DE102016206986B4 - Method and device for determining a roundness form measurement deviation and ring gauge - Google Patents

Abstract

Method for determining a roundness form measurement deviation of a coordinate measuring machine (6), a measuring surface of a ring gauge (1) being measured with the coordinate measuring machine (6), the measuring surface of the ring gauge (1) being measured with a surface measuring device (8), with a measurement result of the measurement by the coordinate measuring machine (6) is corrected as a function of a measurement result of the measurement by the surface measuring device (8), characterized in that the roundness form measurement deviation of the coordinate measuring machine (6) is determined as a function of the corrected measurement result, the measurement result being the Measurement points corrected by the surface measuring device (8) can be determined, deviation values being determined for all or selected corrected measuring points, a deviation value denoting a radial distance of a measuring point from a minimum circle, the roundness form measurement deviation of the coordinate measuring device äts (6) is determined as the range of the deviation values or wherein deviation values are determined for all or selected uncorrected measuring points, wherein a deviation value denotes a radial distance of a measuring point from a minimum circle, these deviation values depending on the measurement result of the measurement by the surface measuring device (8) be corrected, the roundness form measurement deviation of the coordinate measuring machine (6) being determined as the range of the corrected deviation values.

Description

The invention relates to a method and a device for determining a roundness form measurement deviation of a coordinate measuring machine and a ring gauge for determining this roundness form measurement deviation.

The demands on the accuracy of so-called 3-axis and 4-axis coordinate measuring machines are increasing. This means, among other things, that a very low maximum permissible form measurement deviation for roundness (roundness form measurement _deviation , MPE _RONt ) is desired.

The WO 2013/068 044 A1 relates to a method for preparing the operation of a tactile probing coordinate measuring machine, a method for calibrating a probe of a coordinate measuring machine with a calibration ball and a method for correcting measured values in a CMM. In the method, the surface of the calibration sphere, which deviates from an ideal shape of a sphere, is measured with a surface measuring device and coordinates of several real surface points of the calibration sphere are determined in a coordinate system of the calibration sphere. In addition, a reference feature of the calibration sphere is related to a coordinate system of the calibration sphere. The calibration ball is also arranged in the measuring area of the tactile coordinate measuring machine. Furthermore, the coordinate system of the calibration sphere is related to a coordinate system of the coordinate measuring machine, so that information about positions of the real surface points of the calibration sphere is available or can be determined in the coordinate system of the coordinate measuring machine.
These roundness form measurement deviations are usually verified on a so-called ring gauge. However, ring gauges have manufacturing-related inaccuracies that have a negative effect on the roundness form measurement deviation of the coordinate measuring machine. In other words, a portion of the form measurement deviation of the coordinate measuring machine results from inaccuracies in the ring gauge. Thus, the roundness deviation of a CMM that is verified with a ring gauge cannot be better than the roundness deviation of the ring gauge itself.

If e.g. a roundness form measurement deviation of the coordinate measuring machine with a value of 97 nm is detected and the ring gauge, e.g. According to the calibration certificate, even a roundness deviation of 70 nm can be assumed in the worst case that approx. 72% of the roundness form measurement deviation of the coordinate measuring machine is due to the inaccuracy of the ring gauge.

The DE 195 39 148 A1 describes a method for coordinate measurement on workpieces with a CMM (coordinate measuring machine) in which the measured values are offset against stored correction values.

The DE 603 00 331 T2 discloses a coordinate measuring device for checking the dimensions of workpieces.

The DE 10 2008 040 921 A1 discloses a reference body for checking optical or tactile measuring probes.

So far, however, it has been assumed that ring gauges are manufactured with such high precision that they do not cause any errors in the determination of the roundness form measurement deviation of the coordinate measuring machine.

The technical problem thus arises of creating a method and a device for determining a roundness form measurement deviation of a coordinate measuring machine, as well as a ring gauge for this determination, which enable a more precise determination of the roundness form measurement deviation of the coordinate measuring machine.

The solution to the technical problem results from the objects with the features of claims 1, 10 and 11. Further advantageous embodiments of the invention emerge from the subclaims.

A method is proposed for determining a roundness form measurement deviation of a coordinate measuring machine. This roundness form measurement _deviation (MPE _RONt ) is here in the DIN EN ISO 12181-1: 2011-07 as well as in the guideline VDI / VDE 2617, sheet 2.2, status July 2000. This standard also defines parameters for roundness measurement.

The coordinate measuring machine can in particular be a tactile probe coordinate measuring machine (CMM). The CMM can in particular be a 3-axis CMM or a 4-axis CMM. In a 3-axis CMM, a measuring head system and / or a probe system can be moved along three spatial directions, in particular spatial directions oriented perpendicular to one another. For this purpose, the KMG can have three linear guides (axes) oriented at right angles to each other and a length measuring system and a motor drive for each linear guide. The CMM can also have a 3D scanning measuring head. In the case of a 4-axis CMM, the CMM can also include a turntable on which a workpiece to be measured can be arranged. The turntable can be rotated about an axis of rotation.

It is of course also possible that the CMM is an optically probing CMM. In this case, the CMM can include an optical measuring head system and carry out a contactless measurement of a measurement object.

Such CMMs are known from the prior art.

In the process, a measuring surface of a ring gauge is measured with the CMM. The measurement can be used to determine an uncorrected roundness form measurement deviation of the CMM.

The ring gauge can in particular be designed in the shape of a hollow cylinder, at least part of the inner circumferential surface of the ring gauge forming the measuring surface. The ring gauge can also be referred to as a setting ring. Furthermore, the ring gauge can have or form an outer jacket surface and end faces. It is also possible that at least part of the outer circumferential surface of the ring gauge forms the measuring surface. In this case, the ring gauge does not necessarily have to be designed as a hollow cylinder. In particular, the ring gauge can also be designed as a so-called plug gauge in this case. Thus, the term ring gauge in the sense of this disclosure also includes a mandrel.

When measuring, e.g. a measuring head or a probe element of the CMM, in particular a probe ball or an optical sensor, of the coordinate measuring machine can be moved along the measuring surface, in particular along at least one scanning line (target path), with measuring points (CMM measuring points) being determined. The scanning line can denote a line on the measuring surface along which measuring points are generated.

This can also be referred to as a measurement process. The measuring points can in particular be touch points or optically recorded measuring points. In particular, coordinates of measuring points can be determined, further in particular in a coordinate system of the coordinate measuring device. This is explained in more detail below.

The scanning line can in particular be a closed, in particular a circular or essentially circular line. A scanning line can also have overlapping sections. An overlapping section can be determined or identified and then not taken into account in a subsequent evaluation. The scanning line can also be a non-closed line, e.g. a part-circular or substantially part-circular line.

Measurement points in the approach and departure paths to the scanning line can also be determined or identified and then not taken into account in a subsequent evaluation. Furthermore, the scanning line can lie at a predetermined measuring height relative to the ring gauge. For example, the measuring height can be determined as a distance from a reference plane, with an end face of the ring gauge being arranged in this reference plane. The distance can be determined along a normal to this reference plane. Of course, it is also possible to determine several sets of measuring points by measuring the measuring area at different measuring heights. For example, sets of measuring points can be determined at different measuring heights with a predetermined height distance from one another, for example a height distance of 1 mm. The coordinates of the measuring points can be determined in a coordinate system of the coordinate measuring machine.

The measuring surface of the ring gauge is also measured with a surface measuring device (OME). The measurement can be used to determine a roundness form measurement deviation of the ring gauge.

A surface measuring device can in particular also be referred to as a shape tester. The surface measuring device is different from the CMM. A surface measuring device can e.g. an interferometer such as a Fizeau phase interferometer. The surface measuring device is preferably a tactile surface measuring device. Such a surface measuring device can comprise a measuring head system or probe system that can be moved in three spatial directions. If necessary, such a surface measuring device can also comprise a rotatable turntable. However, it is possible that an actuator-supported movement is only possible along two of three spatial directions and a rotation of the turntable is possible. An exemplary surface measuring device can e.g. the form tester RONDCOM 65 from Carl Zeiss Industrielle Messtechnik GmbH.

When measuring, e.g. a measuring head or a probe element of the OME can be moved along the measuring surface, in particular along at least one scanning line (target path) on the measuring surface, with measuring points (OME measuring points) being determined. The measuring points can in particular be contact points. In particular, coordinates of measurement points can be determined, further in particular in a coordinate system of the OMR. The scanning line can in particular be a closed line. Furthermore, the scanning line can lie at a predetermined measuring height relative to the ring gauge.

Of course, it is also possible to determine several sets of measuring points by measuring the measuring area at different measuring heights. For example, sets of measuring points can be determined at different measuring heights with a predetermined height distance from one another, for example a height distance of 1 mm. The coordinates of the measuring points can be determined in a coordinate system of the OMR.

Coordinates of CMM measuring points and OMR measuring points can be recorded in a Cartesian coordinate system, e.g. an x coordinate (coordinate along a longitudinal axis), a y coordinate (coordinate along a transverse axis) and a z coordinate (coordinate along a vertical axis).

In particular for a certain measurement height, coordinates can also be transformed into a polar coordinate system.

The scanning line for measuring with the coordinate measuring machine and the scanning line for measuring with the surface measuring device can be different from one another. In particular, these can be at different measuring heights. However, the scanning lines are preferably at the same level or a height distance between the scanning lines is smaller than a specified distance. The distance is preferably less than 0.5 mm. However, this is not mandatory. The smaller the distance, the more precise the determination of the corrected roundness form measurement deviation. However, sufficient accuracy of the corrected roundness form measurement deviation can be given even with larger distances.

Furthermore, OMR deviation values can be determined for all or selected measuring points. An OMR deviation value here denotes a radial distance of a measuring point from a reference line, in particular a reference circle, further in particular from a minimum circle. The reference line can be determined for a set of measurement points that were determined along a scanning line by methods known to those skilled in the art. E.g. a minimum circle can be determined for the measuring points of the quantity, this minimum circle e.g. is determined by the Chebyshev method known to the person skilled in the art.

It can be assumed here that the roundness form measurement deviation determined by measurement with the surface measuring device results mainly or exclusively from the roundness form measurement deviation of the measuring surface of the ring gauge, with parts of this roundness form measurement deviation e.g. are minimal or absent due to inaccuracies in the surface measuring device.

The actual roundness form measurement deviation of the ring gauge can thus be determined by the surface measuring device.

Furthermore, a measurement result of a measurement by the KMG (KMG measurement result) is corrected as a function of a measurement result of the measurement by the OME (OME measurement result). The OMR measurement result can therefore also be referred to as a correction result.

A CMM measurement result can be all or selected measurement points or CMM deviation values along the scanning line. An OMR measurement result can be all or selected OMR deviation values for measurement points along a scanning line of the OMR. This is explained in more detail below.

In particular, it is possible to change the CMM measurement result as a function of the OMR measurement result, for example through addition or subtraction operations.

The correction of the CMM measurement result as a function of the OME measurement result can be carried out, for example, by means of a fixed calculation rule.

Furthermore, the roundness form measurement deviation of the CMM is determined depending on the corrected measurement result.

Corrected measuring points, in other words corrected coordinates of the measuring points, are also determined as a function of the OMR measurement result. Furthermore, deviation values are determined for all or selected corrected measuring points. According to the explanations above, a deviation value can designate a radial distance of a measuring point from a reference line, in particular a reference circle, further in particular from a minimum circle, preferably a Chebyshev minimum circle. The roundness form measurement deviation of the CMM is then determined as the range of deviation values, e.g. as the difference between a maximum and a minimum deviation value.

Alternatively, deviation values (CMM deviation values) are determined for all or selected uncorrected measurement points in accordance with the explanations given above. These CMM deviation values are then corrected depending on the OMR measurement result. The roundness form measurement deviation of the CMM is then recorded as Range of corrected CMM deviation values determined.

This advantageously results in a more precise determination of the roundness form measurement deviation of the CMM.

This in turn makes it possible to specify an uncorrected roundness form measurement deviation and a corrected roundness form measurement deviation as proposed for a CMM and to represent them, for example, in a form plot. This advantageously enables a better assessment of what proportion of the roundness form measurement deviation comes from the inaccuracies of the CMM and what proportion comes from the inaccuracies of the ring gauge.

It is possible to assign the OMR measurement results (correction result) to each ring gauge. This can be done, for example, in that the OMR measurement results are stored on a particularly portable or central storage device, the stored OMR measurement results being assigned to a unique identifier of the ring gauge. In this case the ring gauge can have the unique identifier, e.g. in the form of a barcode, a serial number or a readable chip that provides the identifier. A central storage device can for example be a server device. This means that the corrected roundness form measurement deviation can be determined for several CMMs. For example, the measuring surface can be measured by different CMMs, the measurement result then being corrected as a function of the ring-gauge-specific OME measurement result called up.

In a further embodiment, measuring points are determined along at least one scanning line on the measuring surface, in particular coordinates (spatial coordinates) of these measuring points. This was explained earlier. The scanning target line can be circular and lie at a predetermined measurement height.

The measurement points, in particular the coordinates, are also corrected by the OME as a function of the measurement result of the measurement. Furthermore, the roundness form measurement deviation of the CMM is determined depending on the corrected measurement points. This has already been explained above.

This advantageously results in a more precise determination of the roundness form measurement deviation of the CMM.

In an alternative embodiment, the coordinate measuring device is used to determine measuring points along at least one scanning line on the measuring surface, a point-specific CMM deviation value being determined for all or selected measuring points, the CMM deviation values being corrected as a function of the measurement result of the measurement by the surface measuring device The roundness form measurement deviation of the coordinate measuring machine is determined as a function of the corrected deviation values.

Furthermore, the coordinates of the corresponding measuring point can be assigned to each point-specific CMM deviation value.

Of course, it is also possible for a contact force and, if necessary, a direction of the contact force to be determined for all or selected measuring points.

E.g. the roundness form measurement deviation can be determined as the range of the corrected deviation values, e.g. as the difference between a maximum and a minimum deviation value.

This advantageously results in an alternative, but also reliable and precise determination of deviation values which are caused by errors in the CMM and the roundness / form measurement deviation of the ring gauge.

In a further embodiment, the CMM measurement points or the CMM deviation values are filtered. In particular, low-pass filtering can be carried out. So-called spline filtering can preferably, but not necessarily, be carried out.

It is possible for the coordinates of the measurement points to be filtered, with the filtered measurement points or the CMM deviation values determined as a function of the filtered measurement points being corrected as a function of the OMR measurement result.

The roundness form measurement deviation of the CMM can then be determined on the basis of these filtered measurement points or CMM deviation values.

This advantageously results in a more precise determination of the roundness form measurement deviation, the accuracy being reduced less by measurement noise.

In a further embodiment, a point-specific OMR deviation value is determined with the surface measuring device for all or selected points of at least one scanning line. The scanning line is here a scanning line of the OME.

This was explained earlier. The measuring points or the CMM deviation values are also corrected as a function of the OMR deviation values.

E.g. The correction can be carried out by subtracting or adding a point-specific OME deviation value or a value that is dependent on the point-specific OME deviation value from a CMM measuring point, in particular a coordinate, or a point-specific CMM deviation value.

This results in an advantageous manner that the portion of the uncorrected roundness form measurement deviation of the CMM, which is caused by errors in the ring gauge, i.e. due to the roundness form measurement deviation of the ring gauge, is reduced or even eliminated.

In a further embodiment, the measurement points (OMR measurement points) of the OMR deviation values or the OMR deviation values are filtered. If the OMR deviation values are determined for measuring points along at least one scanning line of the surface measuring device, then these coordinates of the measuring points can also be filtered in accordance with the explanations for filtering the coordinates recorded by the CMM. Alternatively, the deviation values can be filtered. Low-pass filtering, in particular spline filtering, is preferably carried out here as well.

It is also possible to carry out several filterings, for example a first low-pass filtering with a first cut-off frequency and a further low-pass filtering with a further cut-off frequency, the further cut-off frequency being higher than the first cut-off frequency. Thus, in the first filtering, low-frequency or long-period disturbances or form errors can be corrected.

This advantageously results in a reliable reduction in measurement noise.

In a further embodiment, the CMM measuring points or the CMM deviation values and the OMR deviation values are transformed into a common reference coordinate system. The common reference coordinate system can be the coordinate system of the CMM, the coordinate system of the surface measuring device or a coordinate system different from these coordinate systems. The fact that the deviation values are transformed into the common reference coordinate system can mean that the coordinates of the measuring points to which the respective deviation values are assigned are transformed into the common reference coordinate system.

The transformation of the OMR deviation values into the common reference coordinate system can mean that the coordinates of the OMR measuring points to which the OMR deviation values are assigned are transformed into the common reference coordinate system. In this way, the OMR measurement points can also be transformed into the common reference coordinate system and the OMR deviation values can be determined in the common reference coordinate system.

For the transformation, a position and / or orientation of the ring gauge can be determined both in the coordinate system of the CMM and in the coordinate system of the OMR. The transformation can then take place as a function of these positions and orientations. The measuring points or the deviation values can then be transformed into the common coordinate system by means of a known or determinable transformation rule. The transformation rule can in particular be determined in such a way that measurement points that were generated at the same point on the ring gauge are transformed to the same position in the common coordinate system.

This advantageously results in a simplified assignment of an OMR deviation value to a CMM measurement point or a CMM deviation value, for example in order to correct the CMM measurement point or CMM deviation value with the OMR deviation value or a value dependent on it. Overall, a more precise determination of deviation values is made possible in an advantageous manner.

In a further embodiment, the OMR deviation value corresponding to a CMM measuring point or a CMM deviation value is determined by interpolation or extrapolation. In particular, it is possible that there is no OMR deviation value for a CMM measuring point that is assigned to this measuring point in the reference coordinate system or is arranged in a spatial area of a predetermined size around this measuring point. This can be the case in particular if the number of measuring points that were recorded during measurement by the CMM differs from the number of measurement points that were recorded during measurement by the surface measuring device. This can also be the case if the measuring heights of the scanning lines are different from one another.

An inter- / extrapolation can in particular be a linear, polynomial-based or spline interpolation.

Inter- / extrapolation can preferably be based on coordinates of measurement points in a polar coordinate system or on Based on two coordinates of the measurement points, in particular one coordinate along the longitudinal axis and one coordinate along the transverse axis. This can take place in particular if it is assumed that the CMM measuring points and the OME measuring points were recorded in / with the same or less than a predetermined amount of different measuring height (s) from one another.

However, it is also possible to carry out the inter- / extrapolation on the basis of three coordinates of the measuring points. For this purpose, measuring points for a plurality of scanning lines at different measuring heights can be generated with the KMG and / or the OME. The inter- / extrapolation can then take place on the basis of these measuring points. In particular, this also enables the consideration of different roundness form measurement deviations at different measurement heights. These different roundness form measurement deviations can in particular be caused by a straightness error.

This advantageously results in a more precise determination of the corrected measuring points or the corrected CMM deviation values and thus a more precise determination of the roundness form measurement deviation of the CMM.

In a further embodiment, the ring gauge has at least one reference mark, the position of the reference mark being determined with the coordinate measuring device and the surface measuring device. The position is determined in the respective coordinate system.

The position here can designate or include a clearly determinable position of the reference mark (reference position) and / or an unambiguous orientation of the reference mark (reference orientation). Depending on the position of the reference mark, a position, that is to say a position and / or orientation, of the ring gauge can also be determined in the respective coordinate system. In particular for determining a reference orientation, the ring gauge can have a plurality of reference marks, for example reference marks arranged along a line, in particular along a radial line. These reference marks can be used to determine different reference positions.

The transformation into the common reference coordinate system is also carried out as a function of the position of the reference mark.

For example, a transformation rule for the coordinates of the points in the coordinate system of the CMM and a transformation rule for the coordinates of the points in the coordinate system of the surface measuring device can be determined in such a way that the position of the reference mark or the position of the ring gauge in the common reference coordinate system is the same or only around one predetermined small amount differs.

In this case, the reference mark can in particular be designed in such a way that, in a plurality of measurement processes, respectively certain positions and / or orientations are the same or have only a predetermined slight deviation from one another.

The position of the reference mark can be determined in a scanning process which is different from the measuring process for generating measuring points or deviation values.

A reference mark can in particular be a haptically detectable reference mark, that is to say by touching it. Here, the position of the reference mark can be determined by a tactile measuring device, in particular by a coordinate measuring device with a tactile sensor and by a surface measuring device.

However, a reference mark can also be a reference mark that can be detected optically, that is to say by optical detection. Here, the position of the reference mark can be determined by an optical measuring device, in particular a coordinate measuring device with an optical sensor.

It is possible that a reference orientation of the ring gauge is determined depending on the position of the reference mark. In this case, a reference position of the ring gauge can also be determined as a position, in particular as the x-coordinate and y-coordinate of a center point of a reference circle, the reference circle each having a reference line for measuring points of the CMM and for measuring points of the OMR, which are located along a scanning Line generated along the measuring surface is. As previously explained, the reference circle can be a minimum circle.

The reference orientation can be given in particular in the form of an angle of rotation about the central axis of symmetry of the ring gauge.

A ring gauge for determining a roundness form measurement deviation of a coordinate measuring machine is also proposed. Such a ring gauge has already been explained above.

The ring gauge also has or forms at least one reference mark. Furthermore, the position, that is to say a position and / or an orientation, of the reference mark (s) can be determined with the coordinate measuring machine. The position of the reference mark can also be a desired Surface measuring device can be determined. This can mean that coordinates of the reference mark can be determined repeatedly and unambiguously by the CMM and possibly by the surface measuring device, in particular in the corresponding coordinate system.

Thus, a position and / or orientation of the ring gauge can also be clearly determined in the respective coordinate system.

The exact and reliable determination of the position of the reference mark (s) advantageously enables a reliable transformation of measuring points into a common reference coordinate system.

Such a ring gauge advantageously enables, as explained above, the more precise determination of a roundness form measurement deviation of the CMM.

The reference mark is also designed as a recess in the area of an end face of the ring gauge. The depression can in particular be a conical or part-conical depression. The depression can also be a pyramidal or partially pyramidal depression. This advantageously enables self-centering probing by means of a probe of a coordinate measuring machine and / or a surface measuring device and thus a clear and repeatable determination of the coordinates of the reference mark. Of course, the reference mark can also be designed as a cylindrical or cuboid recess.

A plurality of reference marks, which are each designed as depressions, can have radii different from one another, in particular to enable probing with stylus balls of different radii. Accordingly, a maximum width of reference marks formed as grooves can also differ from one another.

Several reference marks can also be arranged along a straight line, in particular a radial line of the ring gauge.

A depression can be used in particular to determine a reference point. A line that is defined by a plurality of depressions arranged along the line can be used in particular to determine a reference orientation.

By arranging the reference mark in the area of the end face, the result is advantageously that the measuring surface of the ring gauge does not have an area that cannot be used to determine the roundness form measurement deviation. The measuring surface has no reference mark.

Furthermore, the reference mark or a further reference mark is designed as a groove in the area of an end face of the ring gauge. In this context, a groove can in particular denote an elongated depression. The groove can in particular have a triangular or trapezoidal cross section, a cross-sectional plane being oriented perpendicular to a central center line of the groove.

It is also described that the reference mark or another reference mark can be designed as a groove in the area of the measuring surface of the ring gauge. The groove can extend parallel to a central longitudinal axis of the ring gauge. Furthermore, the groove can be arranged in an (upper or lower) edge area of the measuring surface.

It is of course possible that, alternatively or cumulatively, a reference mark designed as a recess is arranged in the area of the measuring surface.

A groove, in particular the center line of the groove, can in particular serve to determine a reference orientation.

This advantageously results in a simple detection of the position of the reference mark, since a button does not have to be moved into the area of the end face by means of a complex control. It is also advantageously possible to determine the position of the reference mark with a feeler element which is also used for measuring, e.g. a disc button.

A device for determining a roundness form measurement deviation of a coordinate measuring machine is also proposed. The device advantageously enables a method to be carried out in accordance with an embodiment described in this disclosure.

The device comprises at least one evaluation device. The evaluation device can e.g. be designed as a microcontroller or include one. The evaluation device can be connected to the coordinate measuring device and to a surface measuring device in terms of data and / or signals. For this purpose, the evaluation device can have appropriate interfaces, for example.

The evaluation device can be part of the coordinate measuring machine. For example, the evaluation device can be formed by a control and / or evaluation device of the coordinate measuring device. Alternatively or cumulatively the evaluation device can also be part of the surface measuring device. However, the evaluation device is preferably not part of the coordinate measuring device and not part of the surface measuring device.

By means of the evaluation device, a measurement result of a measurement of a measuring surface of a ring gauge with the coordinate measuring machine can be corrected as a function of a measurement result of a measurement of the measurement surface of the ring gauge with the surface measuring device and the roundness form measurement deviation of the CMM can be determined as a function of the corrected measurement result.

Furthermore, the evaluation device can be used to determine a measurement result of a measurement of a measuring surface of a ring gauge with the coordinate measuring device and a measurement result of a measurement of the measurement surface of the ring gauge with the surface measurement device.

This and corresponding advantages have been explained above.

Furthermore, the evaluation device can include or form at least one filter device for filtering the CMM measurement points, for filtering the OMR measurement points or for filtering the CMM deviation values and / or for filtering the OMR deviation values.

Furthermore, the position of at least one reference mark of the ring gauge can be determined by means of the evaluation device. Furthermore, a transformation rule for transforming the deviation values into a common reference coordinate system can be determined and a corresponding transformation can be carried out by means of the evaluation device.

A system is further described which comprises the explained device, the coordinate measuring machine and the surface measuring device. Here, the coordinate measuring device and / or the surface measuring device are connected to the device in terms of data and / or signals. The system can also include a ring gauge in accordance with one of the embodiments described in this disclosure.

A computer program product is further described, code for executing a method according to an embodiment described in this disclosure being stored in or on the computer program product. In particular, the computer program product can contain a computer program which has software means for carrying out such a method when the computer program is executed in an automation system.

• 1 eine schematische Draufsicht auf einen Lehrring,
• 2 einen Querschnitt durch den in 2 dargestellten Lehrring,
• 3 eine exemplarische Darstellung von Messpunkten eines KMG in einem kartesischen Koordinatensystem,
• 4 eine exemplarische Darstellung der Messpunkte aus 3 in einem Polarkoordinatensystem,
• 5 eine exemplarische Darstellung von gefilterten Messpunkten des KMG in einem kartesischen Koordinatensystem,
• 6 eine schematische Darstellung OME-Abweichungswerten für verschiedene Messhöhen,
• 7 eine exemplarische Darstellung von OME-Abweichungswerten in einem Polarkoordinatensystem,
• 8 eine exemplarische Darstellung der in 7 dargestellten Messwerte in einem kartesischen Koordinatensystem,
• 9 eine exemplarische Darstellung von gefilterten OME-Abweichungswerten in einem Polarkoordinatensystem,
• 10 eine exemplarische Darstellung der in 9 dargestellten Abweichungswerte in einem Polarkoordinatensystem,
• 11 eine exemplarische Darstellung von ungefilterten KMG-Abweichungswerten und lagerichtigen OME-Abweichungswerten,
• 12 eine exemplarische Darstellung von korrigierten und unkorrigierten Abweichungswerten in einem kartesischen Koordinatensystem,
• 13 eine weitere exemplarische Draufsicht auf einen Lehrring,
• 14 eine exemplarische Darstellung einer Gradheitsmessung an dem Lehrring,
• 15 ein schematisches Flussdiagramm eines erfindungsgemäße Verfahrens und
• 16 ein schematisches Blockschaltbild einer erfindungsgemäßen Vorrichtung.

The invention is explained in more detail using an exemplary embodiment. The figures show:

• 1 a schematic plan view of a ring gauge,
• 2 a cross section through the in 2 illustrated ring gauge,
• 3 an exemplary representation of measuring points of a CMM in a Cartesian coordinate system,
• 4th an exemplary representation of the measuring points 3 in a polar coordinate system,
• 5 an exemplary representation of filtered measuring points of the CMM in a Cartesian coordinate system,
• 6 a schematic representation of OMR deviation values for different measuring heights,
• 7th an exemplary representation of OMR deviation values in a polar coordinate system,
• 8th an exemplary representation of the in 7th displayed measured values in a Cartesian coordinate system,
• 9 an exemplary representation of filtered OMR deviation values in a polar coordinate system,
• 10 an exemplary representation of the in 9 displayed deviation values in a polar coordinate system,
• 11 an exemplary representation of unfiltered CMM deviation values and correctly positioned OME deviation values,
• 12 an exemplary representation of corrected and uncorrected deviation values in a Cartesian coordinate system,
• 13 another exemplary top view of a ring gauge,
• 14th an exemplary representation of a straightness measurement on the ring gauge,
• 15th a schematic flow diagram of a method according to the invention and
• 16 a schematic block diagram of a device according to the invention.

In the following, the same reference symbols designate elements with the same or similar technical features.

In 1 is a schematic plan view of a ring gauge according to the invention 1 shown. The ring gauge 1 is designed as a hollow cylinder and has an end face 2 and a measuring surface 3 on, being the measuring surface 3 is an inner jacket surface of the hollow cylinder. A first axis x (longitudinal axis) and a second axis y (transverse axis) of a Cartesian coordinate system are also shown, the direction of the axes x, y being shown by arrows.

Another depression is shown 4th , in particular a (partially) conical recess in the area of the end face 2 of the ring gauge 1 . This depression 4th forms a first reference mark.

A first groove is also shown 5 in the area of the face 2 . The groove 5 can in particular have a (partially) pyramidal cross-section, with a cross-sectional plane orthogonal to a center line of the first groove 5 can be oriented. In 1 is shown that the first groove 5 extends along or parallel to the transverse axis y.

A position of depression 4th , in particular a reference point of the recess 4th , can be clearly and repeatedly determined in the Cartesian coordinate system. Also is a position of the first groove 5 , in particular a position along the longitudinal axis x, for example a center point of the groove 5 and an orientation of the first groove 5 determinable in the Cartesian coordinate system.

The explanations relate to a ring gauge 1 with tactile reference marks, the positions of which can be recorded in particular with tactile probing systems. Of course, it is also conceivable to determine the positions of the reference mark with optically probing systems.

Alternatively or additionally conceivable are optical reference marks whose position e.g. can be determined by an optical sensor and a corresponding image evaluation. The explanations therefore also apply to optical reference marks and optical probing systems.

2 shows a schematic cross section through the in 1 illustrated ring gauge 1 . The face is shown 2 and the measuring surface 3 . Another groove is also shown 7th which extends parallel to a third axis z (vertical axis). The other groove 7th is in the area of the measuring surface 3 arranged. Also this other groove 7th forms a reference mark. Thus the position, in particular the position along the longitudinal axis x, for example the Z axis of a center point, and / or the orientation of the further groove 7th set in the Cartesian coordinate system.

The position and / or orientation of the reference marks can be determined by a coordinate measuring machine 6 and also by a surface measuring device 8th (please refer 16 ) can be determined.

The first and the next groove 5 , 7th are preferably used to determine the reference orientation, i.e. an orientation of the ring gauge 1 , in a coordinate system of the CMM 6 and in a coordinate system of the surface measuring device 8th (OME 8th ). An angle of rotation around the central axis of symmetry of the ring gauge is used as orientation 1 certainly.

A reference position of the ring gauge 1 can in particular as an x-coordinate and as a y-coordinate of a position of a center point of minimum circles to measuring points of the CMM 6 and the OME 8th can be determined, the measurement points being generated during scanning along a scanning line.

A transformation rule for a transformation of the measuring points of the CMM 6 and the OME 8th A common coordinate system can then be determined in such a way that the reference positions and the reference orientations are transformed to the same positions / orientations which differ from one another only by a predetermined amount.

3 shows an example of an excessive curve 9 of measuring points created with a CMM 6 along a closed, overlapping scanning line on the measuring surface 3 were determined at a predetermined measuring height. An exaggerated curve here denotes a curve of measurement points that have been multiplied by a predetermined factor in order to enable improved visualization. The scanning line can lie at a first measurement height, the measurement height being the distance from the plane containing the end face 2 includes, along the vertical direction z is measured. The curve 9 represents the coordinates, the coordinates of consecutively determined measuring points being connected. A circular reference curve is also shown 10 . This reference curve 10 was based on the measurement points as the minimum circle for the measurement points of the first curve 9 , especially as the Chebyshev district.

A point-specific CMM deviation value can be used as a radial distance between a measuring point and the circular reference curve 10 to be determined.

4th shows the in 3 shown measuring points in a polar coordinate system. What is shown here is the radial distance R of the measuring points from a center point, in particular the center point of the circular reference curve 10 (please refer 3 ), For different angles α in a range from 0 ° to 360 °. The angle of 0 ° corresponds to an orientation along the longitudinal axis x (please refer 1 ).

In 5 is an example of a curve 11 of filtered measuring points of the CMM 6 shown. For this purpose, the in 3 shown measuring points, in particular their coordinates, filtered with a spline filter, which has a threshold number of 150 waves per revolution. Another circular reference curve is also shown 12 , which was determined as the minimum circle for the filtered measuring points.

6 shows a schematic representation of OMR deviation values D_OME (see e.g. 7th ) for different measuring heights.

A first OMR shape curve 13 visualizes OMR deviation values D_OME for a first measurement height, with a section of the further groove 7th ( 2 ) is arranged at this first measuring height. Only for reasons of visualization is the OMR deviation values D_OME a first radius value (dummy radius value) is added, but not the inner radius of the ring gauge 1 must correspond. It can be seen that in the area of the further groove 7th high OMR deviation values D_OME are generated, these in a range around 0 ° of the first OMR shape curve 13 are shown.

The OMR deviation values D_OME are here in a coordinate system of the surface measuring device 8th (please refer 16 ) shown. It can be seen that an angle of 0 ° of the orientation along the transverse axis y (see 1 ) corresponds.

A second OME shape curve is also shown 14th , a third OMR shape curve 15th and a fourth OMR shape curve 16 , the respective OMR deviation values D_OME visualize for different measuring heights. Please refer to the corresponding OMR deviation values D_OME different radii added for improved visualization.

7th shows an exemplary representation of OMR deviation values D_OME for a certain measuring height in a polar coordinate system. Here is a first OMR deviation value curve 17th the course in the polar coordinate system of the surface measuring device 8th Also shown is a shifted OMR deviation value curve 18th . This is about a difference angle compared to the first OMR deviation value curve 17th postponed. The difference angle is selected here in particular such that the angle of 0 ° of the shifted OME deviation value curve 18th an orientation of 0 ° in the coordinate system of the coordinate measuring device 6 corresponds.

If you go, as in 2 shown, assume that the further groove 7th at an angle of 90 ° in a polar coordinate system of the CMM 6 is arranged and at an angle of 0 ° a polar coordinate system of the surface measuring device 8th is arranged, the difference angle is for example 90 °.

Thus represents the OMR deviation value curve 18th represents a curve transformed into a common reference coordinate system, namely the coordinate system of the CMM. The OMR deviation values D_OME are thus transformed into the common reference coordinate system.

8th shows an exemplary exaggerated representation of a curve 19th of shifted OMR deviation values D_OME , in the 7th are shown in a Cartesian coordinate system. In particular, this can be the Cartesian coordinate system of the CMM 6 be, which e.g. also in 5 is shown. To enable better visualization, the deviation values were multiplied by a factor (exaggeration) and then any desired radius value (dummy radius) was added, the radius value being roughly the radius of the ring gauge to be measured 1 corresponds. Another circular reference curve is also shown 20th which was determined as the minimum circle for the shifted OMR deviation values.

9 shows an exemplary representation of filtered, shifted OMR deviation values D_OME_filt in a polar coordinate system. The OMR deviation values D_OME (please refer 7th ) filtered with a spline filter. The spline filter can have a threshold number of 15 waves per revolution. As an alternative or in addition, it is of course also possible to use (further) spline filtering with a higher threshold number.

10 shows an exemplary curve 21st of these filtered, shifted OMR deviation values D_OME_filt in a Cartesian coordinate system with the filtered, shifted deviation values D_OME_filt any radius value (dummy radius) has been added. Another circular reference curve is also shown 22nd that act as the minimum circle for the shifted, filtered OMR deviation values D_OME_filt was determined.

11 represents a curve 23 of CMM deviation values D_KMG and a curve 24 of filtered, shifted OMR deviation values D_OME_filt in a common The polar coordinate system. Here are the filtered OMR deviation values D_OME_filt shown in the correct position or at the correct angle to the deviation values D KMG.

The curve 23 corresponds to the in 4th shown curve, but with a radius value approximately the height of the radius of the ring gauge 1 from the values of the curve in 4th was withdrawn.

12 shows an exemplary curve 11 of filtered and exaggerated CMM measuring points and a curve 21st of filtered and exaggerated shifted OMR deviation values D_OME_filt , where the filtered, shifted deviation values D_OME_filt any radius value (dummy radius) has been added. The measuring points and the deviation values D_OME_filt are shown in a common Cartesian coordinate system.

A curve is also shown 25th of corrected measuring points of the CMM. The points of the curve 25th result by taking from the measuring points of the curve 11 the filtered and correctly positioned OMR deviation values D_OME_filt can be deducted or added. For this it may be necessary to use OMR deviation values D_OME_filt that correspond to a specific CMM measuring point can be determined by interpolation. This can be especially true in the in 11 shown common polar coordinate system.

Another circular reference curve is also shown 26th that acts as the minimum circle for the corrected measurement points of the curve 25th was determined.

The roundness form measurement deviation of the CMM 6 can be used as the range of the radial deviations of the corrected measurement points of the curve 25th can be determined from the circular reference curve.

13 shows a schematic plan view of a ring gauge 1 in a further embodiment with reference marks. It is shown that the ring gauge 1 several wells 4th , 4a , 4b , 4c , 4d , 4e , 4f has that in the area of the end face 2 are arranged. Here, several, in particular three, depressions 4a , ..., 4c ; 4d , ..., 4f be arranged along a radial line. The depressions arranged along a radial line 4a , ..., 4f can have different maximum radii. In 13 is shown that, for example, three wells 4a , 4b , 4c are arranged with different maximum radii along a first radial line with an orientation of 45 °. Next are three more indentations 4d , 4e , 4f with different maximum radii 4d , 4e , 4f arranged along a further radial line with an orientation of 0 °.

14th shows an exemplary representation of a course of OMR measuring points of the scanning line on the measuring surface, the scanning line being oriented parallel to the central center line of the ring gauge. The course shows the straightness of the measuring surface parallel to the central center line. Here is a first straightness curve 32 at an angle of about 180 ° in the coordinate system of the OMR 8th was generated. A second straightness curve is also shown 33 , a third straightness curve 34 and a fourth straightness curve 35 , each at an angle of about 135 °, 90 ° and 45 ° in the coordinate system of the OMR 8th were generated. The straightness curves 32 , ..., 35 visualize deviations of measuring points of the scanning line from a respective minimum line of these measuring points, in particular a Chebyshev line.

14th shows that there are different roundness form measurement deviations for different measuring heights. Thus, a roundness form measurement deviation can also be determined specifically for the measurement height. It is also possible to determine an uncorrected and corrected roundness form measurement deviation for several measurement heights.

15th shows a schematic flow diagram of a method according to the invention. In a first step S1_KMG becomes a measuring surface 3 (see e.g. 1 ) a ring gauge 1 with a coordinate measuring machine 6 (please refer 16 ) measured. Here, the coordinates of CMM measuring points are taken along a scanning line on the measuring surface 3 certainly. These coordinates can be obtained from an evaluation device, for example 27 (please refer 16 ) can be read.

In a second step S2 KMG can, for example, by means of the evaluation device 27 , a position and possibly orientation of a reference mark, z .B. a recess 4th , 4a , ..., 4f , or a groove 5 , 7th in a coordinate system of the CMM 6 to be determined. The coordinate system can be a Cartesian coordinate system.

In a further step S1_OME can by means of a surface measuring device 8th (please refer 16 ) OMR deviation values D_OME (see e.g. 7th ) for a certain measuring height of the measuring surface of the ring gauge 1 to be determined. These can also, for example, by the evaluation device 27 can be read. Coordinates of measuring points to which the OMR deviation values are assigned can be determined in a polar coordinate system.

In a further step S2 OME can be a position and possibly an orientation of a Reference mark in the coordinate system of the surface measuring device 8th to be determined.

In a further step S3 the coordinates of the measuring points of the CMM as well as the coordinates of the measuring points of the OMR to which the OMR deviation values D_OME are assigned, are converted into a common reference coordinate system. This can be done in particular in such a way that the positions and possibly orientations of reference marks are the same in the common coordinate system. In particular, the coordinates of the measurement points to which the OMR deviation values D_OME are assigned to a coordinate system of the KMG 6 be converted. The common coordinate system can be a Cartesian coordinate system. However, this is not mandatory.

For this, it may be necessary to convert the measurement points determined in a polar coordinate system, to which OMR deviation values are assigned, into a Cartesian coordinate system. The transformation from a Cartesian coordinate system into a polar coordinate system is known to the person skilled in the art.

In a further step S4 can use the OMR deviation values D_OME be filtered, for example by means of a spline filter. This was explained earlier. The filtering can take place in a Cartesian coordinate system. For this it may be necessary to use the OMR deviation values D_OME to transform from a polar coordinate system into a Cartesian coordinate system, where any radius value (dummy radius) can be added to the OMR deviation values. The OMR deviation values transformed in this way can then be filtered and transformed again into a polar coordinate system. For this purpose, the radius value can again be subtracted from the transformed OMR deviation values.

In a further step S5 the measuring points of the CMM can be transformed into a common polar coordinate system. Interpolated, filtered OMR deviation values can also be determined, with each measuring point of the CMM 6 an interpolated OMR deviation value is determined, the interpolated OMR deviation value from the filtered OMR deviation values D_OME_filt is determined. The interpolated OMR deviation value D_OME denotes the deviation value for a measuring point of the CMM 6 .

In a further step S6 these interpolated, filtered OMR deviation values can then be transformed back into the common Cartesian coordinate system. These interpolated, filtered OMR deviation values can then also be used D_OME_filt to the coordinates of the respective measuring points of the CMM 6 can be added. In particular, the interpolated, filtered OMR deviation value D_OME_filt through the transformation into the Cartesian coordinate system into a part along the longitudinal axis x and a part along the transverse axis y are divided, with these shares then to the corresponding coordinate values of the measuring point of the CMM 6 can be added.

The resulting corrected measuring points can be used in a further step S7 be filtered, in particular with a further spline filtering. This can have a cutoff wavelength of 150 waves per revolution.

Furthermore, in a further step, corrected measuring points filtered for these can be used S8 a circular reference curve, in particular a Chebyshev circle, can be determined. You can then in a further step S9 KMG deviation values are determined, in particular as radial distances from this circular reference curve. Furthermore, depending on these CMM deviation values, a roundness form measurement deviation of the CMM 6 can be determined, in particular as the range of the CMM deviation values.

An uncorrected roundness form measurement deviation of the CMM 6 can in particular be determined by creating a circular reference curve for the uncorrected measurement points of the CMM 6 is determined and CMM deviation values are determined as radial distances between the measuring points and this reference curve. This is in 15th not shown.

It is possible, for example, that an uncorrected roundness form measurement deviation of the CMM 6 0.984 µm. A corrected roundness form measurement deviation of the CMM determined as suggested 6 can be 0.606 µm. If the roundness form measurement deviation of the ring gauge, for example according to the calibration certificate, is 0.693 µm, the uncorrected roundness form measurement deviation is corrected by approx. 55% of the roundness form measurement deviation of the ring gauge.

16 shows a schematic block diagram of a device according to the invention. The device comprises an evaluation device 27 . This is data and / or signaling with a CMM 6 and a surface measuring device 8th connected. The KMG 6 includes a measuring table 28 , being on the measuring table 28 a ring gauge 1 (please refer 1 ) in the three-dimensional measuring range 36 of the KMG 6 can be arranged. For the sake of clarity, only a two-dimensional base area of the three-dimensional measurement area is shown here. The KMG 6 further comprises a movable one bridge 29 , being a stylus ball 30th via a stylus shaft (not shown) with a measuring head 37 on a quill 31 and thus on the movable bridge 29 is mounted.

The surface measuring device is only shown schematically 8th used as a tactile surface measuring device 8th can be formed. The ring gauge can be used to generate measuring points 1 be arranged in the measuring range of the CMM. Measurement points can then be obtained from the evaluation device 27 can be read. After that, the ring gauge can 1 in a measuring range of the surface measuring device 8th to be ordered. The one from the surface measuring device 8th The measured values generated can then also be used by the evaluation device 27 can be read.

The evaluation device can also 27 then the remaining steps of the in 15th perform the procedure shown.

List of reference symbols

1

Ring gauge

2

Face

3

Measuring surface

4th

deepening

4a, ..., 4f

deepening

5

first groove

6th

Coordinate measuring machine

7th

further groove

8th

Surface measuring device

9

Curve of uncorrected measuring points of the CMM

10

circular reference curve

11

Curve of filtered measuring points of the CMM

12

circular reference curve

13th

first shape curve of the measuring surface at a first measuring height

14th

second shape curve of the measuring surface at a second measuring height

15th

third shape curve of the measuring surface at a third measuring height

16

fourth shape curve of the measuring surface at a fourth measuring height

17th

Curve of OMR deviation values

18th

shifted curve of OMR deviation values

19th

Curve of shifted OMR deviation values in a Cartesian coordinate system

20th

circular reference curve

21st

Curve of filtered, shifted OMR deviation values in a Cartesian coordinate system

22nd

circular reference curve

23

CMM deviation values

24

Curve of filtered, shifted OMR deviation values in a polar coordinate system

25th

Curve of corrected measuring points of the CMM 2

26th

circular reference curve

27

Evaluation device

28

Measuring table

29

movable bridge

30th

Stylus ball

31

Quill

32

first straightness curve

33

first straightness curve

34

first straightness curve

35

first straightness curve

36

Measuring range

37

Measuring head

S1_KMG

Process step

S2_KMG

Process step

S1_OME

Process step

S2_OME

Process step

S3

Process step

S4

Process step

S5

Process step

S6

Process step

S7

Process step

S8

Process step

S9

Process step

x

first spatial axis

y

second spatial axis

z

third spatial axis

D_KMG

CMM deviation values

D_OME

OMR deviation values

D_OME_filt

filtered OMR deviation values

Claims (11)

Method for determining a roundness form measurement deviation of a coordinate measuring machine (6), a measuring surface of a ring gauge (1) being measured with the coordinate measuring machine (6), the measuring surface of the ring gauge (1) being measured with a surface measuring device (8), with a measurement result of the measurement by the coordinate measuring machine (6) is corrected as a function of a measurement result of the measurement by the surface measuring device (8), characterized in that the roundness form measurement deviation of the coordinate measuring machine (6) is determined as a function of the corrected measurement result, the measurement result being the Measurement points corrected by the surface measuring device (8) can be determined, deviation values being determined for all or selected corrected measuring points, a deviation value denoting a radial distance of a measuring point from a minimum circle, the roundness form measurement deviation of the coordinate measurement räts (6) is determined as the range of the deviation values or wherein deviation values are determined for all or selected uncorrected measuring points, wherein a deviation value denotes a radial distance of a measuring point from a minimum circle, these deviation values depending on the measurement result of the measurement by the surface measuring device (8) are corrected, the roundness form measurement deviation of the coordinate measuring device (6) being determined as the range of the corrected deviation values. Procedure according to Claim 1 , characterized in that the coordinate measuring device (6) is used to determine measuring points along at least one scanning line on the measuring surface, the measuring points being corrected as a function of the measurement result of the measurement by the surface measuring device (8), the roundness form measurement deviation of the coordinate measuring device ( 6) is determined depending on the corrected measuring points. Procedure according to Claim 1 , characterized in that the coordinate measuring machine (6) is used to determine measuring points along at least one scanning line on the measuring surface, a point-specific CMM deviation value (D_KMG) being determined for all or selected points, the CMG deviation values (D_KMG) be corrected as a function of the measurement result of the measurement by the surface measuring device (8), the roundness form measurement deviation of the coordinate measuring device (6) being determined as a function of the corrected deviation values. Procedure according to Claim 2 or 3 , characterized in that KMG measurement points or the KMG deviation values (D_KMG) are filtered. Method according to one of the Claims 2 to 4th , characterized in that a point-specific OME deviation value (D_OME) is determined with the surface measuring device (8) for all or selected measuring points of at least one scanning line, the KMG measuring points or the KMG deviation values (D KMG) depending on the OMR deviation values (D_OME) are corrected. Procedure according to Claim 5 , characterized in that OMR measurement points or OMR deviation values (D_OME) are filtered. Method according to one of the Claims 5 to 6 , characterized in that KMG measuring points or KMG deviation values (D_KMG) and OME deviation values (D_OME) are transformed into a common reference coordinate system. Method according to one of the Claims 5 to 7th , characterized in that the OME deviation value (D_OME) corresponding to a CMM measuring point or a CMM deviation value (D_KMG) is determined by interpolation or extrapolation. Method according to one of the Claims 7 to 8th , characterized in that the ring gauge (1) has at least one reference mark, the position of the at least one reference mark being determined with the coordinate measuring device (6) and with the surface measuring device (8), the transformation into the common reference coordinate system depending on the position of the at least one reference mark is carried out. Ring gauge for determining a roundness form measurement deviation of a coordinate measuring device (6), the ring gauge (1) having or forming at least one reference mark, the position of the at least one reference mark being determinable with the coordinate measuring device (6), the reference mark being a recess (4, 4a, ..., 4f) is formed in the area of an end face (2) of the ring gauge (1) and / or wherein the reference mark or another Reference mark is formed as a groove (5) in the area of an end face (2) of the ring gauge (1), characterized in that the measuring surface has no reference mark. Device for determining a roundness form measurement deviation of a coordinate measuring device (6), the device comprising at least one evaluation device (27), wherein the evaluation device can be connected to the coordinate measuring device (6) and to a surface measuring device (8) in terms of data and / or signal technology, wherein by means of the evaluation device (27) a measurement result of a measurement of a measurement surface of a ring gauge (1) with the coordinate measuring device (6) can be corrected as a function of a measurement result of a measurement of the measurement surface of the ring gauge (1) with the surface measurement device (8), characterized in that the The roundness form measurement deviation of the coordinate measuring machine (6) can be determined as a function of the corrected measurement result, with corrected measurement points being determinable as a function of the measurement result of the measurement by the surface measurement device (8), deviation values being determinable for all or selected corrected measurement points, where ei n deviation value denotes a radial distance of a measuring point from a minimum circle, the roundness form measurement deviation of the coordinate measuring device (6) being determinable as the range of the deviation values or where deviation values can be determined for all or selected uncorrected measurement points, with a deviation value representing a radial distance of a measurement point from one Denotes the minimum circle, these deviation values being correctable as a function of the measurement result of the measurement by the surface measuring device (8), the roundness form measurement deviation of the coordinate measuring machine (6) being determinable as the range of the corrected deviation values.

Images