DE102017115963A1 - Eindruckhärteprüfgerät - Google Patents

Abstract

The invention relates to an indentation hardness tester (1) with an indenter (92) which, in addition to microscope images (102), also generates an overview image (100) and a method for recording an overview image (100) and several microscope images (102) in the region of the overview image ( 100) for accurately positioning the hardness test points on the sample surface (42). For this purpose, an overview objective (50) is integrated in the objective turret (30) and the objective turret (30) defines a predefined objective position for image recording (34) vertically above the sample (40) relative to the device frame (12) and one or more inactive objective positions (FIG. 35), in which the respective lenses are pivoted out of operation, wherein by rotation of the objective turret (30) alternately one of the microscope objectives or optical components of the overview lens (50) from an inactive lens position (35) in the lens position for image recording (34) vertically above the sample (40) are pivoted to the same lens position at the same location in the xy plane relative to the device frame (12) with the respective swiveled microscope objective (32a-f) or the optical components of the overview lens (50) and with the same optical Beam axis perpendicular to the xy plane the overview image (100) and the microscope images (10 2) from the sample surface (42).

Description

Field of the invention

The invention relates to an indentation hardness tester having an indentor which, in addition to microscope images, also generates an overview image and a method for recording an overview image and a plurality of microscope images in the region of the overview image for clearly and accurately positioning the hardness test sites on the sample surface.

Background of the invention

Impression hardness testers, often simply referred to as hardness testers, are devices that perform comparative tests to determine hardness on a sample surface. The methods of Shore, Vickers, Brinell or Rockwell are typically used most frequently. An impression hardness tester has a so-called indenter, with which the sample is loaded on its surface with a defined force over a predetermined period of time. For this purpose, the indenter has a defined sample tip which, depending on the hardness test method, can be, for example, pyramidal, conical or spherical. The indenter leaves an impression or impression in the sample surface whose depth and lateral extent in the x-y plane is a measure of the hardness of the sample at the test site. For example, in the Vickers hardness test method, the indenter has a pyramidal tip which leaves a pyramidal impression, the size of the ideally square border of the indentation on the sample surface being a measure of the hardness of the specimen at the test site.

In the meantime, indentation hardness testers are available on the market, which are equipped with a microscope and a computer system in order to be able to position the test points on the sample surface in a microscope-supported manner and, if necessary, to carry out the hardness test partially or fully automatically. An example of such a computer-controlled indentation hardness tester is the Carat 930 the applicant, cf. www.atm-m.de.

Such impression hardness testers typically have a microscope device with a nosepiece on which a plurality of microscope objectives with different magnification factors are arranged in order to be able to view the sample surface with different magnification. Typical microscope devices for indentation hardness testers have microscope objectives with magnification factors of 2.5x to 100x. The sample to be examined is placed on a sample table to optically examine it with the microscope device and to perform the hardness test. The indenter can be attached to a test head, e.g. integrated in the objective turret or mounted in the center of the lens turret of the equipment rack and is typically driven vertically (in the z-direction) with a predefined force from above and into the sample surface, wherein a load cell measures the imprinting force. The sample table is typically formed as an x-y coordinate table, i. is two-dimensionally movable in the x-y plane perpendicular to the movement of the indenter (z-direction) in order to examine and test the sample surface at any desired location.

The microscope images taken with the microscope device typically cover a relatively small area of the sample surface, even at the smallest available magnification factors of the microscope objectives of, for example, 5x or 2.5x. Thus, the size of the section of the sample surface which can be recorded with the microscope device with a 5x microscope objective, typically of the order of about 2 mm × 2 mm. In such small sections, it may be difficult for the user to orient himself. For positioning the test points for hardness testing, it may therefore be advantageous to have a larger-area overview image. For this purpose, some impression hardness testers have an overview camera, which is arranged offset in the axial direction in front of the microscope objectives. This has the disadvantage that the sample table with the sample for recording the overview image from the position in which the microscope images are taken away must be moved forward under the overview camera remote from the microscope image recording position in the xy plane in order to record the overview image there and then must be moved back into the microscope image recording position. This results, among other disadvantages in relation to the precision in the positional association between the overview image and the microscope images. In addition, this procedure slows down the test procedure. Furthermore, a part of the table stroke for approaching the viewing position is "consumed" with the overview camera, in other words, there is a loss of effective table lift.

In other indentation hardness testing systems, the sample is first piecewise scanned with one of the relatively low magnification microscope objectives to acquire a plurality of microscope images along the regions of interest of the sample surface. Subsequently, the plurality of microscope images taken with the microscope consuming a Composite picture composed. Such a method is in the EP 1 559 059 B1 described.

A disadvantage of this method is the considerable time required for the production of the composite image composed of the plurality of microscope images. This process for creating the composite image can take up to several minutes, since hundreds of microscope images may have to be taken in order to produce a sufficient composite image. Furthermore, the scanning of the sample surface, especially if done manually, is cumbersome. In addition, the composite image requires a high storage capacity and processing power for processing. Another problem is that at the image transitions of the microscope images, i. At the edges where the microscope images are assembled into the composite image, positional errors can occur, which can be detrimental to the quality of the composite image.

All in all, the systems described above are in many ways in need of improvement.

General description of the invention

The object of the invention is therefore to provide a hardness tester which enables a fast, comfortable and clear but nevertheless precise positioning of the hardness test points on the sample surface and thus of the entire test process.

A further aspect of the object is to provide a hardness tester which simply and quickly generates a high-quality overview image of the sample surface in which, if necessary, a precise picture-in-picture display of the live microscope image can be made.

A further aspect of the object is to provide a hardness tester which simply and quickly generates a high-quality overview image of the sample surface and effectively utilizes the sample table lift in the x-y plane, depending on the positioning of the indenter.

A further aspect of the object is to provide a method for operating a hardness tester by means of which a high-quality overview image of the sample surface can be generated simply and quickly and, if necessary, a precise picture-in-picture overlay of the live microscope image can be made , and wherein the sample table lift in the xy plane can be effectively utilized depending on the positioning of the indenter.

The object of the invention is solved by the subject matter of the independent claims. Advantageous developments of the invention are defined in the subclaims.

According to the invention, an indentation hardness tester is provided for hardness testing by which the surface hardness of samples, e.g. according to Vickers, Knoop, Brinell and / or Rockwell. The indentation hardness tester comprises a device frame, e.g. by and large in C-shape and in particular has a test head on the upper part of the equipment rack. The indentation hardness tester further includes a sample table for placing or holding a sample under test under the test head. The probe may, but need not, be movable in the z-direction (vertically) to indent an indenter into the sample surface and / or to focus the optical systems on the sample surface. Alternatively, the sample table can also be moved vertically to perform these functions.

The indentor is pressed into the sample surface of the sample placed on the sample table with a defined indentation force in order to determine the hardness of the sample surface on the basis of the impression in the sample surface, in particular on the basis of its extension in the x-y plane.

The impression hardness tester furthermore has a microscope device with one or more microscope objectives, in particular with different magnification factors, and with a microscope camera for recording microscope images of the sample surface through the microscope objective (s) with magnification factor. If different microscope lenses are available, images with different magnification factors can be recorded. In particular, this or the microscope objectives have a magnification factor greater than 1x, in particular greater than or equal to 2.5x. Therefore, the image areas taken with the microscope objectives are of the usual size of an embedded sample, e.g. in the order of about 40 mm x 40 mm, all considerably smaller than the entire sample surface. A 2.5x magnifying microscope objective forms only an image detail on the order of about 3.4 mm x 2.7 mm and a 50x magnifying microscope objective an image detail in the order of about 170 microns x 140 microns from. The microscope device preferably has a plurality of microscope objectives with magnification factors of 2.5x, 5x, 10x, 20x, 50x and / or 100x.

The impression hardness tester according to the invention also has a separate optical in addition to the microscope device Overview imaging system with an independent of the or the microscope objective overview lens for recording an overview image of the sample surface through the overview lens on. The overview lens is in particular a macro lens which does not enlarge, but downsizes, ie has a "magnification factor" of less than 1x. The magnification of the microscope objectives is all greater than 1x, in particular greater than or equal to 2.5x, whereas the magnification of the overview or macro objective less than 1x, preferably less than 0.5x, preferably less than 0.25x, eg in the range of 0th , 13x +/- 0.1. Accordingly, the overview image forms a considerably larger part of the sample surface than the microscope objective with the lowest magnification. If necessary, the overview objective may even cover the entire sample surface, eg with embedded samples, but not necessarily. The overview image preferably forms a region of the sample surface which is greater than 10 mm × 10 mm, preferably greater than 20 mm × 20 mm, preferably greater than 30 mm × 30 mm, for example a region of the sample surface of size 42 mm × 42 mm ,

Furthermore, the indentation hardness tester has a mechanical objective changer device with at least one first and second objective mounting location, the microscope objective being attached to or mounted on the first objective mounting location and at least parts of the overview objective being mounted on the second objective mounting location. The lens changer may be e.g. be designed as a nosepiece and the overview or macro lens is preferably integrated into the nosepiece.

The lens changer defines in the xy plane relative to the apparatus frame a defined, non-variable lens position for image acquisition vertically above the sample, which may also be referred to as an active lens position, and one or more inactive lens positions in which lenses currently not in use be put on the way and parked so to speak. In the case of an objective turret, in particular, it has a circumference with a certain number of lens installation locations, e.g. between 4 and 10 lens mounting locations, which are all arranged on the circumference, so that by rotation of the nosepiece, the respective desired lens in the, in the x-y plane relative to the device frame non-variable lens position for image acquisition can be pivoted on the sample.

Accordingly, the lens changing device thus defines at least a first and second position, or at least as many positions as lens mounting locations, so that each position of the lens changing device of the lenses, or at least optical components thereof, in the fixed relative to the device frame lens position to Image capture is positioned over the sample. With reference to at least one microscope objective and an overview or macro objective, in the first position optical components of the overview objective are positioned in the objective position for image acquisition and the microscope objective is positioned in an inactive objective position and in the second position the microscope objective is in the, i. positioned in the same lens position for imaging and the optical components of the overview lens are positioned in an inactive lens position. Thus, by means of a movement of the lens changing device, either the optical components of the overview lens or the or one of the microscope objectives from the inactive lens position can be moved to the lens position for image acquisition, depending on the position of the lens changing device, either the optical components of the overview lens or to position the or one of the microscope objectives at the same position in the xy plane relative to the device frame and to be able to record a microscope image as well as an overview image with the overview objective at the same position in the xy plane relative to the device frame both with the microscope objective; in particular without moving the sample table in the xy plane.

In an advantageous manner, an overview image can thus be generated with the overview imaging system without having to drive away the sample under the objective position for image acquisition. As a result, high precision of the positional assignment of the microscope image or images within the overview image can be ensured. Furthermore, the adjustment of the objective changer, e.g. make the rotation of the objective turret relatively fast compared to extensive movement of the x-y stage, which benefits the short measurement time. In particular, it can thus be avoided that the sample must be moved away from the position under the microscope objective to a camera position removed in the x-y plane in order to record the overview image.

Furthermore, with the overview imaging system according to the invention, it is possible to produce a composite image as opposed to assembling a plurality of microscope images, as shown in FIG EP 1 559 059 B1 considerable time is saved. In addition, complete, at least substantial coverage of the entire sample surface can be achieved without "dead" areas being present in the overview image.

Nevertheless, an extensive shift of the sample table, eg by a few centimeters, be omitted under a in the xy plane at another place than the microscope lenses attached, so axially parallel to the microscope lenses offset overview camera to record the overview image.

In other words, the invention can provide an overview image through the overview objective and at least one microscope image centered thereon through the microscope objective without, at least without substantial displacement of the sample in the x-y plane, i. without being included in the x-y plane, at least without substantial displacement of the sample stage. Of course, this should not rule out that the sample table is moved on a microscopic scale in order to record a plurality of live microscope images at different locations on the sample surface within the overview image. In any case, the stroke of the sample table for the microscope images and the hardness test can be better utilized and it is not a large part of the sample table lift for starting an axially parallel offset survey camera "wasted".

The overview objective preferably has an optical axis which defines an optical reference axis extending transversely or perpendicular to the x-y plane when the optical components of the overview objective are positioned in the objective position for image recording. The optical axis of the microscope objective (s), in turn, preferably coincide identically or coaxially with the optical reference axis when, instead of the optical components of the overview objective, one of the microscope objectives is now positioned in the objective position for imaging. In other words, the optical axes of the microscope objective or lenses coincide with the optical axis of the overview objective on the sample coaxially with respect to the respective position of the objective changing device in which the respective objective is positioned in the single and thus in the same objective position for image acquisition , As a result, high precision can be ensured.

Preferably, the optical system of the microscope device and / or the overview imaging system are aligned perpendicular to the sample surface when the respective associated lens is positioned in the lens position for image recording and the sample is placed on the sample table, which is the precision of the image and the positional allocation beneficial.

Accordingly, at least a part of the beam path of the microscope device when the microscope objective is positioned in the objective position for image acquisition, and at least part of the optical path of the overview imaging system when the optical components of the overview objective are positioned in the objective position for image acquisition coincide coaxially, resulting in Precision of the picture contributes.

According to a preferred embodiment, the overview imaging system comprises an overview camera separate from the microscope camera, by means of which the overview image of the sample surface is taken by the overview lens when the optical components of the overview lens are positioned in the lens position for image acquisition. In this case, the overview lens forms at least a part of the lens system for the overview camera and the beam path for the overview camera, when the optical components of the overview lens are positioned in the lens position for image capture, in particular coincides with the beam path of the microscope device when the microscope objective positioned in the lens position for image acquisition is, partly coaxially together.

If desired, the overview camera can have a higher resolution than the microscope camera, which on the one hand brings a high image quality of the overview image and on the other hand a fast image processing of the microscope images in line. For example, For example, the microscope camera may use a ½ inch chip (eg CMOS) with a resolution of 1.3 or 5 megapixels, while the overview camera may use a 2/3-inch chip (eg CMOS) with 5 megapixels, 10 megapixels or even 18 megapixels used. Nevertheless, the memory requirements for the overview image remains within practical limits without further image processing.

As already stated above, according to a preferred embodiment, the lens changing device can be designed as an objective turret, which provides the first and second and possibly further bays for the lenses. Accordingly, the microscope objective is attached to the first objective mounting location of the objective turret and the optical components of the overview objective, ie the overview objective at least partially, are attached or installed on the second objective mounting location of the objective turret on the same circumference, ie at the same radial distance from the axis of rotation of the objective revolver as the microscope objective , Possibly. Further microscope objectives are arranged on further lens installation sites on the same circumference, that is to say in the same radial distance from the axis of rotation of the objective revolver as the overview or macro objective. By rotation of the objective turret, either one of the microscope objectives or the overview or macro objective can then be alternately swiveled into the lens position for image acquisition above the sample and the other in each case Lenses are swung out in inactive lens positions of the nosepiece. The integration of the overview lens or macro objective in the nosepiece, in particular on the same circumference, ie the same radial distance from the axis of rotation of the nosepiece as the one or more microscope objectives has proved to be particularly advantageous to with the microscope objective and the overview or macro lens the same xy position relative to the device frame of each pivoted in the lens position for image pickup objective to image the sample surface.

Preferably, the microscope device comprises a microscope illumination device which illuminates the sample surface when the microscope objective is positioned in the objective position for image acquisition above the sample. The overview imaging system preferably comprises a second separate overview illumination device which illuminates the sample surface when the optical components of the overview objective are positioned in the objective position for image acquisition above the sample. Advantageously, separate illumination devices can be adapted separately to the different illumination requirements in the microscope and macro range.

The illumination device of the microscope device is preferably designed as a coaxial illumination for bright field illumination, whereby a sufficient brightness can be achieved even at high magnification factors. For this, e.g. a Köhler LED lighting can be used. For example, the illumination device of the overview imaging system obliquely illuminates the sample surface as non-coaxial illumination to effect dark field illumination. This is simple and avoids reflections e.g. of polished metal sample surfaces. Alternatively, however, a bright field illumination can be used.

According to a preferred development of the invention, the overview imaging system is set up to record the overview image only in a light wavelength interval which is smaller than the width of the visible spectrum. As a result, chromatic errors in the overview optics can be reduced. The overview screen is displayed on a monitor in black and white. Preferably, the width of the wavelength interval is less than 200 nm, preferably less than 100 nm, e.g. the overview image is recorded with light of a wavelength of 630 nm +/- 30 nm.

Preferably, the numerical aperture in the object of the overview imaging system is less than 0.055, preferably less than 0.04, preferably less than 0.025, more preferably less than 0.02, e.g. 0.016. In particular, the numerical aperture of the overview imaging system is smaller than the numerical aperture of all microscope objectives or smaller than the numerical aperture of the microscope objective with the smallest magnification factor or smaller than the numerical aperture of the imaging optics of the microscope device.

It has proved to be particularly advantageous if the optics of the overview imaging system have a depth of focus which is small for a macro objective. Due to the shallow depth of field, a high contrast of the overview image can be ensured despite perpendicular viewing of metallically specimen surfaces with the overview or macro objective.

However, low magnification is typically associated with a small numerical aperture, ie, the smaller the magnification factor, the smaller the numerical aperture is typically. However, a small numerical aperture typically causes a large depth of field. The index objective therefore has a relatively small depth of field due to the numerical aperture of 0.016 at a factor of 0.13x despite this reduction factor. For the overview objective, the ratio of magnification divided by the numerical aperture is preferably smaller or equal 30 , preferably less than or equal to 20 , more preferably less than or equal to 10 ,

In particular, an overview lens is used with a focal length that is smaller than the focal length of a microscope objective with a magnification factor of 1x. The overview objective preferably has a magnification factor of less than 1x and a focal length of less than 160 mm, preferably less than or equal to 100 mm, preferably less than or equal to 50 mm, particularly preferably less than or equal to 25 mm, e.g. about 14 mm +/- 10 mm.

The overall length (the distance of the lower edge of the corresponding lens from the associated camera chip) of the overview imaging system is preferably smaller than the overall length of the optical system of the microscope device. The overall length of the overview imaging system is preferably less than or equal to 300 mm, preferably less than or equal to 200 mm, particularly preferably less than or equal to 150 mm. The overall length of the optical system of the microscope device is preferably greater than 300 mm.

According to a preferred embodiment of the invention, the microscope device comprises a first beam splitter, which is arranged in the beam path of the microscope device and via which at the same time the irradiated light of the Microscope illumination device for illuminating the sample surface by the microscope objective coupled into the microscope beam path and over which the light collected by the microscope objective imaging light is coupled from the sample surface into the microscope camera when the microscope objective is positioned in the lens position for image acquisition on the sample to take a microscope picture. As a result, the light of the microscope illumination device can be irradiated through the respectively pivoted-in microscope objective onto the respectively depicted cutout and a high light intensity can be ensured independently of the magnification factor of the respectively pivoted microscope objective in the bright field illumination.

If the overview imaging system comprises an overview camera separate from the microscope camera, by means of which the overview image of the sample surface is taken by the overview lens, when the optical components of the overview lens are positioned in the lens position for image acquisition, it is advantageous if the overview imaging system comprises a second beam splitter, which is arranged in the beam path of the overview imaging system. The imaging light collected by the overview objective is coupled out of the sample surface into the overview camera via this second beam splitter when the optical components of the overview objective are positioned in the objective position for image recording above the sample in order to record the overview image. In other words, the beam paths of the microscope objective (s) and of the overview or macro objective coincide, ie partially, coaxially, from the sample surface to the second beam splitter when the respective objective is pivoted into the objective position for image acquisition and the second beam splitter splits the beam paths into a stationary part of the optics on the nosepiece to image the image of the sample surface depending on pivoted lens on the microscope camera or on the overview camera. In other words, the second beam splitter separates the beam path of the microscope device and the beam path of the overview imaging system.

1. i) das mit der Mikroskopeinrichtung aufgenommene Mikroskopbild bezüglich der Probenoberfläche zu fokussieren, wenn das Mikroskopobjektiv in der Objektivposition zur Bildaufnahme über der Probe positioniert ist und/oder
2. ii) das mit dem Übersichtsabbildungssystem aufgenommene Übersichtsbild bezüglich der Probenoberfläche zu fokussieren, wenn die optischen Komponenten des Übersichtsobjektivs in der Objektivposition zur Bildaufnahme über der Probe positioniert bzw. eingeschwenkt sind und/oder
3. iii) den Eindringkörper mit der definierten Eindruckkraft in die Probenoberfläche einzudrücken.

Preferably, the indentation hardness tester comprises a lifting mechanism by means of which a vertical relative displacement between the indenter fastened to the test head and the sample table is carried out

1. i) focusing the microscope image taken with the microscope device with respect to the sample surface when the microscope objective is positioned in the objective position for image acquisition above the sample and / or
2. ii) focusing the overview image taken with the overview imaging system with respect to the sample surface when the optical components of the overview objective are positioned or pivoted in the objective position for image acquisition over the sample and / or
3. iii) press the indenter into the sample surface with the defined indentation force.

For this purpose, either the probe or the sample table can be moved vertically, which is also referred to as "movable head" or "movable stage".

In particular, the indentation hardness tester comprises a sample table which can be fastened or fastened in particular in a xy-plane, preferably computer-controlled and / or manually, to which the sample can be computer-controlled and / or manually moved two-dimensionally in the xy plane under the microscope objective in order to image the respective image section of interest to the microscope camera when the microscope objective is positioned or pivoted in the objective position for image acquisition above the sample.

It is particularly advantageous for the operation by the user when a computer software stores the overview image recorded with the overview imaging system and displays the stored overview image on a monitor and the live microscope image currently recorded with the microscope device as a picture-in-picture overlay into the stored image Overview screen appears live. The user can then zoom in from the overview image, which is not composed of microscope images, into the instantaneous live image recorded by the currently swiveled microscope objective in order to mark the exact locations for the hardness test, which are then approached fully automatically if necessary. If another microscope objective is then swiveled in at a different magnification factor, the size of the frame of the live overlay changes in the stored overview image and it can in turn be zoomed into the new live image. Of course, the sample table can also be moved in the x-y plane, which leads to a shift of the frame with the live overlay in the overview image.

• ein Gerätegestell mit einem Prüfkopf,
• einen Probentisch, auf welchem die zu prüfende Probe, z.B. mittels einer Probenhalterung, platzierbar ist,
• einen Eindringkörper zum Eindrücken in die Probenoberfläche der auf dem Probentisch platzierten Probe mit einer definierten Eindruckkraft, um anhand des Eindrucks oder Abdrucks in der Probenoberfläche die Härte der Probenoberfläche zu bestimmen,
• eine Mikroskopeinrichtung mit einer Mikroskop-Beleuchtungseinrichtung, mit einem oder mehreren Mikroskopobjektiven und einer Mikroskopkamera zur Aufnahme von Mikroskopbildern der Probenoberfläche durch jeweils eines der Mikroskopobjektive mit einem Vergrößerungsfaktor größer als eins,
• ein optisches Übersichtsabbildungssystem mit einem Übersichtsobjektiv und einer Übersichtskamera zur Aufnahme eines verkleinerten Übersichtsbildes der Probenoberfläche durch das Übersichtsobjektiv, um einen wesentlich größeren Bereich der Probenoberfläche zu erfassen als mit dem oder den Mikroskopobjektiven,
• einen Objektivrevolver mit zwei oder mehr Objektiveinbauplätzen, wobei das Mikroskopobjektiv an einem ersten der Objektiveinbauplätze und zumindest Teile des Übersichtsobjektivs an einem zweiten der Objektiveinbauplätze an- oder eingebaut sind,
• wobei der Probentisch und der Prüfkopf in einer x-y-Ebene relativ zueinander verschiebbar sind, um jede Stelle auf der Probenoberfläche zur Betrachtung und Härteprüfung anfahren zu können,
• wobei der Probentisch und der Prüfkopf in z-Richtung relativ zueinander verschiebbar sind, um das oder die Mikroskopobjektive und/oder das Übersichtsobjektiv auf die Probenoberfläche zu fokussieren,
• wobei der Objektivrevolver relativ zu dem Gerätegestell eine vordefinierte Objektivposition zur Bildaufnahme senkrecht über der Probe und eine oder mehrere inaktive Objektivpositionen, in welchen die jeweiligen Objektive außer Betrieb weggeschwenkt sind, definiert, und wobei das Makroobjektiv auf demselben Umfang wie das oder die Mikroskopobjektive in den Objektivrevolver integriert ist, so dass mittels Drehung des Objektivrevolvers wechselweise eines der Mikroskopobjektive oder das Makroobjektiv aus einer der inaktiven Objektivpositionen in die Objektivposition zur Bildaufnahme senkrecht über der Probe eingeschwenkt wird, um in derselben Objektivposition an derselben Stelle in der x-y-Ebene relativ zu dem Gerätegehäuse und mit derselben objektivseitigen Strahlachse senkrecht zur x-y-Ebene mit dem jeweils eingeschwenkten Mikroskopobjektiv oder Makroobjektiv das Übersichtsbild und die Mikroskopbilder von der Probenoberfläche aufzunehmen,
• wobei zumindest ein Strahlteiler umfasst ist, welcher die Strahlengänge der Mikroskopeinrichtung und des Übersichtsabbildungssystems ausgehend von einer objektivseitig zusammenfallenden Strahlachse zu der Mikroskopkamera einerseits und zu der Übersichtskamera andererseits aufteilt.

According to a preferred embodiment of the invention, therefore, an indentation hardness tester for hardness testing on sample surfaces is provided, which comprises:

• a device frame with a test head,
• a sample table on which the sample to be tested can be placed, eg by means of a sample holder,
• a penetrator for impressing into the sample surface of the sample placed on the sample table with a defined impression force in order to determine the hardness of the sample surface on the basis of the impression or impression in the sample surface,
• a microscope device with a microscope illumination device, with one or more microscope objectives and a microscope camera for taking microscope images of the sample surface through in each case one of the microscope objectives with a magnification factor greater than one,
• an optical overview imaging system with an overview objective and an overview camera for recording a reduced overview image of the sample surface through the overview objective in order to acquire a substantially larger area of the sample surface than with the microscope objective (s),
• a nosepiece having two or more lens mounting locations, wherein the microscope objective is attached to or installed at a first one of the lens mounting locations and at least portions of the overview objective are mounted to a second one of the lens mounting locations;
• wherein the sample table and the test head are displaceable relative to one another in an xy plane in order to be able to approach each point on the sample surface for viewing and hardness testing,
• wherein the sample table and the test head are displaceable relative to one another in the z direction in order to focus the microscope objective (s) and / or the overview objective onto the sample surface,
• wherein the nosepiece relative to the device frame defines a predefined lens position for imaging vertically above the specimen and one or more inactive lens positions in which the respective lenses are tilted out of operation, and wherein the macro lens is on the same circumference as the one or more microscope objectives in the nosepiece is integrated, so that by rotation of the nosepiece alternately one of the microscope objectives or the macro lens is pivoted from one of the inactive lens positions in the lens position for image recording vertically above the sample to the same lens position at the same point in the xy plane relative to the device housing and to record the overview image and the microscope images from the sample surface with the same lens-side beam axis perpendicular to the xy plane with the respectively pivoted-in microscope objective or macro objective
• wherein at least one beam splitter is included, which divides the beam paths of the microscope device and the overview imaging system starting from an objectively coincident beam axis to the microscope camera on the one hand and to the overview camera on the other hand.

• Bereitstellen eines Härteprüfgeräts mit einem Gerätegestell, einem Probentisch, einem Eindringkörper, einer Mikroskopeinrichtung mit zumindest einem Mikroskopobjektiv, einem optischen Übersichtsabbildungssystem mit einem Übersichtsobjektiv, ggf. einer Probenhalterung und einer Objektiv-Wechseleinrichtung, insbesondere wie vorstehend beschrieben,
• Betätigen der Objektiv-Wechseleinrichtung und damit Positionieren von optischen Komponenten des Übersichtsobjektivs in der Objektivposition zur Bildaufnahme senkrecht über der Probe,
• Aufnehmen eines Übersichtsbildes mit dem Übersichtsabbildungssystem,
• Speichern des Übersichtsbildes,
• Betätigen der Objektiv-Wechseleinrichtung und dadurch Positionieren des Mikroskopobjektivs in der Objektivposition zur Bildaufnahme über der Probe und Positionieren der optischen Komponenten des Übersichtsobjektivs in einer inaktiven Objektivposition,
• Aufnehmen eines oder mehrerer Mikroskopbilder mit der Mikroskopeinrichtung, wobei sich der jeweils vergrößert abgebildete Ausschnitt der Probe in der x-y-Ebene an derselben Objektivposition zur Bildaufnahme relativ zu dem Gerätegestell befindet, an welcher die optischen Komponenten des Übersichtsobjektivs bei der Aufnahme des Übersichtsbildes positioniert waren.

The invention also relates to a method for recording an overview image and a plurality of microscope images in the region of the overview image on sample surfaces, comprising the following steps:

• Providing a hardness tester with a device frame, a sample table, an indenter, a microscope device with at least one microscope objective, an optical overview imaging system with an overview objective, possibly a sample holder and an objective changer, in particular as described above,
• Actuating the objective changing device and thus positioning optical components of the overview objective in the objective position for image recording vertically above the sample,
• Recording an overview image with the overview imaging system,
• Saving the overview picture,
• Actuating the objective changing device and thereby positioning the microscope objective in the objective position for imaging above the sample and positioning the optical components of the overview objective in an inactive objective position,
• Recording one or more microscope images with the microscope device, wherein each enlarged enlarged portion of the sample is in the xy plane at the same lens position for image acquisition relative to the device frame, on which the optical components of the overview lens were positioned when taking the overview image.

By means of the software, the live image currently recorded with the microscope device can be superimposed into the previously recorded and stored overview image, specifically on the basis of the sample table coordinates at the correct position in the overview image.

In the following, the invention will be described with reference to exemplary embodiments and with reference to FIG the figures explained in more detail, wherein the same and similar elements are partially provided with the same reference numerals and the features of the various embodiments can be combined.

list of figures

• 1 eine teilweise transparente perspektivische Darstellung eines Eindruckhärteprüfgeräts gemäß eines Ausführungsbeispiels der Erfindung,
• 2 eine vereinfachte schematische Frontansicht eines Eindruckhärteprüfgeräts gemäß eines Ausführungsbeispiels der Erfindung,
• 3 eine vereinfachte schematische Seitenansicht des Eindruckhärteprüfgeräts aus 2,
• 4 eine Ausschnittsvergrößerung aus 3,
• 5 eine perspektivische Darstellung des Objektivrevolvers,
• 6 eine schematische Schnittdarstellung durch den Prüfkopf entlang der Schnittlinie A-A in 2 mit dem Übersichtsobjektiv in der Objektivposition zur Bildaufnahme,
• 7 wie 6, wobei jedoch anstatt des Übersichtsobjektivs eines der Mikroskopobjektive in die Objektivposition zur Bildaufnahme eingeschwenkt ist,
• 8 eine schematische Schnittdarstellung durch den Objektivrevolver entlang der Schnittlinie B-B in 3 mit dem Übersichtobjektiv in der Objektivposition zur Bildaufnahme,
• 9 wie 8, wobei jedoch wie in 7 anstatt des Übersichtsobjektivs eines der Mikroskopobjektive in die Objektivposition zur Bildaufnahme eingeschwenkt ist,
• 10 ein Übersichtsbild, aufgenommen mit dem Übersichtsobjektiv in der in 6 und 8 dargestellten Stellung des Objektivrevolvers, mit live eingeblendetem Mikroskopbild, aufgenommen mit einem der Mikroskopobjektive in der in 7 und 9 dargestellten Stellung des Objektivrevolvers,
• 11 eine Darstellung des hineingezoomten Live-Mikroskopbildes aus 10.

Show it:

• 1 a partially transparent perspective view of an indentation hardness tester according to an embodiment of the invention,
• 2 a simplified schematic front view of an indentation hardness tester according to an embodiment of the invention,
• 3 a simplified schematic side view of the indentation hardness tester 2 .
• 4 an excerpt from 3 .
• 5 a perspective view of the nosepiece,
• 6 a schematic sectional view through the test head along the section line AA in 2 with the overview lens in the lens position for image recording,
• 7 as 6 , but instead of the overview objective, one of the microscope objectives is pivoted into the objective position for image recording,
• 8th a schematic sectional view through the nosepiece along the section line BB in 3 with the overview lens in the lens position for image recording,
• 9 as 8th , however, as in 7 instead of the overview objective, one of the microscope objectives is pivoted into the objective position for image acquisition,
• 10 an overview picture, taken with the overview lens in the in 6 and 8th shown position of the objective revolver, with live superimposed microscope image, recorded with one of the microscope objectives in the 7 and 9 illustrated position of the nosepiece,
• 11 a representation of the zoomed-in live microscope image 10 ,

Detailed description of the invention

Referring to 1 has the indentation hardness test system 1 a generally C-shaped device frame 12 (so-called "frame"), which has a vertical section 14 and two thighs 16 . 18 having, wherein the upper leg 18 at which the test head 28 with the nosepiece 30 vertically slidably attached, in 1 from the nosepiece 30 is covered. A device housing 10 houses the equipment rack 12 , some control elements and parts of the test head 28 , On the lower leg 16 is a sample stage that can be moved two-dimensionally in the xy plane 20 , also referred to as xy-coordinate table stored. All axes can be accessed through the control module of the computer system 26 , ie controlled by the software. The manual also via adjusting wheels 22 . 24 or via a joystick 25 controllable x and y axes adjust their speed to the respective lens. A scroll wheel allows a particularly fine dynamic control of the z-axis. The sample table 20 has in this example a travel in the x-direction of 250 mm and in the y-direction of 100 mm. The actual physical table lift is almost completely available for sample positioning during sample viewing and setting the test points. In other words, the effective table lift is at least as fast as the actual physical table lift. On the sample table 20 For example, up to eight embedded samples can be individually set up on corresponding eight sample locations.

On the upper leg 18 of the equipment rack 12 is the test head 28 attached, which has a nosepiece 30 with several microscope lenses 32a - 32f with different magnification factors (32e, f are in 1 not to be seen). By rotation of the inclined in this example at 45 ° mounted nosepiece 30 can any of the microscope lenses 32a to 32f be pivoted into the lens position for image capture. In the presentation of the 1 is the microscope objective 32c in the lens position for image recording 34 which the central foremost and in this example due to the inclined mounted nosepiece 30 also the lowest position on the nosepiece 30 is. Accordingly, in the illustrated rotary position of the nosepiece 30 with the microscope lens 32c the surface 42 a sample 40 (see. 7 and 9 ), which is on the sample table 20 will be examined. The focusing of the swiveled-in microscope objective takes place in the illustrated Eindrückhärteprüfgerät 1 by vertical displacement of the test head 28 along a vertical linear guide 44 (so-called "movable head"). Alternatively, the relative displacement between the test head 28 and the sample table 20 but also by a displacement of the sample table 20 be provided in the z-direction (so-called "movable stage").

Referring to the 5-9 the indentation hardness tester has an overview lens 50 in the form of a macro lens, which is in a slot 33g in the nosepiece 30 is integrated. The microscope objective 32c is located in the schematic representation of 6 in an upper inactive lens position 35 while the overview lens 50 in the front lens position for image recording 34 is pivoted, in which the optical axis A50 of the overview lens 50 perpendicular to the sample surface 42 or on the placement interface 21 of the sample table 20 stands to the sample 40 can be viewed vertically from above in the overview. In the in 6 shown state in which the nosepiece 30 in the overview S50 can, with the overview lens 50 So the overview image of the sample surface 42 be recorded. For this the sample surface becomes 42 diagonally from the front with an overview lighting 48 illuminated, which on a housing cover 54 holding the test head 28 accommodated, in the present example on a front housing slope 52 the housing cover 54 , is appropriate. The overview lighting 48 therefore does not radiate coaxial with the optical axis A50 of the overview lens 50 on the sample surface 42 but obliquely from the side, which simplifies the arrangement. Furthermore, a uniform illumination of the entire sample surface 42 be achieved to generate the overview image. With the overview imaging system shown in this embodiment 4 can with the overview camera 80 an area of 42 mm x 42 mm of the sample surface 42 be imaged.

Referring to 7 is the nosepiece 30 around its inclined axis of rotation A30 relative to 6 rotated, so that in the microscope objective position S32c of the nosepiece 30 the microscope objective 32c in the lower lens position for image recording 34 is pivoted. The microscope objective 32c is in a slot 33c of the nosepiece 30 grown. That in the slot 33g of the nosepiece 30 built-in overview lens 50 is in the in 7 shown microscope objective position S32c of the nosepiece 30 into the inactive nosepiece position 35 pivoted. Accordingly, the optical axis stands A32C of the microscope objective 32c in the lens position for image recording 34 perpendicular to the sample 40 or the sample table 20 to use the microscope lens 32c and the microscope camera 60 Microscope images from the sample surface 42 through the microscope lens 32c take.

The optical axis A50 of the overview lens 50 and the optical axis A32C of the microscope objective 32c run coaxially, or coincide identically together, if the respective lens 50 or 32c in the lens position for image recording 34 is pivoted, so if the respective lens 50 . 32c in the present example, in the lower nosepiece position, as shown in FIG 6 on the one hand and in 7 on the other hand is shown. In other words, let the overview lens 50 and the microscope objective 32c - as well as the other microscope objectives 32a . b . d . e . f - In the same image pickup position in the xy plane relative to the device frame 12 herein referred to as "lens position for image capture" 34 designated - position. If the microscope objective 32c in the lens position for image recording 34 is positioned defines the optical axis A32C of the microscope objective with respect to the device frame, a reference axis AR and the optical axis A50 of the overview lens 50 coincides coaxially or identically with the reference axis AR together, if the overview lens 50 in the lens position for image recording 34 is positioned.

This can be achieved by simply turning the nosepiece 30 - without moving the sample table 20 - the sample surface 42 on the one hand with the overview lens 50 and on the other hand with the microscope objective 32c be considered in the same place. More precisely, the microscope image and the overview image can be centered around the same location, ie the center of the microscope image and the center of the overview image can be without moving the objective table 20 coincide in the xy plane.

Of course, the other microscope lenses 32a . b . d . e . f in the same way by rotation of the nosepiece 30 in the same lens position for image acquisition 34 be pivoted, with their optical axes then coaxial with the optical axes A32C and A50 in each case based on the lens position for image acquisition 34 , or with the reference axis AR coincide coaxially. As a result, the overview picture with the overview lens can be displayed first 50 in the lens position for image recording 34 be recorded and then one or successively several different microscope objectives 32a to 32f in the lens position for image recording 34 be swung in and it is with all microscope lenses 32a to 32f ensures that with increasing magnification successively more and more enlarged sections of the sample surface 32 but with the same center, ie to be considered in the same place without the sample table 20 from the viewing position of the microscope device 2 has to be moved out. Of course, this should not rule out that the sample table 20 is moved to take a microscope image, which is not in the center of the overview image; but in any case, the sample table does not have to be moved widely to drive the sample under an axially parallel overview camera, since in the present case the overview objective 50 in the nosepiece 30 , on the same circle circumference U (see. 5 ), like the microscope lenses 32a to 32f is integrated, allowing it in exactly the same lens position for image capture 34 can be swung in the xy plane, like the microscope objectives 32a to 32f , In other words, the radial distance of the optical axes A32A to A32f the microscope lenses 32a to 32f and the optical axis A50 of the overview lens 50 from the axis of rotation A30 equal.

Referring to the 8th and 9 can the beam paths of different lenses 50 and 32c be explained in more detail.

In the in 8th shown overview S50 of the nosepiece 30 is the overview lens 50 in the lens position for image recording 34 vertically above the sample 40 and the microscope camera 60 is inactive. The beam path 56 when looking at the sample surface 42 with the overview lens 50 initially runs objectively perpendicular to the sample 40 or to the sample table 20 , The beam path 56 continues to run through the overview lens 50 vertically upwards in an optical distributor housing 70 which has an interior 72 defined, in which further optical components are incorporated for beam guidance and which not with the nosepiece 30 co-rotated, that is firmly attached to the probe. That of the sample surface 42 radiated and from the overview lens 50 collected light falls along the optical axis A50 of the overview lens 50 in a common inlet opening 74 of the optical distributor housing 70 and hits a beam splitter 76 in the form of a partially transparent mirror, which in the interior 72 is positioned. The beam splitter 76 reflects the light for the overview image by 90 ° to the side. The light is through a ballast optics 78 in front of the overview camera 80 on the CMOS chip 81 the overview camera 80 displayed. The optical distributor housing 70 therefore has an overview camera output 82 for the light for recording the overview image, which is preferably perpendicular to the common input 74 runs.

In the illustrated example, optical components of the overview or macro lens are 50 directly in the nosepiece 30 integrated, optical lenses. But it is also possible, for example, a deflection mirror (not shown) as the first optical component of the overview or macro lens 50 or the overview imaging system 4 at the slot 33g in the nosepiece 30 integrate to the beam path 56 of the overview imaging system 4 immediately above the sample 40 to divert and then collect with lenses and on the overview camera 80 map.

In the in 9 illustrated microscope objective position S32c is the microscope objective 32c in the lens position for image recording 34 , ie in the front or bottom position of the nosepiece 30 and the optical axis A32C of the microscope objective 32c is perpendicular to the sample 40 or the sample table 20 , The overview camera 80 is inactive. The beam path 58 when viewed through the microscope objective 32c runs from the sample surface 42 along the optical axis A32C first vertically upwards through the microscope objective 32c and enters the common entrance 74 in the interior 72 of the optical distributor housing 70 one. There, the light traverses the beam splitter in a straight line 76 , which for the overview camera 80 is provided. The light for taking the microscope image continues to run straight up vertically and passes through another beam splitter 84 in the form of another semitransparent mirror, to the microscope camera output 86 of the distributor housing 70 through a tube optic 87 , which the microscope camera 60 upstream, on the CMOS chip 61 the microscope camera 60 to be focused. The beam path 58 the microscope device 2 is therefore preferably completely straight line perpendicular to the sample 40 or to the sample table 20 , A microscope illumination device 88 illuminated at the same time by a lens system 90 and the microscope lens just swiveled in 32c the sample surface 42 by the irradiated light from the microscope illuminator 88 through the lens system 90 from the side to the beam splitter 84 meets and from this coaxially in the beam path 58 is coupled for receiving the microscope image. The microscope illumination device 88 is designed as Köhler's illumination, whereby the sample surface 42 can be effectively illuminated when taking the microscope images. The light of the microscope illumination device 88 Accordingly, the respective active in the lens position for image acquisition 34 swiveled through microscope objective. As a result, a bright illumination for the microscope images is achieved. The overview images are in dark field illumination with the obliquely irradiated light of the overview lighting device 48 (see. 6 ).

The nosepiece 30 rotates relative to the sample 40 and relative to the optical distributor housing 70 , as well as in this example relative to the inputs and outputs 74 . 82 . 86 of the optical distributor housing 70 , and each fixed to the probe 28 attached microscope camera 60 and overview camera 80 ,

Referring again to the 8th may be due to the fact that the beam path 56 of the overview imaging system 4 Objectively coaxial with the beam path 58 The microscope device is a high precision in the relative assignment of the xy positions of the microscope with the camera 60 recorded microscope images and with the Overview camera 80 recorded overview images are achieved.

As the optical systems of the indentation hardness tester 1 Commonly used for imaging of polished metal specimens can be viewed perpendicularly to the specular surface of the specimen 42 Reflections arise. It therefore becomes an overview imaging system 4 used with shallow depth of field. Due to the shallow depth of field of the overview imaging system 4 There is the advantage that the mirror image of the optical system, mirrored from the sample surface 42 , as blurred as possible. The depth of field can be determined, for example, by means of the numerical aperture of the overview lens 50 to be discribed. Preferably, the numerical aperture (in the object) of the macro-extraction-type overview lens is 50 0.016 in the present embodiment. The numerical aperture for a very low magnification (2.5x) microscope objective is usually 0.07. Generally speaking, therefore, the numerical aperture of the overview lens 50 smaller than the numerical aperture of all microscope objectives 32a - 32f , in particular smaller than the numerical aperture of the microscope objective with the lowest magnification. The numerical aperture of the overview objective in the object is preferably less than 0.055, preferably less than 0.04, preferably less than 0.025, particularly preferably less than 0.02.

This also contributes to the separation of the beam paths 58 . 56 the microscope camera 60 and the overview camera 80 in, as the hereby achievable positioning of the overview camera 80 is advantageous for an optical system with shallow depth of field. In particular, this makes it possible to use the beam path 56 for the overview camera 80 to keep relatively short. As already stated, it is an advantage of the shallow depth of field in the overview imaging system 4 in that, for samples with a polished metal surface, reflections on the metal surface do not unacceptably affect the acquisition of the overview image. The overview lens 50 delivers so with his trained as a macro lens overview lens 50 a virtually anti-reflection overview, which can be used as a starting point for a quick and easy planning of the hardness profiles.

In the present example, the overview imaging system generates 4 with its macro-optics a reduction of the sample surface in the figure about a factor 3 to 5 ,

The length of the overview picture system 4 , ie the length of the beam path 56 from the bottom edge 51 of the overview or macro lens 50 to the camera chip 81 , in this example is 110 mm, whereas the overall length d _M the optical system of the microscope device 2 for all microscope lenses 32a-f is considerably larger. For example, the length of the optical system of the microscope device 2 with the 2.5x microscope objective, ie the length of the beam path 58 from the bottom edge of the 2.5x microscope objective to the camera chip 61 , in this example d _M = 335 mm (in the 6-9 not shown to scale).

The focal length of the overview lens 50 in the present example is 14.1 mm with a "magnification factor" of 0.13x.

The overview or macro lens 50 is essentially paired or matched to the microscope objectives 32a-f formed, with the vertical adjustment between the overview or macro lens 50 and the microscope lenses 32a-f should not be larger than 50 mm.

Referring to 10 is an overview picture 100 shown in dark field illumination, which from the overview camera 80 taken and from the computer system 26 was saved. Then the nosepiece becomes 30 Turned to one of the microscope lenses, for example the microscope objective 32c in the lens position for image recording 34 swing in to the microscope objective 32c to create a microscope live image. This microscope live image 102 a small part of the sample 34 comes with a picture frame 104 from the computer system 26 in the saved overview picture 100 live.

Referring to 11 The user can now view the live microscope image 102 zoom in and out again ( 10 ).

Referring to the 4 is the indenter in the present embodiment 92 in the center of the nosepiece 30 arranged to start the previously defined in the microscope images test points by the sample table 20 is controlled accordingly. In other words, the axis is in this embodiment A92 of the indenter 92 slightly offset axially parallel to the rear relative to the optical beam axes A50 and A32C if the respective lens 50 . 32c in the lens position for image recording 34 is positioned. Ie that the sample 40 although to approach the test points with the indenter 92 something has to be moved backwards, but it is at least during the optical examination, a third approach point of the sample table 20 avoided, because the overview picture with the overview lens 50 and the microscope images with the microscope images coaxially at the same position 34 relative to the device frame 12 be recorded. It should not be excluded, that also the indenter 92 in a slot on the circumference U in the nosepiece 30 is integrated and also in the same position 34 relative to the device frame as for image acquisition by means of all lenses 50 . 32a to 32f can be pivoted or positioned.

In summary, the here presented impression hardness tester 1 various advantages, namely simple and fast recordings of an overview picture 100 with simultaneously high precision in the positional assignment between live microscope images 102 in the overview picture 100 in the case of complete or almost complete utilization of the table lift for the actual measurement and a short time for the production of the overview image 100 and thus a quick setup of the hardness test procedures.

The dynamic live image 102 provides through a lens-independent picture-in-picture function in the overview picture 100 a clear and flexible sample image. An automatic brightness control and autofocus for the microscope objectives 32a to 32f as well as for the overview lens 50 support a fast image result, which can be accelerated by automatic plane detection with automatic fast focus.

It will be apparent to those skilled in the art that the above-described embodiments are to be read by way of example, and that the invention is not limited to them, but that they can be varied in many ways without departing from the scope of the claims. It is also to be understood that the features, independently as they are disclosed in the specification, claims, figures, or otherwise, also individually define essential components of the invention, even if described together with other features.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• EP 1559059 B1 [0006, 0022]

Claims (20)

Indentation hardness tester (1) for hardness testing on sample surfaces, comprising a device frame (12), a sample table (20) for placing a sample to be tested (40), an indenter (92) for impressing into the sample surface (42) the sample (40) placed on the sample table (20) with a defined indentation force to determine the hardness of the sample surface (42) from the indentation in the sample surface (42), a microscope device (2) with at least one microscope objective (32a-f) and a microscope camera (60) for taking microscope images (102) of the sample surface (42) through the microscope objective (32a-f) with a magnification factor greater than 1x, an optical overview imaging system (4) having an overview objective (50) for acquiring an overview image of the sample surface (42) through the overview objective (50), a lens changing device (30) having at least a first and a second lens mounting location (33a-f, 33g), the microscope objective (32a-f) at the first lens mounting location (33a-f) and at least portions of the overview objective (50) at the second Lens mount (33g) are attached or installed, wherein the objective changing device (30) defines in a x-y plane relative to the device frame (12) a predefined objective position for imaging (34) over the sample (40) and at least one inactive objective position (35). wherein the lens changing device (30) defines at least a first and second position, such that in the first position optical components of the overview lens (50) in the lens position for image recording (34) and the microscope objective (32a-f) in an inactive lens position (35) are positioned and in the second position, the microscope objective (32a-f) in the same lens position for image recording (34) and the optical components of the overview lens (50) are positioned in an inactive lens position (35), so that by means of a movement Lens changing device (30) either the optical components of the overview lens (50) or the microscope objective (32a-f) from the inactive lens position (35) in the lens position for image recording (34) can be moved to depending on the position of the lens changing device (30), either the optical components of the overview lens (50) or the microscope objective (32a-f) at the same position ion (34) in the xy plane relative to the device frame (12) and at the same position (34) in the xy plane relative to the device frame (12) with both the microscope objective (32a-f) a microscope image (102 ) as well as the overview lens (50) to be able to record an overview image (100). Impression hardness tester (1) according to Claim 1 , wherein the magnification of the overview imaging system (4) is less than 1, preferably less than 0.5, preferably less than 0.3. An indentation hardness tester (1) according to any one of the preceding claims, wherein the overview objective (50) has an optical axis (A50) defining an optical reference axis (AR) transverse to the xy plane when the optical components of the overview objective (50) in the Lens position for image pickup (34) are positioned, and wherein the optical axis of the microscope objective (32a-f) coincides with the reference optical axis (AR) when the microscope objective (32a-f) is positioned in the lens position for image pickup (34). Indentation hardness tester (1) according to one of the preceding claims, wherein at least a part of the beam path (58) of the microscope device (2), when the microscope objective (32a-f) is positioned in the lens position for image recording (34), and at least a part of the beam path (56) of the outline imaging system (4), when the optical components of the overview lens (50) are positioned in the lens position for image pickup (34), coincide coaxially. Impression hardness tester (1) according to one of the preceding claims, wherein the overview imaging system (4) comprises an overview camera (80) separate from the microscope camera (60), by means of which the overview image (100) of the sample surface (42) is taken by the overview objective (50) in that the optical components of the overview objective (50) are positioned in the objective position for image recording (34), and wherein the overview objective (50) forms at least a part of the optical system (50, 78) for the overview camera (80) and the optical path ( 56) for the overview camera (80), when the optical components of the overview lens (50) are positioned in the objective position for image recording (34), with the beam path (58) of the microscope device (2), when the microscope objective (32a-f) in the lens position for image recording (34) is positioned, partially coaxial coincides. An indentation hardness tester (1) according to any one of the preceding claims, wherein said objective change means comprises a lens revolver (30) forming said first and second lens mounting locations (33a-f, g) for said lenses (32a-f, 50), said microscope objective (32a -f) is arranged on the first lens mounting location (33a-f) of the objective revolver (30) and the optical components of the overview objective (50) are at least partially attached or installed on the second lens mounting location (33g) of the objective revolver (30), and wherein Rotation of the objective turret (30) alternately either the microscope objective (32a-f) or the optical components of the overview lens (50) in the lens position for image recording (34) on the sample (40) pivoted and the respective other lens in an inactive lens position (35 ) of the objective turret (30) can be swung out. Impression hardness tester (1) according to one of the preceding claims, wherein the microscope device (2) comprises a microscope illumination device (88) which illuminates the sample surface (42) when the microscope objective (32a-f) in the objective position for image acquisition (34) the sample (40) is positioned and the overview imaging system (4) comprises a second overview illumination device (48) illuminating the sample surface (42) when the optical components of the overview lens (50) in the lens position for image recording (34) over the Sample (40) are positioned. Impression hardness tester (1) according to one of the preceding claims, wherein the illumination device (88) of the microscope device (2) is designed as coaxial illumination and / or the illumination device (48) of the overview imaging system (4) illuminates obliquely onto the sample surface (42) as non-coaxial illumination , An indentation hardness tester (1) according to any one of the preceding claims, wherein the overview imaging system (4) is adapted to pick up only in a light wavelength interval which is smaller than the width of the visible spectrum. Impression hardness tester (1) according to one of the preceding claims, wherein for the overview objective (50) the ratio of magnification divided by the numerical aperture is less than or equal to 30, preferably less than or equal to 20, particularly preferably less than or equal to 10. Impression hardness tester (1) according to one of the preceding claims, wherein the focal length of the overview objective (50) is less than 160 mm, preferably less than or equal to 100 mm, preferably less than or equal to 50 mm, particularly preferably less than or equal to 25 mm. Indentation hardness tester (1) according to one of the preceding claims, wherein the overall length (du) of the overview imaging system (4) is smaller than the overall length (d _M ) of the optical system of the microscope device (2) and / or wherein the overall length (du) of the overview imaging system ( 4) is less than or equal to 300 mm, preferably less than or equal to 200 mm, particularly preferably less than or equal to 150 mm. Impression hardness tester (1) according to one of the preceding claims, wherein the microscope device (2) comprises a first beam splitter (84), which is arranged in the beam path of the microscope device (2) and via which at the same time the incident light of a microscope illumination device (88) for illumination coupling the sample surface (42) through the microscope objective (32a-f) into the microscope beam path (58) and decoupling the imaging light collected by the microscope objective (32a-f) from the sample surface (42) into the microscope camera (60), when the microscope objective (32a-f) is positioned in the objective position for imaging (34) above the sample (40) to capture a microscope image (102). Imprint hardness tester (1) according to one of the preceding claims, wherein the overview imaging system (4) comprises an overview camera (80) separate from the microscope camera (60), by means of which the overview image (100) of the sample surface (42) is picked up by the overview objective (50) if the optical components of the overview objective (50) are positioned in the lens position for image acquisition (34), wherein the overview imaging system (4) comprises a second beam splitter (76) which is arranged in the beam path (56) of the overview imaging system (4) and via which the imaging light collected by the overview objective (50) is transferred from the sample surface (42) into the overview camera ( 80) when the optical components of the overview lens (50) are positioned in the lens position for image pickup (34) over the sample (40) to capture the overview image (100). Indentation hardness tester (1) according to one of the preceding claims, comprising a lifting mechanism (44) by means of which a relative displacement between the indenter (92) and the sample table (20) can be carried out to i) the microscope image (102) taken with the microscope device (2). with respect to the sample surface (42), when the microscope objective (32a-f) is positioned in the objective position for imaging (34) over the sample (40), and ii) the overview image (100) taken with the overview imaging system (4) to focus the sample surface (42) when the optical components of the overview lens (50) are positioned in the objective position for imaging (34) over the sample (40) and / or iii) the indenter (92) having the defined indentation force into the sample surface (42) depress. Indentation hardness tester (1) according to one of the preceding claims, wherein the sample table (20) is designed to be two-dimensionally movable in an xy plane in order to move the sample (40) computer-controlled and / or manually two-dimensionally in the xy plane under the microscope objective (32a-f ) to image the respective image section of interest to the microscope camera (60) when the microscope objective (32a-f) is positioned in the lens position for image acquisition (34) over the sample (40). Indentation hardness tester (1) according to one of the preceding claims, comprising a computer system (26) which is set up to store the overview image (100) recorded with the overview imaging system (4) and display it on a monitor, which is currently connected to the microscope device (2). recorded live microscope image (102) in the stored overview image (100) live. Indentation hardness tester (1) for hardness testing on sample surfaces, comprising a device frame (12) with a test head (28), a sample table (20) on which the sample to be tested (40) can be placed, an indenter (92) for impressing into the sample surface (42) the sample (40) placed on the sample table (20) with a defined indentation force to determine the hardness of the sample surface (42) from the indentation in the sample surface (42), a microscope device (2) with a microscope illumination device (88), with one or more microscope objectives (32a-f) and a microscope camera (60) for taking microscope images (102) of the sample surface (42) through in each case one of the microscope objectives (32a). f) with a magnification factor greater than one, an optical overview imaging system (4) with a macro objective (50) and an overview camera (80) for capturing a reduced overview image (100) of the sample surface (42) by the macro objective (50) in order to capture a substantially larger area of the sample surface (42) than with the microscope objective (32a-f), a lens revolver (30) having two or more lens mounting locations (33a-g), wherein the microscope objective (32a-f) at a first (33a-f) of the lens installation locations and at least portions of the macro-objective lens (50) at a second (33g) of the lens installation locations are attached or installed, wherein the sample table (20) and the test head (28) are displaceable relative to one another in an x-y plane in order to be able to approach each location on the sample surface (42) for viewing and hardness testing, wherein the sample stage (20) and / or the test head (28) are displaceable in the z-direction relative to one another in order to focus the microscope objective (s) (32a-f) and / or the macro objective (50) on the sample surface (42), wherein the objective turret (30) has a predefined lens position for image recording (34) vertically above the sample (40) relative to the device frame (12) and one or more inactive objective positions (35) in which the respective objectives (32a-f, 50). out of operation, and wherein the macro lens (50) on the same circumference (U) as the one or more microscope objectives (32a-f) in the nosepiece (30) is integrated, so that by means of rotation of the nosepiece (30) alternately a the microscope objective (32a-f) or the macro objective (50) from one of the inactive lens positions (35) in the lens position for image recording (34) is swiveled vertically above the sample (40) in the same position in the xy- Plane relative to the device housing (10) with the respectively pivoted-in microscope objective (32a-f) or macro objective (50) the overview image (100) and the microscope images (102) from the sample surface (42) to be able to record wherein at least one beam splitter (76) is included, which the beam paths (58, 56) of the microscope device (2) and the overview imaging system (4) starting from an objectively coincident beam path (58, 56) to the microscope camera (60) on the one hand and to the Overview camera (80) on the other hand divides. A method for recording an overview image (100) and a plurality of microscope images (102) in the region of the overview image (100) on sample surfaces (42), comprising the steps of: providing a hardness test device (1) with a device frame (12), a sample table (20), an indenter (92), a microscope device (2) with at least one microscope objective (32a-f), an overview optical imaging system (4) with a macro objective (50) and a lens changing device (30), in particular according to one of the preceding claims the lens changing device (30) and thus positioning of optical components of the overview lens (50) in the lens position for image recording (34) over the sample (40), taking an overview image (100) with the overview imaging system (4), storing the overview image ( 100), operating the lens changer (30) and thereby positioning the microscope objective (32a-f) in the objective position ion for imaging (34) over the sample (40), and positioning the optical components of the overview lens (50) in an inactive lens position (35), taking one or more microscope images (102) with the microscope device (2), wherein each Enlarges imaged portion of the sample (40) in the xy plane at the same lens position for imaging (34) relative to the device frame is located at which the optical components of the overview lens (50) were positioned when taking the overview image (100). Method according to Claim 19 comprising fading in the previously recorded and stored overview image (100) of the live image currently recorded with the microscope device (2), specifically on the basis of the sample table coordinates at the correct position in the overview image (100).

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