be in physical contact with the at least two transport rollers.

The substrate may e.g. be plate-shaped, e.g. in the form of a plate, e.g. a glass plate, or a metal plate, or a plate of another material, e.g. a ceramic. The substrate may e.g. band-shaped, e.g. in the form of a foil tape, e.g. in the form of a metal strip or e.g. be in the form of a glass ribbon.

According to various embodiments, a method of operating a transport device (e.g., as described herein) may include: placing a substrate on a plurality of transport rollers of the transport device; Driving at least one of the plurality of transport rollers so that the substrate is transported by the plurality of transport rollers; wherein the arranging of the substrate and / or the driving of the at least one transport roller of the plurality of transport rollers takes place such that the substrate and the collecting roller of the transport device, projecting onto the transport surface of the transport device, at least partially overlap.

Embodiments of the invention are illustrated in the figures and are explained in more detail below.

• 1A eine schematische Querschnittsansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 1B eine schematische Seitenansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 1C eine schematische Draufsicht oder Querschnittsansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 2A und 2B jeweils eine schematische Querschnittsansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 2C eine schematische Draufsicht oder Querschnittsansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 3A und 3B jeweils eine schematische Querschnittsansicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 4A bis 4D jeweils eine schematische Draufsicht einer Transportvorrichtung, gemäß verschiedenen Ausführungsformen;
• 5 eine schematische Seitenansicht oder Querschnittsansicht einer Beschichtungsanordnung, gemäß verschiedenen Ausführungsformen; und
• 6 ein Verfahren in einem schematischen Ablaufdiagramm, gemäß verschiedenen Ausführungsformen.

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• 1A a schematic cross-sectional view of a transport device, according to various embodiments;
• 1B a schematic side view of a transport device, according to various embodiments;
• 1C a schematic plan view or cross-sectional view of a transport device, according to various embodiments;
• 2A and 2 B each a schematic cross-sectional view of a transport device, according to various embodiments;
• 2C a schematic plan view or cross-sectional view of a transport device, according to various embodiments;
• 3A and 3B each a schematic cross-sectional view of a transport device, according to various embodiments;
• 4A to 4D each a schematic plan view of a transport device, according to various embodiments;
• 5 a schematic side view or cross-sectional view of a Coating arrangement according to various embodiments; and
• 6 a method in a schematic flow diagram, according to various embodiments.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

As used herein, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connection, direct or indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

1A illustrates a schematic cross-sectional view of a transport device 100a according to various embodiments.

According to various embodiments, the transport device 100a have a plurality of transport rollers, of which at least two adjacent transport rollers 102 (see 1B) are arranged at a distance from each other. The plurality of transport rollers, ie the at least two adjacent transport rollers 102 , can have an outer circumference 102m (or an outer peripheral surface 102m ), which has a transport surface 102t Are defined. On the several transport rollers, ie on the outer peripheral surface 102m lying down, can be a substrate 202 (compare for example 2 B) in a transport direction 111 be transported, for example, along the transport surface 102t ,

Furthermore, the transport device 100a a catching role 101 have, which at least between the two transport rollers 102 in the transport direction 111 extends longitudinally. The collecting role 101 can be at a distance 101d to the transport area 102t be arranged below this (ie, viewed in the vertical direction, ie, transverse to the transport surface 102t ). The collecting role 101 can also by means of a bearing assembly rotatable about an axis of rotation 101 be stored. Thus, between a transported substrate 202 and the catch roll a gap 101s be formed, in which transport residues can be absorbed without the transport of the substrate 202 to impair. In other words, it can be avoided that transport residues, which on the collecting roll 101 stay in the transport area 102t protrude into it.

For example, the distance 101d in a range of about 0.5 mm to about 5 mm, for example in a range of about 1 mm to about 2 mm.

1B illustrates a schematic side view of a transport device 100b according to various embodiments, eg those in 1A illustrated transport device 100a , eg along a viewing direction transverse to the transport direction 111 ,

According to various embodiments, each transport roller 102 a rotation axis 102 to which the transport roller 102 is rotatably mounted. The axes of rotation 102 the several transport wheels 102 can be aligned parallel to each other. The rotation axis 102 can clearly transverse (perpendicular) to the transport direction 111 run.

According to various embodiments, the transport device 100b also more than the at least two adjacent transport wheels 102 have, for example, several transport rollers, eg more than two transport rollers, eg three, four, five or more than five transport rollers 102 , eg ten transport rollers 102 , eg twenty transport rollers 102 , eg fifty transport wheels 102 , etc. Furthermore, the transport rollers 102 a common transport area 102t define (illustrate), for example by means of their lateral surfaces 102m (In other words, its outer circumference defines the transport surface 102t ). According to another embodiment, the transport rollers 102 be arranged with an offset to each other, and for example, any transport path for transporting a substrate 202 provide, for example, an at least partially planar transport surface 102t and / or an at least partially curved transport surface 102t ,

The collecting role 101 can between the two transport rollers 102 be elongated, eg in the transport direction 111 extends longitudinally.

According to various embodiments, the collecting roll 101 have a substantially circular cross-sectional area.

1C illustrates a schematic plan view or cross-sectional view of a transport device 100c according to various embodiments, eg those in 1A illustrated transport device 100a and / or the in 1B illustrated transport device 100b , eg along a viewing direction transverse to the transport direction 111 and / or across the transport surface 102t ,

According to various embodiments, a transport roller 102 or can the transport rollers 102 a length 105 (ie an extension 105 transverse to the transport direction 111 , or along the axis of rotation 102 ) in a range of about a few centimeters to about a few meters, for example in a range of about 30 cm to about 4 m, for example in a range of about 1 m to about 2.5 m, for example in a range of about 2 m to about 3.3 m. According to various embodiments, the transport roller 102 or can the transport rollers 102 a length 105 of more than 1 m.

According to various embodiments, the transport roller 102 or can the transport rollers 102 a diameter 103 (ie an extension 103 along the transport direction 111 , or transverse to the axis of rotation 102 ) in a range of about a few centimeters (cm) to about one meter (m), for example, in a range of about 5 cm to about 1 m, for example, in a range of about 5 cm to about 20 cm, for example, in a range from about 10 cm to about 50 cm, eg in a range of about 15 cm to about 25 cm. According to various embodiments, the transport roller 102 or can the transport rollers 102 a diameter 103 of more than 10 cm. The diameter 103 may be the outer circumference, or a peripheral surface, the transport rollers 102 define.

According to various embodiments, the transport rollers may 102 at a distance 104 (ie along the transport direction 111 , or transverse to the axis of rotation 102 ) are arranged one from the other, for example at a distance 104 in a range of about a few centimeters to about one meter, for example in a range of about 5 cm to about 1 m, for example in a range of about 15 cm to about 30 cm, for example in a range of about 10 cm to about 60 cm For example, in a range of about 20 cm to about 40 cm.

According to various embodiments, the catch roll 101 and the transport wheels 102 on the transport surface 102t projected, be free from each other, ie not overlap each other or at least have a distance from each other. The distance between the collecting roll 101 and the transport wheels 101 can follow it, like the catch roll 101 and / or the transport rollers 102 are stored.

According to various embodiments, the collecting roll 101 an extension along the transport direction 111 , or transverse to the axis of rotation 102 , Which are essentially the distance 104 two (eg adjacent or next) transport wheels 102 corresponds to each other.

2A illustrates a schematic cross-sectional view of a transport device 200a , according to various embodiments, analogous to that in 1A illustrated transport device 100a ,

As in 2A is shown, a transport device 200a two catch rolls 101 have, which transverse to the transport direction 111 spaced apart from each other.

2 B illustrates a schematic cross-sectional view of a transport device 200b according to various embodiments, eg those in 2A illustrated transport device 200a ,

On the transport wheels 102 , or on the transport surface 102t , can be a substrate 202 rest. The substrate 202 can (from a direction perpendicular to the transport surface 102t considered) the gap 101s at least partially cover and the catch rolls 101 eg partially cover. In other words, the substrate can become 202 and collecting roll of the two collecting rolls 101 , on the transport surface 102t projected, at least partially overlapping (ie partially or completely).

Illustratively, the substrate 202 the catch roll 101 at least partially shield, for example in front of gaseous coating material, for example when the substrate 202 is coated, for example, from one direction along the transport surface 102t ,

The two collection rollers may have a distance to each other which is smaller than a substrate width 202b (Width 202b of the substrate 202 ). This will ensure that the substrate 202 and at least one catch roll (ie one catch roll or more than one catch roll) of the two collecting rollers 101 overlap at least partially (ie partially or completely).

2C illustrates a schematic plan view or cross-sectional view of a transport device 200c according to various embodiments, eg those in 2A illustrated transport device 200a ,

According to various embodiments, a distance of the two collecting rollers 101 each other to be smaller than a length 105 the several transport wheels 102 , In this case, the multiple transport roles 102 at least partially survive beyond at least one collecting role of the two collecting roles addition.

According to various embodiments, each catch roll 101 a rotation axis 101 to which the collecting roll 101 is rotatably mounted. The axes of rotation 101 the collecting rollers 101 can be aligned parallel to each other. The rotation axis 101 can be graphically parallel to the transport direction 111 run.

3A illustrates a schematic cross-sectional view of a transport device 300a , according to various embodiments, analogous to that in 1A illustrated transport device 100a ,

3A serves to illustrate the principle of action of the transport device 300a , which analogous to those in the 1A to 2C is formed transport device shown.

According to various embodiments, a substrate may be provided 202 across the transport area 102t For example, from above, to coat with a coating material 202m. Typically, the material vapor source has to generate the particle stream 202m of the coating material transversely to the transport direction 111 a larger dimension than the substrate width 202b (compare for example 2 B) to the substrate 202 over its substrate width 202b Evenly coat 202m. Thus, a proportion of the particle flow 202m in the gap 101s between the outer circumference 101m (Also as a lateral surface of the collecting roll 101 designated) of the catch roll 101 and the transport area 102t penetration. A share 302 of the particle stream 202m the one in the gap 101s penetrates, can on the lateral surface 101m the collecting role 101 knock down, for example, condense. Another share 303 of the particle stream 202m the one in the gap 101s penetrates, will be on the surface of the substrate 202 precipitate (parasitic coating), which coincide with the transport surface 102t is. The thickness of the parasitic coating 303 can from the edge of the substrate 202 For example, decrease approximately exponentially.

The amount of material of the parasitic coating 303 takes on the size of the gap 101s to. According to various embodiments, the gap may be provided 101s corresponding to a maximum tolerable amount of material of the parasitic coating 303 and then extend the duration of a process campaign. For this purpose, it can be provided that on the collecting role 101 deposited material 302 from the gap 101s to remove.

According to various embodiments may be provided, the collecting roll 101 so across the transport direction 111 (For example, in a plane parallel to the transport surface 102t ) to position that one focal point 302s of the catch roll 101 deposited material 302 outside the center of gravity 101s a still uncoated (for example, a new) collecting role 101 is.

Optionally, according to various embodiments, an aperture element may be provided 301 in one to the transport area 102t parallel plane at a distance 301d from an edge of the substrate 202 to arrange. By means of the size of the distance 301d and the position of the collecting roll 101 transverse to the transport direction 111 can the location of the center of gravity 302s be influenced at least in the horizontal direction. An imaginary line between the center of gravity 302s and the focus 101s may include with the vertical according to various embodiments, an angle between greater than or equal to 5 ° to less than or equal to 45 °.

Exceeds this at the collecting roll 101 acting torque from the material deposited on it 302 the frictional forces of the bearing assembly, not shown, of the collecting roll 101 , the catch role can 101 until reaching equilibrium of forces 101r turn. The material 302 then gets out of the gap 101s away and minimizes the risk of transport disruptions. In other words, by means of the stochastic rotary motion 101r the collecting role 101 the duration of a process campaign will be extended at more or less random intervals.

3B illustrates a schematic cross-sectional view of a transport device 300b , according to various embodiments, analogous to that in 3A illustrated transport device 300a ,

Unlike the in 3A illustrated transport device 300a can be a transport device 300b Furthermore, a drive device 304 having, which with a drive roller 101 may be coupled, so that by means of the drive device 304 a torque on the collecting roll 101 can be transferred.

The drive device 304 can be configured for example as an electric drive. Alternatively it can be provided that the drive device 304 is designed as a transmission whose output is coupled for example via belts, gears or the like with, for example, a transport roller.

By means of the drive device 304 can the rotational movement 101r the collecting role 101 regardless of the material deposited on it 302 respectively. In this way, for example, can be achieved that the material 302 with more or less uniform layer thickness on the collecting roll 101 is deposited. The speed of the collecting roll 101 can only a fraction of the speed of the transport rollers 102 For example, less than one tenth, for example, less than one fiftieth, for example, less than one hundredth, for example, less than one-thousandth, for example, less than one ten-thousandth. In other words, by means of the deterministic rotational movement 101r the collecting role 101 (for example, as a uniform rotational movement) the duration of a process campaign be extended.

4A to 4D each illustrate a schematic plan view or cross-sectional view of a transport device 400a . 400b . 400c and 400d , According to various embodiments, each having differently shaped transport rollers 102 and / or catch rolls 101 ,

4A schematically shows a transport device according to various embodiments 400a having a plurality, for example three, one behind the other at a distance 104 arranged transport rollers 102 , Every transport role 102 each has a rotation axis 102 on which the corresponding transport role 102 is rotatable. At least one of the several transport wheels 102 can be coupled by means of a drive device, not shown, so that a torque can be transmitted to this transport roller. The axes of rotation 102 may lie in a common axis of rotation axis, for example in a planar axis of rotation axis. The outer circumference 102m (Also referred to as lateral surface) of the plurality of transport rollers 102 forms a transport surface on which, for example, a not shown, to be coated substrate can be transported. The transport wheels 102 according to 4A along their axis of rotation 102 a continuous circular cylindrical lateral surface 102m with constant diameter.

In transport direction 111 between each adjacent transport rollers 102 at least one catching role 101 be arranged or become. This at least one catching role 101 has an axis of rotation 101 on which this catch role 101 is rotatable. The rotation axis 101 the collecting role 101 can, for example, parallel to the rotation axis plane of the transport rollers 102 be furnished. This catch roll 101 Can either be a passive, non-powered catcher 101 or as active, driven by a drive means not shown collecting roll 101 be educated. The at least one catching role 101 can be a length 1011 which is smaller than the distance 104 two adjacent transport rollers 102 , The collecting role 101 according to 4A points along its axis of rotation 101 a continuous circular cylindrical lateral surface 102m with constant diameter. In the direction of the axis of rotation 102 the transport role 102 can be provided that the collecting role 101 in one end area 102e the transport role 102 is arranged. The position of the collecting roll 101 in the direction of the axis of rotation 102 the transport role 102 can be chosen so that there is a substrate to be transported and the collecting roll 101 overlap projected onto the transport surface.

Optionally, it can be provided, several collecting rollers 101 between adjacent transport rollers 102 to arrange, for example, two or more (eg, three). The position of the multiple catch rollers 101 in the direction of the axis of rotation 102 the transport role 102 can be chosen so that there is a substrate to be transported and the collecting roll 101 overlap projected onto the transport surface, for example, in an edge region of the transport direction 111 substantially parallel edge of a substrate to be transported. Three or more collection rollers 101 can be provided, for example, when several parallel to substrates, side by side (transverse to the transport direction 111 ) be transported.

In the 4B schematically illustrated transport device 400b according to various embodiments differs from the transport device 400a according to 4A at least by a different design of the transport rollers 102 , The transport wheels 102 the transport device 400b have at least one circumferential groove 102n on. In this circumferential groove 102n can become a catching role 101 extend into it. The circumferential groove 102n and the catch roll 101 are set up so that their lateral surfaces 101m . 102m do not touch (contactless).

The collecting role 101 can be a length 1011 greater than the distance 104 two adjacent transport rollers 102 , for example more than twice the distance 102 , In other words, there may be a catching role 101 by a plurality of circumferential grooves 102n For example, two or more, or for example three or more, or for example, 5 or more, for example 10, several adjacent transport rollers 102 therethrough.

In the 4C schematically illustrated transport device 400c according to various embodiments differs from the transport device 400b according to 4B at least by a different design of the collecting role 101 , The collecting role 101 the transport device 400c has at least one rejuvenation 101v (For example, a groove). The rejuvenation 101v the collecting role 101 has a smaller cross-sectional area than the non-tapered portions of the catch roll 101 ,

The training of the collecting role 101 the transport device 400c can be used, for example, when the particle flow 202m (see 2A) in the field of transport rollers 102 is smaller than in the area between two adjacent transport rollers 102 , Illustrative are then not such strict requirements for the size of the maximum allowable gap 101s (see 2A) posed.

Furthermore, according to various embodiments, the rotation axis may alternatively or additionally be provided 101 collecting role 101 according to 4C below the axis of rotation 102 the transport role 102 to arrange. Thus, the cross-sectional area of the non-tapered region may be increased or, for example, the diameter of the catch roll 101 be selected larger in the non-tapered region as in the embodiment according to 4C , Alternatively, in this embodiment, not shown, on the groove 102n be waived.

In the 4D schematically illustrated transport device 400d according to various embodiments differs from the transport device 400b according to 4B at least by a different design of the transport rollers 102 , At least one transport role 102 can be a shaft or axis 102w have along the axis of rotation 102 several, for example two or more, for example, three spaced disc rollers 102s are arranged. The lateral surface 102m a writing roll 102s may be formed, for example, as a circular cylindrical surface. Several lateral surfaces 102m can be a transport area 102t form, in which a substrate can be transported. The distance of the transport surface 102t to the lateral surface of the shaft 102w can be dimensioned so that a collecting role 101 can extend into this distance.

The collecting role 101 can be a length 101l greater than the distance 104 two adjacent transport rollers 102 For example, more than twice the distance 102 , In other words, there may be a catching role 101 by several named distances between transport surface 103t and lateral surface of the shaft 102w For example, two or more, or for example three or more, or for example, 5 or more, for example 10, several adjacent transport rollers 102 extend through.

5 Figure 12 illustrates a schematic side view or cross-sectional view of a coating arrangement 500 according to various embodiments.

According to various embodiments, as in 5 is shown schematically, the coating arrangement 500 a vacuum process chamber 512 exhibit. According to various embodiments, in the vacuum process chamber 512 a vacuum in the range of the rough vacuum, the fine vacuum, the high vacuum or the ultrahigh vacuum be or become. In this case, the vacuum may be provided by means of a vacuum pump arrangement or may be (not shown), wherein the vacuum pump arrangement may comprise, for example, at least one turbomolecular pump. According to various embodiments, a process pressure within the vacuum process chamber 512 be provided dynamically, wherein during the process both at least one gas in the vacuum process chamber 512 is introduced, as well as gas from the vacuum process chamber 512 is pumped by the vacuum pump assembly. In this case, an equilibrium can set, whereby the process pressure can be fixed or can be determined. The gas flow through the vacuum process chamber 512 through and / or the process pressure can be controlled and / or controlled by means of valves and / or sensors.

According to various embodiments, in the vacuum process chamber 512 a processing area 111 may be arranged (or provided) for coating a substrate 202 in the processing area 111 ,

Furthermore, the coating arrangement 500 a source of material 560 for providing a gaseous coating material in the processing area 111 , The material source 560 may produce a gaseous coating material (material vapor) which spreads into a vapor spreading area 562 can spread (vivid as material vapor stream), for example in the direction of the transport surface 102t , The steam spreading area 562 can be clearly above the transport area 102t , or a transported substrate 202 extended.

For example, the coating arrangement 500 as a sputtering chamber, having a source of material 560 in the form of a sputtering source. It is understood that the coating arrangement 500 may also be an electron beam coating machine or a CVD coating system, wherein a correspondingly different material source 560 is provided to a material vapor stream in the steam propagation region 562 for coating the substrate 202 to create.

As an alternative to the illustrated plate-shaped substrate (for example made of glass, plastic or other) may on the transport surface 102t Also, a belt-shaped substrate (for example, a metal strip, a plastic strip or a glass ribbon) are transported.

Furthermore, the coating arrangement 500 a transport device 542 have, for example, one of the transport devices described above, for example, the transport device 100a . 100b . 100c . 200a . 200b . 200c . 300a . 300b . 400a . 400b . 400c or 400d ,

According to various embodiments, below the substrate 202 A gap 101s be formed, for example between the collection roller 101 and the substrate 202 ,

Alternatively to the horizontal coating arrangement 600 can the transport device 542 be arranged in an analogous manner in a vertical coating arrangement or be.

Alternative to the embodiment according to 5 can be provided that the material source 560 below the transport surface 102t and the catch roll 101 above the transport surface 102t is arranged. In this case, the substrate becomes 102 coated from below. In other words, the steam propagation area 562 directed upwards. Such an arrangement may be provided, for example, when the material source 560 is formed as an electron beam evaporation device or a thermal evaporation device. Such an arrangement may be provided, for example, when the substrate 102 as a band-shaped substrate 102 is trained.

6 illustrates a method 600 according to various embodiments in a schematic flow diagram.

The procedure 600 points in 601 to arrange a substrate on a plurality of transport rollers of the transport device, for example on at least two transport rollers of the plurality of transport rollers. The procedure 600 points in 603 further driving the plurality of transport rollers so that the substrate is transported by the plurality of transport rollers. For driving, mechanical energy, for example having a torque, can be transmitted to the plurality of transport rollers. By means of driving, the plurality of transport rollers can be rotated, eg at a respective rotational speed.

The arrangement of the substrate and / or the driving of the plurality of transport rollers may according to 605 in such a way that the substrate and the collecting roll of the transport device, projecting onto the transport surface of the transport device, at least partially overlap, eg at least a first time during transport, alternatively or in addition to at least a second time (or during a period in between) during transportation. The first time may be, for example, the time at which the substrate is placed on the plurality of transport rollers, eg in physical contact. The second time may be, for example, a point in time at which the substrate reaches a transport roller of the plurality of transport rollers. Illustratively, the placement of the substrate may define the first time and the transport of the substrate may define the second time (or the time period therebetween).

For this purpose, for example, the driving of the plurality of transport rollers can be controlled and / or regulated, e.g. by means of a drive control. For example, the drive controller may include a sensor configured to detect a speed and / or position of the substrate. The drive controller may be configured to control and / or regulate the driving of the plurality of transport rollers, e.g. based on the position of the substrate.

Claims (10)

Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d), comprising: • a plurality of transport rollers, of which at least two adjacent transport rollers (102) are arranged at a distance from each other and through the outer periphery (102m) has a transport surface (102t ) for transporting a substrate along the transport surface (102t) in a transport direction (IIIa); • a collecting roll (101) which extends at least between the two transport rollers (102) in the transport direction (111a) and which is arranged at a distance (101d) to the transport surface (102t), so that between the Transporting surface (102t) and the outer periphery of the collecting roll (101) a gap (101s) is formed. Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to Claim 1 , further comprising: drive means (304) for rotating said catch roller (101), said drive means (304) being mechanically coupled to said catch roller (101). Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to Claim 2 , wherein the drive device (304) is designed as a transmission whose drive is mechanically coupled to one of the plurality of transport rollers and the output of which is connected to the collecting roller (101). Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to one of Claims 1 to 3 , further comprising: cooling means for cooling the catch roll (101), the cooling means being thermally coupled to the catch roll (101). Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to one of Claims 1 to 4 , further comprising: a bearing assembly for supporting the catch roller (101), the bearing assembly being adapted to align and / or position the catch roller (101). Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to one of Claims 1 to 5 , further comprising: a transport area bounded in the direction of the transport rollers (102) by the transport area (102t) and having a lateral boundary according to a width of a transported substrate; and an aperture (301), wherein the aperture (301) is spaced from the lateral boundary so that between the lateral boundary and an edge of the aperture (301) another gap is formed, and wherein the distance (101d) between the conveying surface and the outer circumference of the collecting roller (101) is smaller than the distance (301d) between the lateral boundary and the edge of the diaphragm. Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to one of Claims 1 to 6 wherein at least one transport roller (102) of the plurality of transport rollers has one or more circumferential grooves (102n) into which the catch roller (101) partially extends. Transport device (100a, 200a, 300a, 400a, 400b, 400c, 400d) according to Claim 7 , wherein the collecting roll (101) in the region of the circumferential grooves (102n) is formed tapered. A coating assembly (500), comprising: a vacuum processing chamber (512) in which a processing region (562) is disposed; A material source (560) for providing a gaseous coating material in the processing area (562); and a transport device according to one of the Claims 1 to 8th for transporting a substrate (202) through the processing area (562). Method (600) for operating a transport device according to one of Claims 1 to 8th , comprising: • arranging (601) a substrate on a plurality of transport rollers of the transport device; Driving (603) at least one of the plurality of transport rollers so that the substrate is transported by the plurality of transport rollers; Wherein the arranging of the substrate and / or the driving (605) of the at least one transport roller of the plurality of transport rollers takes place such that the substrate and the collecting roller of the transport device project onto the transport surface of the transport device, at least partially overlapping.

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